• Title/Summary/Keyword: ICP(Inductively coupled plasma)

Search Result 966, Processing Time 0.023 seconds

Property of Nickel Silicides with 10 nm-thick Ni/Amorphous Silicon Layers using Low Temperature Process (10 nm-Ni 층과 비정질 실리콘층으로 제조된 저온공정 나노급 니켈실리사이드의 물성 변화)

  • Choi, Youngyoun;Park, Jongsung;Song, Ohsung
    • Korean Journal of Metals and Materials
    • /
    • v.47 no.5
    • /
    • pp.322-329
    • /
    • 2009
  • 60 nm- and 20 nm-thick hydrogenated amorphous silicon (a-Si:H) layers were deposited on 200 nm $SiO_2/Si$ substrates using ICP-CVD (inductively coupled plasma chemical vapor deposition). A 10 nm-Ni layer was then deposited by e-beam evaporation. Finally, 10 nm-Ni/60 nm a-Si:H/200 nm-$SiO_2/Si$ and 10 nm-Ni/20 nm a-Si:H/200 nm-$SiO_2/Si$ structures were prepared. The samples were annealed by rapid thermal annealing for 40 seconds at $200{\sim}500^{\circ}C$ to produce $NiSi_x$. The resulting changes in sheet resistance, microstructure, phase, chemical composition and surface roughness were examined. The nickel silicide on a 60 nm a-Si:H substrate showed a low sheet resistance at T (temperatures) >$450^{\circ}C$. The nickel silicide on the 20 nm a-Si:H substrate showed a low sheet resistance at T > $300^{\circ}C$. HRXRD analysis revealed a phase transformation of the nickel silicide on a 60 nm a-Si:H substrate (${\delta}-Ni_2Si{\rightarrow}{\zeta}-Ni_2Si{\rightarrow}(NiSi+{\zeta}-Ni_2Si)$) at annealing temperatures of $300^{\circ}C{\rightarrow}400^{\circ}C{\rightarrow}500^{\circ}C$. The nickel silicide on the 20 nm a-Si:H substrate had a composition of ${\delta}-Ni_2Si$ with no secondary phases. Through FE-SEM and TEM analysis, the nickel silicide layer on the 60 nm a-Si:H substrate showed a 60 nm-thick silicide layer with a columnar shape, which contained both residual a-Si:H and $Ni_2Si$ layers, regardless of annealing temperatures. The nickel silicide on the 20 nm a-Si:H substrate had a uniform thickness of 40 nm with a columnar shape and no residual silicon. SPM analysis shows that the surface roughness was < 1.8 nm regardless of the a-Si:H-thickness. It was confirmed that the low temperature silicide process using a 20 nm a-Si:H substrate is more suitable for thin film transistor (TFT) active layer applications.

A Study on the Leaching Effect and Selective Recovery of Lithium Element by Persulfate-based Oxidizing Agents from Waste LiFePO4 Cathode (과황산계 산화제에 따른 폐LiFePO4 양극재에서 리튬의 침출 효과와 선택적 회수에 대한 연구)

  • Kim, Hee-Seon;Kim, Dae-Weon;Jang, Dae-Hwan;Kim, Boram;Jin, Yun-Ho;Chae, Byung-Man;Lee, Sang-Woo
    • Resources Recycling
    • /
    • v.31 no.4
    • /
    • pp.40-48
    • /
    • 2022
  • In waste lithium iron phosphate (LFP) batteries, the cathode material contains approximately 4% lithium. Recycling the constituent elements of batteries is important for resource circulation and for mitigating the environmental pollution. Li contained in the waste LFP cathode powder was selectively leached using persulfate-based oxidizing agents, such as sodium persulfate, potassium persulfate, and ammonium persulfate. Leaching efficiency and waste LFP powder properties were compared and analyzed. Pulp density was used as a variable during leaching, which was performed for 3 h under each condition. The leaching efficiency was calculated using the inductively coupled plasma (ICP) analysis of the leachate. All types of persulfate-based oxidizing agents used in this study showed a Li leaching efficiency over 92%. In particular, when leaching was performed using (NH4)2S2O8, the highest Li leaching percentage of 93.3% was observed, under the conditions of 50 g/L pulp density and an oxidizing agent concentration of 1.1 molar ratio.

