• Title/Summary/Keyword: Interlayer material

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Characteristics of Hillock Formation in the Al-1%Si Film by the Effect of Ion Implantation and Substrate Temperature (이온 주입과 기판 온도 효과에 의한 Al-1%Si 박막의 Hillock 형성 특성)

  • Choi, Chang-Auk;Lee, Yong-Bong;Kim, Jeong-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.27 no.1
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    • pp.8-13
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    • 2014
  • As packing density in integrated circuits increases, multilevel metallization process has been widely used. But hillock formed in the bottom layers of aluminum are well known to make interlayer short in multilevel metallization. In this study, the effects of ion implantation to the metal film and deposition temperature on the hillock formation were investigated. The Al-1%Si thin film of $1{\mu}m$ thickness was DC sputtered with substrate ($SiO_2/Si$) temperature of $20^{\circ}C$, $200^{\circ}C$, and $400^{\circ}C$, respectively. Ar ions ($1{\times}10^{15}cm^{-2}$: 150 keV) and B ions ($1{\times}10^{15}cm^{-2}$, 30 keV, 150 keV) were implanted to the Al-Si thin film. The deposited films were evaluated by SEM, surface profiler and resistance measuring system. As a results, Ar implanting to Al-Si film is very effective to reduce hillock size in the metal deposition temperature below than $200^{\circ}C$, and B implanting to an Al-Si film is effective to reduce hillock density in the high temperature deposition conditions around $400^{\circ}C$. Line width less than $3{\mu}m$ was free of hillock after alloying.

Dissolution Phenomenon of the Base Metal during TLP Bonding Using the Modified Base Metal Powder and Ni Base Filler Metal Powder (유사 조성의 모재분말과 Ni기 삽입금속 혼합분말을 사용한 천이액상확산 접합 시 모재의 용해현상)

  • Song, Woo-Young;Ye, Chang-Ho;Kang, Chung-Yun
    • Journal of Welding and Joining
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    • v.25 no.3
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    • pp.64-71
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    • 2007
  • The dissolution phenomenon of the solid phase powder and base metal by liquid phase insert metal during Transient Liquid Phase bonding using the mixed powder composed of the modified GTD111(base metal) powder and the GNi3 (Ni-l4Cr-9.5Co-3.5Al-2.5B) powder was investigated. In case of the mixed powder contains modified GTD111 powder 50wt%, all of the powder was melted by liquid phase at 1423K. At the temperature between solidus and liquidus of GNi3, liquid phase penetrated into the boundary of the modified GTD111 powder and solid particle separated from powder was melted easily because area of reaction was increased. With increasing mixing ratio of the modified GTD111, it needed the higher temperature to melt all of the modified GTD111 powder. During Transient Liquid Phase bonding using the mixed powder composed of the modified GTD111 50wt% and GNi3 50wt% as insert metal, width of the bonded interlayer was increased with increasing bonding temperature by reaction of the base metal and liquid phase in insert metal. Dissolution of the base metal and modified powder by liquid phase progressed all together and after all of the powder was melted nearly, the dissolution of the base metal occurred quickly.

Properties of ZrO2 Gas Barrier Film using Facing Target Sputtering System with Low Temperature Deposition Process for Flexible Displays (플렉서블 디스플레이용 저온공정을 갖는 대향 타겟식 스퍼터링 장치를 이용한 ZrO2 가스 차단막의 특성)

  • Kim, Ji-Hwan;Cho, Do-Hyun;Sohn, Sun-Young;Kim, Hwa-Min;Kim, Jong-Jae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.5
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    • pp.425-430
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    • 2009
  • $ZrO_2$ film was deposited by facing target sputtering (FTS) system on polyethylene naphthalate (PEN) substrate as a gas barrier layer for flexible organic light emitting devices (FOLEDs), In order to control the heat of the FTS system caused by the ion bombardment in the cathode compared with the conventional sputtering system, the process characteristics of the FTS apparatus are investigated under various sputtering conditions such as the distance between two targets ($d_{TT}$), the distance between the target and the substrate ($d_{TS}$), and the deposition time. The $ZrO_2$ film by the FTS system can reduce the damage on the films because the ion bombardment with high-energy particles like gamma-electrons, Moreover, the $ZrO_2$ film with optimized condition ($d_{TT}$=140 mm) as a function of the distance from center to edge showed a very uniform thickness below 5 % for a deposition time of 3 hours, which can improve the interface property between the anode and the plastics substrate for flexible displays, It is concluded that the $ZrO_2$ film prepared by the FTS system can be applied as a gas barrier layer or an interlayer between the anode and the plastic substrate with good properties of an uniform thickness and a low deposition-temperature.

