• Title/Summary/Keyword: IR signal

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OES based PECVD Process Monitoring Accuracy Improvement by IR Background Signal Subtraction from Emission Signal (적외선 배경신호 처리를 통한 OES 기반 PECVD공정 모니터링 정확도 개선)

  • Lee, Jin Young;Seo, Seok Jun;Kim, Dae-Woong;Hur, Min;Lee, Jae-Ok;Kang, Woo Seok
    • Journal of the Semiconductor & Display Technology
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    • v.18 no.1
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    • pp.5-9
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    • 2019
  • Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on $SiO_2$ PECVD process. Comparing the $SiO_2$ film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

Improvement of Computational Speed for the SVD Background Clutter Signal Subtraction Algorithm in IR-UWB Radar Systems (IR-UWB Radar 시스템에서 특이값 분해를 이용한 클러터 신호 제거 알고리즘의 연산속도 향상 기법)

  • Baek, In Seok;Jung, Moon Kwun;Cho, Sung Ho
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.38C no.1
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    • pp.89-96
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    • 2013
  • This paper presents an improved clutter signal removal algorithm using Singular Value Decomposition(SVD). For indoor positioning system using IR-UWB Radar, the target signal is extracted from received signal. We use clutter signal removal algorithm using SVD for target signal extraction. Clutter signal removal algorithm using SVD has the advantage of operation but the disadvantage of high computational complexity. In this paper, we propose a method to improve computational complexity. As the experimental results, it is confirmed that the method presented in this paper improve the computational complexity of clutter removal algorithm using SVD.

ANALYSIS OF IRSIGNAL CHARACTERISTICS OF A SHIP FOR NON-UNIFORM ATMOSPHERIC CONDITIONS (비균일 대기상태를 고려한 함정의 적외선 신호 특성 분석)

  • Choi, J.H.;Kim, D.H.;Han, K.I.;Ha, N.K.;Jang, H.S.;Lee, S.H.;Kim, D.G.;Kim, T.K.
    • Journal of computational fluids engineering
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    • v.22 no.1
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    • pp.88-94
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    • 2017
  • The IR signal entering into a sensor is composed of the following components: the self-emitted component directly from the object surface, the reflected components of the solar and sky irradiance at the object surface, and the scattered component by the atmosphere without reference to any object surfaces. The self-emitted and reflected components from the object can be lowered by the atmospheric layer between the object and the IR sensor. The principle factors influencing the atmospheric transmittance are the air temperature, the relative humidity and the observation distance. Previous studies on IR signal transmission through the atmosphere are focused on uniform atmospheric conditions and the non-uniform nature of the atmosphere was not properly treated in modeling. In this study, we use the local atmospheric transmittance to simulate the non-uniform atmosphere in analyzing the IR signal from the object surface. The results show that the nonuniform analysis of the atmosphere becomes more important as the wavelength of IR signal increases.

A Study of Motion Recognition Using IR-UWB Radar (IR-UWB 레이다를 이용한 모션 인식에 관한 연구)

  • Lee, Jin-Seop;Yoon, Jung-Won
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.30 no.3
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    • pp.236-242
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    • 2019
  • Ultra-wideband(UWB) is a technology that can transmit and receive signals at high speeds using a very short signal of wideband of several GHz, and has been recently used in the field of radar technology. Impulse radio(IR)-UWB radar is used in the field of motion recognition with high resolution. In this work, we studied motion recognition using IR-UWB radar. We constructed a development environment to acquire data about motion and implemented a signal processing algorithm for performance enhancement. Based on the signal processing result, the performance was verified through feature extraction and learning of motion.

Study on signal processing techniques for low power and low complexity IR-UWB communication system using high speed digital sampler (고속 디지털 샘플러 기술을 이용한 저전력, 저복잡도의 초광대역 임펄스 무선 통신시스템 신호처리부 연구)

  • Lee, Soon-Woo;Park, Young-Jin;Kim, Kwan-Ho
    • Journal of the Institute of Electronics Engineers of Korea TC
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    • v.43 no.12 s.354
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    • pp.9-15
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    • 2006
  • In this paper, signal processing techniques for noncoherent impulse-radio-based UWB (IR-UWB) communication system are proposed to provide system implementation of low power consumption and low complexity. The proposed system adopts a simple modulation technique of OOK (on-oft-keying) and noncoherent signal detection based on signal amplitude. In particular, a technique of a novel high speed digital sampler using a stable, lower reference clock is developed to detect nano-second pulses and recover digital signals from the pulses. Also, a 32 bits Turyn code for data frame synchronization and a convolution code as FEC are applied, respectively. To verify the proposed signal processing techniques for low power, low complexity noncoherent IR-UWB system, the proposed signal processing technique is implemented in FPGA and then a short-range communication system for wireless transmission of high quality MP3 data is designed and tested.

