• 한국정밀공학회지
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• 제31권11호
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• pp.999-1006
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• 2014

In this investigation, we explain the sub-sampling technique of white light scanning interferometry (WLSI) to improve the measurement speed. In addition to the previous work using Fourier domain analysis, several methods to extract the height from the correlogram of WLSI are described with the sub-sampling technique. Especially, Fourier-inverse Fourier transformation method adopting sub-sampling technique is proposed and the phase compensation technique is verified with simulation and experiments. The main advantage of sub-sampling is to speed up the measurements of WLSI but the precision such as repeatability is slightly poor. In case of measuring the sample which has high height step or difference, the proposed technique can be widely used to reduce the measurement time.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.84-87
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• 2001

The high speed machining which cam improve the production and quality has been remarkable in die/mold industry with the growth of parts and materials industries. The speed of machine tool increases, but on the other hand, the response of sensors I not being improved. Therefore, the condition monitoring techniques for the machine too, tool and workpiece in high speed machining are incomplete. In this study, characteristics of the tool edge roughness were verified from the high frequency components of cutting force signals acquired by the high speed dynamometer. Also, the experimental evaluation technique for the machinability and condition monitoring in high speed machining was established by analyzing the cutting force, acceleration and surface roughness.

• 한국정밀공학회지
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• 제23권5호
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• pp.190-196
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• 2006

Transparent materials are widely used in the fields of optic parts and bio industry. We have experiment to find out the characteristics of the micromachining inside transparent materials using femtosecond laser pulses. With its non-linear effects by very high peak intensity, filament (plasma channel) was formed by the cause of the self-focusing and the self-defocusing. Physical damage could be found when the intensity is high enough to give rise to the thermal stress or evaporation. At the vicinity of the power which makes the visible damage or modification, the structural modification occurs with the slow scanning speed. According to the polarization direction to the scanning direction, the filament quality is quite different. There is a good quality when the polarization direction is parallel to the scanning direction. For fine filament, we could suggest the conditions of the high numerical aperture lens, the short shift of focusing point, the low scanning speed and the low power below 20 mW. As the examples of optics parts, we fabricated the fresnel zone plate with the $225{\mu}m$ diameter and Y-bend optical wave guide with the $5{\mu}m$ width.

• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.27-32
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• 2008

This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 mm and 400 mm/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 mm and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 kHz. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 mm/s.

• 비파괴검사학회지
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• 제33권3호
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• pp.283-288
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• 2013

This paper describes development of a high speed Doppler OFDI system for non-invasive vascular imaging. Doppler OFDI (optical frequency domain imaging) is one of the phase-resolved second generation OCT (optical coherence tomography) techniques for high resolution imaging of moving elements in biological tissues. To achieve a phase-resolved imaging, two temporally separated measurements are required. In a conventional Doppler OCT, a pair of massively oversampled successive A-lines is used to minimize de-correlation noise at the expense of significant imaging speed reduction. To minimize a de-correlation noise between targeted two measurements without suffering from significant imaging speed reduction, several methods have been developed such as an optimized scanning pattern and polarization multiplexed dual beam scanning. This research represent novel imaging technique using frequency multiplexed dual beam illumination to measure exactly same position with aimed time interval. Developed system has been verified using a tissue phantom and mouse vessel imaging.

• 한국정밀공학회지
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• 제21권4호
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• pp.32-38
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• 2004

Laser-induced thermochemical wet etching of titanium in phosphoric acid has been investigated to examine the feasibility of this method fur fabrication of microstructures. Cutting, drilling, and milling of titanium foil were carried out while examining the influence of process parameters on etch width, etch depth, and edge straightness. Laser power, scanning speed of workpiece, and etchant concentration were chosen as major process parameters influencing on temperature distribution and reaction rate. Etch width increased almost linearly with laser power showing little dependence on scanning speed while etch depth showed wide variation with both laser power and scanning speed. A well-defined etch profile with good surface quality was obtained at high concentration condition. Fabrication of a hole, micro cantilever beam, and rectangular slot with dimension of tess than 100${\mu}{\textrm}{m}$ has been demonstrated.

• 한국전기전자재료학회논문지
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• 제23권2호
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• pp.133-136
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• 2010

Laser direct patterning is one of new methods which are able to replace a conventional photolithography. In order reduce the fabrication cost and to improve the luminous efficiency of AC plasma display panels (PDPs), in this experiment, a Q-switched Nd:$YVO_4$ laser was used to fabricate T-shaped indium tin oxide (ITO) display electrodes. For the laser beam scanning speed from 100 mm/sec to 800 mm/sec, T-shaped ITO patterns were clearly obtained and investigated. The experimental results showed that the optimized T-shaped ITO electrode was obtained when the lasers scanning speed was 300 mm/s.

• 전력전자학회논문지
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• 제8권5호
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• pp.418-426
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• 2003

컴퓨터 모니터를 통해 안구망막의 형태와 두께를 보기 위해서 레이저의 경로차를 이용하는 SLO 장비가 사용되고 있다. 이러한 방법으로 망막의 선명한 3차원 영상을 보기 위해서는 레이저 광경로 시스템의 정확한 동기제어가 필요하다. 이 영상을 얼기 위해서는 평면주사를 하는데 있어서 정밀동기제어가 매우 중요하다. 본 논문에서는 안구의 3차원 영상을 만들기 위해 고속 동기제어를 구현한다. 또한 고속 제어시 부하 관성에 의해 발생하는 위치 응답의 오차를 보상하기 위해서 기존 PI(Proportional-Integral) 제어기에 데드비트 외란 관측기를 추가한다. 제안된 제어시스템은 고속 제어시 발생하는 토크 변화에 강인하고 정밀한 시스템이 된다. 이상의 제안된 시스템의 안정성과 유용함이 컴퓨터 시뮬레이션과 실험을 통하여 확인되었다.

• 한국측량학회:학술대회논문집
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• 한국측량학회 2007년도 춘계학술발표회 논문집
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• pp.379-382
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• 2007

Laser scanning technology with high positional accuracy and high density automation will be widely applied in vast range of fields including geomatics. Especially, the development of laser scanning technology enabling long range information extraction is increasing its full use in civil engineering. The purpose of this study is to extract accurate highway geometric information taking the advantages of scanning technology. Fulfilling this goal, the information of target highway's three-dimensional data was obtained through terrestrial laser scanning technology. In accordance with the result from target highway's geometric information extraction using the information above, laser scanning technology showed faster speed and better accuracy on highway geometric information extraction with reduced cost compared to traditional methods.

• 대한기계학회논문집A
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• 제32권11호
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• pp.943-950
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• 2008

A novel nondestructive testing (NDT) system, which is able to detect a crack with high speed and high spatial resolution, is urgently required for inspecting small cracks on express train wheels. This paper proposes a high speed scan type magnetic camera, which uses the multiple amplifying circuits and the crack indicating pulse output system. The linearly integrated Hall sensors are arrayed in parallel, and the Hall voltages from each sensor in the scanning direction are obtained and amplified. High-speed NDT can be achieved by using the exclusive analog-digital converter and micro-processor because the ${\partial}\;V_H/\;{\partial}$ x value, which provides the most important crack information, can be obtained by buffering and calculating. The effectiveness of the novel method was verified by examine using cracks on the wheel specimen model.