• Journal of the Korean Society of Visualization
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• v.6 no.1
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• pp.27-33
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• 2008

Air flow inside an automotive HVAC module has been investigated using a high-resolution PIV technique with varying the temperature operation mode. The PIV system consists of a 2-head Nd:YAG laser (125 mJ), a high-resolution CCD camera (2K$\times$2K), optics and a synchronizer. A real automotive HVAC module was used directly under real operating condition. Some casing parts of the HVAC module were replaced with transparent windows for capturing clear flow images with laser light sheet beam illumination. Time-averaged velocity fields were obtained for two different temperature control modes. Flow characteristics of the air-conditioned air flow inside the automotive HVAC system for the two temperature baffle conditions were evaluated.

• Current Optics and Photonics
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• v.5 no.5
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• pp.506-513
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• 2021

An arrayed diffractive optical element design for the beam-shaping of a multi-array light source is proposed. This is an essential device for recent optical security and face recognition applications. In practice, we devise a DC noise reduction technique featuring high fabrication error tolerance regarding the multi-array light source diffractive optical elements, as a necessary part of the proposed design method. The spherical diverging illumination leads to DC-conjugate noise spreading. The main idea is tested experimentally, and the multi-array light source diffraction pattern is investigated numerically.

• Journal of the Semiconductor & Display Technology
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• v.21 no.4
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• pp.77-80
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• 2022

Automatic Vision Inspection (AVI) systems automatically detect defect features and measure their sizes via camera vision. It has been populated because of the accuracy and consistency in terms of QC (Quality Control) of inspection processes. Also, it is important to predict the performance of an AVI to meet customer's specification in advance. AVI are usually suffered from false negative and positives. It can be overcome by providing extra information such as 3D depth information. Stereo vision processing has been popular for depth extraction of the 3D images from 2D images. However, stereo vision methods usually take long time to process. In this paper, retro optical system using reflectors is proposed and experimented to overcome the problem. The optical system extracts the depth without special SW processes. The vision sensor and optical components such as illumination and depth detecting module are integrated as a unit. The depth information can be extracted on real-time basis and utilized and can improve the performance of an AVI system.

• Current Optics and Photonics
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• v.7 no.5
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• pp.537-544
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• 2023

Differential phase contrast (DPC) microscopy, a central quantitative phase imaging (QPI) technique in cell biology, facilitates label-free, real-time monitoring of intrinsic optical phase variations in biological samples. The existing DPC imaging theory, while important for QPI, is grounded in paraxial diffraction theory. However, this theory lacks accuracy when applied to high numerical aperture (NA) systems that are vital for high-resolution cellular studies. To tackle this limitation, we have, for the first time, formulated a nonparaxial DPC imaging equation with a transmission cross-coefficient (TCC) for high NA DPC microscopy. Our theoretical framework incorporates the apodization of the high NA objective lens, nonparaxial light propagation, and the angular distribution of source intensity or detector sensitivity. Thus, our TCC model deviates significantly from traditional paraxial TCCs, influenced by both NA and the angular variation of illumination or detection. Our nonparaxial imaging theory could enhance phase retrieval accuracy in QPI based on high NA DPC imaging.

• Korean Journal of Optics and Photonics
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• v.23 no.2
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• pp.55-63
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• 2012

We present results of optical design and fabrication of a light guiding plate (LGP) to be used as an illumination system for photobioreactors. Modeling of a light-emitting diode (LED) light source, a reflection film, and LGP patterns was performed. Especially, the LGP patterns were modeled as Lambertian scatterers. The modeling parameters (reflectance, scatterer width) were determined through matching simulations with the experimentally measured illuminance distribution for a test LGP. An LGP for an LED light source was designed with the extracted model parameters, and fabricated using a computerized numerical control machine. Optical characteristics including average illuminance and uniformity of illuminance distribution were measured for the fabricated LGP.

• Korean Journal of Optics and Photonics
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• v.5 no.1
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• pp.1-8
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• 1994

A five mirror system with a reduction magnification(M=+1/5) is designed for DUV optical lithography. First, for spherical mirror systems, the numerical solutions of all zero 3rd order aberrations are derived and the 3-dimensional shape of the solution-domain is obtained. In these solutions, we select solutions which have as less residual aberrations and smaller central obscurration as possible and the aspherization is carried out to the last two spherical mirrors to obtain a system that has as higher NA as possible. Finally we obtain the system of which NA is 0.45, the central obscuration is about 25% and the resolution is about 650 cycles/mm at the 50% MTF value criterion and the depth of focus of 0.8${\mu}m$ for the nearly incoherent illumination (${\sigma}$=1.0) and the wavelength of 0.193${\mu}m$ (ArF excimer laser line).

• Korean Journal of Optics and Photonics
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• v.17 no.3
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• pp.240-247
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• 2006

This paper discusses the optical system design for projection TV using LCOS type micro display, which provides the high resolution, slim depth, and a large screen of more than 60 inches. We analyzed the relationship between the illumination system, projection lens, color separation & recombination system, and micro display. From this quantitative analysis, the starting data for the optimum light engine was defined, and all optical systems were designed by an optimization process. Three RGB panels were proposed for a high luminence system, and the four prisms symmetrically located make equal optical path lengths for the RGB rays. This color separation & recombination system enables the a compact illumination system. Also, in order to the slim light engine with high resolution, the folded projection lens system was designed by inserting a mirror between projection lenses.

• Korean Journal of Optics and Photonics
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• v.16 no.3
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• pp.201-208
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• 2005

In order to realize a 3-D stereoscopic display module with alternating illumination angles, several conditions required for a lenticular lens sheet were established, and then both the lens specification and the module structure were designed. Also the performance of the stereoscopic module and its tolerance characteristics were evaluated by simulating the intensity distribution on the observation plane with a finite-ray tracing technique. From the evaluation, it was known that an intersection area between two adjacent lenses should not be filled and that the lateral mismatch between a planar liquid crystal shutter and a lens sheet should be minimized.

• Korean Journal of Optics and Photonics
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• v.30 no.4
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• pp.146-153
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• 2019

The exposure system is a device that transfers a circuit pattern to a desired location. To display patterns on a substrate without deforming the optical characteristics, the characteristics of the optical exposure system are very important. Therefore, to form a microcircuit pattern, a small divergence angle should impinge on the irradiation area. Also, since the light from the source must react uniformly with the photosensitizer, it must have high luminance efficiency and uniformity of illumination. In this paper a parabolic reflector and an aspherical lens were designed to solve the problem of narrow-angle implementation, and it was confirmed by simulation analysis after their arrangement that the beam angle, uniformity, and maximum illuminance satisfied the target performance.

• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.15-21
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• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.