• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.320-320
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• 2013

Film thickness monitoring with plasma impedance monitoring (PIM) is demonstrated for small area $SiO_2$ RF plasma etching processes in this work. The chamber conditions were monitored by the impedance signal variation from the I-V monitoring system. Moreover, modified principal component analysis (mPCA) was applied to estimate the $SiO_2$ film thickness. For verification, the PIM was compared with optical emission spectroscopy (OES) signals which are widely used in the semiconductor industry. The results indicated that film thickness can be estimated by 1st principal component (PC) and 2nd PC. Film thickness monitoring of small area $SiO_2$ etching was successfully demonstrated with RF plasma harmonic impedance monitoring and mPCA. We believe that this technique can be potentially applied to plasma etching processes as a sensitive process monitoring tool.

• Journal of the Korean Data and Information Science Society
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• v.23 no.5
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• pp.1037-1044
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• 2012

Multivariate control charts for effectively monitoring every component in the dispersion matrix of multivariate normal process are considered. Through the numerical results, we noticed that the multivariate control charts based on sample statistic $V_i$ by Hotelling or $W_i$ by Alt do not work effectively when the correlation coefficient components in dispersion matrix are increased. We propose a combined procedure monitoring every component of dispersion matrix, which operates simultaneously both control charts, a chart controlling variance components and a chart controlling correlation coefficients. Our numerical results show that the proposed combined procedure is efficient for detecting changes in both variances and correlation coefficients of dispersion matrix.

• Journal of Sensor Science and Technology
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• v.6 no.4
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• pp.290-297
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• 1997

In this study, the radiation monitoring system using CsI(TI) scintillation counter is developed for the measurement of radiation distribution in the field of high dose level. When the inner diameter of collimator is 8 mm, we have realized the optimum detecting efficiency and spatial resolution. At that time, the position resolution was 10 cm at 1 m from the system. And experimental results indicated that the energy resolution of the system were 10 % for 662 keV of Cs-137, 7.6 % for 1.17 MeV of Co-60, and 5.8 % for 1.33 MeV of Co-60. Also, we have shown that the real radiation distribution images may be obtained by our measurement system.

• Journal of Radiation Protection and Research
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• v.42 no.3
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• pp.158-165
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• 2017

Background: Nuclear facilities in South Korea have generally adopted pressurized ion chambers to measure ambient gamma ray exposure rates for monitoring the impact of radiation on the surrounding environment. The rates assessed with pressurized ion chambers do not distinguish between natural and man-made radiation, so a further step is needed to identify the cause of abnormal variation. In contrast, using NaI(Tl) scintillation detectors to detect gamma energy rates can allow an immediate assessment of the cause of variation through an analysis of the energy spectra. Against this backdrop, this study was conducted to propose a more effective way to monitor ambient gamma exposure rates. Materials and Methods: The following methods were used to analyze gamma energy spectra measured from January to November 2016 with NaI detectors installed at the Korea Atomic Energy Research Institute (KAERI) dormitory and Hanbat University. 1) Correlations of the variation of rates measured at the two locations were determined. 2) The dates, intervals, duration, and weather conditions were identified when rates increased by $5nSv{\cdot}h^{-1}$ or more. 3) Differences in the NaI spectra on normal days and days where rates spiked by $5nSv{\cdot}h^{-1}$ or more were studied. 4) An algorithm was derived for automatically calculating the net variation of the rates. Results and Discussion: The rates measured at KAERI and Hanbat University, located 12 kilometers apart, did not show a strong correlation (coefficient of determination = 0.577). Time gaps between spikes in the rates and rainfall were factors that affected the correlation. The weather conditions on days where rates went up by $5nSv{\cdot}h^{-1}$ or more featured rainfall, snowfall, or overcast, as well as an increase in peaks of the gamma rays emitted from the radon decay products of $^{214}Pb$ and $^{214}Bi$ in the spectrum. This study assumed that $^{214}Pb$ and $^{214}Bi$ exist at a radioactive equilibrium, since both have relatively short half-lives of under 30 minutes. Provided that this assumption is true and that the gamma peaks of the 352 keV and 1,764 keV gamma rays emitted from the radionuclides have proportional count rates, no man-made radiation should be present between the two energy levels. This study proved that this assumption was true by demonstrating a linear correlation between the count rates of these two gamma peaks. In conclusion, if the count rates of these two peaks detected in the gamma energy spectrum at a certain time maintain the ratio measured at a normal time, such variation can be confirmed to be caused by natural radiation. Conclusion: This study confirmed that both $^{214}Pb$ and $^{214}Bi$ have relatively short half-lives of under 30 minutes, thereby existing in a radioactive equilibrium in the atmosphere. If the gamma peaks of the 352 keV and 1,764 keV gamma rays emitted from these radionuclides have proportional count rates, no man-made radiation should exist between the two energy levels.

• The Bulletin of The Korean Astronomical Society
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• v.38 no.2
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• pp.63.1-63.1
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• 2013

We present the results of time monitoring observations of $^{28}SiO$ v = 1, 2, J = 1-0, $^{29}SiO$ v = 0, J = 1-0 and $H_2O$ $6_{16}-5_{23}$ maser lines toward radio Source I in Orion KL. The observations have been performed from 2009 June to 2013 April using the 21m single dish radio telescopes of the Korean VLBI Network. Both SiO and $H_2O$ maser lines were simultaneously obtained at 20 epochs. In particular, the third outburst of $H_2O$ maser emission (the first: 1985, the second: 1998) was detected and the flux density variation curve was obtained. The maximum flux density flared up to an order of $10^5$ Jy during 2012 May-July at peak velocity of 7.33 km $s^{-1}$. Hirota et al. (2011) reported that the bursting maser features are located at 8" from Source I and coincident with the interacting region between the outflow from Source I and a dense ambient gas, Orion Compact Ridge. In the case of SiO masers arising from close to the Source I, the peak emission of the v = 1, J = 1-0 maser line appeared in 2010 April. We are investigating the possible relation between this SiO maser peak emission and the third $H_2O$ maser flaring.

