• 한국산학기술학회논문지
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• 제21권4호
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• pp.588-595
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• 2020

반도체 산업용 9N 이상의 초고순도 N₂, Ar 등 불활성 가스 제조를 위해 가스 정제공정에 사용되고 있는 Ni 촉매의 물성 평가 및 촉매적 특성을 확인하였다. 조성이 다른 원기둥 형태의 C1, 츄러스 형태의 C2의 두 가지 Ni 촉매에 대해 비교 평가를 진행하였다. Ni 촉매의 형상과 미세구조를 분석하기 위해 광학현미경과 FE-SEM을 이용하였으며, 조성 확인 및 물성을 분석하기 위해 EDS, XRD, 그리고 micro-Raman 분석을 이용하였다. 또한 Ni 촉매의 비표면적 및 촉매적 특성을 확인하기 위해 BET, Pulse Titration 분석을 진행하였다. 조성 분석결과, C1의 경우, 상대적으로 graphite가 불순물로 다량 포함되어 있는 것을 확인하였으며, C2는 C1에 비해 Ni의 함량이 높은 것을 확인하였다. 비표면적 분석 결과, C2의 비표면적이 C1보다 약 1.69배 정도 큰 것을 확인할 수 있었다. 촉매적 특성분석 결과, 상온에서 O₂와 CO 불순물 제거 정도가 C2가 우수함을 확인하였다. 따라서 반도체 산업용 초고순도 불활성 기체 제조를 위한 Ni 촉매로는 불순물이 적고, 비표면적이 크며, 상온에서 O₂와 CO 제거 성능이 우수한 C2가 적합함을 확인하였다.

• 한국분말재료학회지
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• 제8권2호
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• pp.98-103
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• 2001

Metallic tin powder with diameter less than 50 nm was synthesized by inert gas condensation method and subsequently oxidized to tin oxide ($SnO_2$) along the two heat-treatment routes. The $SnO_2$ powder of single phase with a tetragonal structure was obtained by the heat-treatment route with intermediate annealing step-wise oxidation, whereas the $SnO_2$ powder with mixture of orthorhombic and tetragonal phases was obtained by the heat-treatment route without intermediate annealing (direct oxidation). $SnO_2$ gas sensors fabricated from the nano-phase $SnO_2$ powders were investigated by structural observations as well as measurement of electrical resistance. The $SnO_2$ gas sensors fabricated from the mixed-phase powder exhibited much lower sensitivity against $H_2$ gas than those fabricated from the powder of tetragonal phase. Reduced sensitivity of gas sensors with the new orthorhombic phase was attributed to detrimental effects of phase boundaries between orthorhombic and tetragonal phases and many twin boundaries on the charge mobility.

• Macromolecular Research
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• 제15권6호
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• pp.565-574
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• 2007

In this study, five representative, commercially available polymers, Ultem 1000 polyetherimide, Kapton polyimide, phenolic resin, polyacrylonitrile and cellulose acetate, were used to prepare pyrolyzed polymer membranes coated on a porous {\alpha}-alumina$ tube via inert pyrolysis for gas separation. Pyrolysis conditions (i.e., final temperature and thermal dwell time) of each polymer were determined using a thermogravimetric method coupled with real-time mass spectroscopy. The surface area and pore size distribution of the pyrolyzed materials derived from the polymers were estimated from the nitrogen adsorption/desorption isotherms. Pyrolyzed membranes from polymer precursors exhibited type I sorption behavior except cellulose acetate (type IV). The gas permeation of the carbon/{\alpha}-alumina$ tubular membranes was characterized using four gases: helium, carbon dioxide, oxygen and nitrogen. The polyetherimide, polyimide, and phenolic resin pyrolyzed polymer membranes showed typical molecular sieving gas permeation behavior, while membranes from polyacrylonitrile and cellulose acetate exhibited intermediate behavior between Knudsen diffusion and molecular sieving. Pyrolyzed membranes with molecular sieving behavior (e.g., polyetherimide, polyimide, and phenolic resin) had a $CO_2/N_2$ selectivity of greater than 15; however, the membranes from polyacrylonitrile and cellulose acetate with intermediate gas transport behavior had a selectivity slightly greater than unity due to their large pore size.

• Journal of Electrochemical Science and Technology
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• 제2권1호
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• pp.20-25
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• 2011

This work focuses on the behavior of the overpotential increase due to a utilization rise in a molten carbonate fuel cell. The behavior is generally explained by Nernst loss, which is a kind of voltage loss due to the thermodynamic potential gradients in a polarization state due to the concentration distribution of reactant species through the gas flow direction. The evaluation of Nernst loss is carried out with a traditional experimental method of constant gas utilization (CU). On the other hand, overpotential due to the gas-phase mass-transport resistance at the anode and cathode shows dependence on the utilization, which can be measured using the inert gas step addition (ISA) method. Since the Nernst loss is assumed to be due to the thermodynamic reasons, the voltage loss can be calculated by the Nernst equation, referred to as a simple calculation (SC) in this work. The three values of voltage loss due to CU, ISA, and SC are compared, showing that these values rise with increases in the utilization within acceptable deviations. When we consider that the anode and cathode reactions are significantly affected by the gas-phase mass transfer, the behavior strongly implies that the voltage loss is attributable not to thermodynamic reasons, namely Nernst loss, but to the kinetic reason of mass-transfer resistance in the gas phase.

