• 제목/요약/키워드: Hole arrays

검색결과 49건 처리시간 0.029초

나노 구체 리소그라피법에 Ashing과 Annealing 효과를 적용하여 크기조절 가능한 나노패턴의 제조 (Size Tunable Nano Patterns Using Nanosphere Lithography with Ashing and Annealing Effect)

  • 이유림;마흐붑 알람;김진열;정우광;김승대
    • 한국재료학회지
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    • 제20권10호
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    • pp.550-554
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    • 2010
  • This work presents a fabrication procedure to make large-area, size-tunable, periodically different shape metal arrays using nanosphere lithography (NSL) combined with ashing and annealing. A polystyrene (PS, 580 ${\mu}m$) monolayer, which was used as a mask, was obtained with a mixed solution of PS in methanol by multi-step spin coating. The mask morphology was changed by oxygen RIE (Reactive Ion Etching) ashing and temperature processing by microwave heating. The Au or Pt deposition resulted in size tunable nano patterns with different morphologies such as hole and dots. These processes allow outstanding control of the size and morphology of the particles. Various sizes of hole patterns were obtained by reducing the size of the PS sphere through the ashing process, and by increasing the size of the PS sphere through annealing treatment, which resulted in tcontrolling the size of the metallic nanoparticles from 30 nm to 230 nm.

Numerical Study on the Air-Cushion Glass Transportation Unit for LCD Panels

  • Im Ik-Tae;Jeon Hyun-Joo;Kim Kwang-Sun
    • 반도체디스플레이기술학회지
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    • 제5권1호
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    • pp.27-31
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    • 2006
  • Non-contact transportation system using air cushion for the manufacturing of large-sized LCD panels was considered. Flow characteristics between air pad and glass plate was analyzed using computational fluid dynamics method to obtain optimized air pad configurations. Effects of the design variables such as hole arrays from which gas is injected, gas-feeding method into the gas supplying channels, and horizontal and vertical pitches of clusters of holes were studied. Optimized air pad unit gave evenly distributed pressure contour on the glass surface and well-suspended levitation height in the experiment.

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작은 체형의 여성 승객을 고려한 조수석 에어백의 설계 개선 (Improvement of Passenger Airbag Based on the Injury Assessment of the 5th Percentile Female Dummy)

  • 권율;김권희;손창규;김형일
    • 한국자동차공학회논문집
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    • 제20권5호
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    • pp.1-7
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    • 2012
  • Automobile airbag deployment process has been studied with MADYMO software. Based on the FMVSS208 and USNCAP(United States New Car Assessment Program) regulations, four parameters were chosen for the design improvement with reference to the 5th percentile female passenger dummy: time to fire, vent hole size, tether length and tank test pressure of inflator. Sensitivity analyses based on orthogonal arrays show that enhanced protection of small females can be achieved with improved USNCAP rating within the boundary of FMVSS 208.

Multi-Channel Vibrotactile Display for Teleoperated Assembly

  • Thomas Debus;Jang, Tae-Jeong;Pierre Dupont;Robert Howe
    • International Journal of Control, Automation, and Systems
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    • 제2권3호
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    • pp.390-397
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    • 2004
  • This paper presents the design and testing of a multi-channel vibrotactile display. It is composed of a cylindrical handle with four embedded vibrating elements driven by piezoelectric beams. Vibrations are transmitted to the hands through arrays of pins. The device was tested in sensory substitution for conveying force information during a teleoperated peg insertion. Results show that the device is effective in reducing peak forces during the insertion task.

Transformations and Their Analysis from a RGBD Image to Elemental Image Array for 3D Integral Imaging and Coding

  • Yoo, Hoon
    • KSII Transactions on Internet and Information Systems (TIIS)
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    • 제12권5호
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    • pp.2273-2286
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    • 2018
  • This paper describes transformations between elemental image arrays and a RGBD image for three-dimensional integral imaging and transmitting systems. Two transformations are introduced and analyzed in the proposed method. Normally, a RGBD image is utilized in efficient 3D data transmission although 3D imaging and display is restricted. Thus, a pixel-to-pixel mapping is required to obtain an elemental image array from a RGBD image. However, transformations and their analysis have little attention in computational integral imaging and transmission. Thus, in this paper, we introduce two different mapping methods that are called as the forward and backward mapping methods. Also, two mappings are analyzed and compared in terms of complexity and visual quality. In addition, a special condition, named as the hole-free condition in this paper, is proposed to understand the methods analytically. To verify our analysis, we carry out experiments for test images and the results indicate that the proposed methods and their analysis work in terms of the computational cost and visual quality.

