• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.415-415
• /
• 2012

ICP (RF) 열 플라즈마 분말 합성법은 초고온 열플라즈마(~10,000 K) 속으로 원료물질을 투입한 뒤, 용융, 기화 및 재합성의 과정을 거쳐 초미분(<1 ${\mu}s$)을 합성하는 방법으로 고출력 시스템의 경우 고온/고 엔탈피 열 유동을 통한 고융점 및 저융점 복합물질의 동시 기화에 의한 물질 조성이 제어된 나노 복합체의 대량 합성이 가능할 것으로 기대되고 있다. 본 연구에서는 전북대학교 고온플라즈마 응용연구센터의 60&200 kW의 고출력 ICP (RF) 열 플라즈마 시스템을 이용하여 LTO (Lithium Titanium Oxide)와 IZTO (Indium Zinc Tin Oxide), Barium Borosilicate Glass (K2O-BaO-B2O3-SiO2)의 다성분계 나노 복합체를 합성하였으며, FE-SEM, TEM, XRD, ICP-OES를 이용하여 그 특성을 분석하였다.

• Proceedings of the International Microelectronics And Packaging Society Conference
• /
• 2001.11a
• /
• pp.226-229
• /
• 2001

현재 초소형 정밀기계(MEMS;Microelectromechanical System) 소자의 가장 큰 문제점으로 대두되고 있는 점착현상을 방지하기 위하여 불화유기박막을 증착하였다. Octafluorocyclobutane(C$_4$F$_{8}$)을 소스가스를 PECVD (Plasma Enhanced CVD)와 ICP (Inductively Coupled Plasma)를 이용하여 증착하였다. 여기에 Ar을 첨가하여 플라즈마의 반응성을 높여주었다. 형성된 불화유기박막의 나노트라이볼러지 특성을 살펴보기 위하여 AFM을 통하여 증착시킨 시편의 topography를 살펴보았다. 그리고 박막의 antiadhesion의 정도를 살펴보기 위하여 cantilever와 박막의 표면 사이에 존재하는 interaction force를 측정 하였고 AFM의 force curve mode를 이용하였다 PECVB를 이용하여 증착된 박막은 ICP를 이용한 박막보다 균일하지 못한 박막을 보였으며 attractive force가 강한 것으로 사료된다.

• Journal of Biomedical Engineering Research
• /
• v.16 no.2
• /
• pp.167-174
• /
• 1995

Development of a noninvasive intensive care system calls for the use of evoked potentials (EPs) as a means of diagnosing traumatic head-injured patients. The experiment entails surgically placing two subarachnoid bolts and a subdural balloon through the skull to simulate a subdural hematoma. Using various levels of intracranial pressure (ICP) and/or different sizes of balloons, auditory evoked potentials (AEPs) were recorded from a rabbit. Six positive peak latencies ($P_1 - P_6$) and five negative peak latencies ($N_l- N_5$) were extracted from an averaged AEP waveform. Multiple regression analyses were performed for determining. a relationship between the ICP and AEP peak latencies. The results indicate that a major correlation of ch, mges on AEP peak latencies is due to mechanical forces of a mass (inflated balloon simulating a hematoma) in the distortion of the brain matter rather than increased ICP itself.

• Journal of Sensor Science and Technology
• /
• v.16 no.2
• /
• pp.126-131
• /
• 2007

In this paper, we fabricated piezoresistive pressure sensor with dry etching technology which used ICP-RIE (inductively coupled plasma reactive ion etching) and etching delay technology which used SOI (silicon-on-insulator). Structure of the fabricated pressure sensor shows a square diaphragm connected to a frame which was vertically fabricated by dry etching process and a single-element four-terminal gauge arranged at diaphragm edge. Sensitivity of the fabricated sensor was about 3.5 mV/V kPa at 1 kPa full-scale. Measurable resolution of the sensor was not exceeding 20 Pa. The nonlinearity of the fabricated pressure sensor was less than 0.5 %F.S.O. at 1 kPa full-scale.

