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GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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Comparison of Life Table and Feeding Behavior of Resistance and Susceptible Population of the Green Peach Aphid, Myzus persicae (Hemiptera: Aphididae) against Etofenprox (Etofenprox에 대한 복숭아혹진딧물(Myzus persicae)의 저항성과 감수성 개체군의 생명표와 섭식행동 비교)

  • Jo, Chang-Wook;Park, Cho-Rong;Yoon, Kyu-Sik;Kang, Min-A;Kwon, Hae-Ri;Kang, Eun-Jin;Seo, Mi-Ja;Yu, Yong-Man;Youn, Young-Nam
    • Korean journal of applied entomology
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    • v.48 no.3
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    • pp.301-310
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    • 2009
  • For the comparing of mortality of the resistance and susceptible population of Myzus persicae, etofenprox was treated in the recommended concentration of 200ppm. Mortalities of resistance population were 16.7 and 36.7%, and susceptible population were 86.7 and 86.7% after 24 and 48 hours treatment, respectively. For the detect of cross resistance to other pyrethroids, 6 pyrethroids were examined. Mortalities of susceptible and resistance populations were 90 and 31% to deltamethrin, 92 and 23% to lambda cyhalothrin, 81 and 14% to cypermethrin, 70 and 20% to $\alpha$-cypermethrin, 29 and 28% to fenpropathrin, 84 and 29% to fenvalerate, respectively. It was showed that resistance populations were generally resistive to other pyrethroids. On the other hands, for recognized ecological characteristic of M. persicae susceptible and resistance populations life table was tested on the pepper leaves in the petri dish and on the plant in the pot. This results were showed that intrinsic rate of increase ($r_m$), net reproduction number ($R_0$) and generation time in day ($T_c$) were significantly different between two population in both tested. However, life span and reproduction period were slightly different between them. Otherwise, feeding behaviors were tested using EPG technique with non- and treated etofenprox. First potential drop time of susceptible and resistance population was 73.5 and 257.9 sec with non-treated and 93.3 and 1076.2 sec after treated, respectively. Electrical probing signals were 8.2 and 48.8 times with susceptible and resistance individuals after treated etofenprox, respectively. It was supposed that the resistance is more probings than susceptible population. After treated, total feeding time have more 6,728.9 sec on resistance than 965.5 sec on susceptible population. So, total non penetration time of susceptible population was 3,000 sec longer than resistance population.

A Study on the Design & Construction Method of Traditional Landscape Space through the 『Imwongyeongjeji』 「Seomyongji」 and the 'Standard Specification for Repairing Cultural Heritages' (『임원경제지』 「섬용지」와 문화재수리 표준시방서를 통해 본 전통조경공간 설계 시공방법)

  • Lee, Jung-Han
    • Journal of the Korean Institute of Traditional Landscape Architecture
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    • v.37 no.4
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    • pp.1-10
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    • 2019
  • The purpose of this study is to examine the design & construction methods of the traditional landscape space of the past and the repair and maintenance of cultural heritages to maintain it today. To this end, the method of narrative description, process extraction and construction related to traditional landscaping were compared to each other based on the 『Imwongyeongjeji』 「Seomyongji」 and 'Standard Specification for Repairing Cultural Heritages'. The results are as follows; First, to analyze at the description methods of the 『Imwongyeongjeji』 「Seomyongji」 and 'Standard Specification for Repairing Cultural Heritages' and related processes in the field of traditional landscaping. 『Imwongyeongjeji』 「Seomyongji」 was an encyclopedia of the overall construction method of the living space, describing the location, effect, and advantages and disadvantages of each component and presenting quantitative figures to institutionalize the construction of traditional landscaping spaces. 'Standard Specification for Repairing Cultural Heritages' presented the entire process of repairing cultural heritages, and it is becoming a kind of guide for reference at the site. Among them, foundation construction, roof construction, landscape construction, and fence construction were drawn as items that could be applied to traditional landscaping areas. Second, the traditional landscape space construction method was divided into the processes of foundation construction, roof construction, landscaping construction, and fence construction. Foundation construction is a way of repeating the process of land-tramping. During the construction of the roof, the tile-roofed building was built on top of the rafters and roofed with tiles. And thatched roof was made to a number of rice straws bundles to cover the roof one after the other. Instead of tiles, the stone roof was made of thin and wide stones, and the wooden boards were used for the single roof and the bark roof were constructed with many layers of dried corrugations. Landscape construction mainly consists of the Paving technique through tramping rubble and the construction of terraced flower by planting stone, plants, and shrubs on the top. According to the building materials, the wall construction was derived from the earth-stacked earthen wall, stone walls using stone and clay, marble walls made of tile patterns, and the construction of a board wall using a wood board as a wall. Third, comparing the construction methods of the 『Imwongyeongjeji』 「Seomyongji」 and 'Standard Specification for Repairing Cultural Heritages', 『Imwongyeongjeji』 「Seomyongji」 focuses on standardizing the construction methods to create a new traditional space. There is a difference in the setting of the scope of the 『Imwongyeongjeji』 「Seomyongji」 and the construction because 'Standard Specification for Repairing Cultural Heritages' provides the overall construction procedure considering the diversity of the cultural heritages. In addition, the traditional landscape space used to be a residential space in the past, but today, the maintenance process of the already established facilities as designated cultural heritages has been carried out, and construction methods have been added to create viewing conditions. In terms of the succession of traditional knowledge, some similar methods were found in the repair of cultural assets today, and some cases were also confirmed in the reconstruction of traditional technologies such as application of some materials or mix, separation of added facilities and introduction of efficient construction methods.

