• Title/Summary/Keyword: In-situ process

Search Result 853, Processing Time 0.032 seconds

Refractive index change of nonlinear polymer thin films induced by corona poling and quantitative evaluation of poling effect (코로나 극성배향이 비선형 고분자박막의 복소굴절율에 미치는 영향 및 배향효과의 정량화)

  • 길현옥;김상준;방현용;김상열
    • Korean Journal of Optics and Photonics
    • /
    • v.10 no.3
    • /
    • pp.181-187
    • /
    • 1999
  • We prepared the side-chain type nonlinear optical NPP(N-(6-nitrophenyl)-(L)-prolinol) polymer films by spin coating method. Ellipsometric spectra were in situ collected by using spectroscopic phase modulated ellipsometer while the NPP polymer films were being corona poled at the temperature above glass transition. We calculated film thickness and the refractive index dispersion by modeling the spectro-ellipsometry data in transparent region. We also calculated the refractive index and the extinction coefficient of the polymer films by numerically inverting the spectro-ellipsometry data in absorbing region, while the previously determined film thickness was used. The independently determined extinction coefficient spectra from the analysis of transmission spectra were compared with those by spectro-ellipsometry and they showed an excellent agreement with each other. From the analysis of the complex refractive index change of the NPP polymer thin films induced by the corona poling, we could determine the vertical complex refractive index and the horizontal complex refractive index separately. Using the volume fraction of the vertical component f⊥, the degree of poling of poled NPP polymer films was quantitatively addressed. It is suggested that the present method can be used to quantitatively address the degree of poling in an absolute manner and to depth profile the poled fraction of thick polymer films. It will be useful to understand the structural change of polymer films and hence the poling mechanism during the poling process.

  • PDF

Characteristics and Physical Property of Tungsten(W) Related Diffusion Barrier Added Impurities (불순물을 주입한 텅스텐(W) 박막의 확산방지 특성과 박막의 물성 특성연구)

  • Kim, Soo-In;Lee, Chang-Woo
    • Journal of the Korean Vacuum Society
    • /
    • v.17 no.6
    • /
    • pp.518-522
    • /
    • 2008
  • The miniaturization of device size and multilevel interlayers have been developed by ULSI circuit devices. These submicron processes cause serious problems in conventional metallization due to the solubility of silicon and metal at the interface, such as an increasing contact resistance in the contact hole and interdiffusion between metal and silicon. Therefore it is necessary to implement a barrier layer between Si and metal. Thus, the size of multilevel interconnection of ULSI devices is critical metallization schemes, and it is necessary reduce the RC time delay for device speed performance. So it is tendency to study the Cu metallization for interconnect of semiconductor processes. However, at the submicron process the interaction between Si and Cu is so strong and detrimental to the electrical performance of Si even at temperatures below $200^{\circ}C$. Thus, we suggest the tungsten-carbon-nitrogen (W-C-N) thin film for Cu diffusion barrier characterized by nano scale indentation system. Nano-indentation system was proposed as an in-situ and nanometer-order local stress analysis technique.

