• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2002년도 춘계학술대회 논문집
• /
• pp.15-19
• /
• 2002

With the rapid development of industrial technologies, the demand for high precision products has been increasing drastically. For this reason, the need for developing of high performance machine tool, which can ensure high precision, is desired in the industrial fields. Technologies on the spindle system manufacture, guideway manufacture, error compensation, design of bed structure, protection against vibrations, and system integration are core technology for developing of high precision machine tools. Especially, among these, design of spindle system, which is leading precision and manufacturing technique. is one of the most important technologies. A high speed and high precision spindle system, which will be used for final machining of ferrule, is designed considering the effect caused by thermal, cutting torque, cutting farce, and work-piece materials. The detail process of analysis is presented.

• JSTS:Journal of Semiconductor Technology and Science
• /
• 제2권4호
• /
• pp.280-287
• /
• 2002

We present technical issues involved in the development of actuators and sensors for applications to high-precision Micro Electro Mechanical System (MEMS). The technical issues include fabrication uncertainty and noise disturbance, causing major difficulties for MEMS to achieve high-precision actuation and detection functions. For nano-precision actuators, we solve the fabrication instability and electrical noise problems using digital actuators coupled with nonlinear mechanical modulators. For the high-precision capacitive sensors, we present a branched finger electrodes using high-amplitude anti-phase sensing signals. We also demonstrate the potential applications of the nanoactuators and nanodetectors to high-precision positioning MEMS.

• 한국정밀공학회지
• /
• 제23권1호
• /
• pp.193-200
• /
• 2006

To perform the finish grinding process of ferrules which are widely used as fiber optic connectors, a high-precision centerless grinding machine is necessary. The high-precision centerless grinding machine is consisted of the hydrostatic GW and RW spindle systems, hydrostatic RW feeding mechanism, RW swivel mechanism, on-machine GW and RW dressers, and concrete-filled steel bed. In this study, the thermal characteristics of the high-precision centerless grinding machine such as the temperature distribution, temperature rise and thermal deformation, are estimated based on the virtual prototype of the grinding machine and the heat generation rates of heat sources related to the machine operation conditions. The reliability of the predicted results is demonstrated by the temperature characteristics measured from the physical prototype. Especially, the predicted and measured results show the fact that the high-precision centerless grinding machine has very stable thermal characteristics.

• 한국정밀공학회지
• /
• 제25권7호
• /
• pp.39-46
• /
• 2008

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the milling experiments, the positional accuracy has been readily achieved within 0.2 micron over the typical 20 mm stroke, and the path error over 2 micron was reduced within 0.2 micron. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2007년도 추계학술대회 논문집
• /
• pp.121-122
• /
• 2007

• 한국분말야금학회:학술대회논문집
• /
• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
• /
• pp.340-341
• /
• 2006

High functional micro devices are demanded in a variety of fields. For realising such demands, development of high-precision micro-components installed in the devices are needed. To achieve high-precision in the mold processing of micro-components, the development of mold materials, i.e., the development of WC-Co hardmetal with higher hardness and fracture strength is essential, together with the developments of processing technology of high precision mold and mold-forming technology of high precision micro-components, etc. The role of development of the finer submicro-grained hardmetal in a NEDO national project aiming the integrated development of these all technologies and some results are mainly explained.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2001년도 춘계학술대회 논문집
• /
• pp.769-773
• /
• 2001

Linear hydrostatic bearings have high stiffness, high damping and excellent guided motion straightness, and thus they are suitable for high precision machine tools. This paper describes the procedure for design and test of a high precision stamping press with vertical hydrostatic bearings. For a hydrostatic bearing set designed and manufactured, measurements were made for the straightness, repeatability and stiffness. They are found to be 1.36$\mu\textrm{m}$/100mm, 0.19$\mu\textrm{m}$/100mm and 1, 261N/$\mu\textrm{m}$ respectively. Based upon the experiences with the hydrostatic bearing, an improved design of the precision press is proposed.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1996년도 춘계학술대회 논문집
• /
• pp.646-650
• /
• 1996

In this paper, A hydrostatic bearing spindle for high precision machining and a motor built-in spindle for high speed machining are developed toobtain the high precision machining accuracy of the prototype lathe. The sliding bearing with fluoric resin (turcite) pad is adopted for improving the damping charateristics of guide ways. The funning accuracy of moving elements isestimated to confirm the validity of application on the prototype; the high precision CNC lathe. The surface roughness of Cupper and Aluminum machined by the hydrostatic spindle are 0.07 .mu. m and 0.10 .mu. mRmax. The surface roughness of Aluminium machined by the built-in spindle are 0.10 .mu. mRmax. From this results, it is venified that the prototype lathe is effective to high precision maching.

• 한국정밀공학회지
• /
• 제14권3호
• /
• pp.82-88
• /
• 1997

In this paper, the development of a precision CNC lathe prototype for mirror surface machining is presented. To obtain high precision machining accuracy, a hydrostatically supported precision spindle and a sliding guideway with turcite pad are adopted as the motion elements. The machining accuracy of the prototype machine, and the motional accuracy of its motion elements are tested and evaluated to confirm the validity of the application of these elements on the prototype. The hydrostatic spindle shows 0.09 .mu. m of rotational accuracy and the guideway shows about 0.8 .mu. m/170mm of horizontal straightness. The sur- face roughness of cupper and aluminium cylinder machined by the prototype machine with diamond tool are 0.07 .mu. m and 0.10 .mu. m Rmax respectively. From these results, it is verified that the prototype lathe is avail- able for high precision machining.

• 한국공작기계학회논문집
• /
• 제12권3호
• /
• pp.68-74
• /
• 2003

Any one of the high precision spindle systems and guide way systems, the high stiffness of structure, the error compensation during assembly, high accuracy control system is inevitable technology for development of high precision machine tools. Especially, among these, design of spindle system is one of the most important technologies leading high precision of machine tool and high quality of manufactured products. A high speed and high precision spindle system, which will be used for final machining of ferrule, is designed considering the effect of heat cutting torque, cutting fore, and work-piece materials. The detailed design and analysis process are presented.