• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.2
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• pp.82-86
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• 2000

Humidity sensors using $TiO_2$ thin films were fabricated on the multi-electrode device by Sol-Gel method and their wettability, surface potential decays and humidity sensing characteristics were investigated. Contact angle of thin films was $28^{\cic}\;at\; 400^{\circ}C$ and surface potential decayed rapidly at $400^{\circ}C$. The specimen showed best humidity sensing characteristics at $400^{\circ}C$. From the results, they were confirmed that humidity sensing characteristics of thin films have connection with contact angle and surface potential decays.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.31A no.4
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• pp.70-76
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• 1994

A humidity sensing device based on a new humidity sensing principle is designed and fabricated in this study. The silicon thermopile is consisted of 25 couples of p-type diffused layer/Al strips. The internal resistance and the Seebeck coefficient are 300kl and 537$\mu$V/K, respectively Fabricated sensors showed linear response characteristics proportional to relative humidity changes with a sensitivity of 9$\mu$V/%RH in the range from 20% to 90%.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.464-467
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• 2002

$TiO_{2}-Co_{3}O_{4}$ humidity sensors were fabricated by conventional ceramic process and their humid sensing characteristics were investigated. The sample which was added 10wt% $Co_{3}O_{4}$ and heat-treated $1200^{\circ}C$ showed the highest sensitivity to humidity changes and improved a linearity. As $Co_{3}O_{4}$ content was increasing, the sensor consists a uniform pore distribution and grain in the surface. This was analyzed by SEM photographs.

• Journal of Industrial Technology
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• v.33 no.A
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• pp.67-72
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• 2013

CNT(carbon nanotube) humidity sensors with plasma treated electrodes exhibit a much faster response time and a higher sensitivity to humidity, compared to untreated CNT and porous Cr electrodes. These results may be partially due to their percolated pore structure being more accessible for water molecules and for expending the diffusion of moisture to the polyimide sensing film, and partially due to the oxygenated surface of CNT films. This paper shows a plasma process effect and selectivity characteristics of CNT film humidity sensor.

• Journal of Sensor Science and Technology
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• v.8 no.6
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• pp.434-439
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• 1999

Differential field effect transistors with double gate metal for integrated humidity sensors have been fabricated and the drain current drift characteristics to relative humidity have been investigated. The aspect ratio was 250/50 for both transistors to get the current difference between the sensing device and non-sensing one. The normalized drain current of the fabricated humidity sensitive field effect transistors increases from 0.12 to 0.3, as relative humidity increases from 30% to 90%.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1531-1533
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• 1997

We prepared polyimide film by electrophoretic deposition onto glass film as a sensing materials of humidity, and treated with plasma discharging as a function of discharging power to improve performance of the sensor. Then evaluated the characteristics of polyimide on humidity.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1472-1474
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• 1994

In this paper, $TiO_2-V_2O_5$ thin films are fabricated by Sol-Gel method and their humidity-sensing characteristics have been investigated. The microstructure of specimen is porous. The humidity-sensing characteristics of thin films are good according to increasing heat treatment temperature and decreasing measurement frequency.

• Polymer(Korea)
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• v.36 no.2
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• pp.169-176
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• 2012

Based on our experience in developing resistive humidity sensor, interdigital gold electrodes with different fingers and gaps have been fabricated on a glass epoxy (GE) substrate using screen printing techniques. The basic structure of the electrode consisted of a 3-, 4- and 5-fingers with gaps of 310 and 460 ${\mu}m$. Gold electrode/GE was prepared by first printing silver nanopaste, followed by consecutive electroless plating of Cu, Ni and then Au. Copolymer of [2-(methacryloyloxy)ethyl] dimethyl benzyl ammonium chloride (MDBAC) and methyl methacrylate (MMA) was used as a humidity-sensing polyelectrolyte, which was fabricated by a screen printing method on the Au electrode/GE substrate. The flexible humidity sensor showed acceptable linearity between logarithmic impedance and relative humidity in the range of 20-95%RH, low hysteresis of 1.5%RH, good response and recovery time of 75 sec at 1 V, 1 kHz, and $25^{\circ}C$. Electrode construction had a significant influence on the humidity-sensing characteristics of polymeric humidity sensors. The activation energy between electrode and ion conducting polyelectrolyte plays an important role in explaining the differences of humidity sensing characteristics such as temperature dependence, sensitivity, linearity and hysteresis.

• Journal of the Korean Ceramic Society
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• v.37 no.6
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• pp.537-544
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• 2000

Thin-film humidity sensor which TiO2, ZrO2, or CeO2 was added to MgCr2O4-based materials, respectively, were fabricated on the alumina substrate by using a resistant-heating evaporator. Thin films were approximately 2${\mu}{\textrm}{m}$ in grain size and shwoed porous microstructures. The resistance of the sensor decreased with increasing the relative humidity and the MgCr2O4-TiO2 sensor had the best humidity-sensing characteristics (linearity in relative humidity versus resistance).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.5
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• pp.436-442
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• 2007

Physical properties and impedance-humidity characteristics of carbon nitride films were investigated for micro-humidity-sensors. Carbon nitride films were deposited in low temperature and low power for application of semiconductor fabrication process, and empirical equation was proposed for thickness evaluation. Deposited films had an uniform and compact surface comparing with previously reported results, which was expected a good candidate for humidity sensing materials. Carbon nitride humidity sensors based on Si substrate revealed good humidity-impedance characteristics with a wide range of relative humidity and showed low hysteresis.