Direct Transfer Printing of Nanomaterials for Future Flexible Electronics

  • 이태윤
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.3.1-3.1
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    • 2011
  • Over the past decade, the major efforts for lowering the cost of electronics has been devoted to increasing the packaging efficiency of the integrated circuits (ICs), which is defined by the ratio of all devices on system-level board compared to the area of the board, and to working on a larger but cheaper substrates. Especially, in flexible electronics, the latter has been the favorable way along with using novel nanomaterials that have excellent mechanical flexibility and electrical properties as active channel materials and conductive films. Here, the tool for achieving large area patterning is by printing methods. Although diverse printing methods have been investigated to produce highly-aligned structures of the nanomaterials with desired patterns, many require laborious processes that need to be further optimized for practical applications, showing a clear limit to the design of the nanomaterial patterns in a large scale assembly. Here, we demonstrate the alignment of highly ordered and dense silicon (Si) NW arrays to anisotropically etched micro-engraved structures using a simple evaporation process. During evaporation, entropic attraction combined with the internal flow of the NW solution induced the alignment of NWs at the corners of pre-defined structures. The assembly characteristics of the NWs were highly dependent on the polarity of the NW solutions. After complete evaporation, the aligned NW arrays were subsequently transferred onto a flexible substrate with 95% selectivity using a direct gravure printing technique. As proof-of-concept, flexible back-gated NW field effect transistors (FETs) were fabricated. The fabricated FETs had an effective hole mobility of 0.17 $cm2/V{\cdot}s$ and an on/off ratio of ${\sim}1.4{\times}104$. These results demonstrate that our NW gravure printing technique is a simple and effective method that can be used to fabricate high-performance flexible electronics based on inorganic materials.

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Investigations on the Magneto-optical Properties of Bilayered Co/Ni Micro-patterned Anti-dot Arrays

  • Deshpande, N.G.;Zheng, H.Y.;Hwang, J.S.;Lee, S.J.;Lee, Y.P.;Rhee, J.Y.;Kim, K.W.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.251-251
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    • 2012
  • A lot of studies are undergoing on the magneto-optical (MO) properties of patterned magnetic systems for the reason that they have potential application to information technology such as ultrahigh-speed computing. Moreover, they can be considered as the future candidates for high-density MO storage devices. Not only the technical aspects, but there have been also tremendous interests in studying their properties related to the fundamental physics. The MO Kerr-rotation effects (both in reflected and the diffracted modes) and the magnetic force microscopy (MFM) are very useful techniques to investigate the micromagnetic properties of such periodic structures. Hence, in this study, we report on the MO properties of bilayered Cobalt (Co)/ nickel (Ni) micro-patterned anti-dot arrays. Such a ferromagnetic structure was made by sequentially depositing co (40 nm)/Ni (5 nm) bilayer on a Si substrate. The anti-dot patterning with hole diameter of $1{\mu}m$ was done only on the upper Co layer using photolithography technique, while the Ni underlayer was kept uniform. The longitudinal Kerr rotation (LKR) of the zeroth- and the first-order diffracted beams were measured at an incidence of $30^{\circ}$ by using a photoelastic modulator method. The external magnetic field was applied perpendicularly to the reflected and the diffracted beams using an electromagnet capable of a maximum field of ${\pm}5$ kOe. Significantly, it was observed that the LKR of the first-order diffracted beam is nearly 4 times larger than that of the zeroth-order beam. The simulated results for the hysteresis loops matched qualitatively well with the experimentally obtained ones. In conjunction with the LKR, we also investigated the magnetic-domain structure by using a MFM system, which were analyzed to elucidate the origin of the enhanced MO rotation.