Exposure Assessment of Heavy Metals Migrated from Glassware on the Korean Market (국내 유통 식품용 유리제의 중금속 노출 평가)

  • Kim, Eunbee;Hwang, Joung Boon;Lee, Jung Eun;Choi, Jae Chun;Park, Se-Jong;Lee, Jong Kwon
    • KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
    • /
    • v.28 no.1
    • /
    • pp.15-21
    • /
    • 2022
  • The purpose of our study was to investigate the migration level of lead (Pb), cadmium (Cd), and barium (Ba) from glassware into a food simulant and to evaluate the exposure of each element. The test articles were glassware, including tableware, pots, and other containers. Pb, Cd, and Ba were analysed by Inductively Coupled Plasma Optical Emission Spectrometry (ICP-OES). The analytical performance of the method was validated in terms of its linearity, limit of detection (LOD), limit of quantification (LOQ), recovery, precision, and uncertainty. The monitoring was performed for 110 samples such as glass cups, containers, pots, and bottles. a food simulant. Migration test was conducted at 25? for 24 hours in a dark place using 4% acetic acid as a food simulant. Based on the data; exposure assessment was carried out to compare the estimated daily intake (EDI) to the human safety criteria. The risk levels of Pb and Ba determined in this study were approximately 1.9% and 0.3% of the provisional tolerable weekly intake (PTWI) and tolerable daily intake (TDI) value, respectively, thereby indicating a low exposure to the population.

The monitoring of some heavy metals in oriental mineral medicines (광물성 생약 중 중금속의 모니터링)

  • Han, Eunjung;Chung, Jaeyeon;Park, Kyungsu;Kang, Inho;Kang, Sinjung;Kim, Yunje
    • Analytical Science and Technology
    • /
    • v.21 no.6
    • /
    • pp.480-486
    • /
    • 2008
  • This paper reports on the monitoring results of some heavy metals (Pb, Cd, As and Hg) in oriental mineral medicines. Levels of Pb, Cd and As were determined using the acid digestion method and ICP-MS. Hg levels were determined using the gold amalgamation method and Automatic mercury analyzer (AMA). The results indicated that, in the case of Pb, 25.81% (24 cases) of the samples were over MRL (5 mg/kg). Pb levels in Calamina, Pumex, and Cinnabaris exceeded MRL (5 mg/kg). In the case of Cd, 9.68% (17cases) of the samples were over MRL (0.3 mg/kg). Cd levels in Calamina, Pumex and Cinnabaris were exceeded MRL (0.3 mg/kg). In case of As, 24.73% (23 cases) of samples exceeded MRL (3 mg/kg). As levels in Calamina, Lithargyrum, Vermilionum, Cinnabaris and Chalcocitum exceeded MRL (3 mg/kg). In the case of Hg, it was shown that the 76.34% (78 cases) of the samples exceeded MRL (0.2 mg/kg). Hg levels in almost all the samples exceeded MRL (0.2 mg/kg). These results led us to recommend that the domestic commercial law to be legislated to ensure the quality estimation and safety of oriental mineral medicines.

A study on the separation and determination of the rare earth Elements by the AG® 50W-X8 cation exchange resin (AG® 50W-X8 양이온교환수지를 이용한 희토류원소의 분리와 분석에 관한 연구)

