• 한국전기전자재료학회논문지
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• 제15권11호
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• pp.933-938
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• 2002

(Ba,Sr)TiO$_{4}$ (BST) thin films on Pt/Ti/SiO$_{2}$/Si substrates were deposited by a sol-gel method and the etch characteristics of BST thin films have been investigated as a function of gas mixing ratio. The maximum etch rate of the BST films was 440 $AA$/min under such conditions as: CF$_{4}$(CF$_{4}$＋Ar) of 0.2, RF-power of 700 W, DC-bias voltage of -200 V, pressure of 15 mTorr and substrate temperature of 30 $^{circ}C$. The selectivities of BST to Pt, SiO$_{2}$ and PR were 0.38, 0.25 and 0.09, respectively. In the XPS (X-ray photoelectron spectroscopy) analysis, Barium (Ba) and Strontium (Sr) component in BST thin films formed low volatile compounds such as BaFx, SrFx, which are forms by the chemical reaction with F atoms and is removed by Ar ion bombardment. Titanium (Ti) is removed by chemical reaction such as TiF with ease. The result of secondary ion mass spectrometry (SIMS) analysis confirmed the existence of the BaFx, SrFK, TiFx.

• 한국연초학회지
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• 제32권1호
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• pp.28-34
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• 2010

Tobacco plants absorb cadmium from soil and accumulate it in high concentrations in their leaves. Additionally, a significant portion of the cadmium contained in cigarettes passes into the smoke. Cadmium is known to be a toxic and carcinogenic compound that has harmful effects on the human body due to smoking. In this study, the concentrations of cadmium in the Ky3R4F reference cigarette and two commercial cigarettes were analyzed by inductively coupled plasma mass spectrometry. Each cigarette sample was partitioned into a tobacco rod and filter and then analyzed in order to determine the concentration of cadmium. The concentrations of cadmium in the mainstream smoke, ash, residue, and cigarette butt were also analyzed after the cigarettes were smoked under ISO smoking conditions. Transfer rates of the cadmium from the tobacco rod to the mainstream smoke, ash, and cigarette butt were 0.8 ~ 5%, 17 ~ 22%, and 5 ~ 7%, respectively. As a result, we estimated that the sidestream smoke contained about 70% of the cadmium from the tobacco rod.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.244-244
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• 1999

Liquid Crystal Displays(LCDs) 투명성 전도막으로 사용하는 Indium Tin Oxide (ITO)의 고밀도 식각특성을 조사하였다. 특히 ITO식각의 경우, pixel electrode 전극에서 사용되는 underlayer인 SiO2, Si3N4와의 최적의 선택비를 얻는데 중점을 두고 있다. 따라서 본 실험에서는 Inductively Coupled Plasma(ICP)를 이용하여 source power, gas combination, bias voltage, pressure 및 기판온도에 따른 ITO의 식각 특성과 이의 underlayer인 SiO2, Si3N4와의 선택비를 조사하였다. Ar과 CH4를 주된 식각가스로서 사용하였으며 첨가가스로는 O2와 HBr를 사용하였다. ITO의 식각특성을 이해하기 위하여 Quadruple Mass Spectrometry(QMS), Optical emission spectroscopy(OES) 이용하였으며, 식각된 sample의 잔류물을 조사하기 위하여 X-ray photoelectron spectroscopy(XPS)를 이용하여 분석하였다. Ar gas에 적정량의 CH4 혼합이 순수한 Ar 가스로 식각한 경우에 비하여 ITO와 SiO2, Si3N4의 선택비가 높았으며, 더 높은 식각 선택비를 얻기 위하여 Ar/CH 분위기에서 첨가가스 O2, HBr을 사용하였다. Source power 및 bias 증가에 따라 ITO의 식각률은 증가하나, underlayer와의 선택비는 감소함을 보였다. 본 실험에서 측정된 ITO의 high 식각률은 약 1500$\AA$/min이며, SiO2, Si3N4와의 high selectivity는 각각 7:1, 12:1로 나타났다. ITO의 etchrate 및 선택비는 source power, bias, pressure, CH 가스첨가에 의존하였지만 기판온도에는 큰 변화가 없음을 관찰하였다. 또한 적정량의 가스조합으로 식각된 시편의 잔류물을 줄일 수 있었다.

