• 제목/요약/키워드: Inorganic film

검색결과 488건 처리시간 0.029초

Investigation of long-term stability of pentacene thin-film transistors encapsulated with transparent $SnO_2$

  • Kim, Woo-Jin;Koo, Won-Hoe;Jo, Sung-Jin;Kim, Chang-Su;Baik, Hong-Koo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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    • pp.1276-1279
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    • 2005
  • The long-term stability of pentacene thin-film transistors (TFTs) encapsulated with a transparent $SnO_2$ thin-film prepared by ion beam assisted deposition (IBAD) was investigated. With a buffer layer of thermally evaporated 100 nm $SnO_2$ film deposited prior to IBAD process, our encapsulated OTFTs sustained its initial field-effect mobility up to one month and then gradually degraded showing only 37% reduction compared to 90% reduction of non-encapsulated OTFTs after 100 days in air ambient. The encapsulated OTFTs also exhibited superior on/off current ratio of over $10^5$ to that of the unprotected devices $({\sim}10^4)$ which was reduced from ${\sim}10^6$ before aging. Therefore, the enhanced long-term stability of our encapsulated OTFTs should be attributed to well protection of permeation of $H_2O$ and $O_2$ into the devices by the IBAD $SnO_2$ thin-film which could be used as an effective inorganic gas barrier for transparent organic electronic devices.

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저 유전체 SiOC 박막의 열처리 공정 온도에 따른 전기적인 특성에 관한 연구 (Study on the Electrical Characteristic of Low-k SiOC films due to the Appropriate Annealing Temperature)

  • 오데레사
    • 대한전자공학회논문지SD
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    • 제48권8호
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    • pp.1-4
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    • 2011
  • SiOC 박막과 같은 유무기 하이브리드 저유전 물질에서의 열처리효과에 의한 전기적인 특성의 변화와 유전상수에 관하여 연구하였다. SiOC 박막은 분극에 따른 특성을 분석하기 위해서 TMS과 산소의 혼합가스를 이용한 CVD방법에 의하여 증착되었으며, 300~500도까지 변화하면서 열처리를 하였다. SiOC 박막은 열처리에 의하여 유전상수는 더욱 낮아지며, 400도에서 열처리 한 경우 전기적인 특성이 우수한 것을 확인하였다. XRD 패턴에 의하면 300도이하에서 열처리한 박막과 400도 이상에서 열처리 한 경우 결합구조가 달라지는 것을 알 수 있고 400도 근처에서 급격한 변화가 일어나고 있는 것을 확인하였다.

Liquid Crystal Alignment Effect on the Inorganic Thin Film by Sputtering and using Ultraviolet Exposure Mothod

  • Hwang, Jeoung-Yeon;Kang, Hyung-Ku;Seo, Dae-Shik;Oh, Byeong-Yun;Ham, Moon-Ho;Myoungr, Jae-Min
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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    • pp.460-463
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    • 2005
  • We studied the nematic liquid crystal (NLC) alignment capability by the Ultraviolet (UV) alignment method on a a-C:H thin -film , and investigated electro-optical performances of the UV aligned twisted nematic (TN)- liquid crystal display (LCD) with the UV exposure on a-C:H thin film surface. A good LC alignment by UV irradiation on a a-C:H thin -film surface was achieved. Monodomain alignment of the UV aligned TN-LCD can be observed. The good electro-optical (EO)characteristics of the UV aligned TN-LCD was observed with oblique UV exposure on the a-C:H thin film surface for 1min.

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열선 차단 필름용 니켈 착화합물의 합성과 특성 (Synthesis and Properties of Nickel Complexes for the Thermal Shielding Film)

  • 곽선엽;이태훈;손세모
    • 한국인쇄학회지
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    • 제24권2호
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    • pp.49-59
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    • 2006
  • In this paper, a transparent film exposed the effect of heat cut-off, reveal as means of the prevention to wrong operation of parts of display and forgery of the credit card, also it will intercept rising of the temperature in interior of a room and car by diminish the influx of near-infrared ray wavelength of solar energy come from the window. As in the past a film which absorb a wavelength of $800{\sim}2500nm$ in near-infrared ray, manufactured in physical vapor deposition(PVD), chemical vapor deposition(CVD) to using ATO, ITO of inorganic materials or sputtering method. but it has lots of problem in manufacture. On the other hand, recently a paper said it easily form a transparent film to using organic dye. This paper show synthesis of many derivatives used in Ni-complex and then it investigate to optical property and durability of flim by make the transparent film.

