• Title/Summary/Keyword: Interfacial Layer

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Evaluation of Characteristics of Oxidized Thin LPCVD-$Si_{3}N_{4}$ Film (얇은 열산화-질화막의 특성평가)

  • 구경완;조성길;홍봉식
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.29A no.9
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    • pp.29-35
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    • 1992
  • Dielectric thin film of N/O (Si$_{3}N_[4}/SIO_{2}$) for high density stacked dynamic-RAM cell was formed by LPCVD and oxidation(Dry & pyrogenic oxidation methods) of the top Si$_{3}N_[4}$ film. The thickness, structure and composition of this film were measured by ellipsometer, high frequency C-V meter, high resolution TEM, AES, and SIMS. The thickness limit of Si$_{3}N_[4}$ film in making thin N/O structure layer was 7nm. In this experiment, the film with thinner than 7nm was not thick enough as oxygen diffusion barrier, and oxygen punched through the film and interfacial oxidation occurred at the phase boundary between Si$_{3}N_[4}$ and polycrystalline silicon electrode.

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Viscoelastic Analysis for Behavior of Edge Cracks at the Bonding Interface of Semiconductor Chip (반도체 칩 접착 계면에 존재하는 모서리 균열 거동에 대한 점탄성 해석)

  • 이상순
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.14 no.3
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    • pp.309-315
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    • 2001
  • The Stress intensity factors for edge cracks located at the bonding interface between the elastic semiconductor chip and the viscoelastic adhesive layer have been investigated. Such cracks might be generated due to stress singularity in the vicinity of the free surface. The domain boundary element method(BEM) has been employed to investigate the behavior of interface stresses. The overall stress intensity factor for the case of a small interfacial edge crack has been computed. The magnitude of stress intensity factors decrease with time due to viscoelastic relaxation.

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The Deposition of Hafnium Oxide Thin Film using MOCVD (MOCVD를 이용한 Hafnium Oxide 박막 증착)

  • 오재민;이태호;김영순;현광수;안진호
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2002.05a
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    • pp.198-202
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    • 2002
  • $HfO_2$films were grown on Si substrate in the temperature range $250~550^{\circ}C$ using metal organic chemical vapor deposition (MOCVD) technique for a gate dielectric. Hafnium tart-butoxide and Oxygen gas were used as precursors and N2 was used as carrier gas. Impurity distribution and film structure(including interfacial layer) were studied at the deposition temperature range between 25$0^{\circ}C$ and $550^{\circ}C$. The growth rate and impurty distribution decreased with increasing temperature. The electrical properties of $HfO_2$were investigated with C-V, 1-V method and showed it has a good properties as a gate dielectric.

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Electrical Characteristics of the Interfacial Layer between XLPE/EPDM Laminates on the Heat Treatment (열처리 조건에 따른 XLPE / EPDM 계면의 전기적 특성)

  • 최원창;이제정;김석기;조대식;한상옥;박강식
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.11a
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    • pp.225-228
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    • 1997
  • The main fault in this interface is that power cable insulating materials are mainly composed of a double layered structure, XLPE/FPDM laminates in cable joint. In this parer, we instituted the interface of XLPE/EPDM laminates and then investigated the breakdown and conduction characteristics as a function of heat treatment time. The results showed that conduction current was influenced by volatile crosslinking by-products which remained inside the insulating material during the production of XLPE and EPDM, especially during heat treatment process. And conduction current of XLPE/Oil 12500cSt/EPDM was more stable than XLPE/Grease/EPDM from the long heat treatment time. AC breakdown strength of silicone oil itself from the heat treatment was changed during the 4∼12 hour heat treatment time.

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Selective modulation of charge carrier transport of photo-anode in PEC cell by a graphitized fullerene interfacial layer (C70의 도입 및 반응면적에 따른 물분해 수소생산용 텅스텐 산화물의 광촉매 특성 연구)

  • Hong, Eun-Mi;Im, Dong-Chan
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.05a
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    • pp.102-102
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    • 2015
  • 지구상 존재하는 화석연료의 고갈에 대한 우려와 함께 최근 들어 지구 온난화로 인해 야기되고 있는 심각한 지구환경 문제에 대한 관심이 고조되고 있다. 이산화탄소로 대표되는 지구 온난화를 일으키는 공해물질의 많은 부분이 현재 주에너지원으로 사용되는 화석연료에 기인하기 때문에 이를 대체할 수 있는 청정에너지 개발은 이미 세계적 당면 과제라고 할 수 있다. 그 중, 수소에너지는 청정에너지로써의 역할 뿐만 아니라 에너지 저장매체로써의 기능 또한 담당할 수 있어 주목 받고 있다. 본 연구에서는 텅스텐 광촉매를 사용하여 물을 수소와 산소로 분해 하고자 하였고 C70을 도입하여 분해 효율을 향상시키고자 하였다.

