Design of Near-Infrared Inspection Illumination System and It's Optimum Conditions Selection for Silicon Wafers (실리콘 웨이퍼를 위한 근적외선 검사 조명계 설계 및 최적조건 선정)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2013.05a
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- pp.1523-1524
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- 2013