• Title/Summary/Keyword: Information Signal Process

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Real-time In-situ Plasma Etch Process Monitoring for Sensor Based-Advanced Process Control

  • Ahn, Jong-Hwan;Gu, Ja-Myong;Han, Seung-Soo;Hong, Sang-Jeen
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.11 no.1
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    • pp.1-5
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    • 2011
  • To enter next process control, numerous approaches, including run-to-run (R2R) process control and fault detection and classification (FDC) have been suggested in semiconductor manufacturing industry as a facilitation of advanced process control. This paper introduces a novel type of optical plasma process monitoring system, called plasma eyes chromatic system (PECSTM) and presents its potential for the purpose of fault detection. Qualitatively comparison of optically acquired signal levels vs. process parameter modifications are successfully demonstrated, and we expect that PECSTM signal can be a useful indication of onset of process change in real-time for advanced process control (APC).

Application of Digital Signal Analysis Technique to Enhance the Quality of Tracer Gas Measurements in IAQ Model Tests

  • Lee, Hee-Kwan;Awbi, Hazim B.
    • Journal of Korean Society for Atmospheric Environment
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    • v.23 no.E2
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    • pp.66-73
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    • 2007
  • The introduction of tracer gas techniques to ventilation studies in indoor environments provides valuable information that used to be unattainable from conventional testing environments. Data acquisition systems (DASs) containing analogue-to-digital (A/D) converters are usually used to function the key role that records signals to storage in digital format. In the testing process, there exist a number of components in the measuring equipment which may produce system-based inference to the monitored results. These unwanted fluctuations may cause significant error in data analysis, especially when non-linear algorithms are involved. In this study, a pre-processor is developed and applied to separate the unwanted fluctuations (noise or interference) in raw measurements and to reduce the uncertainty in the measurement. Moving average, notch filter, FIR (Finite Impulse Response) filters, and IIR (Infinite Impulse Response) filters are designed and applied to collect the desired information from the raw measurements. Tracer gas concentrations are monitored during leakage and ventilation tests in the model test room. The signal analysis functions are introduced to carry out the digital signal processing (DSP) work. Overall the FIR filters process the $CO_2$ measurement properly for ventilation rate and mean age of air calculations. It is found that, the Kaiser filter was the most applicable digital filter for pre-processing the tracer gas measurements. Although the IIR filters help to reduce the random noise in the data, they cause considerable changes to the filtered data, which is not desirable.

A Digital Audio Watermark Using Wavelet Transform and Masking Effect (웨이브릿과 마스킹 효과를 이용한 디지털 오디오 워터마킹)

  • Hwang, Won-Young;Kang, Hwan-Il;Han, Seung-Soo;Kim, Kab-Il;Kang, Hwan-Soo
    • Proceedings of the IEEK Conference
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    • 2003.11b
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    • pp.243-246
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    • 2003
  • In this paper, we propose a new digital audio watermarking technique with the wavelet transform. The watermark is embedded by eliminating unnecessary information of audio signal based on human auditory system (HAS). This algorithm is an audio watermarking method, which does not require any original audio information in watermark extraction process. In this paper, the masking effect is used for audio watermarking, that is, post-tempera] masking effect. We construct the window with the synchronization signal and we extract the best frame in the window by using the zero-crossing rate (ZCR) and the energy of the audio signal. The watermark may be extracted by using the correlation of the watermark signal and the portion of the frame. Experimental results show good robustness against MPEG1-layer3 compression and other common signal processing manipulations. All the attacks are made after the D/A/D conversion.

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Deep-learning Sliding Window Based Object Detection and Tracking for Generating Trigger Signal of the LPR System (LPR 시스템 트리거 신호 생성을 위한 딥러닝 슬라이딩 윈도우 방식의 객체 탐지 및 추적)

  • Kim, Jinho
    • Journal of Korea Society of Digital Industry and Information Management
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    • v.17 no.4
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    • pp.85-94
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    • 2021
  • The LPR system's trigger sensor makes problem occasionally due to the heave weight of vehicle or the obsolescence equipment. If we replace the hardware sensor to the deep-learning based software sensor in order to generate the trigger signal, LPR system maintenance would be a lot easier. In this paper we proposed the deep-learning sliding window based object detection and tracking algorithm for the LPR system's trigger signal generation. The gate passing vehicle's license plate recognition results are combined into the normal tracking algorithm to catch the position of the vehicle on the trigger line. The experimental results show that the deep learning sliding window based trigger signal generating performance was 100% for the gate passing vehicles including the 5.5% trigger signal position errors due to the minimum bounding box location errors in the vehicle detection process.