Comparison of Mechanical Properties on Helical/Hoop Hybrid Wound HNT Reinforced CFRP Pipe with Water Absorption Behavior (CFRP 파이프의 와인딩 적층 패턴 설계 및 HNT 나노입자 보강에 따른 수 환경에서의 기계적 물성 평가)

  • Choi, Ji-Su;Park, Soo-Jeong;Kim, Yun-Hae
    • Composites Research
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    • v.34 no.3
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    • pp.174-179
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    • 2021
  • Currently, fluid transfer steel pipes take a lot of time and expense to maintain all facilities due to new construction and painting or corrosion and aging. Therefore, this study was conducted for designing a CFRP pipe structure with high corrosion resistance and chemical resistance as a substitute for steel pipes. The helical/hoop pattern was cross-laminated to improve durability, and HNT was added to suppress the moisture absorption phenomenon of the epoxy. The HNT/CFRP pipe was manufactured by a filament winding process, and performed a mechanical property test, and a moisture absorption test in distilled water at 70℃. As a result, the highest bending strength was obtained when the hoop pattern was laminated with a thickness equivalent to 0.6% of the pipe. The 0.5 wt% HNT specimen had the highest moisture absorption resistance. Also, the delamination phenomenon at the interlayer interface was delayed, resulting in the lowest strength reduction rate.

Chemical Vapor Deposition of High-Quality MoSe2 Monolayer and Its Application to van der Waals Heterostructure-Based High-Performance Field-Effect Transistors (화학기상증착법을 통한 고품질 단층 MoSe2합성 및 반데르발스 수직이종 접합 구조 기반 고성능 트랜지스터 제작)

  • Si Heon Lim;Sun Woo Kim;Seon Yeon Choi;Hyun Ho Kim
    • Journal of Adhesion and Interface
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    • v.24 no.1
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    • pp.36-40
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    • 2023
  • A van der Waals material refers to a material having a two-dimensional layered structure composed of van der Waals bonds with weak interlayer bonding. The research based on heterojunction structures using such van der Waals two-dimensional materials has been steadily studied since the discovery of graphene. Herein, this paper reports a van der Waals heterojunction -based field-effect transistor device based on monolayer single crystalline MoSe2 grown by atmospheric pressure chemical vapor deposition. We found that MoSe2 grown under optimized process conditions did not have atomic-level defects and the transistor devices incorporating MoSe2 also showed excellent characteristics.

Performance Evaluation of Stress Absorbing Membrane Interlayer Using Epoxy Asphalt Binder (에폭시 아스팔트 바인더를 이용한 응력흡수층의 성능평가)

  • Jo, Shin Haeng;Lee, Bong Lim;Kim, Nakseok
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.37 no.6
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    • pp.1043-1051
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    • 2017
  • Asphalt overlay on deteriorated concrete pavement has a problem of early damage due to reflective cracking. There is a need for a new method capable of reducing reflection cracking and ensuring the durability of pavement. The purpose of this study was to obtain durability of asphalt overlay with stress absorbing membrane interlayer (SAMI) using epoxy asphalt binder. The tensile performance, durability, water resistance and bonding performance of Epoxy-SAMI were evaluated by various tests. As a result of tests, Epoxy-SAMI meets the quality standard of the bridge waterproofing material. The repeated direct tensile test was carried out to investigate the effect of reflective cracking reduction. When the Epoxy-SAMI was applied, it had 1.2~1.56 times higher reflective cracking resistance than PSMA asphalt concrete with the thickness of 10cm even if the section thickness decreased. 4-point bending beam test results showed the number of fatigue failures increased 7.5 times when Epoxy-SAMI was applied. The Epoxy-SAMI was found to be effective in improving the durability of the asphalt pavement overlay because it serves to prevent reflective cracking, increase lifespan, and function as a waterproof layer.

Sorption of aqueous uranium(VI) ion onto a cation-exchangeable K-birnessite colloid (양이온 교환능을 갖는 K-Birnessite 콜로이드에 의한 수용성 우라늄(VI) 이온의 흡착 연구)

  • Kang, Kwang-Cheol;Kim, Seung-Soo;Baik, Min-Hoon;Kwon, Soo-Han;Rhee, Seog-Woo
    • Analytical Science and Technology
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    • v.23 no.6
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    • pp.566-571
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    • 2010
  • This paper describes the sorption behaviors of aqueous uranium ions on the K-birnessite. K-birnessite was synthesized by adding a concentrated HCl to an aqueous solution of $KMnO_4$. Physicochemical characteristics of the K-birnessite, such as structure, specific surface area and surface charge, were investigated. K-birnessite is a layered material and the $K^+$ ions exist in the interlayer of layered K-birnessite. BET specific surface area of the K-birnessite was 38.30 m2/g. The surface charge of K-birnessite was $-1.65\;C/m^2$ at pH 5.00 and ionic strength of 0.010 M $NaClO_4$, at which the sorption experiments of uranium ions were carried out. Uranium ions were incorporated into the interlayer of the K-birnessite by cation-exchange reaction with $K^+$ ions, and the distribution coefficient is quite similar to those of common ion-exchange materials. The results might be applicable in the retardation of migration of radioactive materials from the underground disposal site of high-level radioactive waste.