• Journal of the Korean institute of surface engineering
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• v.38 no.2
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• pp.73-78
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• 2005

A real-time monitoring of ICP(inductively coupled plasma) assisted magnetron sputtering of MgO was carried out using a QMS(quadrupole mass spectrometer), an OES(optical emission spectrometer), and a digital oscilloscope with a high voltage probe and a current monitor. At the time of ICP ignition, the most distinct impurity was OH emission (308.9 nm) which was dissociated from water molecules. For reactive deposition oxygen was added to Ar and the OH emission intensity was reduced abruptly When the discharge voltage was regulated by a PID controller from 240V(metallic mode) to 120V(oxide mode), the emission intensity from Mg (285.2 nm) changed proportionally to the discharge voltage, but the intensity of Ar I(811.6 nm) was constant. At 100V of discharge voltage, Mg sputtering was almost stopped. Emissions from Ar I(420.1 nm) and Mg I were dropped down to 1/10, but Ar I(811.6 nm) didn't change. And the emission from atomic oxygen (O I, 777.3 nm) was increased to 10 times. These results are compatible with those from QMS study.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.153-153
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• 2012

Endpoint detection with plasma impedance monitoring and self-plasma optical emission spectroscopy is demonstrated for dielectric layers etching processes. For in-situ detecting endpoint, optical-emission spectroscopy (OES) is used for in-situ endpoint detection for plasma etching. However, the sensitivity of OES is decreased if polymer is deposited on viewport or the proportion of exposed area on the wafer is too small. To overcome these problems, the endpoint was determined by impedance signal variation from I-V monitoring (VI probe) and self-plasma optical emission spectroscopy. In addition, modified principal component analysis was applied to enhance sensitivity for small area etching. As a result, the sensitivity of this method is increased about twice better than that of OES. From plasma impedance monitoring and self-plasma optical emission spectroscopy, properties of plasma and chamber are analyzed, and real-time endpoint detection is achieved.

• Proceedings of the KIEE Conference
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• 1995.11a
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• pp.309-311
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• 1995

Recently, a power supply system of the telecommunication equipments with monitoring function has been widely studied. In the power supply system which is apart from the central station, it is required to check and test the operating states of the system at the central station. In this paper, the power supply system with monitoring function is discussed. In the system, the Full-Bridge converter is designed as a power supply and it has the ratings of DC 280-340V input and DC 48V, 480W output. And the monitoring part of the system is composed of a voltage and current sensing unit A/D converter, I/O card, and a personal computer. The operating states of the system is monitored by checking the voltage and current variation at input and output, and it is represented by graphical modes. By conducting the experiment, it is confirmed that the operating states of the system is well monitored.

• Atmosphere
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• v.16 no.2
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• pp.85-96
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• 2006

The six-year (2000~2005) record of aerosol optical thickness (AOT or $\tau$) data from the Moderate Resolution Imaging Spectroradiometer (MODIS) was analyzed over the Northeast Asia. The MODIS AOT standard products (MOD04_L2) over both ocean and land were collected to evaluate the spatial and temporal variability of the atmospheric aerosols over the study region ($32^{\circ}N{\sim}42^{\circ}N$ and $115^{\circ}E{\sim}133^{\circ}E$). The monthly averaged AOT result revealed slight changes(${\pm}0.002{\tau}/month$), which was almost unchangeable, over Korea. In contrast, the large AOT values (> 0.6) and a significant AOT increase (> 0.004 ${\tau}/month$) over East China were observed. For the analysis of spatio-temporal variability of AOT values, study area was divided by six sectors (I: North-East China, II: East China, III: Yellow Sea, IV: Korea Peninsular, V: East Sea, and VI: South Sea and Western part of Japan). The considerable result showed that particularly high AOT contribution was observed over sector I (32.5%) and II (25.5%) where some major urban and industrialized areas and agricultural fields are located and other cases were observed 13.2%, 14.6%, 7.1%, 7.0% over sector III, IV, V, and VI, respectively. In addition, yearly AOT changes based on seasons are observed differently at each sector but increasing trends reveal in summer and fall over all sectors.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.103.1-103.1
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• 2012

We present the results of SDSS r, i and z band photometry for HBC722 (also known as $LkH{\alpha}$ 188 G4, PTF10qpf and V2493 Cyg), with Camera for Quasars in Early uNiverse (CQUEAN) attached to 2.1m Otto Struve telescope at McDonald Observatory, USA. HBC722 is a newly erupted FU Orionis type object, which produced optical outburst (${\Delta}V$=4.7 mag) over a year that peaked in 2010 September. We carried out the monitoring observations during 48 nights from 2011 April to 2012 June to check the short-term and the long-term variabilities for chasing the Keplerian rotation of the system. Comparing the photometric results of r, i and z band, we describe the color variability which is related to the physical properties of the system like circumstellar disk and accretion process.