• Korean Journal of Materials Research
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• v.25 no.9
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• pp.462-467
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• 2015

Pellicle is defined as a thin transparent film stretched over an aluminum (Al) frame that is glued on one side of a photomask. As semiconductor devices are pursuing higher levels of integration and higher resolution patterns, the cleaning of the Al flame surface is becoming a critical step because the contaminants on the Al flame can cause lithography exposure defects on the wafers. In order to remove these contaminants from the Al frame, a highly concentrated nitric acid ($HNO_3$) solution is used. However, it is difficult to fully remove them, which results in an increase in the Al surface roughness. In this paper, the pellicle frame cleaning is investigated using various cleaning solutions. When the mixture of sulfuric acid ($H_2SO_4$), hydrofluoric acid (HF), hydrogen peroxide ($H_2O_2$), and deionized water with ultrasonic is used, a high cleaning efficiency is achieved without $HNO_3$. Thus, this cleaning process is suitable for Al frame cleaning and it can also reduce the use of chemicals.

• Journal of the Korean Society of Propulsion Engineers
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• v.7 no.4
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• pp.27-32
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• 2003

The Performance of micro combustor in various condition was exploited experimentally. Various geometric conditions of combustor were considered to figure out the performance of micro combustor. The micro combustor studied in this study was constant volume with cylindrical shape. Geometric parameters of combustor were defined to be combustor height and diameter. The effect of height was exploited parametrically with the size of 1mm, 2mm and 3mm. The effect of diameter was observed parameterized with 7.5mm and 15mm. Three different combustibles or Stoichiometric mixture of methane/air, hydrogen/air were used. Pressure transition during combustion process was recorded. The maximum pressure by combustion responded favorably with the change of height of combustor and the initial pressure. The flame propagation was visulized using Schlieren method. The flame propagation within combustor was observed when specific conditions such as combustor height and initial pressure over critical value was satisfied.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.44 no.4
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• pp.333-342
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• 2016

Liquid rocket propulsion is a system that produces required thrust for satellites and space launch vehicles by using chemical reactions of a liquid fuel and a liquid oxidizer. Monomethylhydrazine/dinitrogen tetroxide, liquid hydrogen/liquid oxygen and RP-1/liquid oxygen are typical combinations of liquid propellants commonly used for the liquid rocket propulsion system. The objective of the present study is to investigate useful design and performance data of liquid rocket engine by conducting a numerical analysis of thermochemical reactions of liquid rocket propellants. For this, final products and chemical compositions of three liquid propellant combinations are calculated using equilibrium constants of major elementary equilibrium reactions when reactants remain in chemical equilibrium state after combustion process. In addition, flame temperature and specific impulse are estimated.

• Transactions of the Korean hydrogen and new energy society
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• v.29 no.1
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• pp.97-104
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• 2018

3-dimensional temperature distribution of the exhaust gas of a fire flame of LPG have been measured by the constructed CT-TDLAS system. 3-Dimensional temperature distributions are measured by 2 layers of CT-TDLAS. Each layer has $8{\times}8$ laser beams implying the temperatures of 64 meshes are measured. SMART algorithm has been adopted for reconstructing the absorption coefficients on the meshes. The line strengths at 6 representative wave lengths of $H_2O$ have been used for obtaining the absorption spectra of the exhaust gas. The temperature distributions measured by the constructed CT-TDLAS have been compared with those by the thermocouples. The relative errors measured between by thermocouple and CT-TDLAS were 13% in average and 33% at maximum. The similarity of temperature distribution between by thermocouples and by CT-TDLAS has been shown at the lower layer than the upper layer implying an unstability of combustions.

• Journal of the Korean Institute of Gas
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• v.17 no.5
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• pp.8-14
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• 2013

Hydrogen-natural gas blends(HCNG) engine is optimizing technology of performance and emission characteristics with use of hydrogen's fast flame speed and wide flammability limit. As lean-burn limit is extended, the improvement in thermal efficiency and harmful emissions can be achieved. However, the extension of lean-burn limit under a wide open throttle operation point could be realized with the increase in boosting capacity in a lean-burn engine with turbo-charging system. In the present study, the power output characteristics of HCNG engine with turbo-charger change is assessed and feasibility of the increase in boosting capacity is evaluated. The turbo-charger design with high efficiency at higher flow rate rather than higher boosting pressure makes efficient operation possible at relatively rich mixture condition.