High rate deposition of poly-si thin films using new magnetron sputtering source

  • Boo, Jin-Hyo;Park, Heon-Kyu;Nam, Kyung-Hoon;Han, Jeon-Geon
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2000.02a
    • /
    • pp.186-186
    • /
    • 2000
  • After LeComber et al. reported the first amorphous hydrogenated silicon (a-Si: H) TFT, many laboratories started the development of an active matrix LCDs using a-Si:H TFTs formed on glass substrate. With increasing the display area and pixel density of TFT-LCD, however, high mobility TFTs are required for pixel driver of TF-LCD in order to shorten the charging time of the pixel electrodes. The most important of these drawbacks is a-Si's electron mobiliy, which is the speed at which electrons can move through each transistor. The problem of low carier mobility for the a-Si:H TFTs can be overcome by introducing polycrystalline silicon (poly-Si) thin film instead of a-Si:H as a semiconductor layer of TFTs. Therefore, poly-Si has gained increasing interest and has been investigated by many researchers. Recnetly, fabrication of such poly-Si TFT-LCD panels with VGA pixel size and monolithic drivers has been reported, . Especially, fabricating poly-Si TFTs at a temperature mach lower than the strain point of glass is needed in order to have high mobility TFTs on large-size glass substrate, and the monolithic drivers will reduce the cost of TFT-LCDs. The conventional methods to fabricate poly-Si films are low pressure chemical vapor deposition (LPCVD0 as well as solid phase crystallization (SPC), pulsed rapid thermal annealing(PRTA), and eximer laser annealing (ELA). However, these methods have some disadvantages such as high deposition temperature over $600^{\circ}C$, small grain size (<50nm), poor crystallinity, and high grain boundary states. Therefore the low temperature and large area processes using a cheap glass substrate are impossible because of high temperature process. In this study, therefore, we have deposited poly-Si thin films on si(100) and glass substrates at growth temperature of below 40$0^{\circ}C$ using newly developed high rate magnetron sputtering method. To improve the sputtering yield and the growth rate, a high power (10~30 W/cm2) sputtering source with unbalanced magnetron and Si ion extraction grid was designed and constructed based on the results of computer simulation. The maximum deposition rate could be reached to be 0.35$\mu$m/min due to a high ion bombardment. This is 5 times higher than that of conventional sputtering method, and the sputtering yield was also increased up to 80%. The best film was obtained on Si(100) using Si ion extraction grid under 9.0$\times$10-3Torr of working pressure and 11 W/cm2 of the target power density. The electron mobility of the poly-si film grown on Si(100) at 40$0^{\circ}C$ with ion extraction grid shows 96 cm2/V sec. During sputtering, moreover, the characteristics of si source were also analyzed with in situ Langmuir probe method and optical emission spectroscopy.

  • PDF

V2O5WO3/TiO2 Catalyst Prepared on Nanodispersed TiO2 for NH3-SCR: Relationship between D ispersed Particle Size of TiO2 and Maximum Decomposition Temperature of NOx (NH3-SCR용 나노분산 TiO2 담체상에 제조된 V2O5WO3/TiO2 촉매: TiO2 분산입도와 NOx 최대 분해온도와의 상관성)

  • Min Chae, Seo;Se-Min, Ban;Jae Gu, Heo;Yong Sik, Chu;Kyung-Seok, Moon;Dae-Sung, Kim
    • Korean Journal of Materials Research
    • /
    • v.32 no.11
    • /
    • pp.496-507
    • /
    • 2022
  • For the selective catalytic reduction of NOx with ammonia (NH3-SCR), a V2O5WO3/TiO2 (VW/nTi) catalyst was prepared using V2O5 and WO3 on a nanodispersed TiO2 (nTi) support by simple impregnation process. The nTi support was dispersed for 0~3 hrs under controlled bead-milling in ethanol. The average particle size (D50) of nTi was reduced from 582 nm to 93 nm depending on the milling time. The NOx activity of these catalysts with maximum temperature shift was influenced by the dispersion of the TiO2. For the V0.5W2/nTi-0h catalyst, prepared with 582 nm nTi-0h before milling, the decomposition temperature with over 94 % NOx conversion had a narrow temperature window, within the range of 365-391 ℃. Similarly, the V0.5W2/nTi-2h catalyst, prepared with 107 nm nTi-2h bead-milled for 2hrs, showed a broad temperature window in the range of 358~450 ℃. However, the V0.5W2/Ti catalyst (D50 = 2.4 ㎛, aqueous, without milling) was observed at 325-385 ℃. Our results could pave the way for the production of effective NOx decomposition catalysts with a higher temperature range. This approach is also better at facilitating the dispersion on the support material. NH3-TPD, H2-TPR, FT-IR, and XPS were used to investigate the role of nTi in the DeNOx catalyst.

