• Title/Summary/Keyword: High-aspect-ratio

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반도체 소자의 3차원 집적에 적용되는 through-Silicon-via (TSV) 배선의 구조형성

  • Im, Yeong-Dae;Lee, Seung-Hwan;Yu, Won-Jong;Jeong, O-Jin;Kim, Sang-Cheol;Lee, Han-Chun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2008.11a
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    • pp.21-22
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    • 2008
  • $SF_6/O_2$ 플라즈마 에칭을 통한 반도체 칩의 3차원 집적에 응용되는 through-silicon-via (TSV) 구조형성 연구를 수행하였다. Si via 형상은 $SF_6$, $O_2$의 가스 비율과 에칭이 되는 Silicon 기판의 온도에 의존함을 알수 있었다. 또한 Si via 형상에서 최소의 언더컷 (undercut) 과 측벽에칭 (local bowing) 은 black Si이 나타나는 공정조건에서 나타남을 확인하였다. 더 나아가 저온을 이용한 via 형성시 via 측벽에 형성되는 passivation layer와 mask의 성질이 저온으로 인해 high-aspect-ratio를 갖는 via를 형성할 수 있음을 알 수 있었다.

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Preparation of catalyst-doped TiO2 nanotubes by anodization and its applications: single step anodization vs. potential shock (양극산화를 통한 촉매 도핑된 타이타늄 나노튜뷰 산화물 제조 및 응용 :단일양극산화법 vs. 전기충격법)

  • Choe, Jin-Seop;Yu, Hyeon-Seok;Kim, Yeon-Mi;Kim, Seon-Gyu;Seong, Mi-Jeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.05a
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    • pp.50-50
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    • 2015
  • 양극산화를 통하여 타이타늄 산화물 나노튜뷰를 제조하고 전기화학적 촉매능을 향상시키기 위하여 다양한 방법의 촉매 도핑방법을 소개한다. 특히, 단일(single step) 양극산화법과 전기충격법(potential shock)를 통한 촉매도핑법을 비교하며 장횡비(high aspect ratio)가 높은 나노튜뷰에 균일하고 효율적인 촉매도핑법 및 도핑된 나노튜뷰를 활용한 물분해 실험결과를 소개한다.

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Multi-temporal image derived Ratio Vegetation Index and NDVI in a landslide prone region

  • Paramarthalingam, Rajakumar;Shanmugam, Sanjeevi
    • Proceedings of the KSRS Conference
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    • 2003.11a
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    • pp.257-259
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    • 2003
  • Landuse maps are prepared from satellite imagery and field observations were conducted at various locations in the study area. Compared to the field data and NDVI and RVI thematic maps, NDVI is better than RVI, because it compensates for changing illumination conditions, surface slope, aspect and other factors. Clouds, water and snow have negative values for RVI and NDVI. Rock and bare soils have similar reflectance in both NIR and visible band, so RVI and NDVI are near zero. In forest areas with good vegetation cover, NDVI is high and landslide occurrence is less. But if annual and biennial vegetations are present and if cultivation practices are changed frequently, NDVI is medium and landslide occurrence is moderate. In areas where deforestation and settlement is in progress, NDVI is less and landslide occurrence is more. The NDVI FCC thematic map may be used as an important layer in GIS application for landslide studies. Analyzing other layers such as slope, rainfall, soil, geology, drainage, lineament, etc with NDVI FCC layer will give a better idea about the identity of landslide prone areas.

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Fabrication of polymer thick film resistor and study on resistance variation regarding curing temperature (폴리머 후막 저항체의 제작 및 경화 온도에 따른 저항 값 변화에 대한 연구)

  • Yoo, Myong-Jae;Lee, Sang-Myong;Park, Seong-Dae;Kang, Nam-Kee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.212-213
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    • 2006
  • Polymer thick film resistor paste was fabricated using various materials. Inorganic materials of carbon black and graphite were selected as fillers and epoxy resin was selected as organic material. Solvent with high boiling temperature was applied to adjust viscosity. A designed test coupon pattern was used to evaluate fabricated resistors. Aspect ratio of 1 was selected for evaluating resistor values. Electrical properties of fabricated resistors were measured and their values analyzed in relation to paste composition. PTF fabricated using carbon black as fillers achieved resistor value of $530{\Omega}/sq$.

