• Title/Summary/Keyword: ITO박막

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Effect of Hydrogen on Mechanical S tability of Amorphous In-Sn-O thin films for flexible electronics (수소 첨가에 의한 비정질 ITO 박막의 기계적 특성 연구)

  • Kim, Seo-Han;Song, Pung-Geun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.56-56
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    • 2018
  • Transparent conductive oxides (TCOs) have attracted attention due to their high electrical conductivity and optical transparency in the visible region. Consequently, TCOs have been widely used as electrode materials in various electronic devices such as flat panel displays and solar cells. Previous studies on TCOs focused on their electrical and optical performances; there have been numerous attempts to improve these properties, such as chemical doping and crystallinity enhancement. Recently, due to rapidly increasing demand for flexible electronics, the academic interest in the mechanical stability of materials has come to the fore as a major issue. In particular, long-term stability under bending is a crucial requirement for flexible electrodes; however, research on this feature is still in the nascent stage. Hydrogen-incorporated amorphous In-Sn-O (a-ITO) thin films were fabricated by introducing hydrogen gas during deposition. The hydrogen concentration in the film was determined by secondary ion mass spectrometry and was found to vary from $4.7{\times}10^{20}$ to $8.1{\times}10^{20}cm^{-3}$ with increasing $H_2$ flow rate. The mechanical stability of the a-ITO thin films dramatically improved because of hydrogen incorporation, without any observable degradation in their electrical or optical properties. With increasing hydrogen concentration, the compressive residual stress gradually decreased and the subgap absorption at around 3.1 eV was suppressed. Considering that the residual stress and subgap absorption mainly originated from defects, hydrogen may be a promising candidate for defect passivation in flexible electronics.

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Performance Improvement of Amorphous In-Ga-Zn-O Thin-film Transistors Using Different Source/drain Electrode Materials (서로 다른 소스/드레인 전극물질을 이용한 비정질 In-Ga-Zn-O 박막트랜지스터 성능향상)

  • Kim, Seung-Tae;Cho, Won-Ju
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.2
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    • pp.69-74
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    • 2016
  • In this study, we proposed an a-IGZO (amorphous In-Ga-Zn-O) TFT (thin-film transistor) with off-planed source/drain structure. Furthermore, two different electrode materials (ITO and Ti) were applied to the source and drain contacts for performance improvement of a-IGZO TFTs. When the ITO with a large work-function and the Ti with a small work-function are applied to drain electrode and source contact, respectively, the electrical performances of a-IGZO TFTs were improved; an increased driving current, a decreased leakage current, a high on-off current ratio, and a reduced subthreshold swing. As a result of gate bias stress test at various temperatures, the off-planed S/D a-IGZO TFTs showed a degradation mechanism due to electron trapping and both devices with ITO-drain or Ti-drain electrode revealed an equivalent instability.

Studies on The Optical and Electrical Properties if Europium Complexes with Monolayer and Multilayer (Europium complexes 단층과 다층 구조 박막의 전기적ㆍ광학적 특성에 관한 연구)

  • 이명호;표상우;이한성;김영관;김정수
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.10
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    • pp.871-877
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    • 1998
  • Electroluminescent(EL) devices based on organic materials have been of great interest due to their possible applications for large-area flat-panel displays, where they are attractive because of their capability of multicolor emission, and low operation voltage. In this study, glass substrate/ITO/Eu(TTA)$_3$(phen)/Al, glass substrate/ITO/Eu(TTA)$_3$(phen)/Al and glass substrate/ITO/Eu(TTA)$_3$(phen)/AlQ$_3$/Al structures were fabricated by vacuum evaporation method, where aromatic diamine(TPD) was used as a hole transporting material, Eu(TTA)$_3$(phen) as an emitting material, and Tris(8-hydroxyquinoline) aluminu-m(AlQ$_3$) as an electron transporting layer. Electrolumescent(EL) and I-V characteristics of Eu(TTA)$_3$-(-phen) were investigated. These structures show the red EL spectra, which are almost the same at the PL spectrum of Eu(TTA)$_3$(phen). I-V characteristics of this structure show that turn-on voltage was 9V and current density was 0.01A/㎤ at a operation voltage of 9V. Electrical transporting phenomena of these structures were explained using the trapped-charge-limited current model with I-V characteristics.

