• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1280-1282
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• 1994

The method of passivation for protecting the $Hg_{l-x}Cd_xTe$ surface is important device fabrication process, because the surface components are highly reactive leading to its chemical and electrical instability. Especially, the material of which composition is x=0.2 or 0.3, is narrow bandgap semiconductor and used as detector of infrared radiation. The device performance of narrow bandgap semiconductors are largely governed by the properties of the semiconductor surface. The electro-chemical processing of $Hg_{l-x}Cd_xTe$ allows rigorous control of the surface chemistry and provides an in-situ monitor of surface reaction. So electro-chemical reduction at specific potential can selectively eliminate the undesirable species on the surface and manipulated to reproducibly attain the desired stoichiometry. This method shows to assess the quality or chemically treated $Hg_{l-x}Cd_xTe$ good surface.

• Journal of the Korean Vacuum Society
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• v.19 no.1
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• pp.14-21
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• 2010

Ge is one of the attractive channel materials for the next generation high speed metal oxide semiconductor field effect transistors (MOSFETs) due to its higher carrier mobility than Si. But the absence of a chemically stable thermal oxide has been the main obstacle hindering the use of Ge channels in MOS devices. Especially, the fabrication of gate oxide on Ge with high quality interface is essential requirement. In this study, $HfO_xN_y$ thin films were prepared by plasma-enhanced atomic layer deposition on Ge substrate. The nitrogen was incorporated in situ during PE-ALD by using the mixture of nitrogen and oxygen plasma as a reactant. The effects of nitrogen to oxygen gas ratio were studied focusing on the improvements on the electrical and interface properties. When the nitrogen to oxygen gas flow ratio was 1, we obtained good quality with 10% EOT reduction. Additional analysis techniques including X-ray photoemission spectroscopy and high resolution transmission electron microscopy were used for chemical and microstructural analysis.

• Applied Chemistry for Engineering
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• v.35 no.4
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• pp.296-302
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• 2024

An ionic conjugated polymer-iron (III) chloride composite was prepared via in-situ quaternization polymerization of 2-ethynylpyridine (2EP) using iron (III) chloride. Various instrumental methods revealed that the chemical structure of the resulting conjugated polymer (P2EP)-iron (III) chloride composite has the conjugated backbone system having the designed pyridinium ferric chloride complexes. The polymerization mechanism was assumed to be that the activated triple bond of 2-ethynylpyridinium salt, formed at the first reaction step, is easily susceptible to the step-wise polymerization, followed by the same propagation step that contains the propagating macroanion and monomeric 2-ethynylpyridinium salts. The electro-optical and electrochemical properties of the P2EP-FeCl₃ composite were studied. In the UV-visible spectra of P2EP-FeCl₃ composite, the absorption maximum values were 480 nm and 533 nm, and the PL maximum value was 598 nm. The cyclic voltammograms of the P2EP-FeCl₃ composite exhibited irreversible electrochemical behavior between the oxidation and reduction peaks. The kinetics of the redox process of composites were found to be very close to a diffusion-controlled process from the plot of the oxidation current density versus the scan rate.

• Bulletin of the Korean Chemical Society
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• v.21 no.6
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• pp.588-594
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• 2000

