• Journal of the Semiconductor & Display Technology
• /
• v.17 no.3
• /
• pp.70-74
• /
• 2018

In typical spectroscopic ellipsometry, the optical and geometrical properties of thin film and nano pattern can be obtained by measuring the polarization state of light reflected/transmitted from the object by rotating a analyzer or a compensator. We proposed a snapshot spectroscopic ellipsometric system based on a modified Michelson interferometer to overcome the time-consuring measurement principle due to rotating part. The proposed system provides spectral ellipsometric parameters (psi, delta) in real time by using a single spectral interference signal generated in the interferometric polarization module. However, it has a long-term stability problem resulting in delta(k) drift. In this paper, it is experimentally proved that the drift problem is caused by anisotropic refractive index change of the beam intersection layer in beam splitter of interferometer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1998.06a
• /
• pp.101-104
• /
• 1998

We report some methods for measuring a LiNbO$_3$ optical phase modulator bandwidth. Since Mach-Zehnder waveguide type, one of methods for modulation bandwidth measurement, is comparatively simple and useful, it was adapted in this work. In order to confirm this method, the waveguide of single and Mach-Zehnder type were fabricated on the same wafer. The Mach-Zehnder interferometric waveguide and the single channel waveguide were used for the measurement of the phase modulator's driving voltage and bandwidth for device fabrications, respectively. Ti-860$\AA$ in-diffusion was achieved in a wet-bubbling oxygen environment at 105$0^{\circ}C$/8hours. LINbO$_3$ internal chips were pigtailed to PMF(polarization maintaining fiber)/SMF(single mode fiber) using an epoxy curing technique. Examined were optical properties such as an insertion loss, propagation loss and mode size, and the loss mechanism of optical coupling between an optical fiber and a waveguide was considered.