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Dislocations as native nanostructures - electronic properties

  • Reiche, Manfred;Kittler, Martin;Uebensee, Hartmut;Pippel, Eckhard;Hopfe, Sigrid
    • Advances in nano research
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    • 제2권1호
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    • pp.1-14
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    • 2014
  • Dislocations are basic crystal defects and represent one-dimensional native nanostructures embedded in a perfect crystalline matrix. Their structure is predefined by crystal symmetry. Two-dimensional, self-organized arrays of such nanostructures are realized reproducibly using specific preparation conditions (semiconductor wafer direct bonding). This technique allows separating dislocations up to a few hundred nanometers which enables electrical measurements of only a few, or, in the ideal case, of an individual dislocation. Electrical properties of dislocations in silicon were measured using MOSFETs as test structures. It is shown that an increase of the drain current results for nMOSFETs which is caused by a high concentration of electrons on dislocations in p-type material. The number of electrons on a dislocation is estimated from device simulations. This leads to the conclusion that metallic-like conduction exists along dislocations in this material caused by a one-dimensional carrier confinement. On the other hand, measurements of pMOSFETs prepared in n-type silicon proved the dominant transport of holes along dislocations. The experimentally measured increase of the drain current, however, is here not only caused by an higher hole concentration on these defects but also by an increasing hole mobility along dislocations. All the data proved for the first time the ambipolar behavior of dislocations in silicon. Dislocations in p-type Si form efficient one-dimensional channels for electrons, while dislocations in n-type material cause one-dimensional channels for holes.

충돌제트에서의 유량공급 채널 및 제트 홀 배열에 따른 열유동 특성 수치해석 (Numerical Analysis on the Effects of Supply Channel and Jet Hole Arrangement on Heat Flow Characteristics of Impingement Jet)

  • 황병조;정희윤;주원구;조형희
    • 한국추진공학회지
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    • 제20권4호
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    • pp.77-86
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    • 2016
  • 유량공급 채널 및 제트 홀 배열이 충돌제트의 열유동 특성에 미치는 영향을 분석하기 위하여 수치해석을 수행하였다. 유량공급 채널 내에 있는 제트 홀은 전연면 채널의 중심축으로부터 일열 또는 엇갈림 배열로 되어 있다. ICEMCFD 소프트웨어를 사용하여 해석영역을 정렬 격자로 모델링하였으며, 수치해석은 CFD 코드인 CFX 15.0으로 수행하였다. 본 해석 결과의 타당성은 타 연구자들의 실험 및 수치해석 결과와의 비교를 통해 검증하였다. 일열 또는 엇갈림 배열인 경우에 충돌 제트의 질량유량 및 충돌면에서의 Nusselt 수 분포에 대해 비교 분석하였다.

Surface modification for block copolymer nanolithographyon gold surface

  • 황인찬;방성환;이병주;이한보람;김형준
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 추계학술발표대회
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    • pp.33.2-33.2
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    • 2009
  • Block copolymer lithography has attracted great attention for emerging nanolithography since nanoscaleperiodic patterns can be easily obtained through self-assembly process without conventional top-down patterning process. Since the morphologies of self-assembled block copolymer patterns are strongly dependent on surface energy of a substrate, suitable surface modification is required. Until now, the surface modification has been studied by using random copolymer or self-assembled mono layers (SAMs). However, the research on surface modifications has been limited within several substrates such as Si-based materials. In present study, we investigated the formation of block copolymer on Au substrate by $O_2$ plasma treatment with the SAM of 3-(p-methoxy-phenyl)propyltrichloro-silane [MPTS, $CH_3OPh(CH_2)_3SiCl_3$]. After $O_2$ plasma treatment, the chemical bonding states of the surface were analyzed by X-ray photoelectron spectroscopy (XPS). The static contact angle measurement was performed to study the effects of $O_2$ plasma treatment on the formation of MPTS monolayer. The block copolymer nanotemplates formed on Au surface were analyzed by scanning electron microscopy. The results showed that the ordering of self-assembled block copolymer pattern and the formation of cylindrical nano hole arrays were enhanced dramatically by oxygen plasma treatment. Thus, the oxidation of gold surface by $O_2$ plasma treatment enables the MPTS to form the monolayer assembly leading to surface neutralization of gold substrates.

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