  • Lee, Jung Sook;Choi, Beom Suk
    • Analytical Science and Technology
    • /
    • v.21 no.4
    • /
    • pp.272-278
    • /
    • 2008
  • Methods to separate 14 rare earth elements (REEs) and yttrium by the $AG^{(R)}$ 50W-X8 cation exchange resin, and to determine REEs by inductively coupled plasma atomic emission spectrophotometry (ICP-AES) were described. Ion exchange capacities of REEs on the resin were so high that the REEs were quantitatively ion exchanged under the flow rate of 0.3~1.0 mL/min at pH 1~6. The breakthrough capacity curve of the REEs showed that ion exchange capacities of light REEs (Cerium group) were greater than that of the heavy REEs (Yttrium group). When $200{\mu}g$ of each REEs was ion exchanged on 100 mg of resin, most of the heavy REEs were quantitatively desorbed with 10 mL of 2.0 M of $HNO_3$, while most of the light REEs with 30 mL. The method was applied to the monazite sample. The REEs could be separated from matrix, since ion exchange capacities of matrix ions of Ca, Ti, Mg, Mn were much lower than that of the REEs. However the relative standard deviations of the analytical results by the present method were not improved, as high as 1~5%.

Contents of Mercury, Methylmercury, and Selenium in Deep-Sea Fishes (심해성 어류의 수은, 메틸수은 및 셀레늄 함량)

  • Yun-Sik Cho;Seon-Il Hwang;Sang-Woon Shin;Hyun-Ju Kim;Ji-Yeon Lee;Ji-Won Song;Jeong-Eun Kim;Byoung-Hoon Lee;A-Ra Mo;Myeong-Ki Park
    • Journal of Food Hygiene and Safety
    • /
    • v.38 no.3
    • /
    • pp.158-163
    • /
    • 2023
  • This study aimed to determine mercury (Hg), methylmercury (MeHg), and selenium (Se) levels in deep-sea fishes distributed in Gyeonggi-do, South Korea. Concentrations of Hg, MeHg, and Se were measured by using a mercury analyzer and Inductively Coupled Plasma - Mass Spectrometry (ICP-MS). The average content (mg/kg) in the seafood samples was as follows: Hg, 0.7647 (0.0182-5.3620), MeHg, 0.0764 (0.0096-0.8750), and Se, 0.4728 (0.1075-3.5100). All the levels of MeHg were below the recommended standards of the Ministry of Food and Drug Safety i.e., <1.0 mg/kg. Recent studies have shown that Se prevents Hg toxicity. The average daily intake in humans was 3.3 ㎍/kg, which was lower than the recommended amount (50-200 ㎍/person/day). The weekly intake of Hg and MeHg was calculated to be 6.07% and 1.90%, respectively, of the provisional tolerable weekly intake (PTWI). This study showed that the weekly intake of Hg and MeHg from abyssal fish was less than the PTWI recommended by the Joint FAO/WHO expert committee on food additives. Therefore, the levels reported in this study are presumed to be adequately safe.

Arsenic species in husked and polished rice grains grown at the non-contaminated paddy soils in Korea (국내 비오염 논토양에서 재배한 현미와 백미 중 비소화학종 함량)

  • Kim, Da-Young;Kim, Ji-Young;Kim, Kye-Hoon;Kim, Kwon-Rae;Kim, Hyuck-Soo;Kim, Jeong-Gyu;Kim, Won-Il
    • Journal of Applied Biological Chemistry
    • /
    • v.61 no.4
    • /
    • pp.391-395
    • /
    • 2018
  • There is an increasing concern over arsenic (As) contamination of paddy soil and rice with regard to food safety. This study was conducted to investigate total and inorganic As concentration in one hundred husked and polished rice samples collected at the non-contaminated paddy soil in Korea. Arsenic species in rice samples were extracted using 1% nitric acid ($HNO_3$) with a microwave oven and were measured using high performance liquid chromatography coupled with inductively coupled plasma-mass spectrometry. Mean concentrations of total As in husked rice and polished rice were 0.18 and $0.11mg\;kg^{-1}$, respectively. Also, average inorganic As concentrations in husked rice and polished rice were 0.11 and $0.07mg\;kg^{-1}$, respectively. These levels are lower than the standard guideline value 0.35 and $0.2mg\;kg^{-1}$ for inorganic As in husked and polished rice recommended by Codex Committee on Contaminants in Foods and Ministry of Food and Drug Safety, respectively. The mean of the inorganic As ratio for the total amount of As was 0.65 and 0.67 for husked rice and polished rice, respectively, and the range was from 0.08 to 1.0. For health risk assessment, the average value of cancer risk probability was $9.24{\times}10^{-5}$ and ranged from $2.30{\times}10^{-5}$ to $1.90{\times}10^{-5}$. Therefore, human exposure to As through dietary intake of surveyed rice samples might considered to be a low health risk.

