• Applied Chemistry for Engineering
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• v.16 no.6
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• pp.853-856
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• 2005

Inductively coupled plasma reactive ion etching of magnetic tunnel junction (MTJ) stack, which is one of the key elements in magnetic random access memory, was studied. The MTJ stacks were patterned in nanometer size by electron(e)-beam lithography, and TiN thin films were employed as a hard mask. The etch process of TiN hard mask was examined using Ar, $Cl_2/Ar$, and $SF_6/Ar$. The TiN hard mask patterned by e-beam lithography was first etched and then the etching of MTJ stack was performed. The MTJ stacks were etched using Ar, $Cl_2/Ar$, and $BCl_3/Ar$ gases by varying gas concentration and pressure.

• The Korean Journal of Food And Nutrition
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• v.7 no.4
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• pp.297-306
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• 1994

This experiment was carried out to investigate the healing loss and the heavy metal residues such as copper, zinc, manganese, cadmium and lead In porcine visceras by inductively coupled argon plasma spectrometer(ICP), and to probe changes when porcine visceras were boiling In water treatment(BWT), heating in autoclave treatment (HAT) and heating In oil treatment (HOT) . The range of heating loss on porcine viscera were BWT(23.11∼34.53%) , HAT(18.48∼28.00%) and HOT(14.20∼25.22%)and the heart tissue were higher and liver were lower than those of the other tissues. The total value of heavy metal residues in large intestine, small intestine, heart, kidney, liver and stomach tissue were 11.298${\pm}$5.302 ppm, 27.825${\pm}$8. 177 ppm, 16.756${\pm}$6.334 ppm 21.107${\pm}$6.057 ppm, 25.369 ${\pm}$ 10.164 ppm and 12.611 ${\pm}$5.513 ppm, respectively. Heavy metal residues in porcine visceras tended to decrease according to heating methods and the variety viscera, and the change of total heavy metal residues on BWT, HAT and HOT were 4.16∼32.57%, 12.01∼28.09% and 9.60∼25.76%, respectively. The decrease of lead element of mean value were 21.76% and copper, zinc, manganese and cadmium element were 18.00∼ 18.16%. The change of heavy metal residues were not significant in the porcine visceras(P>0.05), and the these were significantly correlated among the three heating method(P < 0.05).

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.11
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• pp.4468-4472
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• 2010

SiOC films made by the inductively coupled plasma chemical vapor deposition were researched the relationship between the dielectric constant and the chemical shift. SiOC film obtained by plasma method had the main Si-O-C bond with the molecule vibration mode in the range of $930{\sim}1230\;cm^{-1}$ which consists of C-O and Si-O bonds related to the cross link formation according to the dissociation and recombination. The C-O bond originated from the elongation effect by the neighboring highly electron negative oxygen atoms at terminal C-H bond in Si-$CH_3$ of $1270cm^{-1}$. However, the Si-O bond was formed from the second ionic sites recombined after the dissociation of Si-$CH_3$ of $1270cm^{-1}$. The increase of the Si-O bond induced the redshift as the shift of peak in FTIR spectra because of the increase of right shoulder in main bond. These results mean that SiOC films become more stable and stronger than SiOC film with dominant C-O bond. So it was researched that the roughness was also decreased due to the high degree of amorphous structure at SiOC film with the redshift after annealing.

• Journal of Korean Neurosurgical Society
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• v.30 no.sup1
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• pp.37-43
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• 2001

Object : The rapid and early oxygen delivery to brain tissue was a common therapeutic method in the treatment of severe head injury patients. The purpose of this study was to investigate the effect of increased fraction of inspired oxygen in early stage of severe head injury. Methods : The parameters of research were CSF(cerebral spinal fluid) oxygen pressure($PcsfO_2$), lactate, pH, temperature, and CSF carbon dioxide pressure($PcsfCO_2$). We selected 28 patients with head trauma whose the Glasgow Coma Scale(GCS) score was less than 8 point at admission. All patients were mechanically ventilated and monitored with the commercial ICP monitoring device. Each of parameters was compared as increased fraction of inspired oxygen. In experimental cohort of 14 patients, the mean $PcsfO_2$ level was increased to $314.93{\pm}259.15mmHg$ by raising the $FiO_2$ from 40% to 100% for nine hours(p<0.05). And the mean CSF lactate level was decreased to $2.96{\pm}1.98mmol/L$ on 100% $FiO_2$ as compared with $5.98{\pm}3.25mmol/L$ on 40% $FiO_2$ in control group(p<0.05). The only above two parameters were showed statistically meaningful outcome. Conclusions : Although this study was performed in small cohort and short period, these results supports that increased inspired oxygen therapy in severe head injuried patients was recommended as a modality of treatment in future through the continuous survey.