Natural Language Processing Model for Data Visualization Interaction in Chatbot Environment (챗봇 환경에서 데이터 시각화 인터랙션을 위한 자연어처리 모델)

  • Oh, Sang Heon;Hur, Su Jin;Kim, Sung-Hee
    • KIPS Transactions on Computer and Communication Systems
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    • v.9 no.11
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    • pp.281-290
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    • 2020
  • With the spread of smartphones, services that want to use personalized data are increasing. In particular, healthcare-related services deal with a variety of data, and data visualization techniques are used to effectively show this. As data visualization techniques are used, interactions in visualization are also naturally emphasized. In the PC environment, since the interaction for data visualization is performed with a mouse, various filtering for data is provided. On the other hand, in the case of interaction in a mobile environment, the screen size is small and it is difficult to recognize whether or not the interaction is possible, so that only limited visualization provided by the app can be provided through a button touch method. In order to overcome the limitation of interaction in such a mobile environment, we intend to enable data visualization interactions through conversations with chatbots so that users can check individual data through various visualizations. To do this, it is necessary to convert the user's query into a query and retrieve the result data through the converted query in the database that is storing data periodically. There are many studies currently being done to convert natural language into queries, but research on converting user queries into queries based on visualization has not been done yet. Therefore, in this paper, we will focus on query generation in a situation where a data visualization technique has been determined in advance. Supported interactions are filtering on task x-axis values and comparison between two groups. The test scenario utilized data on the number of steps, and filtering for the x-axis period was shown as a bar graph, and a comparison between the two groups was shown as a line graph. In order to develop a natural language processing model that can receive requested information through visualization, about 15,800 training data were collected through a survey of 1,000 people. As a result of algorithm development and performance evaluation, about 89% accuracy in classification model and 99% accuracy in query generation model was obtained.

GENE EXPRESSION PATTERNS INDUCED BY $TAXOL^{(R)}$ AND CYCLOSPORIN A IN ORAL SQUAMOUS CELL CARCINOMA CELL LINE USING CDNA MICROARRAY (cDNA Microarray를 이용한 구강편평세포암종 세포주에서 $Taxol^{(R)}$과 Cyclosporin A로 유도된 유전자 발현양상)