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OLED의 Thin Film Encapsulation을 위한 MgO 박막의 원자층 증착 장치 및 공정에 관한 연구 (Study on the Atomic Layer Deposition System and Process of the MgO Thin Layer for the Thin Film Encapsulation of OLED)

  • 조의식;권상직
    • 반도체디스플레이기술학회지
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    • 제20권3호
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    • pp.22-26
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    • 2021
  • Thin-film encapsulation (TFE) technology is most effective in preventing water vapor and oxygen permeation in the organic light emitting diodes (OLED). Of those, a laminated structure of Al2O3 and MgO were applied to provide efficient barrier performance for increasing the stability of devices in air. Atomic layer deposition (ALD) method is known as the most promising technology for making the laminated Al2O3/MgO and is used to realize a thin film encapsulation technology in organic light-emitting diodes. Atomic layer deposited inorganic films have superior barrier performance and have advantages of excellent uniformity over large scales at relatively low deposition temperatures. In this study, the control system of the MgCP2 precursor for the atomic layer deposition of MgO was established in order to deposit the MgO layer stably by the injection time of second level and the stable heating temperature. The deposition rate was obtained stably to be from 4 to 10 Å/cycle using the injection pulse times ranging from 3 to 12 sec and a substrate temperature ranging from 80 to 150 ℃.

Microporous Ceramic Membrane and Its Gas Separation Performance

  • Li, Lin;Li, Junhui;Qi, Xiwang
    • 한국막학회:학술대회논문집
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    • 한국막학회 1996년도 춘계 총회 및 학술발표회
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    • pp.16-19
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    • 1996
  • Separation with synthetic membrane have become increasingly important processes in many fields. In the most application of membrane process, polymer membrane is used. the main advantage of polymers as a material for membrane preparation is the relative simplicity of this film formation which enables one to obtain rather high permeability rates. However, polymeric membranes have several limitations, such as high temperature instability, swelling and decomposition in organic solvent, et. al.. These limitations can be overcome by inorganic membrane. At the present time, commercially available inorganic membranes have pore diameters ranging 5nm to 50mm, and the predominant flow regime in such membrane is Knudsen diffusion. Since the Knudsen permeability is directly proportional to the molecular velocity, gases can be separated due to their molecular masses. However, this separation mechanism is only of important for light gases such as H2 and He. Other separation mechanisms like surface diffusion, active diffusion can play an important role only with very small pore diameters(2nm) and give rise to large permselectivities. Therefore, preparation of inorganic membrane with nano-sized pore have been attracting more and more attention.

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Fabrication and characterization of photocurable inorganic-organic hybrid materials using organically modified colloidal-silica nanoparticles and acryl resin

  • Kang, Dong-Jun;Han, Dong-Hee;Kang, Young-Taec;Kang, Dong-Pil
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.422-422
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    • 2009
  • Photocurable inorganic-organic hybrid materials were prepared from colloidal-silica nanoparticles synthesized through the solgel process and using acryl resin. The synthesized colloidal-silica nanoparticles had uniform diameters of around 20 nm, and they were organically modified, using methyl and methacryl functional silanes, for efficient hybridization with acryl resin. The organically modified and stabilized colloidal-silica nanoparticles could be homogeneously hybridized with aeryl resin without phase separation. The successfully fabricated hybrid materials exhibit efficient photocurability and simple film formation due to the photopolymerization of the organically modified colloidal-silica nanoparticles and acryl resin upon UV exposure. The fabricated hybrid films exhibit an excellent optical transmission of above 90% in the visible region as well as an enhanced surface smoothness of around 1 nm RMS roughness. In addition, the hybrid films exhibit improved thermal and mechanical characteristics, much better than those of acryl resin. More importantly, these photocurable hybrid materials fabricated through the synergistic combination of colloidal-silica nanoparticles with acryl resin are candidates for optical and electrical applications.