Structural changes of an iron phthalocyanine (FePC) monolayer induced by adsorption and externally applied potential on high area carbon surface have been investigated in situ by iron K-edge X-ray absorption fine structure (XAFS) in 0.5 M $H_2S0_4.$ Fine structures shown in the X-ray absorption near edge structure (XANES) for microcrystalline FePC decreased upon adsorption and further diminished under electrochemical conditions. Fe(II)PC(-2) showed a 1s ${\rightarrow}$ 4p transition as poorly resolved shoulder to the main absorption edge rather than a distinct peak and a weak 1s ${\rightarrow}$ 3d transition. The absorption edge position measured at half maximum was shifted from 7121.8 eV for Fe(lI)PC(-2) to 7124.8 eV for $[Fe(III)PC(-2)]^+$ as well as the 1s ${\rightarrow}$ 3d pre-edge peak being slightly enhanced. However, essentially no absorption edge shift was observed by the 1-electron reduction of Fe(Il)PC(-2), indicating that the species formed is $[Fe(II)PC(-3)]^-$. Structural parameters were obtained by analyzing extended X-ray absorption fine structure (EXAFS) oscillations with theoretical phases and amplitudes calculated from FEFF 6.01 using multiple-scattering theory. When applied to the powder FePC, the average iron-to-phthalocyanine nitrogen distance, d(Fe-$N_p$) and the coordination number were found to be 1.933 $\AA$ and 3.2, respectively, and these values are the same, within experimental error, as those reported ( $1.927\AA$ and 4). Virtually no structural changes were found upon adsorption except for the increased Debye-Wailer factor of $0.005\AA^2$ from $0.003\AA^2.$ Oxidation of Fe(II)PC(-2) to $[Fe(III)PC(-2)]^+$ yielded an increased d(Fe-Np) (1 $.98\AA)$ and Debye-Wailer factor $(0.005\AA^2).$ The formation of $[Fe(II)PC(-3)]^-$, however, produced a shorter d(Fe-$N_p$) of $1.91\AA$ the same as that of crystalline FePC within experimental error, and about the same DebyeWaller $factor(0.006\AA^2)$.

• Journal of the Korean Ceramic Society
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• v.39 no.8
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• pp.801-806
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• 2002

The decomposition and/or conversion of carbon dioxide to carbon have been studied using oxygen-deficient ferrites for the reduction of $CO_2$ emission to the atmosphere. In this work, the homogeneous precipitation method using urea decomposition was employed to induce in situ precipitation of Ni ferrite($Ni_{0.4}Fe_{2.6}O_4$) on the porous ceramic fiber support (50 mm diameter${\times}$10 mm thickness). Effects of ferrite loading conditions on the CO2 decomposition efficiency were discussed in this paper. Removal of residual chloride ions and urea by solvent exchange from the porous media after ferrite deposition apparently helps to form spinel ferrite, but does not increase the efficiency of $CO_2$ decomposition. Porous ceramic fiber composites containing 20 wt% (1g) ferrite samples showed 100% efficiency for $CO_2$decomposition during the first three minutes, but the efficiency decreased rapidly after the elapsed time of ten minutes. The characteristic reduction time for the $CO_2$ decomposition efficiency was estimated as about 3∼7 min.

• Transactions on Electrical and Electronic Materials
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• v.3 no.3
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• pp.14-17
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• 2002

The HDP (High Density Plasma) CVD process consists of a simultaneous sputter etch and chemical vapor deposition. As CMOS process continues to scale down to sub- quarter micron technology, HDP process has been widely used fur the gap-fill of small geometry metal spacing in inter-metal dielectric process. However, HBP CVD system has some potential problems including plasma-induced damage. Plasma-induced gate oxide damage has been an increasingly important issue for integrated circuit process technology. In this paper, thin gate oxide charge damage caused by HDP deposition of inter-metal dielectric was studied. Multiple step HDP deposition process was demonstrated in this work to prevent plasma-induced damage by introducing an in-situ top SiH$_4$ unbiased liner deposition before conventional deposition.

• Korean Journal of Materials Research
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• v.11 no.8
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• pp.641-646
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• 2001

The $CoSi_2$ layers have been in-situ grown on undoped poly-Si by the reactive chemical vapor deposition of $Co({\Eta}^5-C_5H_5)(CO)_2$ at $650^{\circ}C$ and their thermal stabilities have been investigated in the temperature range of 800 to $1000^{\circ}C$. The $CoSi_2$ layer grown by the in-situ method had grains with large area of (111) plane, while grains with little area of (111) plane appeared on the $CoSi_2$ layer grown by the conventional two-step method where $CoSi_2$ formed first and transformed to $CoSi_2$. The thermal stability of the $CoSi_2$ layer grown by the in- situ process was improved by more than $100^{\circ}C$ higher than that of the $CoSi_2$ layer grown by the conventional two-step process. The $CoSi_2$ layer grown in situ on a large-grained Poly-Si was stable up to $950^{\circ}C$. The effect of stability improvement by the in situ growth was more pronounced when the grain sizes of the poly-Si substrate were small. The improved thermal stability of the in-situ grown $CoSi_2$ layer could be mainly due to the formation of a uniform $CoSi_2$ layer with the $CoSi_2$ grains, which are in the form of epitaxial-like growth on the each poly-Si grains, causing a reduction of the interfacial energy of the system.

