• Journal of the Korean Institute of Intelligent Systems
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• 제14권5호
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• pp.648-654
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• 2004

The Mass Flow Controller(MFC) has become crucial in semiconductor manufacturing equipments. It is an important element because the quality and the yield of a semiconductor process are decided by the accurate flow control of gas. Therefore, the demand for implementing the high speed and the highly accurate control of MFCs has been increasing. It is hard to find an article of the control algorithm applied to MFCs. But, it is known that commercially available MFCs adopt PID control algorithms. Particularly, when the system detects the flow by way of heat transfer, the MFC control problem includes the slow response and the nonlinearity. In this paper, MFC control algorithm with a superior performance to the conventional PID algorithm is discussed and the superiority is demonstrated through the experiment. A fuzzy controller was utilized in order to compensate the nonlinearity and the slow response, and the performance is compared with that of an MFC currently available in the market. The control system, in this paper, consists of a personal computer, the data acquisition board and the control algorithm carried out by LabWindows/CVI program on the PC. In addition, a method of estimating the actual flow from the sensor output with the slow response is presented. In conclusion, according to the result of the experiment, the proposed algorithm shows better accuracy and is faster than the conventional controller.

• Applied Chemistry for Engineering
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• 제26권6호
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• pp.737-742
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• 2015

An environmentally favorable solid oxidizer, guanidine dinitramide ($H_2C(NH_2)NH_2N(NO_2)_2$), with high purity and synthesis yield was prepared using guanidine carbonate ($NH_2C(=NH)NH_2{\cdot}1/2H_2CO_3$). Two different crystalline forms (${\alpha}$-form and ${\beta}$-form) were obtained depending on the solvent used and synthesis process. Despite of the same chemical composition, Raman-IR and TGA-DSC revealed that different structures existed between them. In particular, the thermal analysis showed the exothermic temperature of ${\alpha}$-form at $155.7^{\circ}C$ while $191.6^{\circ}C$ for ${\beta}$-form. The caloric value of ${\alpha}$-form was 536.4 J/g which was 2.5 times larger than that of ${\beta}$-form, 1310 J/g. In addition, ${\alpha}$-form was steeply decomposed with one-step variation, but ${\beta}$-form followed a two-step thermal decomposition pattern.

• Journal of the Institute of Electronics Engineers of Korea SD
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• 제37권6호
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• pp.9-16
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• 2000

In order to achieve stiction-free polysilicon surfaces, we have suggested a new class of chemical coating precursors and confirmed their excellent characteristics. The strategy is to adopt dialkyldichlorosilanes (DDS, $R2SiCl_2$) instead of monoalkyltrichlorosilanes (MTS, $RSiCl_3$) such as octadecyltrichlorosilane (OTS) or 1H,1H2H,2H-perfluorodecyltrichlorosilane (FDTS). Dichlorodimethylsilane (DDMS, $(CH_3)2SiCl_2$) in this study is commercially available DDS with two short chains. DDMS in aprotic media spontaneously deposits on the hydrophilic polysilicon surface, which is completely changed to hydrophobic one. When polysilicon surface is exposed to DDMS solution at room temperature, anti-stiction property and hydrophobicity are clearly comparable to FDTS. DDMS is even superior to MTS in reliability and easy handling, which provides high yield. Since interactions among precursor molecules are reduced, conglomeration both in homogeneous solution and on surface can be effectively avoided. Even the cantilevers of 3 mm in length can be protected successfully from the stiction and the final quality of the modified surfaces is much less dependent on temperature. And no difference was found between the processes in ambient environment and in dry box. In addition, DDMS has advantages of remarkably reduced process time and low cost.

• Journal of the Korean Wood Science and Technology
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• 제39권6호
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• pp.459-468
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• 2011

The main purpose of this study was to examine the influence of treatment amounts of Slurry Composting and Biofiltration liquid fertilizer (SCBLF) on biomass growth of Yellow poplar (Liriodendron tulipifera) and to compare bioethanol production from the harvested wood. Relative growth rate, biomass production and leaf characteristics were significantly enhanced by SCBLF treatment and medium treatment plot showed highest value. Nitrogen compounds and water content in SCBLF affected to increase chlorophyll contents which led improving biomass production (64.67%) and glucose contents (6.07%) than control. Organosolv and dilute acid pretreatments were preliminarily carried for bioethanol production, and the pretreatment processes were conducted at all the same solid to liquid ratio (1 : 10), reaction temperature ($150^{\circ}C$), preheating time (40 min) and residence time (10 min). The water insoluble solid recovery of Organosolv pretreatment with 1% sulfuric acid as a catalyst was the lowest and that of medium treatment plot was 44.81%. Exchangeable cations in SCBLF might be affected to increase pretreatment effect. The simultaneous saccharification and fermentation process was followed to determine the ethanol production of the pretreated biomass. The highest ethanol production yield based on initial weight was obtained from high treatment plotby Organosolv pretreatment with 1% sulfuric acid (16.11%). But regarding biomass production, medium treatment plot produced most, and bioethanol production was increased by 72.93% than control.

