• 제목/요약/키워드: Inorganic film

검색결과 488건 처리시간 0.03초

ZnO buffer 박막층 위에 성장된 3차원 ZnO 나노구조체의 합성 (Synthesis of 3D nanostructured flower-like ZnO architecture on ZnO thin-film by hydrothermal process)

  • 유범근;박용욱;강종윤;김진상;최두진;윤석진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.248-248
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    • 2009
  • Recently, the control of size, morphology and dimensionality in inorganic materials has been rapidly developed into a promising field in materials chemistry. 3D nanostructured flower-like ZnO architecture with different size and shapes have been simply synthesized via a hydrothermal process, using zinc acetate and ammonium hydroxide as reactants.[1] In this study, the Zno thin-films were deposited by RF magnetron sputtering in other to get high adhesion and uniformity of 3D nanostructured flower-like ZnO architecture on a $SiO_2$ substrate. The XRD patterns identified that the obtained the nanocrystallized ZnO architecture exhibited a wurtzite structure. SEM images illustrated that the flower-like ZnO bundles consisted of flower-like or chestnut bur, which were characterized by polycrystalline and [0001] preferential orientation.

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Ellipsometry를 이용한 Low-k SiOCH 박막의 유전특성에 관한 연구 (A Study of the Dielectric Characteristics of the Low-k SiOCH Thin Films by Ellipsometry)

  • 이인환;황창수;김홍배
    • 한국전기전자재료학회논문지
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    • 제21권12호
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    • pp.1083-1089
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    • 2008
  • We studied the dielectric characteristics of low-k SiOCH thin films by Ellipsometry. The SiOCH thin films were prepared by deposition of BTMSM precursors on p-Si wafer by CCP-PECVD method. The nano-porous structural organic/inorganic hybrid-type of SiOCH thin films correlated directly to the formation of low dielectrics close to pore(k=1). The structural groups including highly dense pores in SiOCH thin films originated the anisotropic geometry type of network structure directing to complex refractive characteristics of SiOCH single layer on the p-Si wafer. The linearly polarized beam of Xe-ramp in the range from 190 nm to 2100 nm introduced to the surface of SiOCH thin film, and the reflected beam was Elliptically polarized by complex refractive coefficients of SiOCH dipole groups. The amplitude variation $\Psi$ and phase variation $\Delta$ of the relative reflective coefficients between perpendicular and parallel components to the incident plane were measured by Ellipsometry. The complex optical constants n and k as well as the dielectric constant and thickness of SiOCH thin films were driven by the measured value of $\Psi$ and $\Delta$.

혐기성 토양에 서식하는 황산염환원세균에 의한 가스배관의 미생물부식 (CORROSION OF STEEL GAS PIPELINE INDUCED BY SULFATE-REDUCING BACTERIA IN ANAEROBIC SOIL)

  • 이선엽;전경수;고영태;강탁
    • 한국가스학회:학술대회논문집
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    • 한국가스학회 2001년도 추계학술발표회 논문집
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    • pp.58-68
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    • 2001
  • Microbiologically influenced corrosion (MIC) of carbon steel gas pipeline in soil environments was investigated at field and laboratory MIC is very severe corrosion and it is not easy to distinguish this corrosion from Inorganic corrosion because of its localized, pitting-type character Therefore, it is important to provide proper assessment techniques for the prediction, detection, monitoring and mitigation of MIC. It is possible to predict the MIC risk, i.e., the activity of sulfate-reducing bacteria (SRB) through the analysis of soil environments. Chemical, microbiological and surface analysis of corrosion products and metal attacked could reveal the possibility of the occurrence of MIC. Various electrochemical and surface analysis techniques could be used for the study of MIC. Among these techniques, thin-film electrical resistance (ER) type sensors are promising to obtain localized corrosion rate of MIC induced by SRB. It is also important to study the effect of cathodic protection (CP) on the MIC In case of coated pipeline, the relationship between coating disbondment and the activity of SRB beneath the disbanded coating is also important.

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IBASD법으로 제조된 BNN 박막의 결정화 및 전기적 특성 (Crystallization Behavior and Electrical Properties of BNN Thin Films prepared by IBASD Methods)

  • 우동찬;정성원;이희영;조상희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.489-493
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    • 2004
  • [ $Ba_2NaNb_5O_{15}$ ]은 orthorhombic tungsten bronze 결정구조를 갖는 강유전체로서, 단결정의 경우 $LiNbO_3$에 비해 우수한 비선형 전광계수 값을 나타내는 것으로 알려져 있으며, 또한 주목할만한 초전, 압전, 강유전특성을 나타내고 있다. 본 연구에서는 다른 강유전체박막에 비하여 상대적으로 연구가 덜 이루어진 BNN 박막을 세라믹 타겟을 사용하여 이온빔 보조 증착법을 사용하여 제조하였으며, $Ar/O_2$ 분위기에서 증착된 BNN 박막에 대한 결정화 및 배향 특성을 고찰하였고, 이에 따른 전기적 특성의 변화를 살펴보았다. 연구에 사용된 기판은 $Pt(100)/TiO_2/SiO_2/Si(100)$이었으며, 이온빔 보조 증착법에서 보조 이온빔의 에너지를 $0{\sim}400eV$로 변화 시키며 BNN 박막을 증착한 후, 열처리하였다. BNN 박막의 전기적 특성은 MFM 박막 커패시터의 형태로 제조하여 강유전 특성에 대해 살펴보았다.

