• Proceedings of the IEEK Conference
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• 1999.11a
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• pp.891-894
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• 1999

ICP reactor produces high-density and high-uniformity plasma in large area, are has excellent characteristic of direction in the case of etching. Until now, many algorithms used one mesh method. These algorithms are not appropriate for sub 0.1 ${\mu}{\textrm}{m}$ device technologies which should deal with each ion. These algorithms could not present exactly straggle and interaction between projectile ions and could not consider reflection effects due to interactions among next projectile ions, reflected ions and sputtering ions, simultaneously. And difficult consider am-bipolar drift effect.

• Nuclear Engineering and Technology
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• v.50 no.8
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• pp.1349-1354
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• 2018

Inductively Coupled Plasma Atomic Emission Spectroscopy (ICP-AES) is widely used for the determination of trace elements in geological samples in Iran. In this paper, we have calculated the detection limits of neutron activation analysis (NAA) for some of the common elements in such samples utilizing the ORIGEN and MCNP codes and verified the simulations using the experimental results of three soil standard reference materials, namely, G02.SRM, G18.SRM, and G28.SRM. The results show that while the detection limit of ICP-AES method is usually in the mg/kg range, it is represented to the ${\mu}g/kg$ range for most of the elements of interest using the NAA method, and the simulations can be verified in a tolerance range of 20%.

• Analytical Science and Technology
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• v.17 no.5
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• pp.438-442
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• 2004

To determine the contents of $^{99}Tc$ in the spent PWR (pressurized water reactor) nuclear fuels by ICP-MS (inductively coupled plasma-mass spectrometry), a technetium separation method using an extraction chromatographic resin (TEVA Spec resin) has been established. $^{99}Tc$ was separated from a spent PWR nuclear fuel solution by this separation procedure and its concentration was determined by ICP-MS. The result agrees well with the value calculated by the program ORIGEN 2 and also the value measured by AG MP-1 resin/ICP-MS method described in our previous paper. It can be concluded that the present separation procedure is superior to the AG MP-1 resin procedure with respect to the time required for technetium separation as well as the efficiency of decontamination from other radioactive nuclides.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.126-126
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• 2009

Noninvasive plasma diagnostic technique is introduced to analyze and characterize HICP (Helmholtz Inductively Coupled Plasma) source during the plasma etching process. The HICP reactor generates plasma mainly through RF source power at 13.56MHz RF power and RF bias power of 12.56MHz is applied to the cathode to independently control ion density and ion energy. For noninvasive sensors, the RF sensor and the OES (Optical emission spectroscopy) were employed since it is possible to obtain both physical and chemical properties of the reactor with plasma etching. The plasma impedance and optical spectra were observed while altering process parameters such as pressure, gas flow, source and bias power during the poly silicon etching process. In this experiment, we have found that data measured from these noninvasive sensors can be correlated to etch results. In this paper, we discuss the relationship between process parameters and the measurement data from RF sensor and OES such as plasma impedance and optical spectra and using these relationships to analyze and characterize H-ICP source.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.88-88
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• 2003

Optical Emission Spectroscopy(OES) is a very important technology for real-time monitoring of plasma in a reactor during dry etching process. OES technology is non-invasive to the plasma process. It can be used to collect information on excitation and recombination between electrons and ions in the plasma. It also helps easily diagnose plasma intensity and monitor end-point during plasma etch processing. We studied high density planar inductively coupled BCl$_3$ and BCl$_3$/Ar plasma with an OES as a function of processing pressure, RIE chuck power, ICP source power and gas composition. The scan range of wavelength used was from 400 nm to 1000 nm. It was found that OES peak Intensity was a strong function of ICP source power and processing pressure, while it was almost independent on RIE chuck power in BCl$_3$-based planar ICP processes. It was also worthwhile to note that increase of processing pressure reduced negatively self-induced dc bias. The case was reverse for RIE chuck power. ICP power and gas composition hardly had influence on do bias. We will report OES results of high density planar inductively coupled BCl$_3$ and BCl$_3$/Ar Plasma in detail in this presentation.

• Bulletin of the Korean Chemical Society
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• v.33 no.8
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• pp.2642-2646
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• 2012

Pretreatment of spent FCC catalyst and its application in remove trace olefins in aromatics were investigated in this research. The most effective pretreatment route of spent FCC catalyst was calcining at $700^{\circ}C$ for 1 h, washing with 5% oxalic acid solution in ultrasonic reactor and dried. Treated spent FCC catalyst was modified with metal halides, then to prepare catalyst to remove trace olefins in aromatics. X-ray diffraction, Pyridine-FTIR, $N_2$ adsorption-desorption and inductively coupled plasma optical emission spectrometer (ICP-OES) were used to investigate the pretreatment process. The result showed that the performance of the treated spent FCC catalyst was much greater than that of the spent FCC catalyst, which indicted the possibility and improvement of this research.

• Journal of Electrical Engineering and Technology
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• v.7 no.1
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• pp.86-90
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• 2012

A two-dimensional nonlocal heating theory of planar-type inductively coupled plasma source has been previously reported with a filamentary antenna current model. However, such model yields an infinite value of electric field at the antenna position, resulting in the infinite self-inductance of the antenna. To overcome this problem, a surface current model of antenna should be adopted in the calculation of the electromagnetic fields. In the present study, the reactor impedance is calculated based on the surface current model and the dependence on various discharge parameters is studied. In addition, a simpler method is suggested and compared with the surface current calculation.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.5
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• pp.407-412
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• 2014

A new apparatus for seawater desalination, based on the principle of gas hydrates, is suggested. The equipment continuously produces and pelletizes gas hydrates by a squeezing operation in a dual cylinder unit, which is able to extract pure hydrate pellets from the seawater-containing reactor. Desalination efficiency for each dissolved ion from seawater samples was tested by inductively coupled plasma atomic emission spectroscopy (ICP-AES) and ion chromatography (IC) analysis. This study demonstrates that the suggested method and the stated apparatus may solve the difficulty of separating hydrate crystals from concentrated brine solutions, and therefore may be applied to improve the efficiency of existing desalination processes.

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2003.11a
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• pp.421-425
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• 2003

The reductive extraction process is an important step to refine the TRU product from the electrorefining process for the preparation of transmutation reactor fuel. In this study, it was studied on the reductive extraction between the eutectic salt and Bi metal phases. The solutes were zirconium and the rare earth elements, where zirconium was used as a surrogate for the transuranic(TRU) elements. All the experiments were performed in a glove box filled with a argon gas. Li-Bi alloy was used as a reducing agent to reduce the high chemical activity of Li. The reductive extraction characteristics were examined using ICP, XRD and EPMA analysis. The reduction reaction was equilibrated within 3 hours after the Li addition. Three eutectic salt systems were compared and Zr was successfully separated from the rare earth elements in all the three salt systems.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1444-1445
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• 2006

Carbon nanotubes (CNTs) are grown on TiN-Coated silicon substrates at $700^{\circ}C$ using an ICP-CVD method. Ni catalysts for CNT growth are formed using an RF magnetron sputtering system. Post-treatment using hydrogen ions has been performed in the ICP reactor by varying the treatment period. The characterization using various techniques, such as FESEM, HRTEM, and Raman spectroscopy, show that the physical dimension as well as the crystal quality of CNTs are changed by the post-treatment process. It is also seen that the hydrogen ion-bombardment may change the surface structure of CNTs, which may lead to produce better electron emission properties. The physical reason for all the measured data obtained are discussed to establish the relationship between the structural property and the electron emission characteristic of CNTs.