Effect of Different Curing Methods on the Unconfined Compressive Strength of Cemented Sand (양생방법에 따른 고결모래의 일축압축강도 특성)

  • Park, Sung-Sik;Kim, Ki-Young;Choi, Hyun-Seok;Kim, Chang-Woo
    • KSCE Journal of Civil and Environmental Engineering Research
    • /
    • v.29 no.5C
    • /
    • pp.207-215
    • /
    • 2009
  • Cemented soils or concrete are usually cured under moisture conditions and their strength increases with curing time. An insufficient supply of water to cemented soils can contribute to hydration process during curing, which results in the variation of bonding strength of cemented soils. In this study, by the consideration of in situ water supply conditions, cemented sand with cement ratio less than 20% is prepared by air dry, wrapped, moisture, and underwater conditions. A series of unconfined compression tests are carried out to evaluate the effect of curing conditions on the strength of cemented soils. The strength of air dry curing specimen is higher than those of moisture and wrapped cured specimens when cement ratio is less than 10%, whereas it is lower when cement ratio is greater than 10%. Regardless of cement ratio, air dry cured specimens are stronger than underwater cured specimens. A strength increase ratio with cement ratio is calculated based on the strength of 4% cemented specimen. The strength increase ratio of air dry cured specimen is lowest and that of wrapped, moisture, and underwater cured ones increased by square. Strength of air dry cured specimen drops to maximum 30% after wetting when cement ratio is low. However, regardless of cement ratio, strength of moisture and wrapped specimens drops to an average 10% after wetting. The results of this study can predict the strength variation of cemented sand depending on water supply conditions and wetting in the field, which can guarantee the safety of geotechnical structures such as dam.

GIS Application for the Analysis of Geomorphic Surfaces of Marine Terrace at Gampo, Gyeongju City (경주 감포지역 해안단구의 지형면분석을 위한 GIS의 적용)

  • Hwang, Sang-Ill;Jung, Hye-Kyung;Yoon, Soon-Ock
    • Journal of the Korean Association of Geographic Information Studies
    • /
    • v.3 no.2
    • /
    • pp.48-60
    • /
    • 2000
  • This study is aimed to clarify the distribution chracteristics of marine terraces and extract the specific surface at Gampo-eup, Gyeongju city on the map of 1:5,000 using GIS. The effects and problems occurred on the process of using GIS were investigated for the research of marine terrace. The longitudinal profile analysis was carried out along the 12 sections on the geomorphic surfaces of the study area, and actually High higher surface(HH-surface) was found over 100m a.s.l., which has not been reported till now. And the occupancy rate could be calculated by substitution on the height between 4m and 87m a.s.l. for each mean slope degree $1-5^{\circ}$ obtained from the actual measuring along four sections. Consequently the lower-I surface was highly reliable to use as the key bed for studying marine terraces. The accurate and detail analysis about the marine terraces is able to be accomplished on the basis of meaningful actual measuring, though its general possible distribution area can be extracted from GIS with the less effort. Namely the quantified results obtained from GIS could offer the basis for the objective analysis of the geomorphic surfaces. And we can look over the landscape and investigate the surfaces with reliefs effectively in relation to the real geomorphology on the study area, where in situ approach is difficult. But the digital map with a large scale should be offered first of all in order to raise the accuracy of the analysis.

  • PDF

Study of Blast Ground Vibration & Noise Measurements In-situ and Effect Analysis for Numerical Analysis, Rational Blasting Design at an Eel Farm (양만장의 발파 진동소음 현장측정과 수치해석을 통한 영향검토 및 합리적인 발파설계 연구)

  • Lee Song;Kim Sung-Ku;Rhee Yong-Ho
    • Tunnel and Underground Space
    • /
    • v.16 no.2 s.61
    • /
    • pp.179-188
    • /
    • 2006
  • The vibration or/and noise generated by blast operations might cause not only structural damage to properties but mentally also to humans and animals. For that reason, maximum permitted vibration and noise levels are set by sensitivities of structures and they are used for the management of blast vibration. It is known that the fish lived in water are more sensitive to vibration than land animals, and thus the adverse impact of the blasting on fish farms should be very concerned. This study investigated the vibration and noise levels at a large eel farm located some 840 meters of the blasting site through the large real-scale experiments of blastings, prior to conducting the actual blasting. As a result, it was found that the noise met the requirement to be within maximum permitted level, while the ground vibration exceeded the permitted vibration. Accordingly, the impact of the excess vibration was investigated by an existing empirical method and verified by a new three dimensional numerical analysis. In this study, such an inspection process was briefly described, and a method was suggested for the examination of possible adverse effects from blasting on vibration-sensitive structures like the eel farm. The study also introduced a design method that controls the blast effects - ground vibration and noise.