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OLED passivation에 적용하기 위한 무기박막의 특성에 관한 연구 (Study on the characteristics of inorganic thin film for OLED passovation)

  • 윤재경;권오관;윤원민;신훈규;박찬언
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.176-176
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    • 2010
  • OLED(Organic Light Emitting Device)는 LCD(Liquid Crystal Display)의 뒤를 잇는 차세대 디스플레이의 선두주자로서 자체발광형이기 때문에 백라이트 등의 보조광원이 불필요하며, 구동전압이 낮고 넓은 시야각과 빠른 응답속도 등의 특징을 가지고 있다. 또한 플렉서블 기판을 사용할 수 있어 차세대 디스플레이인 플렉서블 디스플레이에 적합하다. 플렉서블한 디스플레이를 만들기 위해서 플라스틱 기판에 OLED 물질을 사용하여 기존에 무겁고, 깨지기 쉬우며, 변형이 불가능한 유리로 만든 소자 보다 더 가볍고 깨지지 않고 변형이 가능한 플렉서블 디스플레이를 제작 할 수 있다. 그러나 플라스틱 기판은 매우 큰 투습율을 가지고 있어 OLED소자에 적용시키면 공기 중의 수분이나 산소와 접촉이 많아져 쉽게 산화되어 소자의 효율 및 수명이 짧아진다. 또한 OLED에 사용되는 유기물도 산소나 수분에 의해 특성이 급격히 저하되기 때문에 산소 및 수분의 차단은 필수적이다. 이러한 단점을 최소화하기 위해서 PECVD(Plasma Enhanced Chemical Vapor Deposition)로 만든 SiON(Silicon Oxynitride), $SiO_2$(Sillicon dioxide), $Si_3N_4$(Sillicon nitride) 박막을 차단막(Passivation layer)으로 사용하였다. PECVD(Plasma Enhanced Chemical Vapor Deposition)로 만든 SiON(Silicon Oxynitride), $SiO_2$(Sillicon dioxide), $Si_3N_4$(Sillicon nitride) 각각의 박막의 Crack의 특성을 85%-$85^{\circ}C$조건에서 24hr 측정하였다.

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Ellipsometry를 이용한 저 유전상수를 갖는 SiOCH박막의 광학특성 연구 (A Study of Optical Characteristics Correlated with Low Dielectric Constant of SiOCH Thin Films Through Ellipsometry)

  • 박용헌
    • 한국전기전자재료학회논문지
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    • 제23권3호
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    • pp.228-233
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    • 2010
  • We studied the optical characteristics correlated with low dielectric constants of low-k SiOCH thin films through ellipsometry. The low-k SiOCH thin films were prepared by CCP-PECVD method using BTMSM(Bis-trimethylsilylmethane) precursors deposited on p-Si wafer. The Si-O-CHx, Si-O-Si, Si-CHx, CHx and Si-H bonding groups were specified by FTIR spectroscopic spectra, and the groups coupled with the nano-porous structural organic/inorganic hybrid-type of SiOCH thin films which has extremely low dielectric constant close to 2.0. The structural groups includes highly dense pore as well as ions in SiOCH thin films affecting to complex refraction characteristics of single layer on the p-Si wafer. The structural complexity originate the complex refractive constants of the films, and resulted the elliptical polarization of the incident linearly polarized light source of Xe-light source in the range from 190 nm to 2100 nm. Phase difference and amplitude ratio between s wave and p wave propagating through SiOCH thin film was studied. After annealing, the amplitude of p wave was reduced more than s wave, and phase difference between p and s wave was also reduced.

Characterization of Silica/EVOH Hybrid Coating Materials Prepared by Sol-Gel Method

  • Kim, Seong-Woo
    • 한국응용과학기술학회지
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    • 제26권3호
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    • pp.288-296
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    • 2009
  • In this study, the silica-based hybrid material with high barrier property was prepared by incorporating ethylene-vinyl alcohol (EVOH) copolymer, which has been utilized as packaging materials due to its superior gas permeation resistance, during sol-gel process. In preparation of this EVOH/$SiO_2$ hybrid coating materials, the (3-glycidoxy-propyl)-trimethoxysilane (GPTMS) as a silane coupling agent was employed to promote interfacial adhesion between organic and inorganic phases. As confirmed from FT-IR analysis, the physical interaction between two phases was improved due to the increased hydrogen bonding, resulting in homogeneous microstructure with dispersion of nano-sized silica particles. However, depending on the range of content of added silane coupling agent (GPTMS), micro-phase separated microstructure in the hybrid could be observed due to insufficient interfacial attraction or possibility of polymerization reaction of epoxide ring in GPTMS. The oxygen barrier property of the mono-layer coated BOPP (biaxially oriented polypropylene) film was examined for the hybrids containing various GPTMS contents. Consequently, it is revealed that GPTMS should be used in an optimum level of content to produce the high barrier EVOH/$SiO_2$ hybrid material with an improved optical transparency and homogeneous phase morphology.

