• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.349-352
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• 1997

A Piezoelectric actuator yields hysteresis effect due to its composed ferroelectric. Hysteresis nonlinearity is neglected when a piezoelectric actuator moves with short stroke. However when it moves with long stroke and high frequency, the hysteresis nonlinearity can not be neglected. The hysteresis nonlinearity of piezoelectric actuator degrades the control performance in precision position control. In this paper, in order to improve the control performance of piezoelectric actuator, an inverse modeling scheme is proposed to compensate the hysteresis nonlinearity problem. And feedforward-feedforward-feedback controller is proposed to give a good tracking performance. The Feedforward controller is inverse hysteresis model, and PID control is sued as a feedback controller. To show the feasibility of the proposed controller and hysteresis modeling, some experiments have been carried out. It is concluded hat the proposed control scheme gives good tracking performance.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.9
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• pp.1011-1017
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• 2011

Servo control loops are a core part in the control architecture of machine tools. Servo control loops manage acceleration, velocity and position of all the axes in a machine tool based on commands. The performance of servo control loops sets the basis for quality of production paris and cycle time reduction. First, this paper presents a general control architecture of machine tools and several control schemes in literature, which can be applicable to machine tools control; including Zero Phase Error Tracking Control (ZPETC) and Cross Coupling Control (CCC). After that, modem control strategies to mitigate the problem of high speed machining are reviewed. In high speed machining, high accelerations excite the machine structure up to high frequencies, thereby exciting the structure's modes of vibration. These structural vibrations need to be damped if accurate positioning or trajectory following is required. Input shaping is an attractive option in dealing with structural vibrations. The advantages and drawbacks of using input shaping technique for machine tools are discussed in detail.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.15 no.5
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• pp.90-96
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• 2001

This paper proposes the hybrid fuzzy control system for fast response time and precision control of auto-equipment which exist disturbance, parameter alteration of system, uncertainty. The purposed system, which provides the improvement in terms of the control region in high speed and precision control, first used the fuzzy control method for fast response time and when the error reaches the preset value, used the frequency-locked method for precision control. The theoretical and experimental studies have been carried out. The presented results from the above investigation show considerably improved performance in the position control of auto-equipment.

• Journal of Institute of Control, Robotics and Systems
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• v.9 no.1
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• pp.22-29
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• 2003

A piezoelectric actuator yields hysteresis effect due to its composed ferroelectric. Hysteresis nonlinearty is neglected when a piezoelectric actuator moves with short stroke. However when it moves with long stroke and high frequency, the hysteresis nonlinearty can not be neglected. The hysteresis nonlinearty of piezoelectric actuator degrades the control performance in precision position control. In this paper, in order to improve the control performance of piezoelectric actuator, an inverse modeling scheme is proposed to compensate the hysteresis nonlinearty. And feedforward - feedback controller is proposed to give a good tracking performance. The Feedforward controller is an inverse hysteresis model, base on neural network and the feedback control is implemented with PID control. To show the feasibility of the proposed controller and hysteresis modeling, some experiments have been carried out. It is concluded that the proposed control scheme gives good tracking performance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.153-154
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• 2006

Development of sorting machine for photo diode and its control system is addressed. The sorting machine for optical communication device requires high positional precision because the alignment is one of the most important point in the sorting process. This sorting method describes how to detect the target chip's angle and position from the wafer. The machine vision system is used for the feedback control. This sorting machine is implemented by motion controller, machine vision and various solenoid valve and is interfaced with RS-232c, GPIB and PCI communication. This system gets the position accuracy within $1{\mu}m$ with our experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1012-1017
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• 2003