Field-effect Transistors Based on a Van der Waals Vertical Heterostructure Using CVD-grown Graphene and MoSe2 (화학기상증착법을 통해 합성된 그래핀 및 MoSe2를 이용한 반데르발스 수직이종접합 전계효과 트랜지스터)

  • Seon Yeon Choi;Eun Bee Ko;Seong Kyun Kwon;Min Hee Kim;Seol Ah Kim;Ga Eun Lee;Min Cheol Choi;Hyun Ho Kim
    • Journal of Adhesion and Interface
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    • v.24 no.3
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    • pp.100-104
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    • 2023
  • Van der Waals heterostructures have garnered significant attention in recent research due to their excellent electronic characteristics arising from the absence of dangling bonds and the exclusive reliance on Van der Waals forces for interlayer coupling. However, most studies have been confined to fundamental research employing the Scotch tape (mechanical exfoliation) method. We fabricated Van der Waals vertical heterojunction transistors to advance this field using materials exclusively grown via chemical vapor deposition (CVD). CVDgrown graphene was patterned through photolithography to serve as electrodes, while CVD-grown MoSe2 was employed as the pickup/transfer material, resulting in the realization of Van der Waals heterojunction transistors with interlayer charge transfer effects. The electrical characteristics of the fabricated devices were thoroughly examined. Additionally, we observed variations in the transistor's performance based on the presence of defects in MoSe2 layer.

Manufacturing and testing of flat-type divertor mockup with advanced materials

  • Nanyu Mou;Xiyang Zhang;Qianqian Lin;Xianke Yang;Le Han;Lei Cao;Damao Yao
    • Nuclear Engineering and Technology
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    • v.55 no.6
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    • pp.2139-2146
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    • 2023
  • During reactor operation, the divertor must withstand unprecedented simultaneous high heat fluxes and high-energy neutron irradiation. The extremely severe service environment of the divertor imposes a huge challenge to the bonding quality of divertor joints, i.e., the joints must withstand thermal, mechanical and neutron loads, as well as cyclic mode of operation. In this paper, potassium-doped tungsten (KW) is selected as the plasma facing material (PFM), oxygen-free copper (OFC) as the interlayer, oxide dispersion strengthened copper (ODS-Cu) alloy as the heat sink material, and reduced activation ferritic/martensitic (RAFM) steel as the structural material. In this study, a vacuum brazing technology is proposed and optimized to bond Cu and ODS-Cu alloy with the silver-free brazing material CuSnTi. The most appropriate brazing parameters are a brazing temperature of 940 ℃ and a holding time of 15 min. High-quality bonding interfaces have been successfully obtained by vacuum brazing technology, and the average shear strength of the as-obtained KW/Cu and ODS-Cu alloy joints is ~268 MPa. And a fabrication route for manufacturing the flat-type divertor target based on brazing technology is set. For evaluating the reliability of the fabrication technologies under the reactor relevant condition, the high heat flux test at 20 MW/m2 for the as-manufactured flat-type KW/Cu/ODS-Cu/RAFM mockup is carried out by using the Electron-beam Material testing Scenario (EMS-60) with water cooling. This paper reports the improved vacuum brazing technology to connect Cu to ODS-Cu alloy and summarizes the production route, high heat flux (HHF) test, the pre and post non-destructive examination, and the surface results of the flat-type KW/Cu/ODS-Cu/RAFM mockup after the HHF test. The test results demonstrate that the mockup manufactured according to the fabrication route still have structural and interfacial integrity under cyclic high heat loads.

A Literature Review on Studies of Bentonite Alteration by Cement-bentonite Interactions (시멘트-벤토나이트 상호작용에 의한 벤토나이트 변질 연구사례 분석)

  • Goo, Ja-Young;Kim, Jin-Seok;Kwon, Jang-Soon;Jo, Ho Young
    • Economic and Environmental Geology
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    • v.55 no.3
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    • pp.219-229
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    • 2022
  • Bentonite is being considered as a candidate for buffer material in geological disposal systems for high-level radioactive wastes. In this study, the effect of cement-bentonite interactions on bentonite alteration was investigated by reviewing the literature on studies of cement-bentonite interactions. The major bentonite alteration by hyperalkaline fluids produced by the interaction of cementitious materials with groundwater includes cation exchange, montmorillonite dissolution, secondary mineral precipitation, and illitization. When the hyperalkaline leachate from the reaction of the cementitious material with the groundwater comes into contact with bentonite, montmorillonite, the main component of bentonite, is dissolved and a small amount of secondary minerals such as zeolite, calcium silicate hydrate, and calcite is produced. When montmorillonite is continuously dissolved, the physicochemical properties of bentonite may change, which may ultimately causes changes in bentonite performance as a buffer material such as adsorption capacity, swelling capacity, and hydraulic conductivity. In addition, the bentonite alteration is affected by various factors such as temperature, reaction period, pressure, composition of pore water, bentonite constituent minerals, chemical composition of montmorillonite, and types of interlayer cations. This study can be used as basic information for the long-term stability verification study of the buffer material in the geological disposal system for high-level radioactive wastes.