• 한국CDE학회논문집
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• 제1권1호
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• pp.76-83
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• 1996

A three dimensional FE mesh generation scheme based on mapping approach is proposed in this study. A volume in Eucledian space is represented by composite hyperpatches which are piecewise cubic functions in parameters u, v, w. A key idea in the proposed approach is that I sampled grid data points lying only on the boundary surfaces are needed for the shape representation. Inner points which are necessary to form a hyperpatch are internally generated by Coons patches. This approach is most appropriate for the shapes which are compositions of hexahedronlike shapes and also severely curved.

• 한국정밀공학회지
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• 제13권1호
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• pp.98-107
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• 1996

The use of composite hyperpatch model is proposed to predict a machine tool positional error over the entire work space. This is an appropriate representation of the distorted work space. This model is valid for any configuration of 3-axis machine tool. Tool position, which is given NC data or CL data, contains error vector in actual work space. In this study, off-line compensation scheme was investigated for tool position error due to inaccuracy in machine tool structure. The error vector in actual work space is corrected by the error model using Newton-Raphson method. The proposed error compensation method shows the possibility of improving machine accuracy at a low cost.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1994년도 추계학술대회 논문집
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• pp.298-302
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• 1994

A three dimensional FE mesh generation scheme based on mapping approach is proposed in this study. A volume in Euclcdian space is represented by composite hyperpatches which are piecewise cubic functions with parameters u,v,w. A key idea in the proposed approach is that sampled grid data points only on the boundary surfaces are needed for the shape representation. Inner points which are necessary of form a hyperpatch are internally generated by Coons patches. This approach is most appropriate for the shapes which are compositions of hexahedron-like shapes and also severely curved.

• 한국정밀공학회지
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• 제18권11호
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• pp.138-147
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• 2001

Alignment systems are frequently used under various semiconductor manufacturing environment. Particularly in PDP(Plasma Display Panel) manufacturing process, the alignment system is applied to the combining and sealing processes of the upper and lower glass panels of PDP, where these processes are performed in the vacuum chamber of high vacuum and high temperature. In this paper, the XYΘ-alignment stage is developed to align PDP panels. Because of high vacuum and high temperature environment, the alignment chamber has been designed to isolate the inner part of the alignment chamber from the outer environment of high vacuum and high temperature, in which every part of the alignment stage is inserted. As it is difficult to attach feedback sensors to the alignment stage in the alignment chamber, the alignment stage is implemented with the open loop algorithm, where the parallel link structure has been designed using step-motors and ball-screws for structural simplicity. The kinematic analysis is performed to drive the parallel link structure, based on the experiments of actuation-compensation of the alignment stage. For the error compensation, the hyperpatch model has been used to model the errors. From the experiments, the positional accuracy of the alignment stage can be improved significantly.