• Proceedings of the Korean Institute of Surface Engineering Conference
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• 한국표면공학회 2007년도 춘계학술발표회 초록집
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• pp.157-158
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• 2007

Tin oxide films were successfully crystallized without additional heating by inductively coupled plasma assisted chemical vapor deposition (ICP-CVD). The degree of crystallization was affected by the ICP power, hydrogen flow and ion bombardment induced by negative substrate bias. The substrate temperature was increased only up to $150^{\sim}180^{\circ}C$ by plasma heating, which suggests that the formation of $SnO_2$ crystalswas caused by enhanced reactivity of precursors in high density plasma. The hardness of deposited tin oxide films ranged from 5.5 to 11GPa at different hydrogen flow rates.

• Bulletin of the Korean Chemical Society
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• 제22권8호
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• pp.827-832
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• 2001

The excitation temperature and electron number density have been measured for end-on-view ICP discharge. In this work, end-on-view ICP-AES equipped with the newly developed “optical plasma interface (OPI)” was used to eliminate or remove the neg ative effects caused by end-on-plasma source. The axial excitation temperature was measured using analyte (Fe I) emission line data obtained with end-on-view ICP-AES. The axial electron number density was calculated by Saha-Eggert ionization equilibrium theory. In the present study, the effects of forward power, nebulizer gas flow rate and the presence of Na on the excitation temperature and electron number density have been investigated. For sample introduction, two kinds of nebulizers (pneumatic and ultrasonic nebulizer) were utilized.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 한국반도체및디스플레이장비학회 2005년도 추계 학술대회
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• pp.197-202
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• 2005

Due to high permeability of the ferrite core, the characteristics of the ICP are expected to be greatly improved. We investigated the effect of the ferrite cores on conventional inductively coupled plasma. It was observed that the current and voltage in ike ICP antenna are slightly decreased and the power transfer efficiency is increased. However, due to eddy current and hysterisis loss, plasma density in the ICP with the ferrite cores is not increased. It seems that the ICP with the ferrite cores at low frequency (${\~}$100kHz) will be greatly improved since the losses at the low frequency can be negligible.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 한국대기환경학회 2008년도 춘계학술대회 논문집
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• pp.389-390
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• 2008

• Proceedings of the Korea Air Pollution Research Association Conference
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• 한국대기환경학회 2004년도 춘계학술대회 논문집
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• pp.139-140
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• 2004

• 대한방사선방어학회:학술대회논문집
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• 대한방사선방어학회 2010년도 춘계 학술발표회 및 심포지엄
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• pp.86-87
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• 2010

• Proceedings of the Materials Research Society of Korea Conference
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• 한국재료학회 2001년도 추계 학술발표강연 및 논문개요집
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• pp.172-172
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• 2001

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 한국표면공학회 2003년도 춘계학술발표회 초록집
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• pp.5-5
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• 2003

• Bulletin of the Korean Chemical Society
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• 제17권8호
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• pp.769-771
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• 1996

• Journal of the Korean Chemical Society
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• 제43권2호
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• pp.182-192
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• 1999

The new GD/ICP-AES quick change over system has been developed and characterized. Within less than 15 minutes, ICP-AES could be switched to GD-AES and vise a versa. As a result, both solid and liquid samples could be analyzed in a very short period of time by the ICP/GD-AES quick change over system developed in our laboratory. The influences of the experimental variables, such as flow rate of coolant gas, flow rate of auxiliary gas, flow rate of sample carrier gas, sampling depth, orifice size of sampling cone, and rf (radio frequency) power on emission intensity have been presented. The detection limits of Cd(I) 228.8 nm, Mn (II) 257.61 nm, and Fe(II) 259.95 nm were found to be 3.86, 1.49, and 5.79 ppb, respectively. And linealities of the calibration curves were measured to be unity.