• 한국산학기술학회논문지
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• 제6권5호
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• pp.432-438
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• 2005

본 논문에서는 반도체 제조를 위한 AC 서보 모터의 고정도 위치 제어에 관하여 연구하였다. 제어기는 150 MIPS의 고속 처리가 가능한 Tl사의 차세대 모터 제어용 DSP TMS320F2812를 이용하여 컨트롤러를 구성하였으며, 2,500 PPR 분해능의 광학식 증분형 엔코더가 장착 된 100W 용량의 PMSM을 위치 제어 하였다. 위치 제어기를 구성하기 위하여 속도 제어기와 전류 제어기를 하위 루프로 구성하였으며, 회전형 엔코더 4체배 된 신호를 이용하여 최대 10,000 PPR의 위치 제어를 수행 하였다. 이로부터 보다 많은 PPR을 지원하는 엔코더에서도 같은 방법으로 고정도 위치제어가 가능할 것이다.

• 제어로봇시스템학회논문지
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• 제15권9호
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• pp.909-915
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• 2009

This work is to develop a vision system for high precision alignment between upper and lower plates required at the imprinting process of the large LCD flat panel. We compose a gantry-stage that has highly repeated accuracy for high precision alignment and achieves analysis about thermal transformations of stage itself. Position error in the stage is corrected by feedback control from the analysis. This system can confirm alignment mark of upper and lower plates by using two cameras at a time for the alignment of two plates. Pattern matching that uses geometric feature is proposed to consider the recognition problem for alignment mark of two plates. It is algorithm to correct central point and angle for the alignment from the recognized mark of upper and lower plates based on the special characteristics. At the alignment process, revision for error position is performed through Look and Move techniques.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
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• pp.32-35
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• 1997

A recent development in the Flat Panel Display(FPD) industry requires an auto-alignment system which is operated in high speed and high precision. In the FPD production process, aligning photo-mask with respect to guide mark printed in the glass should be accomplished in the accuracy of sub-micron order. So the system has high bandwidth and needs a dedicated control system which is fast and robust enough to control linear motors in precise manner. Proposed auto-alignment system structure in this presentation which consists of the master controller board, the DSP position controller board which controls 3 axis precision linear motors, the servo system and the man machine interface software. Designed and tuned under repeated experiments, the proposed system showed a reasonable performance in the aspect of rise time and steady state error.

• 한국정밀공학회지
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• 제19권6호
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• pp.51-61
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• 2002

A tracking control scheme on the XY ball-screw drive system in the presence of nonlinear dynamic friction is proposed. A nonlinear dynamic friction is regarded as the Lund-Grenoble friction model to compensate effects of friction. The conventional VSC method that often has been used as a non-model-based friction controller has poor tracking performance in high-precision position tracking application since it cannot compensate the friction effect below a certain precision level completely. Thus to improve the precise position tracking performance, we propose the integral type VSC method combined with the friction-model-based observer. Then this control scheme has the high precise tracking performance compared with the non-model-baked VSC method and the PID control method with a similar observer. This fact is shown through the experiment on the XY ball-screw drive system with the nonlinear dynamic friction.

• 한국정밀공학회지
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• 제33권12호
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• pp.1007-1013
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• 2016

This paper presents the development of a magneto-optical encoder for higher precision and smaller size. In general, optical encoders can have very high precision based on the position information of the slate, while their sizes tend to be larger due to the presence of complex and large components, such as an optical module. In contrast, magnetic encoders have exactly the opposite characteristics, i.e., small size and low precision. In order to achieve encoder features encompassing the advantages of both optical and magnetic encoders, i.e., high precision and small size, we designed a magneto-optical encoder and developed a method to detect absolute position, by compensating for the error of the hall sensor using the linear table compensation method. The performance of the magneto-optical encoder was evaluated through an experimental testbed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.461-465
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• 1996

In servo systems such as the computer hard disk, surface mountiong device and robot manipulators, the high precision and high speed are increasingly demanding. In these examples, the repeatable errors exist and the repetitive controller removes these errors effectively by adding signals calculated from the previous cycle errors to the existing feedback controller. The experimental results of the position tracking control and contact force control show that the repetitive control effectively improves the precision of mechanical servo systems.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.344-344
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• 2000

Recently, the demand for high precision and large stroke in linear positioning systems is increasing in industry. A coarse-fine position control system composed of a linear motor and a piezoelectric actuator has such characteristics. Many optimal control laws have been applied to the position control of coarse-fine actuators but most of them did not take account into constraints. In this study, model predictive control (MPC) method with constraints is applied to the position control of the coarse-fine actuator and the performance of MPC is compared with those of conventional control laws.

• 유공압시스템학회논문집
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• 제8권2호
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• pp.29-35
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• 2011

These days the injection molding work and press work are in the trend of needing the precision control of position and pressure in a high speed. On the other hand the digital computer technology is developing rapidly. And recently the digital servo controller using micro controller become to be used more broadly, because of the merit of digital communication. In this study the sequential control of hydraulic system switching from position to pressure and to position is tried using the HACD(Hydraulic Axis Controller Digital for electrohydraulic drives) which is manufactured by BoschRexroth. Through this, the possibility of the precision sequential control using the digital servo controller HACD is examined.

• 한국정밀공학회지
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• 제11권6호
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• pp.117-126
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• 1994

This paper describes an application step of a $R^{-{\theta}}$ method which measures circular movements in machining centers. The detection of composite errors of circular movements and a high precision cutting method in machining centers were investigated by the analysis of data measured by $R^{\theta }$method which can detect the rotating angle and is applicable to variable measuring radius. When the error by squareness error and unbalance of position-loop-gain were mixed, the detection method of each error was proposed. Although the errors by squarenss error and backlash compensation were mixed, the errors by squareness error be detected. If the errors by unbalance of position-loop-gain and backlash compensation were mixed, the errors by unbalance of position-loop-gain could not detected. A high precision cutting mehod, which uses the NC program compensated by using feed-back data from error measured by the $R^{\theta }$method, was proposed.

• 전력전자학회논문지
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• 제12권1호
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• pp.19-26
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• 2007

본 논문은 외란 변화에 대하여 정밀위치 변화를 줄이고자 외란 관측기를 사용하였고 이를 유도전동기에 적용하였다. 제안된 알고리즘이 외란 변화에 대한 유도전동기의 정밀 제어에 강인함을 보이고 있다. 외란 관측기가 있는 이 시스템은 높은 실효성과 외란 보상에 뛰어난 데드비트 컨트롤을 사용하고 있다. 이 효과를 보이기 위해서 모의 실험은 Simulink를 사용하였고 DSP6416 및 TCP-IP 네트워크 보드와 연동하여 실험하였다.