• Korean Journal of Materials Research
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• 제30권10호
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• pp.542-549
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• 2020

Effects of Sc addition on microstructure, electrical conductivity, thermal conductivity and mechanical properties of the as-cast and as-extruded Al-2Zn-1Cu-0.3Mg-xSc (x = 0, 0.25, 0.5 wt%) alloys are investigated. The average grain size of the as-cast Al-2Zn-1Cu-0.3Mg alloy is 2,334 ㎛; however, this value drops to 914 and 529 ㎛ with addition of Sc element at 0.25 wt% and 0.5 wt%, respectively. This grain refinement is due to primary Al₃Sc phase forming during solidification. The as-extruded Al-2Zn-1Cu-0.3Mg alloy has a recrystallization structure consisting of almost equiaxed grains. However, the as-extruded Sc-containing alloys consist of grains that are extremely elongated in the extrusion direction. In addition, it is found that the proportion of low-angle grain boundaries below 15 degree is dominant. This is because the addition of Sc results in the formation of coherent and nano-scale Al₃Sc phases during hot extrusion, inhibiting the process of recrystallization and improving the strength by pinning of dislocations and the formation of subgrain boundaries. The maximum values of the yield and tensile strength are 126 MPa and 215 MPa for the as-extruded Al-2Zn-1Cu-0.3Mg-0.25Sc alloy, respectively. The increase in strength is probably due to the existence of nano-scale Al₃Sc precipitates and dense Al₂Cu phases. Thermal conductivity of the as-cast Al-2Zn-1Cu-0.3Mg-xSc alloy is reduced to 204, 187 and 183 W/MK by additions of elemental Sc of 0, 0.25 and 0.5 wt%, respectively. On the other hand, the thermal conductivity of the as-extruded Al-2Zn-1Cu-0.3Mg-xSc alloy is about 200 W/Mk regardless of the content of Sc. This is because of the formation of coherent Al₃Sc phase, which decreases Sc content and causes extremely high electrical resistivity.

• Applied Chemistry for Engineering
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• 제19권5호
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• pp.526-532
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• 2008

The proposed $CO_2$ storage technology in the present study is a one-step sequestration process that stabilizes $CO_2$ in a reactor with Serpentine. The advantage of this technology is associated with its high stability of final product so that the entire system is recognized as permanent environment-friendly $CO_2$ removal method. Since the sequestration reaction mechanisms are generally understood that carbonation reaction proceeds with very slow rate, so that pretreatment method to increases reaction rate of $CO_2$ carbonation reaction should be developed. To increase the reactivity of Serpentine with $CO_2$, two different methods of pretreatment are carried out in the present investigation. One is heat-treatment, the other is chemical pretreatment. In this study, only chemical pretreatment is considered leaching method of magnesium from Serpentine using sulfuric acid at the various reaction temperatures, times, and acid concentrations. Experimental results illustrated that pretreatment by sulfuric acid increases surface area of serpentine from $11.1209m^2/g$ to $98.7903m^2/g$ and extracts magnesium compounds. Single variable experiment demonstrated the enhancements of magnesium extraction with increased reaction temperature and time. Amount of magnesium extraction is obtained by using the data of ICP-AES as maximum extraction condition of magnesium is 2 M acid solution, $75^{\circ}C$ and 1hr. After performing chemical pretreatment, carbonation yield increased from 23.24% to 46.30% of weight.

• Korean Journal of Food Science and Technology
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• 제40권5호
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• pp.485-490
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• 2008

In this study, organic tea leaves were characterized with the aim of developing an organic beverage process. The green tea leaves grown using organic farming techniques were collected in Haenam, Korea. Catechins in green tea leaves were extracted by chloroform and ethyl acetate and these were then analyzed quantitatively and qualitatively by HPLC (high pressure liquid chromatography). The color and pH values of the green tea extracts were also measured. The catechin levels of April-harvested, May-harvested and June-harvested, semi-fermented leaves at 0.5% were 66.24, 29.19, 57.11, and 5.27 ${\mu}g/mL$, respectively. Among the detected catechins, the level of (-)-epigallocatechin gallate was the highest while that of (-)-epigallocatechin was not detected. The June-harvested leaves were selected as raw material for development of the green tea beverage, based on the levels of catechins, economic viability and yield of tea extract. As the level of extract increased, the levels of catechins of 0.1, 0.2, 0.5% also increased by 1.5, 11.78 and 41.01 times. From the results of the sensory evaluation of June-harvested leaf-extract, the sensory score of color was the highest in 0.1%, while the flavor and overall quality were the highest in 0.2%.

