Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Effect of Laser Scanning Speed on the Laser Direct Patterning of T-shaped Indium Tin Oxide (ITO) Electrode for High Luminous AC Plasma Display Panels

고효율 플라즈마 디스플레이 패널을 위한 T-형 ITO 전극의 레이저 직접 패터닝시 레이저 스캔 속도의 영향

  • Published : 2010.02.01
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Abstract

Laser direct patterning is one of new methods which are able to replace a conventional photolithography. In order reduce the fabrication cost and to improve the luminous efficiency of AC plasma display panels (PDPs), in this experiment, a Q-switched Nd:$YVO_4$ laser was used to fabricate T-shaped indium tin oxide (ITO) display electrodes. For the laser beam scanning speed from 100 mm/sec to 800 mm/sec, T-shaped ITO patterns were clearly obtained and investigated. The experimental results showed that the optimized T-shaped ITO electrode was obtained when the lasers scanning speed was 300 mm/s.

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References

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