Analyses of Micromachinning Processes for Microaccelecrometer Sensors Based on Electrostatic Forces (정전기력을 이용한 마이크로가속도계 센서의 마이크로머시닝 공정해석)
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- Proceedings of the Korean Society of Machine Tool Engineers Conference
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- 2000.04a
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- pp.579-584
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- 2000