• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1422-1424
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• 1994

This paper deals with piezoresistive humidity sensor using polycrystalline silicon (Poly-Si ) with membrane in sensors of semiconductor. Poly-Si piezoresistors which have no temperature dependancy are deposited on silicon wafer, membrane is formed with micromachining technology, then polyimide is formed as a hygroscopic layer. Whereas the principle of conventional humidify sensors are based on the change in electrical properties of the material, the humidity induced volume change of a polyimide layer leads to a deformation of a silicon membrane in this case. This deformation is transformed into an output voltage by Poly-Si piezoresistive. Wheatstone bridge. Fabricated piezoresistive humidity sensors showed good linearity, response time, and long term stability.

• Korean Journal of Materials Research
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• v.13 no.2
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• pp.120-125
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• 2003

A low melting borosilicate glass frit was used as an adhesion promoter, which enables $MnWO_4$to be sintered with in a reasonable sintering temperature range ($800∼1000^{\circ}C$). The glass was evaluated for glass transition temperature ($Τ_{g}$ X) and thermal expansion coefficient($\alpha$). Mechanical property (Vickers hardness), grain growth, the comparison of lattice parameter and pore distribution of sintered $MnWO_4$ with the frit were methodically discussed. As sintering temperature increased, a typical liquid phase sintering showed the rapid grain growth and high densification of X$MnWO_4$grain, improvement of hardness (until $920^{\circ}C$) and different pore size distribution. Resistance of sintered $MnWO_4$varied from 450k$\Omega$ to 8.8M$\Omega$ under the measuring humidify ranging from 30 to 90%. Thus, the results will contribute to the application of glass frit containing sensor materials and their future use.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2005.11a
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• pp.153-156
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• 2005

Nondestructive sensing of electrospun PYDF web and multi-wall carbon nanotube (MWCNT)/epoxy composites were investigated using electro-micromechanical technique. Electrospinning is a technique used to produce micron to submicron diameter polymeric fibers. Electrospun PVDF web was also evaluated for the sensing properties by micromechanical test and by measurement electrical resistance. CNT composite was especially prepared for high volume contents, 50 vol% of reinforcement. Electrical contact resistivity on humidity sensing was a good indicator for monitoring as for multifunctional applications. Work of adhesion using contact angle measurement was studied to correlate acid-base surface energy between carbon fiber and CNF composites, and will study furher for interfacial adhesion force by micromechanical test.