• 대한기계학회논문집B
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• 제22권12호
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• pp.1691-1701
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• 1998

Fly ash produced in coal combustion is a fine-grained material consisting mostly of spherical, glassy, and porous particles. A study on the formation mechanism of the fly ash from coal particles in the pulverized coal power plant is investigated with a physical, morphological, and chemical characteristic analysis of fly ash collected from the Samchonpo power plant. This study may contribute to the data base of domestic fly ash, the improvement of combustion efficiency, fouling phenomena and ash collection in the electrostatic precipitator. The physical property of fly ash is determined using a particle counter for the measurement of ash size distribution. Morphological characteristic of fly ash is performed using a scanning electron micrograph. The chemical components of fly ash are determined using an inductively coupled plasma emission spectrometry(ICP). The distribution of fly ash size was bi-modal and ranged from 12 to $19{\mu}m$ in mass median diameter. Exposure conditions of flue gas temperature and duration within the combustion zone of the boiler played an important role on the morphological properties of the fly ash such as shape, particle size and chemical components. The evolution of ash formation during pulverized coal combustion has revealed three major mechanisms by large particle formation due to break-up process, gas to particle conversion and growth by coagulation and agglomeration.

• 상하수도학회지
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• 제30권3호
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• pp.263-270
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• 2016

Recent Engineered nanoparticles were increasingly exposed to environmental system with the wide application and production of nanomaterials, concerns are increasing about their environmental risk to soil and groundwater system. In order to assess the transport behavior of silver nanoparticles (AgNPs), a saturated packed column experiments were examined. Inductively coupled plasma-mass spectrometry and a DLS detector was used for concentration and size measurement of AgNPs. The column experiment results showed that solution chemistry had a considerable temporal deposition of AgNPs on the porous media of solid glass beads. In column experiment, comparable mobility improvement of AgNPs were observed by changing solution chemistry conditions from salts (in both NaCl and $CaCl_2$ solutions) to DI conditions, but in much lower ionic strength (IS) with $CaCl_2$. Additionally, the fitted parameters with two-site kinetic attachment model form the experimental breakthrough curves (BTCs) were associated that the retention rates of the AgNPs aggregates were enhanced with increasing IS under both NaCl and $CaCl_2$ solutions.

• 한국재료학회지
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• 제16권2호
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• pp.80-84
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• 2006

The removal efficiency of Cu and Fe contaminants on the silicon wafer surface was examined to investigate the effect of cleaning solutions on the behavior of metallic impurities. Silicon wafers were intentionally contaminated with Cu and Fe solutions by spin coating and cleaned in different types of cleaning solutions based on $NH_4OH/H_2O_2/H_2O\;(SC1),\;H_2O_2/HCl/H_2O$ (SC2), and/or HCl/$H_2O$ (m-SC2) mixtures. The concentration of metallic contaminants on the silicon wafer surface before and after cleaning was analyzed by vapor phase decomposition/inductively coupled plasma-mass spectrometry (VPD/ICP-MS). Cu ions were effectively removed both in alkali (SC1) and in acid (SC2) based solutions. When $H_2O_2$ was not added to SC2 solution like m-SC2, the removal efficiency of Cu impurities was decreased drastically. The efficiency of Cu ions in SC1 was not changed by increasing cleaning temperature. Fe ions were soluble only in acid solution like SC2 or m-SC2 solution. The removal efficiencies of Fe ions in acid solutions were enhanced by increasing cleaning temperature. It is found that the behavior of metallic contaminants as Cu and Fe from silicon surfaces in cleaning solutions could be explained in terms of Pourbaix diagram.

• 한국에너지공학회:학술대회논문집
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• 한국에너지공학회 1996년도 춘계학술발표회 초록집
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• pp.88-96
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• 1996

The characteristic analysis of fly ash generated from a fired power plant using bunker-C oil has been investigated. Ash size distribution by an optical microscopy with image processing technique, morphological shape by a scanning electron microscope(SEM) and microscope, chemical composition by the inductively coupled plasma emission spectrometry(ICP), and resistivity measurement as a function of temperature and moisture content by the resistivity meter are performed. A study of physical, chemical and electrical characteristics of bunker-C fly ash plays an important role of improving the performance of an electrostatic precipitator and protecting air pollution. The samples of bunker-C fly ash for analysis were collected from the electrostatic precipitator hopper of Ulsan Power Plant Unit 1 and Pusan Power Plant Unit 1. Mass median diameter(MMD) of bunker-C fly ash was measured 12.7${\mu}{\textrm}{m}$, while MMD of fly ash generated from the mixture of bunker-C oil(40%) and domestic anthracitic coal(60%) was 25.7${\mu}{\textrm}{m}$. The morphological structure of bunker-C fly ash consisted of fine particles of non-spherical shape. The primary chemical components of bunker-C fly ash were composed of SiO2(2.36%), Al2O3(4.91%), Fe2O3(14.33%) and C(11.84%). Resistivity of bunker-C fly ash was found to be increased with increasing temperature at the range of 100~15$0^{\circ}C$ and was measured 103~104 ohm-cm.