  • Kim, Yong-Kwan;Lee, Jae-Hoon;Kim, Chul-Hwan
    • Maxillofacial Plastic and Reconstructive Surgery
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    • v.28 no.3
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    • pp.202-212
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    • 2006
  • It is well-known that paclitaxel($Taxol^{(R)}$), which is extracted from the pacific and English yew, has been used as a chemotherapeutic agent for ovarian carcinoma and advanced breast carcinoma and Cyclosporin A, which is highly lipophilic cyclic peptide and isolated from a fungus, has been also used as an useful immunosuppressive drug after transplantation and is associated with cellular apoptosis. Since 1953, in which James Watson, Rosalind Franklin and Francis Crick discovered the double helical structure of DNA, a few kinds of techniques for identifying gene expression have been developed. In postgenomic period, many of researchers have used the DNA microarray which is high throughput screening technique to screen large numbers of gene expression simultaneously. In this study, we searched and screened the gene expression in the oral squamous cell carcinoma cell lines treated with $Taxol^{(R)}$, cyclosporin or cyclosporin combined with $Taxol^{(R)}$ using cDNA microarray. The results were as following; 1. It was useful that the appropriate concentration of Cyclosporin A and $Taxol^{(R)}$ used in oral squamous cell carcinoma cell line was under 1${\mu}g/ml$ and 3${\mu}g/ml$. 2. In the experimental group in which $Taxol^{(R)}$ and $Taxol^{(R)}$ + Cyclosporin A were used, the cell growth was extremely decreased. 3. In the group in which Cyclosporin A was used, the MTT assay was rarely decreased which means the activity of succinyl dehydrogenase is remained in mitochondria but in the group in which the mixture of Cyclosporin A and $Taxol^{(R)}$ were used, the MTT assay was extremely decreased. 4. In the each group in which Cyclosporin A(3 ${\mu}g/ml$) and $Taxol^{(R)}$(1 ${\mu}g/ml$) were used, the cell arrest was appeared in $G_2/M$ phase and in the group in which $Taxol^{(R)}$(3 ${\mu}g/ml$) was used, the cell arrest was appeared in both S phase and $G_2/M$ phase. 5. In the oral squamous cell carcinoma cell line treated with $Taxol^{(R)}$, several genes including ANGPTL4, RALBP1 and TXNRD1, associated with apoptosis, SUI1, MAC30, RRAGA and CTGF, related with cell growth, HUS1 and DUSP5, related with cell cycle and proliferation, ATF4 and CEBPG, associated with transcription factor, BTG1 and VEGF, associated with angiogenesis, FDPS, FCER1G, GPA33 and EPHA4 associated with signal transduction and receptor activity and AKR1C2 and UGTA10 related with carcinogenesis were detected in increased levels. The genes that showed increaced expression in the oral squamous cell carcinoma cell line treated with Cyclosporin A were CYR61, SERPINB2, SSR3 and UPA3A which are known as genes associated with cell growth, carcinogenesis, receptor activity and transcription factor. The genes expressed in the HN22 cell line treated with cyclosporin combined with $taxol^{(R)}$ were ALCAM and GTSE1 associated with cancer invasiveness and cell cycle regulation.

A Study on the Individual Issue and Organizational Issue of Organizational Innovation (개인혁신과 조직혁신의 이슈에 관한 연구)

  • Song Kyung-Soo;Kim Hye-Jung
    • Management & Information Systems Review
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    • v.16
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    • pp.59-76
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    • 2005
  • The inner and outer environment surrounding companies becomes more insecure and unpredictable due to sudden changes. Because the change of environment surrounding companies can deeply affect the existence of companies, continuous innovation of organization is required to develope management ability. Also, to conquer insecure present and future of companies effectively, organizations of companies have voluntarily coped with insecurities and intense competitions through endless organization innovation. Externally, globalization, openness, and relaxed regulation intensify competitions; consumers' requests get varied; consciousness of members of organizations have changed. Due to those factors, companies are placed in a situation that they should practice endless inner innovation. Internally, competitive power has weakened due to decline in productivity and inefficiency of indirect parts of company has increased. From those factors, managers increasingly request inner innovation and pursue organization innovation for the purpose of effective usage of extra resources and being prepared for the future. The managers who operate organization innovation think that systematized approach to organization innovation is the most practical, and actually operate the thought. However, the negative side of the thought is not neglectable. To minimize inner and outer resistance and to operate organization innovation successfully, some innovation strategies that properly reflect several issues related to organization innovation should be prepared. Another words, organization innovation should be operated differently by cases that if it focuses on personal perspective or on organization's. For many cases of our country, several techniques of organization innovation have been adopted in a short time and operated without making its original use. Therefore, this study looks into major Issues that should be considered for more successful operation of organization innovation, from both personal aspect and organizational aspect. When considering such aspects and operate organization innovation, there is more possibility to succeed on organization innovation. Now, Korean companies have overcame trial period and reborn as global companies. Take warnings by the ordeal under IMF administration, this is time to secure international competitive power by using developed innovation techniques and transform to superior company. Managers need to recognize that to try successful organization innovation is the shortcut to reborn as competitive company, and should take a continuous and profound search for decisive factors to succeed on organization innovation. To operate successful organization innovation, first, at the step of planning organization. innovation, the company should understand the company's capability, position in market and relationship with competitors. Then, the company should establish a distinguished innovation strategy which is of the whole company's aspect, so that the company can freely choose various technique of organization innovation that suits for the company's capability and needs, and unfold the organization innovation movement. Establishing strategy in the aspect of the total company is very important because it offers clear focus of the purpose of adopt, priority and distribution of resources. Second, at the step of operating organization innovation, the company should define concrete purpose and method to evaluate the results that are expected to obtain by adopting organization innovation in advance. While pushing forward, the company should set proper time of examination(milestone) and inspect if expected results are shown. Third, at the step of afterward management of operating organization innovation, the company requires a thorough afterwards verification if targeted results are obtained and of confirmation of successful or failure factors. Also, the company should cultivate specialists in the company who can accumulate and continuously spread the know-how learned during organization innovation promotion, so the know-how don't remain only in certain departments or to a few people in charge. The company should also give effort to maintain the accumulated innovation techniques to be continued.