• Journal of Surface Science and Engineering
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• v.32 no.3
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• pp.416-422
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• 1999

The characteristics of inductively coupled Cl$_2$/BCl$_3$ plasmas during the GaN etching were studied using plasma mass spectrometry by measuring the relative amounts of reactive ions, neutrals, and etch products. GaN etch rates increased with the increase of pressure and showed a maximum near 25mTorr for the pure $Cl_2$ and near 30mTorr for $Cl_2$$BCl_3$. The addition of$ BCl_3$ to $Cl_2$ also was increased GaN etch rates until 50%BCl$_3$ was mixed to $Cl_2$. The GaN etching with pure $Cl Cl_2$ appears to be related to the combination of Cl$_2^{+}$ ion bombardment and the chemical reaction of Cl radicals. In the case of the GaN etching with Cl$_2$/BCl$_3$, in addition to the combined effect of$_2^{ +}$ ions and Cl radicals, $_BCl2^{+ }$ ions appear to be responsible for some of GaN etching even though they do not have significant effect on the GaN etching compared to $Cl_2^{+}$ and Cl. $Ga^{+ }$ , $GaCl^{+}$ , $GaCl_2^{+}$ , and $N_2^{+}$ were observed as the positive ions of etch products, and the intensities of these etch products showed the same trends as those of GaN etch rate. Among the etch products, Ga and $N_2$ appear to be the main etch products.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.05a
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• pp.144-144
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• 2012

스퍼터링 기술은 타겟 사용 효율 및 증착률 향상 개념에서의 소스 특성향상과, 증착 기판으로 이동하는 스퍼터링 입자량 및 이온화율 제어를 통한 코팅 박막의 특성향상 등 크게 두 축을 중심으로 발전되어 왔다. 특히 소스 특성 향상 관점에서 고진공에서의 스퍼터링 기술, 듀얼 마그네크론 스퍼터링 및 무빙 마그네트론 스퍼터링 기술 및 원통형 스퍼터링 기술이 개발되어왔으며, 코팅 박막의 특성 향상과 관련하여서는 스퍼터링 방전 내 플라즈마의 밀도의 증대 및 기판 입사 입자의 에너지 제어를 통한 박막의 치밀도 향상 연구가 많이 이루어져, UBM 또는 ICP 결합 스퍼터링 및 Arc-스퍼터링 혼합공정이 연구되어 왔다. 박막 증착에서 박막의 물성을 조절하는 주요인자는, 기판에 입사하는 입자의 에너지로, 그 조절 범위가 좁고 넓음에 따라 활용 가능한 코팅 공정의 window가 설정된다. 지난 15년간 증착박막의 물성 향상을 위하여 스퍼터링 소스의 제어 관점이 아닌 전원적 관점에서 스퍼터된 입자의 에너지 제어를 MF(kHz), Pulse 전원 사용을 통해 이루어져 왔고, 특히 High Impulse Pulse를 이용한 HiPIMS 기법이 연구개발과 시장의 이해가 잘 어울려져 많은 발전을 이루고 있다. HiPIMS 공정은 박막의 물성을 제어하는 관점을 스퍼터링에 사용되는 보조 가스인 Ar 이온에 의존하지 않고, 직접 스퍼터된 입자의 이온화를 증대시키고, 이 이온화된 입자를 활용하여 증착 박막의 치밀성 및 반응성을 증대시켜, 박막특성을 제어하는 기술이다. HiPIMS의 경우, 초기 개발 당시에는 고에너지, 고이온화의 금속 이온을 대량 생성할 수 있다는 이론적 배경에서 연구되었다. 그러나 연구 개발이 진행되면서, 박막의 물성과 증착률 등 상반된 특성이 나타나면서 이에 대한 전원장치의 개량이나 스퍼터링 소스의 개선 등 다양한 개발 연구들이 요구되고 있다. 재료연구소에서는 스퍼터링 기술에서 가장 문제가 되고 있는 타겟 사용효율화 관점 및 스퍼트된 입자의 이온화률 증대에 대한 두 가지 문제를 동시에 해결할 수 있는 방안으로 고밀도 플라즈마를 이용한 스퍼터링 기술을 개발하고 있다. 본 발표에서는 이러한 HiPIMS의 연구 개발 동향과 고밀도 플라즈마를 이용한 스퍼터링 기술에 대한 연구 동향을 발표하고자 한다.

• Journal of the Korean Institute of Gas
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• v.16 no.4
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• pp.1-7
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• 2012

Systematic safety research by Korea Government has been made to enhance the safety of CNG (compressed natural gas) vehicles since the burst of compressed cylinder of an urban bus in August 9, 2010. This article summarizes some major activities to ensure the safety of CNG vehicles, which covers review of regulation, safety management system including standard of inspection and certification, and training program of inspectors and car mechanics. Specifically, the followings were reviewed; type of CNG cylinder, location of CNG cylinder, material and type of fuel line and vent line, modification of pipeline connection, installation of gas detector, installation of emergency shutdown valve, installation of protecting cover for cylinder, obligations for CNG vehicle filling station. improving periodical inspection, routine test on gas vehicles, training program for engaged in gas vehicles, and designation of safety manager for CNG bus company. This paper suggests how to improve safety of CNG vehicles as a result of review of above mentioned check items.