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Studies on The Optical and Electrical Properties of Europium Complex (Europium compound박막의 전기적 광학적 특성에 관한 연구)

  • 이명호;표상우;김영관;김정수;이한성
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.06a
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    • pp.317-320
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    • 1998
  • Electroluminescent(EL) devices based on organic materials have been of great interest due to their possible applications for large-area flat-panel displays, where they are attractive because of their capability of multicolor emission, and low operation voltage. In this study, glass substrate/ITO/Eu(TTA)$_3$(Phen)/Al(A), glass substrate/ITO/TPD/Eu(TTA)$_3$(phen)/Al(B) aNd glass substrate/ITO/TPD/Eu(TTA)$_3$(Phen)/A1Q$_3$/Al (C) structures were fabricated by vacuum evaporation method, where aromatic diamine(TPD) was used as a hole transporting material, Eu(TTA)$_3$(phen) as an emitting material, and tris(8-hydroxyquinoline) Aluminum (AlQ$_3$) as an electron transporting layer. Etectroluminescent(EL) and I-V characteristics of Eu(TTA)$_3$(phen) with a various thickness were investigated. This structure shows the red EL spectrum, which is almost the same as the PL spectrum of Eu(TTA)$_3$(phen). I-V characteristics of this structure show that turn-on voltage was 9V and current density was 0.01A/㎤ at a dc operation voltage of 9V. Electrical transporting phenomena of these structures was explained using the trapped-charge-limited current model with I-V characteristics.

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A Study on the Fabrication and Characteristics of ITO thin Film Deposited by the Ionized Cluster Beam Deposition (Ionized Cluster Beam 증착방법을 이용한 Indium-Tin-Oxide(ITO) 박막의 제작과 그 특성에 관한 연구)

  • 최성창;황보상우;조만호;김남영;홍창의;이덕형;심태언;황정남
    • Journal of the Korean Vacuum Society
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    • v.5 no.1
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    • pp.54-61
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    • 1996
  • Indium-tin oxide (ITO) films were deposited on the glass substrate by the reactive -ionized cluster beam deposition(ICBD) method. In the oxygen atmosphere, indium cluster formed through the nozzle is ionized by the electron bombardment and is accelerated to be deposited on the substrate. And tin is simultaneoulsy evaporated from the boron-nitride crucible. The chracteristics of films were examined by the X-ray photoelectron spectroscopy(XPS), glancing angle X-ray diffractrion(GXRD) and the electrical properties. were measured by 4-point-probe and Hall effect measurement system . From the XPS spectrum , it was found that indium and tin atoms combined with the oxygen to form oxide$(In_2O_3, SnO_2)$. In the case of films with high tin-concentration, the GXRD spectra show that the main $In_2O_3$ peak of (222) plane, but also sub peaks((440) peak etc.) and $SnO_2$ peaks were detected. From that results, itis concluded that the heavily dopped tin component (more than 14 at. %) disturbs to form $In_2O_3$(222) phase. Four-point-probe and Hall effect measurement show that, in the most desirable case, the transmittance of the films is more then 90% in visible range and its resistivity is $$\rho$=3.55 \times10^{-4}\Omega$cm and its mobility is $\mu$=42.8 $\textrm{cm}^2$/Vsec.

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Electrochromism of Reactive Magnetron Sputtered Tungsten Oxide Thin Films (반응성 마그네트론 스퍼터링법에 의해 증착된 $WO_3$ 박막의 일렉트로크로믹 특성)

  • Lee, Kee-Oh;Choi, Young-Kyu;Chung, Gwiy-Sang
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1346-1348
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    • 1998
  • Tungsten oxide($WO_3$) thin films were prepared by reactive magnetron sputtering in an $Ar/O_2$ atmosphere from a compressed powder $WO_3$ target and their electrochromic(EC) phenomena were investigated. PEO-$LiClO_4$-PC polymer electrolyte can easely be formed into thin films and showed high transmittance. Such electrolyte have electrochromic properties suitable for large-scale electrochromic devices. For the devices using $WO_3$ thin films of 1500, 2500, $4000{\AA}$ thickness with glass/ITO/$WO_3$/PEO-$LiClO_4$-PC/ITO/glass structure, an optical modulation of $50{\sim}60%$ were obtained at a potential range of $1{\sim}2V$. It has shown that transmittance and reflectance of light could be electrically controlled by low applied voltage.