Effects of Contrast Agent Concentration on the Signal Intensity and Turbo Factor of TSE and Slice-selective IR in T1-weighted Contrast Imaging

  • Han, Yong Soo;Lee, Soo Chul;Lee, Dong Yong;Choi, Jiwon;Lee, Jong Woong;Kweon, Dae Cheol
    • Journal of Magnetics
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    • v.21 no.1
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    • pp.115-124
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    • 2016
  • The present study analyzes T1 TSE and T1 slice sel. IR (dark_fluid) signal strength according to the degree of gadolinium contrast agent dilution and analyzes the turbo factors with regard to changes in the maximum and overall signal strength to study correlations between changes and signal-to-noise ratios (SNRs) and compare peak-to-peak SNR (PSNR) enhancement in order to improve the quality of T1-weighted images. Enhancement TR (600 msec) evaluated to determine the T1 TSE turbo factor and obtain the maximum signal strength, T1WI were used sequentially to experiment with turbo factors_1-4. T1 slice sel. IR (dark-fluid) was used to sequentially test turbo factors_2-5 but not turbo factor_1 at a TR (1500 msec) and compare data at an increase in T1 of 900 msec. The T1 TSE was reduced according to the contrast agent concentration. Phantom signal strength increased, whereas turbo factors_1-4 exhibited maximum signal strength at a concentration of 3 mmol, followed by a gradual decrease. In the turbo factors_2-5, the signal strength increased sharply to maximum signal strength at 0.7 mmol, followed by a reduction. T1 TSE had a greater maximum signal strength than did T1 slice sel. IR (dark_fluid). A comparison of SNR found that T1 TSE imaging was superior (33.3 dB) in turbo factor_1 and T1 slice sel. IR (dark_fluid) was highest (33.9 dB) at turbo factor_5. A PSNR comparison analysis was not sufficient to distinguish between the images obtained with both techniques at 30 dB or higher under all experimental conditions.

Design and Analysis of Flame Signal Detection with the Combination of UV/IR Sensors (UV/IR센서 결합에 의한 불꽃 영상검출의 설계 및 분석)

  • Kang, Daeseok;Kim, Eunchong;Moon, Piljae;Sin, Wonho;Kang, Min-goo
    • Journal of Internet Computing and Services
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    • v.14 no.2
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    • pp.45-51
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    • 2013
  • In this paper, the combination of ultraviolet and infrared sensors based design for flame signal detection algorithms was proposed with the application of light-wavelength from burning. And, the performance result of image detection was compared by an ultraviolet sensor, an infrared sensor, and the proposed dual-mode sensors(combination of ultraviolet and infrared sensors).

A DSP System for On-line Monitoring in Laser Welding Using a IR and UV Sensors (IR 및 UV센서를 이용한 레이저 용접시의 실시간 모니터링 DSP 시스템)

  • Yoon Choong-Sup
    • Journal of Welding and Joining
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    • v.23 no.4
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    • pp.53-58
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    • 2005
  • We designed a weld monitoring system with UV and IR sensors using a embedded DSP controller for implementing a distribution system; running stand alone and communication with outside by industrial standard protocols. Also this system provided a USB port in order to be acquiring data in PC. The user interface program in PC visualized the IR and W data in time, frequency and state space. A correlation of IR and UV signals showed closely related to weld quality. A rapid change of geometry can be found through a moving average filter. And the average value of IR signal at an interval represented a welding width and depth. Through these results, we proposed a monitoring algorithm for a integer type DSP.

Performance Evaluation of Antipodal Vivaldi Antenna in the Time- and Frequency-Domains for IR-UWB Systems Application (IR-UWB 시스템 응용을 위한 시간- 및 주파수-영역에서의 앤티포달 비발디 안테나 성능 평가)

  • Koh, Young-Mok;Kim, Keun-Yong;Ra, Keuk-Hwan
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.23 no.2
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    • pp.159-168
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    • 2012
  • In this paper, we designed the antipodal vivaldi antenna for IR-UWB systems application and evaluated IR-UWB antenna performance for the ultra wideband impulse signal transmission in the time- and frequency-domain. The designed antipodal vivaldi antenna was fabricated using FR-4 substrate which thickness 1.6 mm, dielectric constant ${\epsilon}_r=4.7$ and $tan{\delta}=0.002$. We measured the return loss, far filed radiation pattern at the anechoic chamber in the frequency-domain. We also performed the pulse fidelity analysis in the time-domain using nano-second impulse signal transmission and demonstrated the feasibility of ultra wideband signal stable transmission in the UWB band. The designed and fabricated antipodal vivaldi antenna could be emitting and receiving the IR-UWB signal while preserving low pulse distortion and good radiation pattern in time- and frequency-domain.

A Study on a High Speed Computational Scheme for the Reflected IR Signal Component by Considering the BRDF (BRDF를 고려한 적외선 신호의 반사 성분 고속 연산기법에 관한 연구)

  • Kim, Dong-Geon;Han, Kuk-Il;Choi, Jun-Hyuk;Choi, Soon-Ho;Kim, Tae-Kuk
    • Journal of the Korea Institute of Military Science and Technology
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    • v.20 no.1
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    • pp.18-24
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    • 2017
  • This paper is a part of developing a computer code that can be used to generate synthetic IR images by calculating the outgoing infrared signal from objects. To predict the reflected component that is a part of the outgoing IR signal, such as those components reflected from the target surface by the solar and sky irradiations, it is necessary to calculate the complicated BRDF values for considering the directional surface reflection characteristics. Since the calculation of reflectance using the BRDF requires a large amount of computation time due to the hemispherical integral term, it is frequently restricted in applying for a real-time prediction of IR signal. In this research, the simplified method for calculating IR reflected component has been proposed by replacing the integral terms into two parts, a directionally uniform component and a step function representing the specular component, to reduce computation time. The proposed method is proved to result in very fast calculation of the BRDF (up to 600 times faster calculations) for most of the surfaces with minimal loss of the accuracy.