References
- X. Niu, N. Jakatdar, J. Bao and C. J. Spanos, "Specular Spectroscopic Scatterometry," IEEE Trans. Semi. Manu. 14, 97-111, 2001. https://doi.org/10.1109/66.920722
- W. Yang, J. Hu, R. Lowe-Webb, R. Korlahalli, D. Shivaprasad, H. Sasano, W. Liu, and D. S. Mui, "Line-profile and critical dimension measurements using a normal incidence optical metrology system," in Advanced Semiconductor Manufacturing IEEE/SEMI Conference and Workshop (IEEE, 2002), pp. 119-124, 2002.
- Y.-N. Kim, J.-S. Paek, S. Rabello, S. Lee, J. Hu, Z. Liu, Y. Hao, and W. McGahan, "Device based in-chip critical dimension and overlay metrology," Opt. Exp.17(23), 21336-21343, 2009. https://doi.org/10.1364/OE.17.021336
- M. Wurm, F. Pilarski and B. Bodermann, "A new flexible scatterometer for critical dimension metrology," Rev. Sci. Instrum. 81(2) 023701. doi: 10.1063/1.3280160, 2010.
- Huard S. Polarization of Light. (Wiley, 1997).
- L. Fymat, "Interferometric Spectropolarimetry: n Alternative Experimental Methods,". Appl. Opt. 11, :2255-2264, 1972. https://doi.org/10.1364/AO.11.002255
- P. Hlubina, D. Ciprian, and J. Lunacek, "Spectral interferometric technique to measure the ellipsometric phase of a thin-film structure," Opt. Lett. 34 (17), 2661-2663, 2009. https://doi.org/10.1364/OL.34.002661
- H. Hazebroek and A. Holscher, "Interferometric ellipsometry," J. Phys. Educ. 6, 822-826, 1973.
- L. R. Watkins, "Interferometric ellipsometer," Appl. Opt. 47(16), 2998-3001, 2008. https://doi.org/10.1364/AO.47.002998
- K. Oka and T. Kato, "Spectroscopic polarimetry with a channeled spectrum," Opt. Lett. 24, 1475-1477, 1999. https://doi.org/10.1364/OL.24.001475
- H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (John Wiley & Sons, 2007).
- D. Kim, Y. Seo, M. Jin, Y. Yoon, W. Chegal, Y. J. Cho, H. M. Cho, D. G. Abdelsalam, and R. Magnusson, "Stokes vector measurement based on snapshot polarizationsensitive spectral interferometry," Opt. Exp.22(14), 17430-17439, 2014. https://doi.org/10.1364/OE.22.017430
- V. Dembele, M. Jin, B-J. Baek and D. Kim, "Dynamic spectro-polarimetric based on a modified Michelson interferometric scheme," Opt. Exp. 24 (13), 14419-14428, 2016. https://doi.org/10.1364/OE.24.014419
- D. Kim, Y. Seo, Y. Yoon, V. Dembele, J. Yoon, K. Lee, and R. Magnusson, "Robust snapshot interferometric spectropolarimetry," Opt. Lett. 41, 2318-2321, 2016. https://doi.org/10.1364/OL.41.002318
- V. Dembele, M. Jin, I. Choi, W. Chegal, and D. Kim, "Interferometric snapshot spectro-ellipsometry," Opt. Exp. 26(2): 1333-1341, 2018. https://doi.org/10.1364/OE.26.001333
- M. Takeda, H. Ina, and S. Kobayashi, "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72, 156-160, 1982. https://doi.org/10.1364/JOSA.72.000156