• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1995년도 추계학술대회 논문집
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• pp.18-23
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• 1995

The study was carried out to develope a precision positioning apparatus, consisting of DC servo motor and piezoelectric actuator. This system is composed of fine and coarse apparatus, measurement system and control system, Piezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is drived by DC servo motor. Control system output a signal from laser interferometer and microsense to amplifier of DC servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometor and microsense

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 춘계학술대회 논문집
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• pp.56-62
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• 1999

We make a study of pricisioning apparatus that is used in the various industrial machine. The study was carried out to develope a pricision positioning apparatus, consisting of servo motor and piezoelectric actuator. This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is drived by servo motor. Control system output a signal from laser interferometer and microsense to amplifier of servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometor and microsense so, we can controlled positioning of one output by the coarse positioning in the system. Also we obtain the positioning resolution of 9nm in the system.

• 대한기계학회논문집B
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• 제27권2호
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• pp.188-196
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• 2003

Liquid-assisted cleaning technology utilizing a nanosecond laser pulse is effective for removing submicron particulates from a variety of solid substrates. In the technique, saturated vapor is condensed on a solid surface to form a thin liquid film and the film is evaporated explosively by laser heating. The present work studies the role of liquid-film evaporation in the cleaning process. First, optical interferometry is employed for in-situ monitoring the displacement of the laser-irradiated sample in the cleaning process. The experiments are performed for estimating the recoil force exerted on the target with and without liquid deposition. Secondly, time-resolved visualization and optical reflectance probing are also conducted for monitoring the phase-change kinetics and plume dynamics in vaporization of thin liquid layers. Discussions are made on the effect of liquid-film thickness and dynamics of plume and acoustic wave. The results confirm that cleaning force is generated when the bubble nuclei initially grow in the strongly superheated liquid.

• 한국광학회지
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• 제6권4호
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• pp.365-372
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• 1995

취상변조기나 3*3 광결합기와 같은 특수 광부품을 사용하지 않고도 간섭형 센서의 고감도를 유지할 수 있고, 주변환경의 변화에도 영향을 받지 않는 간섭형 광섬유 센서를 위한 신호처리 기술을 소개하였다. 이 기법은 간섭형 센서의 넓은 다이나믹 레인지와 고감도를 유지한 신호처리를 위해 레이저 다이오드의 주파수 처핑을 이용하며 주변환경의 변화에 의한 측정에러를 보상하기 위해 별도의 간섭계를 기준 간섭계로 사용하였다. 새로운 신호처리 기법을 거울 내장형 Fabry-Perot(FT) 간섭계 온도센서에 적용한 결과 1cm 광섬유 FP 간섭계 센서소자로 부터 $4\times10^{-3\circ}C$(광위상 4.5mrad)의 분해능을 얻었으며 광위상 변화량의 크기가 $\pi$ 이내로 제한되지 않으므로 다이나믹 레인지가 넓은 온도센서의 구현이 가능하였다.