• Title/Summary/Keyword: In-Situ Observation

Search Result 273, Processing Time 0.024 seconds

Fluorine Plasma Corrosion Resistance of Anodic Oxide Film Depending on Electrolyte Temperature

  • Shin, Jae-Soo;Kim, Minjoong;Song, Je-beom;Jeong, Nak-gwan;Kim, Jin-tae;Yun, Ju-Young
    • Applied Science and Convergence Technology
    • /
    • v.27 no.1
    • /
    • pp.9-13
    • /
    • 2018
  • Samples of anodic oxide film used in semiconductor and display manufacturing processes were prepared at different electrolyte temperatures to investigate the corrosion resistance. The anodic oxide film was grown on aluminum alloy 6061 by using a sulfuric acid ($H_2SO_4$) electrolyte of 1.5 M at $0^{\circ}C$, $5^{\circ}C$, $10^{\circ}C$, $15^{\circ}C$, and $20^{\circ}C$. The insulating properties of the samples were evaluated by measuring the breakdown voltage, which gradually increased from 0.43 kV ($0^{\circ}C$) to 0.52 kV ($5^{\circ}C$), 1.02 kV ($10^{\circ}C$), and 1.46 kV ($15^{\circ}C$) as the electrolyte temperature was increased from $0^{\circ}C$ to $15^{\circ}C$, but then decreased to 1.24 kV ($20^{\circ}C$). To evaluate the erosion of the film by fluorine plasma, the plasma erosion and the contamination particles were measured. The plasma erosion was evaluated by measuring the breakdown voltage after exposing the film to $CF_4/O_2/Ar$ and $NF_3/O_2/Ar$ plasmas. With exposure to $CF_4/O_2/Ar$ plasma, the breakdown voltage of the film slightly decreased at $0^{\circ}C$, by 0.41 kV; however, the breakdown voltage significantly decreased at $20^{\circ}C$, by 0.83 kV. With exposure to $NF_3/O_2/Ar$ plasma, the breakdown voltage of the film slightly decreased at $0^{\circ}C$, by 0.38 kV; however, the breakdown voltage significantly decreased at $20^{\circ}C$, by 0. 77 kV. In addition, for the entire temperature range, the breakdown voltage decreased more when sample was exposed to $NF_3/O_2/Ar$ plasma than to $CF_4/O_2/Ar$ plasma. The decrease of the breakdown voltage was lower in the anodic oxide film samples that were grown slowly at lower temperatures. The rate of breakdown voltage decrease after exposure to fluorine plasma was highest at $20^{\circ}C$, indicating that the anodic oxide film was most vulnerable to erosion by fluorine plasma at that temperature. Contamination particles generated by exposure to the $CF_4/O_2/Ar$ and $NF_3/O_2/Ar$ plasmas were measured on a real-time basis. The number of contamination particles generated after the exposure to the respective plasmas was lower at $5^{\circ}C$ and higher at $0^{\circ}C$. In particular, for the entire temperature range, about five times more contamination particles were generated with exposure to $NF_3/O_2/Ar$ plasma than for exposure to $CF_4/O_2/Ar$ plasma. Observation of the surface of the anodic oxide film showed that the pore size and density of the non-treated film sample increased with the increase of the temperature. The change of the surface after exposure to fluorine plasma was greatest at $0^{\circ}C$. The generation of contamination particles by fluorine plasma exposure for the anodic oxide film prepared in the present study was different from that of previous aluminum anodic oxide films.

The Relationship between Climate and Food Incidents in Korea (식품안전 사건 사고와 기후요소와의 관련성)

  • Lee, Jong-Hwa;Kim, Young-Soo;Baek, Hee-Jung;Chung, Myung-Sub
    • Journal of Climate Change Research
    • /
    • v.2 no.4
    • /
    • pp.297-307
    • /
    • 2011
  • This study investigates relation of food safety incidents with climate. Therefore food safety incidents and climate data during 1999 to 2009 have been analyzed. In situ observations of monthly mean temperature, maximum temperature, minimum temperature, precipitation, and relative humidity in 60 observation stations of Korean Meteorological Administration (KMA) have been used in this study. Food safety incidents data have been constructed by searching media reports following Park's method (2009) during the same period. According to the Park's method, 729 events were collected. To analyze its relations, food safety incidents data have been classified into chemical, biological, and physical hazards. Pearson product-moment correlation coefficients have been applied to analyze the relations. The correlation of food safety incidents has negative one with precipitation (-0.48), and positive one with minimum temperature(0.45). Precipitation has been correlated with biological and physical hazards more than chemical hazard. Temperatures (mean temperature, maximum temperature, and minimum temperature) have been correlated closely with chemical hazard than others. Food safety incidents data has been interblended with human behavior factor through decision-making processes in food manufacturing, processing, and consumption phases of "farm-totable" food processing. Act in the preventing damage will be obvious if the hazard were apparent. Therefore abnormal condition could be more dangerous than that of apparent extreme events because apparent events or extreme events become one of alarm over hazards. Therefore, human behavior should be considered as one of the important factors for analysis of food safety incidents. The result of this study can be used as a better case study for food safety researches related to climate change.

Interpretation of Material Provenance and Production Techniques of Pottery and Kilns from Gundong and Majeon Sites in the 3rd Century at Yeonggwang, Korea (영광 군동.마전 원삼국시대 토기와 가마의 제작특성 및 태토의 산지해석)

  • Jang, Sung-Yoon;Lee, Gi-Gil;Moon, Hee-Soo;Lee, Chan-Hee
    • Journal of Conservation Science
    • /
    • v.25 no.1
    • /
    • pp.101-114
    • /
    • 2009
  • Potsherds and kilns of the AD 3th century excavated from Gundong and Majeon sites, Korea were studied to investigate the production techniques and provenance of potsherds and kilns on the pastes. For potsherds, kilns blocks and in-situ paleo-soils, provenance of raw materials were estimated through mineralogy and geochemistry, while production technique and thermal feature of kilns were investigated through observation of textures and compositions as well as firing experiment on paleo-soils. As a result of study, potsherds and kilns were found to have similar mineralogical compositions as the neighboring paleo-soils and to have same evolution path with that of geochemistry. The potsherds were divided into 3 groups according to firing temperature and production technique. Group 1 consists of reddish stamped pattern pottery with loose textures, which has many pores and contains many iron oxides. Its temper is less than about 0.5mm, and was probably fired between 700 to $800^{\circ}C$. Group 2 contains ash to grayish blue stamped pattern pottery, which has vitrified texture and few pores. Its temper is less than about 0.5mm, and was probably fired from 900 to $1,000^{\circ}C$. However, some potsherd belongs to the group 2 in terms of features for temper and pastes, but it was probably fired over $1,100^{\circ}C$. Group 3 contains reddish and grayish stamped pattern pottery. It has vitrified matrix, few pores and temper consists of polycrystalline quartz and feldspar over 2mm, and it was probably fired around $1,000^{\circ}C$. The kiln had experienced temperature from 600 to $700^{\circ}C$ on the wall, from 900 to $1,000^{\circ}C$ on the bottom, suggesting the function of high temperature firing.

  • PDF