• Transactions of the Korean hydrogen and new energy society
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• v.20 no.3
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• pp.232-237
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• 2009

$Ag/Al_2O_3$ 촉매하에 디젤 엔진에서 배출되는 NOx를 정화하기 위하여, 수소가 풍부한 바이오디젤을 환원제로 사용하였다. Ag 전구체 함침과정에서 촉매기공이 부분적으로 폐쇄되는 것을 BET 실험을 통하여 관찰하였다. 2% $Ag/Al_2O_3$ 촉매의 형상과 조성은 산처리 과정을 거치더라도 변화하지 않는 것을 SEM과 EDXS 분석으로부터 확인하였다. $Ag/Al_2O_3$ 촉매 표면에서 생성되는 -NCO 와 -CN을 in-Situ DRIFT 방법을 사용하여 관찰하여 HC-SCR에서의 NOx 제거 반응구조를 확인하였다.

• Journal of the Korean Chemical Society
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• v.66 no.3
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• pp.202-208
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• 2022

In this study, we tried to obtain the optimal conditions to reduce odors generated from pig wastewater using magnesia (MgO) through in-situ test after producing a reactor for removing odors. For this purpose, the filling amount of magnesia, the injection amount of pig wastewater, the aeration method, the aeration amount and the aeration time were considered. The field experiment was conducted at Cheongwoon Livestock Farm, which has a pig wastewater reservoir. As the amount of magnesia added to the weight of wastewater (500 kg) increases, the amount of ammonia (NH₃) and hydrogen sulfide (H₂S) generated tended to gradually decrease. As a result of the test, ammonia and hydrogen sulfide in the pig wastewater decreased up to 65% and 77%, respectively, for 2 days aeration after 0.8% of magnesia was added to the reaction tank. The initial pH of the pig wastewater in the reactor was 8.2, and the pH was found to be 9.2 when magnesia was added up to 0.8%. In the light of this trend, it can be known that magnesia gradually increases the pH in the pig wastewater and makes it weakly alkaline. As the pH increases, part of the ammonia gas present in the pig wastewater vaporizes into the air and the remaining part is removed by precipitation after chemical bonding with dissolved magnesium ions and phosphate ions. In order to remove the odor of pig wastewater and turn it into compost, most of the existing livestock farms go through a six-month aeration process using microorganisms. In contrast, the current study proved the effect of removing odors from pig wastewater within 2 days through chemical reactions that do not affect microbial activity.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.212-212
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• 2011

In addition to the catalysts' activity and selectivity, the deactivation of catalysts during use is of practical importance. It is crucial to understand the phenomena of the deactivation to predict the loss of activity during catalyst usage so that the high operational costs associated with catalyst replacement can be reduced. In this study, the activity of Ru catalysts, such as nanoparticles (3~6 nm) and polycrystalline thin film (50 nm), have been investigated under CO oxidation and oxidative/reductive reaction conditions at various temperatures with the ambient pressure X-Ray photoelectron spectroscopy (APXPS). With APXPS, the surface oxides on the catalyst are measured and monitored in-situ. It was found that the Ru film exhibited faster oxidation-and-reduction compared to that of nanoparticles showing mild oxidative-and-reductive characteristics. Additionally, the larger Ru nanoparticles showed a higher degree of oxide formation at all temperatures, suggesting a higher stability of the oxide. These observations are in agreement with the catalytic activity of Ru catalysts. The loss of activity of Ru films is correlated with bulk oxide formation, which is inactive in CO oxidation. The Ru nanoparticle, however, does not exhibit deactivation under similar conditions, suggesting that its surface is covered with a highly active ultrathin surface oxide. Since the active oxide is more stable as nanoparticles than as a film, the nanoparticles showed mild oxidative/reductive behavior, as confirmed by APXPS results. We believe these simultaneous observations of both the surface oxide of Ru catalysts and the reactivity in real time enable us to pinpoint the deactivation phenomena more precisely and help in designing more efficient and stable catalytic systems.