RABiTS와 PLD를 이용한 YBCO coated conductor 제조 (Manufacturing of YBCO coated conductor using RABiTS as the texture template and pulsed laser for the multi-layer oxide film deposition)

  • 박찬;고락길;신기철;송규정;정준기;;유상임;염도준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.104-106
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    • 2003
  • 다층의 산화물 박막으로 이루어진 coated conductor의 제조를 위하여 각층의 증착조건이 최적화되어야 한다. 가공/열처리를 통하여 2축배향성을 가지는 Ni 금속 기판위에 $Y_2O_3$, YSZ, $CeO_2$ 등의 산화물 완충층을 증착한 후 초전도층인 YBCO를 증착하였다. 12도와 8도의 in-plane fwhm (full width at half maximum)과 out-of-plane fwhm을 가지는 Ni 기판을 이용하여 13도와 4.5도의 in-plane 및 out-of-plane fwhm을 가지는 YBCO coated conductor를 제조하였다. 임계온도 (Tc), 임계전류 (Ic), 및 임계전류밀도 (Jc) 는 각각 84K, 3.3A, 및 $310,000\;A/cm^2$ 이었다.

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CEMENTATION 공정으로 Cu(II)와 Ni(II) 이온을 각각 도우핑한 전도성 고분자의 전기화학적 특성 분석 (Characteristics of electrochemical properties polypyrrole (PPy) film doped with Cu(II), Ni(II) by electrochemical cementation process)

  • 윤동화;진준형;양정훈;민남기;홍석인
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 하계학술대회 논문집 C
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    • pp.2011-2013
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    • 2002
  • 일반적으로, 전도성 고분자는 금속에 준하는 전기 전도도와 다공성을 이용한 전해질 이온 및 생채 고분자의 물리, 화학적 도우핑 능력을 장점으로 한다. 따라서, 이 분야의 최근 연구동향도 이온 도우핑에 의한 전도성 고분자의 전기 전도도 향상에 초점이 맞추어져 있으며, 이미 다수의 연구진에 의행 여러 가지 방법이 제시되었다. 본 논문은 전기 화학적 cementation 공정을 이용하여 금속 이온을 전도성 고분자에 도우핑하고 특성을 고찰하였다. 전도성 고분자로써 polypyrrole (PPy)을 사용하고, micropaticles (구리와 니켈 이온)를 도펀트 (dopant)로 하여 -1.5 V ${\sim}$ 2V의 범위에서 순환 전압 전류법 (Cyclic voltammetry)을 이용해 organic-inorganic complex를 제작하였고, 각각의 전극을 비교, 분석 하였다. 구리 이온을 도우핑한 PPy 필름은 전기 전도도가 매우 우수하나 대기 중 공기 및 수분에 의해 쉽게 산화되므로 life-time이 짧다. 이를 보완하기 위하여 상대적으로 안정한 니켈 이온을 도우핑한 PPy 필름의 전기 화학적 특성을 고찰하였다. 전극의 표면은 SEM (Scanning Electron Microscopy), EDX (Energy Dispersive X-ray spectroscopy)를 이용하여 분석하였다.

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Thin Films for Environmental Application and Energy Devices

  • Kim, Young-Dok
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.91-91
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    • 2012
  • We aim in synthesizing various functional thin films thinner than ~ 10 nm for environmental applications and photovoltaic devices. Atomic layer deposition is used for synthesizing inorganic thin films with a precise control of the film thickness. Several examples about application of our thin films for removing volatile organic compounds (VOC) will be highlighted, which are summarized in the below. 1) $TiO_2$ thin films prepared by ALD at low temperature ($<100^{\circ}C$) show high adsorption capacity for toluene. In combination with nanostructured templates, $TiO_2$ thin films can be used as building-block of high-performing VOC filter. 2) $TiO_2$ thin films on carbon fibers and nanodiamonds annealed at high temperatures are active for photocatalytic oxidation of VOCs, i.e. photocatalytic filter can be created by atomic layer deposition. 3) NiO can catalyze oxidation of toluene to $CO_2$ and $H_2O$ at $<300^{\circ}C$. $TiO_2$ thin films on NiO can reduce poisoning of NiO surfaces by reaction intermediates below $200^{\circ}C$. We also fabricated inverted organic solar cell based on ZnO electron collecting layers on ITO. $TiO_2$ thin films with a mean diameter less than 3 nm on ZnO can enhance photovoltaic performance by reducing electron-hole recombination on ZnO surfaces.

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