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ELECTRON MICROSCOPIC STUDY OF SLOWLY ADAPTING PERIODONTAL MECHANORECEPTIVE PRIMARY AFFERENT FIBERS WITHIN THE SUBNUCLEUS ORALIS OF THE CAT (서순응형 치근막 일차구심성 신경섬유 종말부의 Subnucleus oralis에서의 시냅스 양상에 관한 전자현미경적 연구)

  • Kim, Moo-Jung;Bae, Yong-Chul;Kim, Chin-Soo
    • Maxillofacial Plastic and Reconstructive Surgery
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    • v.15 no.4
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    • pp.281-301
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    • 1993
  • It was revealed that the morphology and projection pattern of terminal arbors from single primary afferent are different among distinct fiber types, functional types and the different subdivision of trigeminal sensory nucleus complex(TSNC). But it was not identified the ultrastructural morphology and synaptic connections of terminal arbors from each primary afferent within TSNC. So we employed the intra-axonal horseradish peroxidase(HRP) injection technique to define the terminal arbors of primary afferent fiber from slowly adapting mechanoreceptors in the periodontal ligament of the cat, and examined 66 labeled terminal arbors within the rostrodorsomedial part(Vo.r) of the trigeminal nucleus oralis, electromicroscopically with 90nm serial sections. All the boutons labelled with HRP contained clear, spherical and uniform sized synaptic vesicles(diameter : $47.66{\pm}3.58nm$ ). Most of the labelled boutons were boutons en passant type and they were connected by unmyelinated axonal strand. In which neurofilament and microtubule was not developed but occasionally contained synaptic vesicle in contrast to the myelinated axon. The size of the labelled bouton was relatively small(long diameter : $1.46{\pm}0.24{\mu}m$, short diameter $0.85{\pm}0.26{\mu}m$, average diameter $1.15{\pm}0.24{\mu}m$) and the shape of which varied from dome to elongated shape, but scalloped glomerulus shape was not developed. Each primary ending in Vo.r made synapse with one or two neuronal propiles(average : $1.11{\pm}0.31$), of which, 89.4% of labelled boutons made synapse with only one neuronal pro pile, the remainder, 10.6% of labelled boutons, made synapse with two neuronal propile. So characteristically they made very simple synapse. Most of labelled boutons(80.03%) made asymmetrical synapse only with dendritic shaft or spine, and 6.1% of labelled boutons received symmetrical synapse from pleomorphic vesicle containing axonal ending(p-ending). So presynaptic inhibiton was relatively scarce. Synaptic triad, in which a p-ending is presynaptic both pre-and post-synaptic element of the axo-dendritic contact from the labelled primary ending was not observed.