Application of Non-Alkaline Silica Sol Grouting Method Considering the Eco-Friendliness (친환경 비알칼리성 실리카졸 차수공법의 적용)

  • Jang, Yonggu;Kim, Sugyum;Kang, Injoon
    • Journal of the Korean GEO-environmental Society
    • /
    • v.17 no.9
    • /
    • pp.37-45
    • /
    • 2016
  • This study analyzes the environmental and durability problems of traditional (LW) grouting method. And the proposed method was compared to the others effects by analyzing the in-situ applicability and effect of performance of the method using the silica sol. This study analyzed the eco-friendly, effects of high strength silica sol through laboratory tests. The effects of the construction process were identified through the field tests. The compressive strength was increased by 1.3 times compared to the LW method and the shrinkage is 3~8 times less than that of LW method with water glass. No toxicity, which could affect soil contamination. In particular, it was confirmed that the Toxicity fish also survived with little pH change in the concentration tank. Also it confirmed the construction effects through field test. Field tests are a standard penetration test, permeability test, LLT, BST. Permeability was reduced to $1{\times}10^{-5{\sim}-6}cm/sec$.

Development of Biomass-Derived Anode Material for Lithium-Ion Battery (리튬이온 전지용 바이오매스 기반 음극재 개발)

  • Jeong, Jae Yoon;Lee, Dong Jun;Heo, Jungwon;Lim, Du-Hyun;Seo, Yang-Gon;Ahn, Jou-Hyeon;Choi, Chang-Ho
    • Clean Technology
    • /
    • v.26 no.2
    • /
    • pp.131-136
    • /
    • 2020
  • Biomass bamboo charcoal is utilized as anode for lithium-ion battery in an effort to find an alternative to conventional resources such as cokes and petroleum pitches. The amorphous phase of the bamboo charcoal is partially converted to graphite through a low temperature graphitization process with iron oxide nanoparticle catalyst impregnated into the bamboo charcoal. An optimum catalysis amount for the graphitization is determined based on the characterization results of TEM, Raman spectroscopy, and XRD. It is found that the graphitization occurs surrounding the surface of the catalysis, and large pores are formed after the removal of the catalysis. The formation of the large pores increases the pore volume and, as a result, reduces the surface area of the graphitized bamboo charcoal. The partial graphitization of the pristine bamboo charcoal improves the discharge capacity and coulombic efficiency compared to the pristine counterpart. However, the discharge capacity of the graphitized charcoal at elevated current density is decreased due to the reduced surface area. These results indicate that the size of the catalysis formed in in-situ graphitization is a critical parameter to determine the battery performance and thus should be tuned as small as one of the pristine charcoal to retain the surface area and eventually improve the discharge capacity at high current density.

Quantum Dot-Sensitized Solar Cells Based on Mesoporous TiO2 Thin Films (메조포러스 이산화티타늄 박막 기반 양자점-감응 태양전지)

  • Lee, Hyo Joong
    • Journal of the Korean Electrochemical Society
    • /
    • v.18 no.1
    • /
    • pp.38-44
    • /
    • 2015
  • This review article summarizes the recent progress of quantum dot (QD)-sensitized solar cells based on mesoporous $TiO_2$ thin films. From the intrinsic characteristics of nanoscale inorganic QDs with various compositions, it was possible to construct a variety of 3rd-generation thin film solar cells by solution process. Depending on preparation methods, colloidal QD sensitizers are pre-prepared for later deposition onto the surface of $TiO_2$ or in-situ deposition of QDs from chemical bath is done for direct growth of QD sensitizers over substrates. Recently, colloidal QD sensitizers have shown an overall power conversion efficiency of ~7% by a very precise control of composition while a representative CdS/CdSe from chemical bath deposition have done ~5% with polysulfide electrolytes. In the near future, it is necessary to carry out systematic investigations for developing new hole-conducting materials and controlling interfaces within the cell, thus leading to an enhancement of both open-circuit voltage and fill factor while keeping the current high value of photocurrents from QDs towards more efficient and stable QD-sensitized solar cells.