• Analytical Science and Technology
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• 제18권3호
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• pp.201-205
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• 2005

Tri-octyl amine (TOA) is used in solvent extraction process for radioactive waste. This compound may be degraded to di-octyl amine (DOA), mono-octyl amine (MOA) by radioactive materials. Amount of TOA, DOA and MOA in TOA must be monitored because they production of these compounds means degradation of which leads to a decrease in the extraction yield. Retention behavior for TOA, DOA and MOA are studied with Phenomenex LUNA-$C_{18}$ ($4.6mm{\times}25cm$) analytical column and $CH_3OH:H_2O$ (50 mmol $CH_3COONH_4$) eluent by liquid chromatography. Optimum condition for these compounds is $CH_3OH:H_2O$ (50 mmol $CH_3COONH_4$) = 85 : 15 ratio. TOA, DOA and MOA compounds is well separated within 20 minute. Dynamic range is $30{\sim}160{\mu}g/mL$ for TOA, $5{\sim}100{\mu}g/mL$ for DOA and $0.1{\sim}5{\mu}g/mL$ for MOA, respectively. The detection limit are $0.1{\mu}g/mL$ for TOA, $1{\mu}g/mL$ for DOA (in SCAN mode) and $0.1{\mu}g/mL$ for MOA (in SIM mode) in this system with $20{\mu}L$ sample loop.

• Clean Technology
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• 제19권4호
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• pp.393-400
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• 2013

In this study, Polyethylene wax, which was produced in manufacturing process of high density polyethylene was grafted with maleic anhydride (MAH). The influences of reaction parameters on the graft polymerization as well as the effect of hydrolysis of the anhydride functions were investigated. The results show that the grafting degree increased and conversion of maleic anhydride decreased with an increase in MAH monomer content. This means the highest grafting efficiency for the reaction can be met when MAH monomer content is about 15 wt%. DCP (dicumyl peroxide) and DTBP (di-tert-butyl peroxide) have been used as the initiator and the highest yield of grafting was obtained when the initiator content is about 0.5 wt%. However, It can be seen that the gel content values of this polyethylene wax grafted MAH were below 2%. It was also observed that the grafting degree increased with an increase in reaction temperature and the maximum value was reached 2 hours later. Although MAH functions grafted onto polyethylene wax were mainly in the carboxylic acid forms, some anhydride form of MAH appeared in over 5% of grafting degree. As a result of hydrolysis reaction, it was observed that the conversion of anhydride group into carboxylic acid group was reached up to 10%.

• Journal of the Korean Geotechnical Society
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• 제17권4호
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• pp.289-299
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• 2001

본 연구는 균질 및 2개층 비균질지반에서 사질토지반 상에 놓인 정방형 기초의 극한지지력과 침하에 대하여 고찰하였다. 본 연구는 얕은기초의 거동에 대한 정방형 기초의 크기, 지반 상대밀도, 기초 폭에 대한 상부층의 두께 비(H/B), 상부층 아래 경계면의 경사($\theta$) 그리고 지반강성비의 영향을 규명하기 위하여 모형실험을 수행하였다. 동일 상대밀도에서 지지력 계수($N_{{\gamma}}$)는 일정하지 않으며 기초 폭에 직접적으로 관련되며 지지력계수는 기초 폭이 증가함에 따라 감소하였다. 기초크기의 영향과 구속압력의 영향을 고려하는 Ueno 방법에 의한 극한지지력의 예측값은 고전적인 지지력 산정식보다 더 잘 일치하며 그 값은 실험값의 65% 이상으로 나타났다. $\theta$=$0^{\circ}$인 2개층 지반의 결과에 근거하여, 극한지지력에 대한 하부층 지반의 영향을 무시할 수 있는 한계 상부층 두께는 기초 폭의 2배로 결정되었다. 그러나, 73%의 상부층 상대밀도인 경우는 침하비($\delta$B) 0.05 이하에서만 이 결과가 유효하였다. 경계면이 경사진 2개층 지반의 결과에 근거하여, 상부층의 상대밀도가 느슨할수록 그리고 상부층의 두께가 클수록 극한지지력에 대한 경계면 경사의 영향은 크지 않는 것으로 나타났다. 경계면의 경사가 증가함에 따른 극한침하량의 변화는 경계면이 수평인 경우($\theta$=$0^{\circ}$)를 기준으로 0.82~1.2(상부층 $D_{r}$=73%인 경우) 그리고 0.9~1.07(상부층 $D_{r}$=50%인 경우) 정도로 나타났다.Markup Language 문서로부터 무선 마크업 언어 문서로 자동 변환된 텍스트를 인코딩하는 경우와 같이 특정한 응용 분야에서는 일반 문자열에 대한 확장 인코딩 기법을 적용할 필요가 있을 수 있다.mical etch-stop method for the etching of Si in TMAH:IPA;pyrazine solutions provides a powerful and versatile alternative process for fabricating high-yield Si micro-membranes. the RSC circle, but also to the logistics system in the SLC circle. Thus, the RSLC model can maximize combat synergy effects by integrating the RSC and the SLC. With a similar logic, this paper develops "A Revised System of Systems with Logistics (RSSL)" which combines "A New system of Systems" and logistics. These tow models proposed here help explain several issues such as logistics environment in future warfare, MOE(Measure of Effectiveness( on logistics performance, and COA(Course of Actions) for decreasing mass and increasing velocity. In particular, velocity in logistics is emphasized.