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Surface Analysis Study on ZIRLO Cladding Hulls Oxidized at Low Temperatures (저온 산화된 ZIRLO 피복관의 표면분석 연구)

  • Jeon, Min Ku;Choi, Yong Taek;Lee, Chang Hwa;Kang, Kweon Ho;Park, Geun Il
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.12 no.3
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    • pp.235-243
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    • 2014
  • Surface oxidation behavior of ZIRLO (ZIRconium Low Oxidation) hulls was investigated using an X-ray photoelectron spectroscopy (XPS) technique. The effects of oxidation time (10-336 h at $500^{\circ}C$) and temperature ($400-700^{\circ}C$ for 10 h) were studied. Deconvolution results of the hulls oxidized at $500^{\circ}C$ revealed that a $ZrO_2$ phase appeared after 24 h (11.86%), and an increase in the $ZrO_2$ ratio was observed when the hulls were oxidized for 336 h (17.93%). On the other hand, the ZrO phase which employed 5.68% in the 10 h oxidized sample disappeared when the oxidation time increased to 24 h. The XPS results also showed that an increase in the oxidation temperature resulted in an increase in the ratio of ZrO, which increased from 0 to 5.68, 8.31, and 9.16% when the oxidation temperature increased from 400 to 500, 600, and $700^{\circ}C$, respectively. $ZrO_2$ phase was observed only in the sample that was oxidized at $700^{\circ}C$. The mechanism of ZrO formation was not conclusive, but it was suggested that a formation of hydroxide might have been accelerated at elevated temperatures leading to a formation of a $Zr(OH)_4$ phase. The relationship between the surface oxidation status of the hulls oxidized at $500^{\circ}C$ and their chlorination reaction feasibility was discussed, and it was suggested that the thickness of the oxide layer is an important parameter that determines the chlorination reaction feasibility.

Speed-up Techniques for High-Resolution Grid Data Processing in the Early Warning System for Agrometeorological Disaster (농업기상재해 조기경보시스템에서의 고해상도 격자형 자료의 처리 속도 향상 기법)

  • Park, J.H.;Shin, Y.S.;Kim, S.K.;Kang, W.S.;Han, Y.K.;Kim, J.H.;Kim, D.J.;Kim, S.O.;Shim, K.M.;Park, E.W.
    • Korean Journal of Agricultural and Forest Meteorology
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    • v.19 no.3
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    • pp.153-163
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    • 2017
  • The objective of this study is to enhance the model's speed of estimating weather variables (e.g., minimum/maximum temperature, sunshine hour, PRISM (Parameter-elevation Regression on Independent Slopes Model) based precipitation), which are applied to the Agrometeorological Early Warning System (http://www.agmet.kr). The current process of weather estimation is operated on high-performance multi-core CPUs that have 8 physical cores and 16 logical threads. Nonetheless, the server is not even dedicated to the handling of a single county, indicating that very high overhead is involved in calculating the 10 counties of the Seomjin River Basin. In order to reduce such overhead, several cache and parallelization techniques were used to measure the performance and to check the applicability. Results are as follows: (1) for simple calculations such as Growing Degree Days accumulation, the time required for Input and Output (I/O) is significantly greater than that for calculation, suggesting the need of a technique which reduces disk I/O bottlenecks; (2) when there are many I/O, it is advantageous to distribute them on several servers. However, each server must have a cache for input data so that it does not compete for the same resource; and (3) GPU-based parallel processing method is most suitable for models such as PRISM with large computation loads.

Developing English Proficiency by Using English Animation (영어애니메이션을 활용한 영어 의사소통 능력 향상에 관한 연구)

  • Jung, Jae-Hee
    • Cartoon and Animation Studies
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    • s.37
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    • pp.107-142
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    • 2014
  • The purpose of this study is to examine the effects of the teaching English factors on student's communicative competence and motivation by using animation at the College. To achieve this purpose, this study presented an effective integrative teaching model to develop students communicative competence. The study created animation based teaching English model by using the animation of Frozen and applied it to lectures. Using animation in the classroom was a creative English teaching technique involving authentic activities like English dram, English guide contest, and various communicative activities A case study on the use of the animation in English classes at was examined and the language teaching syllabus were provided. In order to investigate the motivation and proficiency of learners, the writer chose 79 students who took the lecture. The study discovered the students' motivation and proficiency in English improved significantly. The results of experiment are as follows: First, using animation in the English class was found to have meaningful influence student's intrinsic motivation to learn English. Second, using animation in the English class was found to be effective for developing student's English proficiency. Third, appropriate materials should be selected and applied it to the real classroom activities. In conclusion, one of disadvantages of learning is less communication and the authentic interaction in a real life, so that the integrative teaching methodology which is combined English content and English animation content is also the effective method to improve student's intrinsic motivations in the age of global village.