• Applied Microscopy
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• 제43권1호
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• pp.9-13
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• 2013

The helium ion microscope (HIM) has recently emerged as a novel tool for imaging and analysis. Based on a bright ion source and small probe, the HIM offers advantages over the conventional field emission scanning electron microscope. The key features of the HIM include (1) high resolution (ca. 0.25 nm), (2) great surface sensitivity, (3) great contrast, (4) large depth-of-field, (5) efficient charge control, (6) reduced specimen damage, and (7) nanomachining capability. Due to the charge neutralization by flood electron beam, there is no need for conductive metal coating for the observation of insulating biological specimens by HIM. There is growing evidence that the HIM has substantial potential for high-resolution imaging of uncoated insulating biological specimens at the nanoscale.

• 한국자동차공학회논문집
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• 제8권6호
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• pp.1-8
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• 2000

A new method of knock detection in SI engines, using a change of ion concentration in the combustion chamber, was developed. In order to measure in-cylinder ionization current, ionization probes were installed at spark plug and cylinder head of production engine. It was found that the electric current generated by ionized gas in core burned gas region of knocking cycle is between 2 and 10 times larger than that of normal cycle, because the burned gas temperature which is the dominant parameter of a change of ion concentration increases. However, a change of ionization current in boundary region of burned gas is relatively weak. Hence a change of ion concentration in core burned gas region can be used for knock detection.

• 한국환경과학회지
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• 제14권1호
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• pp.15-22
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• 2005

Natural gas possesses several characteristics that make it desirable as an engine fuel; 1)lower production cost, 2)abundant commodity and 3)cleaner energy source than gasoline. Due to the physics characteristics of natural gas, the volumetric efficiency and flame speed of a natural gas engine are lower than those of a gasoline engine, which results in a power loss of $10-20{\%}$ when compared to a normal gasoline engine. This paper describes the results of a research to improve the performance of a natural gas engine through the modification and controls of compression ratio, air/fuel ratio, spark advance and supercharging and method of measuring flame propagation velocity. It emphasizes how to improve the power characteristics of a natural gas engine. Combustion characteristics are also studied using an ion probe. The ion probe is applied to measure flame speed of gasoline and methane fuels to confirm the performance improvement of natural gas engine combustion characteristics.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.461-462
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• 2006

This paper reports on the development of a scanning probe microscopy(SPM) tip with caborn nanotubes. We used an electric field which causes dielectrophoresis(DEP), to align and deposit CNTs on a metal-coated SPM tip. Using the CNT attached SPM tip, we have obtained an enhanced resolution and wear property compared to that from the bare silicon tip through the scanning of the surface of the bio materials. The carbon nanotube tip align toward the source of the ion beam allowing their orientation to be changed at precise angles. By this technique, metal coated carbon nanotube tips that are several micrometer in length are prepared for scanning probe microscopy.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 1999년도 학술대회논문집-국제 전기방전 및 플라즈마 심포지엄 Proceedings of 1999 KIIEE Annual Conference-International Symposium of Electrical Discharge and Plasma
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• pp.29-39
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• 1999

Both conventional and PI3 implanters require dense sources for high productivity rate, and small sheath expansion in PI3 besides. The problem of the creation of large volume uniform plasma in PI3 facilities replaces that of beam forming in accelerators. Some aspects of ion extraction in both cases and Langmuir probe plasma diagnostics with be discussed. Plasma parameters of large volume multicusp dc hot cathode and inductively coupled RF plasma sources obtained with Langmuir probe and ion mass analyzer with be presented. Design features and performances of high current Freeman and ECR ion sources will be described.