A Study on the etching mechanism of $CeO_2$ thin film by high density plasma (고밀도 플라즈마에 의한 $CeO_2$ 박막의 식각 메커니즘 연구)

  • Oh, Chang-Seok;Kim, Chang-Il
    • Journal of the Institute of Electronics Engineers of Korea SD
    • /
    • v.38 no.12
    • /
    • pp.8-13
    • /
    • 2001
  • Cerium oxide ($CeO_2$) thin film has been proposed as a buffer layer between the ferroelectric thin film and the Si substrate in Metal-Ferroelectric-Insulator-Silicon (MFIS) structures for ferroelectric random access memory (FRAM) applications. In this study, $CeO_2$ thin films were etched with $Cl_2$/Ar gas mixture in an inductively coupled plasma (ICP). Etch properties were measured for different gas mixing ratio of $Cl_2$($Cl_2$+Ar) while the other process conditions were fixed at RF power (600 W), dc bias voltage (-200 V), and chamber pressure (15 mTorr). The highest etch rate of $CeO_2$ thin film was 230 ${\AA}$/min and the selectivity of $CeO_2$ to $YMnO_3$ was 1.83 at $Cl_2$($Cl_2$+Ar gas mixing ratio of 0.2. The surface reaction of the etched $CeO_2$ thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. There is a Ce-Cl bonding by chemical reaction between Ce and Cl. The results of secondary ion mass spectrometer (SIMS) analysis were compared with the results of XPS analysis and the Ce-Cl bonding was monitored at 176.15 (a.m.u). These results confirm that Ce atoms of $CeO_2$ thin films react with chlorine and a compound such as CeCl remains on the surface of etched $CeO_2$ thin films. These products can be removed by Ar ion bombardment.

  • PDF

A Study on Corrosion according to Distance between Amalgam and Dissimilar Metals (아말감과 이종(異種)금속의 거리에 따른 부식에 대한 고찰)