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The Preparation of $Bebq_2$ Thin Films and Their Electroluminescent Characteristics (($Bebq_2$박막의 제작 및 전기발광 특성)

  • Kwon, Oh-Kwan;Kim, Young-Kwan;Ha, Yun-Kyoung;Sohn, Byoung-Chung
    • Journal of the Korean Applied Science and Technology
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    • v.16 no.1
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    • pp.41-44
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    • 1999
  • Recently, high luminance and efficiency were realize in organic thin film electroluminescence (EL) cells with multilayer structures including an emitting layer (EML), hole transporting layer (HTL), and an electron transporting layer (ETL). In this study, Bis(10-hydroxybenzo[h]quinolinato)beryllium (Bebq2) was synthesized. PL and EL characteristics of their thin film were investigated by fabricating the devices having a structure of ITO/PVK/Bebq2/Al, ITO/PVK dispersed with TPD/Bebq2/Al. The EL color of these device was greenish and the wavelength of their EL peaks was located, respectly, at 495nm, and 492.5nm.

Effect of Urea on the Rose Bengal Sensitized Photocurrent (Rose Bengal 감응 광전류에 미치는 Urea의 영향)

  • Yun, Gil Jung;Gang, Seong Cheol;Kim, Gang Jin
    • Journal of the Korean Chemical Society
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    • v.34 no.6
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    • pp.600-605
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    • 1990
  • Electron injection from excited rose bengal into the conduction band of a thin film of SnO$2$, semiconductor was investigated in an electrochemical cell, ITO/SnO$2$/rose bengal, NaClO$4$/Pt. It was observed that urea enhanced the supersensitized photocurrent, followed by the reduction in the photocurrent after a shallow maximum. Spectroscopic analyses of the dye solution containing urea revealed that dye aggregation appeared to be involved in the increased photocurrent, although the concentration of the dye was continuously decreased dye to photochemical reactions.

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Doping and Annealing Effect on Luminescent Characteristics of $_2$ Phosphor Thin Films (ZnGa$_2$O$_4$형광박막의 발광특성에 미치는 도핑 및 어닐리의 효과)

  • 정영호;정승묵;김석범;김영진
    • Journal of the Korean Ceramic Society
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    • v.35 no.6
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    • pp.619-625
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    • 1998
  • Mn doped {{{{ {Zn {Ga }_{2 }O }_{4 } }} thin film phosphors were prepared on Si(100) wafers and ITO coated glass substrates by rf magnetron sputtering technique and the effects of the substrates dopant and the sputtering paramet-ers were analyzed, Changes of the oreintation were observed after annealine tratment. The grain size of {{{{ {Zn {Ga }_{2 }O }_{4 } }} : Mn thin film deposited on Si wafer was smaller than that on ITO/glass substrate which resulted in higher PL intensity. The PL spectra of Mn doped {{{{ {Zn {Ga }_{2 }O }_{4 } }} thin films showed sharp green luminescence spec-trum. According to CL spectrum it could be concluded that Mn ions acted as an actuator for green emission by substituting Zn atom sites.

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Development of an electrochemical detector using Prussian blue modified indium tin oxide electrode (Prussian blue가 전착된 indium tin oxide전극을 이용한 전기화학적 검출기의 개발)

  • Yi, In-Je;Kim, Ju-Ho;Kang, C.J.;Kim, Yong-Sang
    • Proceedings of the KIEE Conference
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    • 2005.07c
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    • pp.2404-2406
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    • 2005
  • 본 연구에서는 전기촉매제를 사용하여 증가된 감도를 가지는 검출 시스템을 제작하였다. 전극과 검출물질 사이의 산화환원반응을 촉진시키기 위한 물질로 Prussian blue (PB)를 indium tin oxide (ITO) 전극에 전착하였다. 본 실험에서는 분석물질의 이동 및 분리를 위하여 모세관 전기영동방법을 사용하였으며 측정방법은 전류량법을 사용하였다. 전착된 PB 박막의 특성은 원자 현미경으로 분석하여 0.1V, 3min의 전착조건으로 최적화하였다. 전기 촉매제로써의 PB의 특성을 확인하기 위하여 ITO 전극만을 사용한 전기화학적 검출기와 비교하였으며 본 연구에서 제안된 검출기의 감도가 20배정도 더 좋다는 것을 확인하였다.

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