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저에너지 UV 경화형 무용제 소재 개발 (Solventless UV Curable Material for Low Cost System)

  • 김광인;이주헌;이현주;한학수
    • 한국수소및신에너지학회논문집
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    • 제28권1호
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    • pp.77-84
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    • 2017
  • In this study, Poly-urethane acrylate (PUA) was synthesized by the reaction between Polycaprolactonetriol (PCLT) and Isophorone dissocyanate (IPDI) and hybridized with inorganic materials. Tetraethylortho silicate (TEOS) and nano clay (Closite 20A) were used as inorganic particles. For the hybridization of TEOS with PUA, sol-gel method is used, in which TEOS is made into spherical particle in the firsthand. In the case of Nano clay, hybridization is carried out through the dispersion as Nano clay has a layered structure. The solution of PUA hybrid was made into a film after UV curing and its thermo and electrical properties were measured. The experimental analysis and result demonstrate that the PUA hybrid shows an improved thermal properties and lower dielectric constant than that of the non-hybrid PUA. The trend of improved properties was different depending on structure of inorganic materials.

전기화학법을 이용한 $\textrm{TiO}_2$ 박막의 제조 (Preparation of $\textrm{TiO}_2$ Thin Film by Electrochemical Method)

  • 공필구;이종국;곽효섭;박순자;김환
    • 한국재료학회지
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    • 제6권10호
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    • pp.999-1006
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    • 1996
  • 전기화학법 중 음극환원법을 이용하여 0.005M TiCI4수용액으로부터 수화물 형태의 TiO2박막을 제조하였다. TiCI4수용액에 첨가제로 에탄올을 50vol% 첨가하여 균일한 박막을 얻을 수가 있었으며, 전류밀도와 시간에 따라서 박막의 두께와 미세구조가 변화하였다. 성장속도가 큰 조건에서 얻은 박막은 균질성의 감소로 인하여 건조과정이나 열처리 중 다량의 균열이 발생하였다. 일정한 전류밀도ㅇ에서 반응시간의 증가에 따라 박막의 두께가 직선적으로 증가하였으며, 10mA/$\textrm{cm}^2$의 전류밀도에서 3분 동안 반응시켜 약 0.7$\mu\textrm{m}$ 두께의 우수한 TiO2박막을 얻을수 있었다. 이러한 박막은 80$0^{\circ}C$에서 한 시간 열처리 한 결과, rutile 단일상으로 결정화되었다.

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Effect of Heat Treatment on the Morphology and Transparency of Thick Inorganic-Organic Hybrid Films Prepared by the Electrophoretic Sol-Gel Deposition of Polyphenylsilsesquioxane Particles

  • Hasegawa, Koichi;Katagiri, Kiyofumi;Matsuda, Astunori;Tatsumisago, Masahiro;Minami, Tsutomu
    • The Korean Journal of Ceramics
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    • 제6권1호
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    • pp.15-20
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    • 2000
  • Thick inorganic-organic hybrid films were prepared on ITO-coated glass substrates by the electrophoretic sol-gel deposition of polyphenylsilsesquioxane particles. The morphology of the deposited films changed from the aggregate of the spherical particles to monolith by heat treatment at temperatures higher than $200^{\circ}C$. Transparency of the films was significantly improved accompanied by the morphological change of the particles. The degree of the morphological change was governed by two factors; maximum heat treatment temperature and heating rate. Transparent thick films of ca. 3$\mu\textrm{m}$ in thickness were obtained only by heat treatment at $400^{\circ}C$ for 2h with rapid heating from room temperature to $400^{\circ}C$. These films obtained were strongly adhered to the ITO-coated glass substrates and has a very smooth surface.

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