• Bulletin of the Korean Chemical Society
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• 제34권11호
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• pp.3362-3366
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• 2013

A simple and quick separation technique for selenite in natural water was developed using $TiO_2$@$SiO_2/Fe_3O_4$ nanoparticles. For the synthesis of nanoparticles, a polymer-assisted sol-gel method using hydroxypropyl cellulose (HPC) was developed to control particle dispersion in the synthetic procedure. In addition, titanium butoxide (TBT) precursor, instead of the typical titanium tetra isopropoxide, was used for the formation of the $TiO_2$ shell. The synthesized nanoparticles were used to separate selenite ($Se^{4+}$) in the presence of $Se^{6+}$ or selenium anions for the photocatalytic reduction to $Se^0$ atom on the $TiO_2$ shell, followed by magnetic separation using $Fe_3O_4$ nanoparticles. The reduction efficiency of the photocatalytic reaction was 81.4% at a UV power of 6W for 3 h with a dark adsorption of 17.5% to the nanoparticles, as determined by inductively coupled plasma-mass spectrometry (ICP-MS). The developed separation method can be used for the speciation and preconcentration of selenium cations in environmental and biological analysis.

• Environmental Engineering Research
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• 제18권1호
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• pp.3-8
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• 2013

Collision cell technology-inductively coupled plasma-mass spectrometry (CCT-ICP-MS) was used to measure the concentrations of approximately 19 elements associated with airborne PM2.5 samples that were collected from a roadside sampling station in Daejeon, Korea. Standard reference material (SRM 2783, air particulate on filter media) of the National Institute of Standards and Technology was used for the quality assurance of CCT-ICP-MS. The elemental concentrations were compared statistically with the certified (or recommended) values. The patterns of distribution were clearly distinguished between elements with their concentrations ranging over four orders of magnitude. If compared in terms of enrichment factors, it was found that toxic trace elements (e.g., Sb, Se, Cd, As, Zn, Pb, and Cu) of anthropogenic origin are much more enriched in PM2.5 samples of the study site. To the contrary, the results of the correlation analysis showed that PM2.5 concentrations can exhibit more enhanced correlations with the elements (e.g., Fe, K, Si, and Ti) arising from earth's crust. The findings of strong correlations between PM2.5 and the elements of crustal origin may be directly comparable with the dominant role of those species by constituting a major fraction of even PM2.5 as well as PM10 at the roadside area.

• Nuclear Engineering and Technology
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• 제49권3호
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• pp.562-568
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• 2017

Background: The chemical characterization of metallic alloys and oxides is conventionally carried out by wet chemical analytical methods and/or instrumental methods. Instrumental neutron activation analysis (INAA) is capable of analyzing samples nondestructively. As a part of a chemical quality control exercise, Zircaloys 2 and 4, nimonic alloy, and zirconium oxide samples were analyzed by two INAA methods. The samples of alloys and oxides were also analyzed by inductively coupled plasma optical emission spectroscopy (ICP-OES) and direct current Arc OES methods, respectively, for quality assurance purposes. The samples are important in various fields including nuclear technology. Methods: Samples were neutron irradiated using nuclear reactors, and the radioactive assay was carried out using high-resolution gamma-ray spectrometry. Major to trace mass fractions were determined using both relative and internal monostandard (IM) NAA methods as well as OES methods. Results: In the case of alloys, compositional analyses as well as concentrations of some trace elements were determined, whereas in the case of zirconium oxides, six trace elements were determined. For method validation, British Chemical Standard (BCS)-certified reference material 310/1 (a nimonic alloy) was analyzed using both relative INAA and IM-NAA methods. Conclusion: The results showed that IM-NAA and relative INAA methods can be used for nondestructive chemical quality control of alloys and oxide samples.