A Study on the Digital Filter Structure for ADM Coded Signal (ADM 부호화신호를 위한 디지털필터구조에 관한 연구)

  • 신재호
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.14 no.6
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    • pp.642-649
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    • 1989
  • In this paper the theory of digital filters which can directly process the ADM encoded signal, and their structures are studied. In order to investigate the frequency characteristics of DM filters with the strucutures presented in this paper, a sampled speech signal is used for the input data. The result of computer simulation shows that the presented DM filter structures can be used effectively for the direct process of ADM encoded signals, ven though they do not posses sufficiently sharp cutoff characteristics.

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Error Rate Performance of DS-BPSK Signal transmitted through a Hard-Limiting Satellite Channel in the presence of Interference and Noise (간섭과 잡음이 존재하는 Hard-Limiting 위성채널상에서의 DS-BPSK신호의 오율특성)

  • 신동일;조성준
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.11 no.1
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    • pp.64-72
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    • 1986
  • The error rate equation fo DS-BPSK(Direct Sequence Binary Phase Shift Keying) signal transmitted through the nonlinear satellite transponder has been derived in the cochannel interference and downlink Gaussian noise environment. The input to the satellite transponder is the superposition of DS-BPSK signal with one interfere which is a cochannel wide-band PN signal. The error rate performance of DS-BPSK system has been evaluated and shown in figures in terms of carrier to interference power ratio(CIR), downlink signal to noise power ratio(downlink SNR) and process gain. In the analysis, it has been shown that the use of a hard limiter in DS-BPSK satellite system leads to the generation of narrow-band intermodulation products which is independent of the process gain. Also it is known that the error rate performance can be improved in the low levels (below 10dB) of CIR as the CIR increase. As the process gain varies from 10 to 100 the curve gives the about 10 dB gain in downlink SNR to maintain a fixed error rate.

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Design and Fabrication of SYNC Signal Separator IC (동기신호 분리용 집적회로의 설계 및 제거)

  • 장영욱;김영생;갑명철
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.24 no.6
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    • pp.992-997
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    • 1987
  • This paper describes the design and fabrication of an integrated circuit that can separate the horizontal SYNC., vertical SYNC. and composite SYNC. signal included in a composite video signal. The circuit that is based on the comparator level samplign method can separate a stable SYNC. signal even from an external circuit with large variation. It has been fabrivated by the SST bipolar process. Its chip size is 1.5x1.5mm\ulcorner As a result, we succeeded in fabrication of IC which satisfied DC characteristics and SYNC. singal separator function.

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Design and Fabrication of VTR Audio Signal Processor IC (VTR 음성신호 처리용 집적회로의 설계 및 제작)

  • Shin, Myung-Chul
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.24 no.4
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    • pp.618-624
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    • 1987
  • This paper describes the design and fabrication of a signal processing integrated circuit required for the recording and playback of VTR audio signal. The integrated circuit was designed using 8\ulcorner design rule and its chip size is 2.5x2.5mm\ulcorner It was fabricated using SST bipolar standard process technology. The measurement analysis of the fabricated circuit proves the satisfactory DC characteristics and its proper audio signal processing funcstion.

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AMOLED Aging Chamber Signal Generation and Heating System (AMOLED 에이징 챔버 신호 생성 및 가열 시스템)

  • Lee, Byungkwon;Cho, Kwanghee;Jung, Hoekyung
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.22 no.6
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    • pp.861-866
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    • 2018
  • In OLED (Organic Light-Emitting Diode) manufacturing, the aging process increases the manufacturing efficiency and measures the correction value to correct the aging. The correction value for correcting the aging of the OLED can be applied to the driving signal. The OLED aging process measures the current after outputting the light for a predetermined time according to the preset driving signal and temperature. In the OLED manufacturing process, aging is applied for non-uniformity by deposition and temperature. This time has little effect on OLED efficiency reduction. Heating devices and signal generation systems are required to create the conditions necessary for aging. The results measured by the heating system and signal generation system can be used as a basis for evaluating power requirements, uniformity and efficiency in OLED manufacturing. In this paper, we propose and implement a configuration for interlocking the driving signal generation and heating system for practical OLED aging correction.

Power Signal Monitering System with Compression Storage and Reconstruction (압축 저장 및 복원기능을 가지는 전력신호 모니터링 시스템)

  • Bae, Hyeon-Deok
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • v.9 no.2
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    • pp.148-154
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    • 2016
  • In recent year, the interests of PQ is increase due to the increasing of non-linear load and distributed power sources in power system. For the parameters detection and feature extraction of PQ, and the PQ improvement method, continuous power signal monitering is needed. In this paper, the power signal compression and reconstruction method is suggested for power signal monitering. The power signal is compressed using DCT that has good compression performance, and the compressed signal is reconstructed through IDCT. And for the higher compression rate, DCT coefficients are arranged by magnitude in compression process, and in recouction process DCT coefficients are rearranged to original frequency position. The synthesized signal according to the IEC standard is used used in compression and reconstruction simulations. The performances of the proposed method are verified by comparing the error between synthesized signal and reconstructed signal.