• Journal of the Korean Wood Science and Technology
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• v.44 no.5
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• pp.639-654
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• 2016

This study building materials by relates to human hazard assessment in accordance with the combustion gas SEM, the flame-retardant foam FTIR and cone calorimeter to configure the Forest products of MDF and preservative treated Lauan two kinds of Retardant styrofoam, Styrofoam, Urethane foam and gypsum board four kinds of plastics material by the combustion gas were each analyzed. MDF was burned to the structure of the wood and the glue evenly mixed combustion area preservative treated Lauan, kept constant even in the form of high heat to penetrate deep into the wood flame retardant agents. Retardant styrofoam is due to feed my Dropped dissolved inorganic flame retardant without the fire-stick and confirmed that the weak form of gypsum board, but keep the column. In MDF ammonia ($NH_3$), lethal concentration (750 ppm) compared to 795 ppm, preservative treated Lauan is carbon dioxide ($CO_2$) that was greater than 2.5 times the lethal concentration (100,000 ppm) to 256,965 ppm, the lethal concentration (500 ppm) of hydrogen chloride (HCl). The Urethane greater than 697 ppm, 434 ppm also greatly exceeding the nitrogen dioxide ($NO_2$) lethal concentration (250 ppm) in Retardant styrofoam and 398 ppm was released. It is confirmed that the human body is extremely harmful gas emitted from most of the materials to be utilized as basic data for evaluating the hazard-specific human future building material.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.5
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• pp.509-515
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• 2012

In this study, ${\gamma}-Al_2O_3$ nanoparticles were synthesized by using coflow hydrogen diffusion flames. The synthesis conditions were varied with using several oxygen concentrations in the oxidizing air. The particle characteristics of the flame-synthesized $Al_2O_3$ nanoparticles were determined by examining the crystalline structure, shape, and specific surface area of the nanoparticles. The measured maximum centerline temperature of the flames ranged from 1507.8 K to 1998.7 K. The morphology and crystal structure of the $Al_2O_3$ nanoparticles were determined from SEM images and XRD analyses, respectively. The particle sizes were calculated from measured BET specific surface areas and ranged from 25 nm to 52 nm. From XRD analyses, it was inferred that a large number of the synthesized nanoparticles were ${\gamma}-Al_2O_3$ nanoparticles including ${\theta}-Al_2O_3$ nanoparticles.

• Journal of the Korean Society of Marine Environment & Safety
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• v.18 no.5
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• pp.468-474
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• 2012

In this study, experimental studies were performed for the carbon nanomaterial(CNM) which is catching on as a material for eco-ship. The opposed-flow methane flame was used as a heat source for synthesis of CNM. Ferrocene was used as a catalyst for the synthesis of CNM. These major parameters were $H_2$ mixing rate and sampling positions that synthesize CNMs in opposed-flow diffusion flames. The propensities of CNMs were experimentally determined using SEM and TEM images. The experimental result showed that the amount of CNTs was increased with increasing $H_2$ concentration. It can also be found that the optimal temperature in opposed-flow methane flame for synthesis of CNT was about 1500 K.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.4
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• pp.407-411
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• 2011

The technology of line heating has evolved in various methods. Among them, fossil fuels like ethylene gas and LPG(Liquid Petroleum Gas) are widely used due to their simple utility. In the meantime, the technology implementing high frequency for line heating has also been developed continually, but its manufacturing technology or application includes lots of problems by now. One of the main characteristics of line heating using conventional technolob'Y is the quenching effect followed by heating process. On the other hand, hydrox gas which is mixed by hydrogen and oxygen is a prominent candidate for an application without above shortcomings. Especially, it is found that line heating using hydrox gas is tremendously effective taking low cost as well as low noise. In this paper, a small cell with high efficiency which can minimize installing space is developed to deal with the problem installing in narrow place. Experiments to prove the validation, efficiency and effectiveness is carried out by characterizing in the line heating of steel. It is found that the energy saving of using hydrox gas for line heating is significant and that the deviation performance is reduced by 78~89%. Furthermore, the noise is also reduced as amount of 18.3% though the heating time is not too different.

• 한국신재생에너지학회:학술대회논문집
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• 2009.06a
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• pp.889-892
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• 2009

A microwave plasma torch at the atmospheric pressure by making use of magnetrons operated at the 2.45 GHz and used in a home microwave oven has been developed. This electrodeless torch can be used to various areas, including industrial, environmental and military applications. Although the microwave plasma torch has many applications, we in the present work focused on the microwave plasma torch operated in pure steam and several applications, which may be used in future and right now. For example, a high-temperature steam microwave plasma torch may have a potential application of the hydrocarbon fuel reforming at one atmospheric pressure. Moreover, the radicals including hydrogen, oxygen and hydroxide molecules are abundantly available in the steam torch, dramatically enhancing the reaction speed. Also, the microwave plasma torch can be used as a high-temperature, large-volume plasma burner by injecting hydrocarbon fuels in gas, liquid, and solid into the plasma flame. Lastly, we briefly report an underway research, which is remediation of soils contaminated with oils, volatile organic compounds, heavy metals, etc.