• 한국자기공명학회논문지
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• 제17권2호
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• pp.81-85
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• 2013

Various fluorine-containing materials are used in electronic devices like LCD display panels and Li-ion batteries. The structural conformation of fluorine in fluorinated materials is an important contributing factor that influences the chemical and physical properties. The conformation can be changed by heat and stress during manufacture or use. Understanding the conformational changes is critical for understanding the performance and durability of electronic devices. Solid-state NMR spectroscopy could be widely used for the analysis of various fluorine-containing materials for electronic devices. However, conventional CPMAS probes cannot be used for in-situ analysis of fluorine-containing electronic devices like LCD panels and Li-ion batteries. In this paper, we show the design, construction, and optimization of a $^{19}F-^{13}C$ double-resonance solid-state NMR probe for a 400MHz wide-bore magnet with a flat square coil for in-situ analysis of fluorine-containing electronic devices without observing fluorine background signals. This custom-built probe does not show any fluorine background signals, and can have higher efficiency for lossy samples.

• 전자공학회논문지D
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• 제36D권5호
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• pp.29-35
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• 1999

Pt박막의 ICP 식각을 위한 Cl\sub 2 \/Ar 가스 플라즈마에 O\sub 2\ 가스를 첨가하여 Pt 식각 메카니즘을 XPS와 QMS로 조사하였다. 또한 single Langmuir probe를 사용하여 이온전류밀도를 Ar/Cl\sub 2 \/O\sub 2\ 가스 플라즈마에서 측정하였다. O\sub 2\가스 첨가비가 증가할수록 Cl과 Ar species가 급격하게 감소하고 이온전류밀도 역시 감소함을 QMS와 single Langmuir probe로 확인하였다. Pt 식각율의 감소는 O\sub 2\가스 첨가비가 증가할수록 반응성 species와 이온전류밀도의 감소에 기인함을 의미한다. 150 nm/min의 치대 식각율과 2.5의 산화막식각 선택비가 50 sccm의 Ar/Cl\sub 2 \/O\sub 2\ 가수 유량, 600 W의 RF 전력, 125 V의 dc 바이어스 전압 및 10mTorr의 반응로 압력에서 얻었다.

• 대한기계학회논문집
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• 제17권6호
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• pp.1633-1639
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• 1993

본 연구에서는 급속연소기술의 가솔린엔진에 적용을 목적으로 흡입과정시 강한 와류(swirl)를 생성하는 마스크부착 헤드(masked shroud head, MSH)형을 급속연 소형으로 제작하여 마스크부착 헤드형에서의 급속연소효과를 이온전류법에 의한 화염 속도를 측정하므로서 규명하려한다. 이온전류는 이온탐침계(ion probe)를 연소실 표면의 두 지점에 설치하여 검출하며, 이온전류 신호를 정성적인 방법으로 검증한 후 표준 헤드형과 마스크부착헤드형을 장착한 엔진에 대해서 화염전파 속도를 비교 측정 한다. 측정된 화염 전파속도는 정확한 연소특성 분석을 위해 각 사이클에서의 값을 표본으로 하는 통계적 방법으로 처리한다.

• 센서학회지
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• 제30권4호
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• pp.236-242
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• 2021

In this paper, we report the fabrication of the tip-on-gate of a field-effect-transistor (ToGoFET) probe using a standard complementary metal-oxide-semiconductor (CMOS) process and the performance evaluation of the fabricated probe. After the CMOS process, I-V characteristic measurement was performed on the reference MOSFET. We confirmed that the ToGoFET probe could be operated at a gate voltage of 0 V due to channel ion implantation. The transconductance at the operating point (Vg = 0 V, Vd = 2 V) was 360 ㎂/V. After the fabrication process was completed, calibration was performed using a pure metal sample. For sensitivity calibration, the relationship between the input voltage of the sample and the output current of the probe was determined and the result was consistent with the measurement result of the reference MOSFET. An oxide sample measurement was performed as an example of an application of the new ToGoFET probe. According to the measurement, the ToGoFET probe could spatially resolve a hundred nanometers with a height of a few nanometers in both the topographic image and the ToGoFET image.

• 한국자동차공학회논문집
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• 제8권4호
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• pp.18-25
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• 2000

Ion current in an S.I engine cylinder is measured with the spark plug as a probe. The peak values are confirmed to show a fair correlation with local air-fuel ration and engine speed which implies that the ion current measured at the spark plug may provide a signal for the local mixture strength which is the key parameter in precise fuel control for future engines especially of gasoline direct-injected lean burn engines.