• Analytical Science and Technology
• /
• v.11 no.2
• /
• pp.120-124
• /
• 1998

A rapid and accurate determination method of ultra-trace amounts of germanium in spring water by ICP-MS has been developed. Mass number 74 was not only the best mass but also the smallest mass interference. Only 30% of water samples contain germanium more than $0.1{\mu}g/L$, and a few of them has organogermanium species.

• Proceedings of the Korean Society of Agricultural Engineers Conference
• /
• 1998.10a
• /
• pp.513-520
• /
• 1998

The evaluation of uncertainty in environmental elemental analysis can be difficult because of the wide variety of analytical sample and objectives. for the specification of measured, elemetal analysis need certain method and high pretreatment technique. The sample of Pb, Cd in paddy soil and sewage sludge were analyzed by same ICP-AES, but each using four different pretreatment technique ; 0.1N HCl extraction, AB-DTPA extraction and two Mixture Acid Digestion. The four technique gave comparable results for the analysis of lead and cadmium. Concentrations determined by Mixture Acid Digestion were more higher than those by 0.1NHCI extraction and AB-DTPA extraction.

• Proceedings of the KIEE Conference
• /
• 2003.10a
• /
• pp.309-311
• /
• 2003

The effects of etch parameters on dry etching of BLT thin films were investigated with ICP etch system in $Cl_2$/Ar and $BCl_2/Cl_2$/Ar gas. The etch rate and etch selectivity of BLT films were examined as a function of gas concentration, ICP power, bias power, and pressure. The maximum etch rates of 191.1 nm/min was obtained at the mixed etch condition of $BCl_3(20%)/Cl_2$/Ar, 700 W ICP RF power, 12 mTorr pressure and 400 W substrate RF power. As ICP power and rf power increased, the etch rate of BLT increased. As pressure increased, the etch rate of BLT decreased. The changes of radicals in both $Cl_2$/Ar and $BCl_3/Cl_2$/Ar plasma were measured with using optical emission spectroscopy (OES).

• Analytical Science and Technology
• /
• v.11 no.4
• /
• pp.311-315
• /
• 1998

Ultra trace metal impurities of high-purity sulfuric acid for semiconductor process have been determined in the concentration of lower than ppb (ng/g) level using high resolution inductively coupled plasma mass spectrometer (HR-ICP-MS).The acid samples were evaporated and concentrated by the factor of 20. No clement in the acids exceeded 1ppb level and most of the clements were determined below 10ppt (pg/g). Elements without spectral interference in mass spectrum, such as In, V, Mn, etc, were determined in the concentration of below 1 ppt level The recoveries in the range of 72% to 127.2% for 0.5 ppb spiked sample were obtained.

• Ocean and Polar Research
• /
• v.25 no.1
• /
• pp.53-62
• /
• 2003

Inductively coupled plasma mass spectrometry (ICP-MS) is useful instrument for determining abundance of rare earth elements, due to very low detection limits and rapid data acquisition. In this article, two methods are used for decomposition of alkaline rocks; close vessel acid digestion and $Na_2Co_3$ fusion. The two analytical results show good agreements. Considering total dissolved solids and detection limits, the most adequate dilution factor is 5,000 times. Polyatomic ion interferences during analysis can give rise to Inaccuracies. After correction from oxide and hydroxide interference, the analytical result show 20-30% decrease for Gd and Tm, 10-20% decrease for Tb and Er. In comparing the analytical results from KORDI with other institutes, most rare earth elements abundance show good agreements except Lu.

• 제어로봇시스템학회:학술대회논문집
• /
• 2005.06a
• /
• pp.2301-2306
• /
• 2005

Even if there are lots of researches on localization using 2D range finder in static environment, very few researches have been reported for robust real-time localization of mobile robot in uncertain and dynamic environment. In this paper, we present a new localization method based on ICP(Iterative Closest Point) algorithm for navigation of mobile robot under dynamic or uncertain environment. The ICP method is widely used for geometric alignment of three-dimensional models when an initial estimate of the relative pose is known. We use the method to align global map with 2D scanned data from range finder. The proposed algorithm accelerates the processing time by uniformly sampling the line fitted data from world map of mobile robot. A data filtering method is also used for threshold of occluded data from the range finder sensor. The effectiveness of the proposed method has been demonstrated through computer simulation and experiment in an office environment.