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Interfaces of Stacking $TiO_2$ Thin Layers Affected on Photocatalytic Activities

  • Ju, Dong-U;Bu, Jin-Hyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.189.1-189.1
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    • 2013
  • Titanium dioxide (TiO2) is a wide bandgap semiconductor possessing photochemical stability and thus widely used for photocatalysis. However, enhancing photocatalytic efficiency is still a challenging issue. In general, the efficiency is affected by physio-chemical properties such as crystalline phase, crystallinity, exposed crystal facets, crystallite size, porosity, and surface/bulk defects. Here we propose an alternative approach to enhance the efficiency by studying interfaces between thin TiO2 layers to be stacked; that is, the interfacial phenomena influencing on the formation of porous structures, controlling crystallite sizes and crystallinity. To do so, multi-layered TiO2 thin films were fabricated by using a sol-gel method. Specifically, a single TiO2 thin layer with a thickness range of 20~40 nm was deposited on a silicon wafer and annealed at $600^{\circ}C$. The processing step was repeated up to 6 times. The resulting structures were characterized by conventional electron microscopes, and followed by carrying out photocatalytic performances. The multi-layered TiO2 thin films with enhancing photocatalytic efficiency can be readily applied for bio- and gas sensing devices.

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Micro-PIV Measurements of interfacial electrokinetic effects in a microchannel (마이크로 PTV 기법을 이용한 미세채널 내부 계면의 electrokinetic 효과 해석)

  • Kim Guk-bae;Lee Sang-Joon
    • 한국가시화정보학회:학술대회논문집
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    • 2002.11a
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    • pp.49-50
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    • 2002
  • In micro-channels, the electro-viscous effect is caused by the electrical double layer on pressure-driven liquid flow. Velocity fields of flow inside micro-channels were measured using micro-PIV system for investigating the electro-viscous effect. De-ionized water and aqueous NaCl solutions with four different concentrations were used as working fluid in a PDMS micro-channel of $100{\mu}m$ width and $66{\mu}m$ height. The pressure gradient, dP/dx, was determined from the pre-determined input flow rate Q of syringe pump. The mean velocity $u_m$ used for calculating Reynolds number was obtained from the PIV velocity field data. These are used to plot the pressure gradient as a function of Reynolds numbers. The pressure gradient far lower concentration solution $(10^{-5}\;M)$ was higher than that for the higher concentration solution. The increase of flow resistance was about $30\%\;and\;37.5\%$ at Re=0.02 and 0.06, respectively.

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Interfacial ultrastructure of the AQ Bond Plus

  • Haruyama, Chikahiro;Amgai, Tetsuya;Sugiyama, Toshiko;Muto, Yoshitake;Takase, Yasuaki;Hirai, Yoshito
    • Proceedings of the KACD Conference
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    • 2003.11a
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    • pp.601-601
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    • 2003
  • AQ Bond Plus has the function of self-etching priming adhesive, which can be applied by single coating without second coating, being different from conventional AQ bonds. Moreover, because the absorption range of light became wider, the bond can comply with any visible light curing units. Thus, the bond can produce an unified form between the dentine layer with impregnated resin of good quality and the thin and hard film characteristically. In this study, we investigated the junctional conditions of AQ Bond Plus, using a scanning electron microscope (SEM).(omitted)

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Detection of edge delamination in surface adhered active fiber composites

  • Wang, Dwo-Wen;Yin, Ching-Chung
    • Smart Structures and Systems
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    • v.5 no.6
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    • pp.633-644
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    • 2009
  • A simple method has been developed to detect the bonding condition of active fiber composites (AFC) adhered to the surface of a host structure. Large deformation actuating capability is one of important features of AFC. Edge delamination in adhesive layer due to large interfacial shear stress at the free edge is typically resulted from axial strain mismatch between bonded materials. AFC patch possesses very good flexibility and toughness. When an AFC patch is partially delaminated from host structure, there remains sensing capability in the debonded part. The debonding size can be determined through axial resonance measured by the interdigitated electrodes symmetrically aligned on opposite surfaces of the patch. The electrical impedance and modal response of the AFC patch in part adhered to an aluminum plate were investigated in a broad frequency range. Debonding ratio of the AFC patch is in inverse proportion to the resonant frequency of the fundamental mode. Feasibility of in-situ detecting the progressive delamination between AFC patch and host plate is demonstrated.

Surface Characterization and Morphology in Ar-Plasma-Treated Polypropylene Blend

  • Weon, Jong-Il;Choi, Kil-Yeong
    • Macromolecular Research
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    • v.17 no.11
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    • pp.886-893
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    • 2009
  • Surface modifications using a radio frequency Ar-plasma treatment were performed on a polypropylene (PP) blend used for automotive bumper fascia. The surface characterization and morphology were examined. With increasing aging time, there was an increase in wettability, oxygen containing polar functional groups (i.e., C-O, C=O and O-C=O) due to oxidation, the amount of tale, and bearing depth and roughness on the PP surface, while there was a decrease in the number of hydrocarbon groups (i.e., C-C and C-H). AFM indicated that the Ar-plasma-treatment on a PP blend surface transforms the wholly annular surface into a locally dimpled surface, leading to an improvement in wettability. SEM showed that the PP layer observed in the non-plasma-treated sample was removed after the Ar-plasma treatment and the rubber particles were exposed to the surface. The observed surface characterization and morphologies are responsible for the improved wettability and interfacial adhesion between the PP blend substrate and bumper coating layers.