The development of a fast, accurate, and inexpensive position-controlled pneumatic actuator that may be applied to a variety of practical positioning applications with various external loads is described in this paper. A novel modified pulso width modulation (MPWM) valve pulsing algorithm allows on/off solenoid valves to be used in place of costly servo valves. A comparison between the system response of standard PWM technique and that of the novel modified PWM technique shows that the control performance is significantly increased. A state feedback controller with position, velocity and acceleration feedback is successfully implemented as the continuous controller. Switching algorithm of control parameter using learning vector quantization neural network (LVQNN) is newly proposed. which estimates the external loads of the pneumatic actuator. The effectiveness of the proposed control algorithms are demonstrated through experiments with various loads.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1995.03a
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• pp.40-62
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool optical device measurement system. In order to keep a high precision displacement resolution it to useful to take a position sensor and feedback of the error. From the practical point of view high-resolution displacement sensor systems are very expensive and it is difficult to make such a sensitive sensor work properly in a poor operational environment of industry. In this study a piezo-electric micro-depth control system which does not require position sensor but piezoelectric voltage feedback has been developed. It is driven by hysteresis-considering reference input voltage calculated in advance and actuator/sensor characteristics of piezoelectric materials. From the result of experiments a fast and stable response of micro-depth control system has been achieved and an efficient technique to control the piezoelectric actuator suggested.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.190-194
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• 2001

Because, Piezo-electric transducer(PZT) transform electric energy into mechanical energy, it is a adequate material for positioning control and force control, take excellent properties as actuator with high speed and high performance. Recently, researches of ultra precision positioning using this PZT are advanced in. In this paper, we use a actuator of PZT, design a positioning apparatus with ultra precision position apparatus as hinge structure. Because of this purpose, before, we were confirmed in control properties of ultra precision stage by FEM method.

• Transactions of Materials Processing
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• v.13 no.3
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• pp.253-261
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• 2004

The machining technology for the brittle materials such as ceramics are applied to the fields of MEMS(micro electromechanical system) by the progress of new machining technologies such as Etching, Diamond machining, Micro drilling, EDM(Electro discharge machining), ECDM(Electro discharge machining), USM(Ultrasonic machining), LBM(Laser beam machining), EBM(Electron beam machining). Especially, the USM technology can be applied to the dieletric brittle materials such as silicon, borosilicate glass, silicon nitride, quartz and ceramics with high aspect ratio. The micro machining system with machining force controlled position servo is developed in this paper and the optimized ultrasonic machining algorithm is constructed by the force controlled position servo control. The load cell is adapted in the force measuring and the servo control algorithm, suit for the ultrasonic machining characteristics, is estabilished with using the PID auto-tunning functions at the PMAC system which is generally adapted in the field of robot industries. The precision force signal amplifier is constructed with high precision operational amplifier AD524. The vacuum adsorption chuck which is made of titanum and internal flow line is engraved, is used in the workpiece fixing. The mahining results by USM shows that there are some deviation between the force command and the actual machining force that the servo control algorithm should be applied in the machining procedures. Therefore, the constant force controlled position servo system is developed for the micro USM system and by the examination machining process in USM, the stable USM system is realized by tracking the average value of machining force.

• Journal of Power Electronics
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• v.7 no.2
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• pp.159-173
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• 2007

In this paper, an intelligent sliding-mode position controller (ISMC) for achieving favorable decoupling control and high precision position tracking performance of permanent-magnet synchronous motor (PMSM) servo drives is proposed. The intelligent position controller consists of a sliding-mode position controller (SMC) in the position feed-back loop in addition to an on-line trained fuzzy-neural-network model-following controller (FNNMFC) in the feedforward loop. The intelligent position controller combines the merits of the SMC with robust characteristics and the FNNMFC with on-line learning ability for periodic command tracking of a PMSM servo drive. The theoretical analyses of the sliding-mode position controller are described with a second order switching surface (PID) which is insensitive to parameter uncertainties and external load disturbances. To realize high dynamic performance in disturbance rejection and tracking characteristics, an on-line trained FNNMFC is proposed. The connective weights and membership functions of the FNNMFC are trained on-line according to the model-following error between the outputs of the reference model and the PMSM servo drive system. The FNNMFC generates an adaptive control signal which is added to the SMC output to attain robust model-following characteristics under different operating conditions regardless of parameter uncertainties and load disturbances. A computer simulation is developed to demonstrate the effectiveness of the proposed intelligent sliding mode position controller. The results confirm that the proposed ISMC grants robust performance and precise response to the reference model regardless of load disturbances and PMSM parameter uncertainties.