• Journal of the Semiconductor & Display Technology
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• v.14 no.4
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• pp.67-71
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• 2015

Product of technology developed in this study is an external interface for controlling the equipment of pendant key remote control system circuit board, and it is used in the electronic component test equipment system. Main control system module is in the role as a device for controlling the various control devices that make up the integrated system for microscopic examination at the request of the host computer engineers to control the inspection equipment. The pentane-key interface module to its role as a device for controlling the various control devices that make up the integrated system for microscopic examination at the request of the host computer for the engineer to control the inspection equipment. Development of the control system can be expected in the configuration of a system for efficient and accurate inspection of high-precision parts.

• Journal of the Optical Society of Korea
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• v.14 no.1
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• pp.38-41
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• 2010

We design and fabricate a widely tunable laser diode made of InGaAsP-InP. The diode is monolithically integrated with a wavelength-selective coupled-ring reflector and semiconductor amplifiers. For realization of a compact size device, deeply etched multi-mode interference couplers and square ring resonators composed of total-internal-reflection mirrors are adopted and fabricated using a self-aligned process. It is demonstrated that the laser diode exhibits single mode operation and 16 nm tuning range with side-mode-suppression-ratio exceeding 20 dB.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.422-427
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• 2006

This paper presents force-feedback control performance of a haptic device in virtual environment of minimally invasive surgery(MIS). As a first step, based on an electrorheological(ER) fluid and spherical geometry, a new type of master device is developed and integrated with a virtual environment of MIS such as a surgical tool and human organ. The virtual object is then mathematically formulated by adopting the shape retaining chain linked(S-Chain) model. After evaluating reflection force, computational time, and compatibility with real time control, the virtual environment of MIS is formulated by interactivity with the ER haptic device in real space. Tracking control performances for virtual force trajectory are presented in time domain, and theirtrackingerrorsareevaluated.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.16 no.12 s.117
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• pp.1286-1293
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• 2006

This paper presents force-feedback control performance of a haptic device in virtual environment of minimally invasive surgery(MIS). As a first step, based on an electrorheological (ER) fluid and spherical geometry, a new type of master device is developed and integrated with a virtual environment of MIS such as a surgical tool and human organ. The virtual object is then mathematically formulated by adopting the shape retaining chain linked(S-chain) model. After evaluating reflection force, computational time, and compatibility with real time control, the virtual environment of MIS is formulated by interactivity with the ER haptic device in real space. Tracking control performances for virtual force trajectory are presented in time domain.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.33-36
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• 2001

Chemical mechanical polishing(CMP) process has been widely used to planarize dielectric layers, which can be applied to the integrated circuits for deep sub-micron technology. The rise throughput and the stability in the device fabrication can be obtained by applying of CMP process to STI structure in 0.18$\mu\textrm{m}$ m semiconductor device. The reverse moat process has been added to employ in of each thin films in STI-CMP was not equal, hence the devices must to be effected, that is, the damage was occurred in the device area for the case of excessive CMP process and the nitride film was remained on the device area for the case of insufficient CMP process, and than, these defects affect the device characteristics. Also, we studied the High Selectivity Slurry(HSS) to perform global planarization without reverse moat step.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.2397-2401
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• 2005

It is well understood that force reflecting coupled with visual display can be an important two-way communication channel in human-computer interaction. In this work, important components for a high-fidelity system bandwidth are force reflecting device and that all the computations including contact determination and response computation have to be performed in less than a millisecond. This paper describes a force-reflecting device and an embedded controller. The realized force-reflecting device is based on a novel serial type mechanical structure, and features compactness, high sustained output force capability, low friction, zero backlash, and enough workspace. The embedded controller reduces software computational load via main processor and simplifies hardware strictures by the time-division control. The device is integrated with existing dynamic simulation algorithms running separate workstation, so that objects can be manipulated in real time and the corresponding forces felt back by the operator.

• Structural Engineering and Mechanics
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• v.22 no.4
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• pp.433-447
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• 2006

The problem of very large deflection of a circular cantilever arc device subjected to inward or outward polar force is studied. An exact elliptic integral solution is derived for the two cases and the results are checked using large displacement finite element analysis via the ANSYS package by performing a new novel modeling simulation technique for this problem. Excellent agreements have been obtained between the exact analytical solution and the numerical approach. From this study, a design chart for engineers is developed to predict the required value for the inward polar force for the device to switch on for a given angle forming the circular arc (${\theta}_o$). This study has several interesting applications in mechanical engineering, integrated circuit technology, nanotechnology and especially in microelectromechanical systems (MEMs) such as a MEM circular device switch subjected to attractive or repulsive magnetic forces due to the attachments of two magnetic poles at the fixed and at the free end of the circular cantilever arc switch device.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.55-58
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• 2000

SiGe heterojuction bipolar transistors (HBT) have been studied and applied for advanced high speed integrated circuits. Device characteristics of SiGe HBT depending on the Ge profile of the transistor base region have been analysed using a device simulator, ATLAS/BLAZE. The models and parameters have been calibrated to the measured characteristics of the device, having a trapeziodal base profile, including the cut-off frequency of 45GHz and the dc current gain of 200. The Ge concentration which increases linearly, exponentially, or root-functionally from the emitter-base junction to the base-collector junction, has been tried to find out the influence on the device characteristics. The cut-off frequency and gain rather strongly depends on the exponential and root-functional Ge base profiles, respectively.

• Journal of the Semiconductor & Display Technology
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• v.7 no.3
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• pp.29-34
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• 2008

This paper describes the fabrication and characterization of a differential pressure type integrated mass-flow controller made of stainless steel for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally closed valve and differential pressure sensor. A stacked solenoid actuator mounted on a base-block is utilized for precise and rapid control of gas flow. The differential pressure flow sensor consisting of four diaphragms can detect a flow rate by deflection of diaphragm. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a fast response less than 0.3 sec. Also, this device shows accuracy less than 0.1% of full scale. It is confirmed that this device is not attacked by toxic gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control corrosive gases with fast response.

• Journal of Magnetics
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• v.17 no.4
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• pp.308-315
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• 2012

Experimental investigations of the magnetization, magnetostriction and magnetoelectric (ME) effects were performed on sandwich - type Metglas/PZT/Metglas laminate composites. The results have been analyzed by taking into account the demagnetization contribution. The study has pointed out that the magnetic flux concentration is strongly improved in piezomagnetic laminates with a narrower width leading to a significant enhancement of the ME effects. The piezomagnetic laminates with the optimal area dimension were integrated to form a 2-D geomagnetic device, which simultaneously can precisely detect the strength as well as inclination of the earth's magnetic field. In this case, a magnetic field resolution of better than $10^{-4}$ Oe and an angle precision of ${\pm}0.1^{\circ}$ were determined. This simple and low-cost geomagnetic-field device is promising for various applications.