• Journal of the Korean Society of Food Science and Nutrition
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• v.27 no.5
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• pp.980-986
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• 1998

The effects of mungbean sprout juice on cadmium-induced hepatotoxicity in rats were investigated. Sprague-Dawley rats weighing about 90g were divided into 4 groups and raised for 6 weeks. ; control group(CON), mungbean sprouts juice-administered group(MSJ), cadmium-administered group(CAD) fed water containing 40 ppm cadmium chloride and mung bean sprouts juice and cadmium-administered group(MCD). The diet was supplied every day for the measurement of feed efficiency ratio(FER) and net weight gain was measured every 3 days. The activities of serum glutamic oxaloactic transaminase(GOT) and glutamic pyruvic transaminase(GPT), superoxide dimutase(SOD), catalase and glutathione peroxidase(GSH-Px) in the liver and the hepatic contents of glutathione were examined. The contents of Cd in liver and kidney of the rats were determined by using ICP(Inductively Coupled Plasma Emission Spectrophotometer). Growth rate and FER were decreased in CAD group, compared with CON group but the changes were not significant in MCD group. The activities of serum GOT and GPT, SOD, catalase and GSH-Px in the liver were increased by Cd administration, but the alterations were decreased by supplementation with mungbean sprouts juice. The level of glutathione decreased in CAD group(26.8$\pm$9.0mg/g liver), whereas it increased in MCD group(36.4$\pm$15.8mg gliver). The content of Cd in the liver and kidney in MCD group(9.57 ppm, 4.88 ppm) was decreased, compared with CAD group(12.81 ppm, 5.46 ppm). This result suggested that mungbean sprout juice has a lowering effect on the accumulation of Cd in the liver and kidney and it is believed that the juice has some protective effects to Cd-induced hepatotoxicity in rats, but the mechanism of these effects was obscure.

• Korean Journal of Metals and Materials
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• v.49 no.11
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• pp.845-852
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• 2011

The Spark Plasma Sintering(SPS) method offers a means of fabricating a sintered-body having high density without grain growth through short sintering time and a one-step process. A titanium compact having high density and purity was fabricated by the SPS process. It can be used to fabricate a Ti sputtering target with controlled parameters such as sintering temperature, heating rate, and pressure to establish the optimized processing conditions. The compact/target(?) has a diameter of ${\Phi}150{\times}6.35mm$. The density, purity, phase transformation, and microstructure of the Ti compact were analyzed by Archimedes, ICP, XRD and FE-SEM. A Ti thin-film fabricated on a $Si/SiO_2$ substrate by a sputtering device (SRN-100) was analyzed by XRD, TEM, and SIMS. Density and grain size were up to 99% and below $40{\mu}m$, respectively. The specific resistivity of the optimized Ti target was $8.63{\times}10^{-6}{\Omega}{\cdot}cm$.

• Bulletin of the Korean Chemical Society
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• v.18 no.6
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• pp.618-622
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• 1997

The polysiloxane-bridged dinuclear metallocenes $[(SiMe_2O)_n-SiMe_2(C_5H_4)_2][(C_9H_7)ZrCl_2]_2$ (n=1 (7), 2 (8), 3 (9)) have been generated as a model complex for the immobilized metallocene at silica surface by treating the respective disodium salts of the ligands with 2 equivalents of $(C_9H_7)ZrCl_3$ in THF. All three complexes are characterized by $^1H$ NMR and measurement of metal content through ICP-MS. It turned out that the values of ${\Delta}{\delta}=[{\delta}_d-{\delta}_p]$, the chemical shift difference between the distal $({\delta}_d)$ and proximal $({\delta}_p)$ protons, for the produced dinuclear compounds (0.47 for 7, 0.49 for 8, and 0.5 for 9) were larger than the Δδ value of the known ansa-type complex holding the same ligand as a chelating one, that is just the opposite to the normal trend. In order to compare polymerization behavior of the dinuclear metallocene with the corresponding mononuclear metallocene, (Cp)$(C_9H_7)ZrCl_2$ was separately prepared. To investigate the catalytic properties of the dinuclear complexes and mononuclear metallocenes ethylene polymerization has been conducted in the presence of MMAO. The polymerization results display the typical activity dependence on polymerization temperature for all complexes. The most important feature is that the polymers from the dinuclear metallocenes represent enormously improved molecular weight compared with the polymer from the corresponding mononuclear metallocene. In addition, the influence of the nature of the bridging ligand upon the reactivities of the dinuclear metallocenes has also been observed.