• Journal of Welding and Joining
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• 제25권4호
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• pp.42-48
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• 2007

An inert gas atomized NiTiZrSiSn bulk metallic glass feedstock was sprayed onto the copper plate using vacuum plasma spraying process. In order to change the in-flight particle energy, that is, thermal energy, the hydrogen gas flow rate in plasma gas mixture was increased at the constant flow rate of argon gas. Coating and single pass spraying bead were produced with the least feeding rate. Regardless of the plasma gas composition, fully melted through unmelted particle could be observed on the overlay coating. However, the frequency of the unmelted particle number density was increased with the decrease of the hydrogen gas flow rate. The amorphous phase fraction within coating was also affected by the number density of the unmelted particle.

• 한국가스학회지
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• 제16권4호
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• pp.52-58
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• 2012

최근 대기환경규제의 강화로 화학공장에서 발생하는 폐가스를 소각 처리하는 경우가 증대되고 있다. 이러한 소각설비는 저장탱크 상부와 배관을 통해 연결되어 화염을 통하여 폐가스를 연소 소각시키기 때문에, 배관을 따라 화염이 역화될 경우에는 치명적인 사고로 연결될 수 있다. 본 연구는 아크릴산 제조공정의 소각시스템에서 발생한 중대산업사고에 대해 폭발의 3요소와 화염의 전파 원인을 분석하여 사고 예방대책 및 안전성 향상 방안을 다음과 같이 제시하였다. 첫째, 소각시스템의 송풍기를 재 가동하기 전에는 공기 또는 불활성 가스로 충분히 희석하여 폭발을 예방하여야 한다. 둘째, 폭굉으로 전이된 화염이 저장탱크로 전파되지 않도록 소각설비의 전단 및 저장탱크 상부에 폭굉용 화염방지기를 설치하는 것이 필요하다. 섯째, 폭연용 화염방지기를 그대로 사용할 경우에는 그 전단에 파열판을 설치하거나 저장탱크 상부와 소각설비의 배관을 후드식으로 연결하여 폭굉으로 전이된 화염을 저장탱크 밖으로 분출시켜야 한다. 마지막으로, 소각설비에 연결된 송풍기의 제어반(MCC)에 순간정전 보상장치인 시간지연계전기(TDR: time delay relay)등을 설치하여 순간정전 후에도 자동으로 재가동될 수 있도록 조치해야 한다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2000년도 하계종합학술대회 논문집(2)
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• pp.56-59
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• 2000

In this paper, we have made a comparison between secondary ion mass spectroscopy(SIMS) data by the 5kcV-15keV boron implantation and computer simulation results. In order to make electrical activation of implanted carriers, thermal annealing are carried out by RTP method for 30s at 1000$^{\circ}C$ Two dimensional doping concentration distribution from different mask dimensions under inert gas annealing, dry-, and wet-oxidation condition were calculated and simulated with microtec simulator.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2014년도 제49회 KOSCO SYMPOSIUM 초록집
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• pp.207-210
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• 2014

The potential of combustion treatment of low concentration VOC on a turbulent partially premixed flame has been studied experimentally. The significant decrease in hydrocarbon concentration from the low concentration VOC was observed with a turbulent partially premixed flame. The VOC/inert gas mixture whose fuel concentration is beyond the flammability limit could be treated in this method.

• 한국진공학회지
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• 제2권3호
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• pp.275-281
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• 1993

본 논문은 포항가속기에서 건설 중인 진공 chamger의 용접에 관한 것이다. 저장링에 전자빔을 5시간 이상 저장하기 위하여 10-10torr 이하로 진공도를 유지하도록 설계되어 있기 때문에 초고진공에 적합한 TIG 용접(tungsten inert gas welding)을 하였다. 진공 chamber는 Al 5083-H321이며 flange의 재질은 Al 2219-T852이다. Sector chamber I, II의 총 용접 길이는 각각 27m, 37m이며 진공에 유해한 균열과 virtual leak가 생기지 않도록 하는 용접조건 등을 선정하였다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2000년도 추계종합학술대회 논문집(2)
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• pp.225-228
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• 2000

In this paper, we demonstrated an analytical description method of forward voltage drop and reverse voltage of $P^{+}N$ junction diode with <111> oriented antimony doped silicon wafer 60keV boron implantation computer simulation results. In order to make electrical activation of implanted carriers, thermal annealing are carried out by RTP method for 1min at $1000^{\circ}C$ inert gas condition.