  • Kim, Ju-won;Jeong, Eun-gyeong
    • Journal of dental hygiene science
    • /
    • v.4 no.3
    • /
    • pp.103-109
    • /
    • 2004
  • The present study prepared 72 test samples - 24 made of amalgam alloy, 24 of Verabond (Ni-Cr alloy) for crown and 24 of Talladium $^{TM}alloy$ for denture - according to the manufacturers' manuals and general method in consideration of the width of the mesial-distal dental crown of the lower $1^{st}$ molar and MOD cavity in clinics, put them in a 200 ml beaker containing 80 ml of artificial saliva, and measured their galvanic corrosion at distances of 0 mm, 7 mm and 40 mm after 7 days. Isolated metals in the electrolyte such as Cu, Ag, Ni, Cr, Sn, Zn and Hg were quantitatively analyzed with Inductively Coupled Plasma - Atomic Emission Spectrometer (ICP-AES, JY-50P, VG Elemental Co. France), and from the results were drawn conclusions as follows. First, Cu, Sn, Ag, Hg and Zn were highly advantageous when amalgam contacted gold alloy compared to Ni-Cr alloy for crown and Talladium alloy for denture. In addition, although gold alloy was finest in terms of oral tissue and biocompatibility, it was most disadvantageous when it was with amalgam. Second, when amalgam contacted gold alloy, heavy metals such as Ni and Cr were not isolated at all because gold alloy did not contain such elements but Sn was isolated as much as $227.1{\pm}18.0035{\mu}g/cm^2$ although it was not included in the composition either. Hg was also isolated. These elements are assumed to have been isolated from amalgam itself. Third, when amalgam alloy was apart from gold alloy 0 mm, 7 mm and 40 mm, Cu and Ag showed significance but Hg did not. This suggests that gold alloy must not be used together with amalgam, and must not be used between dissimilar prostheses regardless of distance. Fourth, when amalgam alloy contacted Ni-Cr alloy for crown, Ag was not isolated from the amalgam, but Zn, Ni, Sn, Hg and Cu were isolated in order of quantity. Significance was observed according to distance - 0 mm, 7 mm and 40 mm. Hg was not isolated but heavy metals Ni and Cr were isolated. If amalgam alloy was in the opposite arch or it was apart from Ni-Cr alloy for crown, the isolation Hg was less than that when amalgam alloy contacted Ni-Cr alloy for crown. Fifth, when amalgam alloy contacted Talladium alloy for denture, significance was observed at distances of 0mm, 7 mm and 40 mm. Hg was not isolated but heavy metals Ni and Cr were isolated. If amalgam alloy was in the opposite arch or it was apart from Talladium alloy for denture, the isolation Hg was less than that when amalgam alloy contacted Talladium alloy for denture. Sixth, according to the result of ICPES test on Cu, Sn, Ag, Hg, Zn, Ni and Cr of amalgam alloy, gold ally, Verabond and Talladium alloy when these alloys contacted artificial saliva, significance was observed in Cu and Hg. Seventh, when amalgam alloy contracted two non-precious metals Ni-Cr alloy for crown and Talladium alloy for denture in artificial saliva, significance was observed in the isolated by-products of Hg, Ni and Cr according to distance.

  • PDF

New Analytical Method to Identify Chromium Species, Cr(III) and Cr(VI), and Characteristic Distribution of Chromium Species in the Han River (한강수계해서의 크롬(III,VI) 종(species) 분포 및 분석방법 정립)

  • Jeong, Gwan-Jo;Kim, Dok-Chan;Park, Hyeon
    • Journal of Korean Society of Environmental Engineers
    • /
    • v.27 no.6
    • /
    • pp.590-598
    • /
    • 2005
  • An adequate method to identify chromium separation, Cr(III) and Cr(VI), in water samples were studied by using High Performance Liquid Chromatography(HPLC) coupled with Inductively Coupled Plasma Mass Spectometer(ICP-MS) equipped with Dynamic Reaction Cell(DRC). The characteristic distribution of Cr(III) and Cr(VI) in the raw water taken at the six water intake stations in Seoul, was analyzed by the method developed by the authors. The chromium species separated by HPLC was isocratically conducted by using tetrabutylammonium phosphate monobasic(1.0 mM TBAP), ethylenediaminetetraacetic acid(0.6 mM EDTA) and 2% v/v methanol as the mobile phase. 5% v/v methanol was used as flushing solvent. A reactive ammonia($NH_3$) gas was used to eliminate the potential interference of $ArC^+$. Several Parameters such as solvent ratio, pH, flow rate and sample injection volume were optimized for the successful separation and reproducibility. Although it has been reported thai the separation sensitivity of Cr(III) is superior to that of Cr(VI), the authors observed Cr(VI) was more sensitive than Cr(III) when ammonia($NH_3$) gas was used as the reaction gas. It took less than 3 minutes to analyze chromium species with this method and the estimated detection limits were $0.061\;{\mu}g/L$ for Cr(III) and $0.052\;{\mu}g/L$, for Cr(VI). According to the results from the analysis on chromium species in the raw water of the six intake stations, the concentrations of Cr(III) ranged from 0.048 to $0.064\;{\mu}g/L$(ave. $0.054\;{\mu}g/L$) while that of Cr(VI) ranged from 0.014 to $0.023\;{\mu}g/L$(ave. $0.019\;{\mu}g/L$). Recovery ratio was very high($90.1{\sim}94.1%$). There were two or three times more Cr(III) than Cr(VI) in the raw water.