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Analysis of Unsteady Heat Transfer of Radiatively Heated Stacked Disks (복사가열되는 적층원판의 비정상 열전달해석)

  • 이주호;송태호;현재민
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.18 no.1
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    • pp.156-165
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    • 1994
  • Unsteady heat conduction in stacked disks in a furnace has been numerically solved The effects of relevant parameters such as disk spacing, aspect ratio, environmental temperature, Biot nember, etc. have been investigated. The highest temperature appears at the disk edge and the lowest at the center. Penetration of heat form the surface to the center requires some time. Heating should be slow for uniform temperature rise. Geometric parameters complicates the radiative and conductive heat transfer. Though the resulting dependence of temperature nonuniformity on various parameters is complicated, high uniformity of temperature is in general available by low Biot number and/or low environmental temperature.

차세대 STI Gap Fill 방법의 연구

  • Yu, Jin-Hyeok;Kim, Hui-Dae;Han, Jeong-Hun;Gang, Dae-Bong;Lee, Dae-U;Seo, Seung-Hun;Lee, Nae-Eung;Son, Jong-Won
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2007.04a
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    • pp.151-152
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    • 2007
  • 최근들어 Device 크기가 100nm 이하로 줄어듦에 따라 High Density Plasma Chemical Vapor Deposition(HDP-CVD) 기술로는 100nm 이하의 gap에 Aspect ratio가 6:1 이상 되는 STI(Shallow Trench Isolation) 구조를 Void 없이 채우는 것이 불가능해 지고 있다. 이를 극복하기 위하여 여러 방면으로 연구가 수행되어지고 있다. 그 방법 중의 하나인 Dep/Etch/Dep Cycle이 이번 연구에서 사용되었으며, 일반적인 HDP CVD보다 더 낮은 압력에서 증착과 식각이 수행되었다. 그 결과 다른 여러 방법들보다 좋은 막질을 얻을 수 있었으며, Gap fill 성능을 향상 시킬 수 있었다.

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Free vibration of symmetrically laminated quasi-isotropic super-elliptical thin plates

  • Altunsaray, Erkin
    • Steel and Composite Structures
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    • v.29 no.4
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    • pp.493-508
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    • 2018
  • Free vibration analysis of super-elliptical composite thin plates was investigated. Plate is formed by symmetrical quasi-isotropic laminates. Rayleigh-Ritz method was used for parametric analysis based on the governing differential equations of Classical Laminated Plate Theory (CLPT). Simply supported and clamped boundary conditions at the periphery of plates were considered. Parametric study was performed for the effect of different lamination type, aspect ratio, thickness and super-elliptical power on natural frequencies. Convergence study and validation of isotropic case were achieved. A number of design parameters like different dimensions, structure systems, panel sizes, panel thicknesses, lamination sequences, boundary conditions and loading conditions must be considered in the production of composite ships. The number of possible combinations practically may be so high that a parametric study should be carried out in order to determine the optimum design parameters rapidly during the preliminary design stage. The use of Rayleigh-Ritz method could make this parametric study possible. Thereby it might be decreasing the consumption of time, material and labor. Certain results for some different super-elliptical powers presented in tabulated form in Appendix for designers as well.

Effect of parapets to pressure distribution on flat top of a finite cylinder

  • Ozmen, Y.
    • Wind and Structures
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    • v.17 no.5
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    • pp.465-477
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    • 2013
  • In this paper, the effects of parapets on the mean and fluctuating wind pressures which are acting on a flat top of a finite cylinder vertically placed on a flat plate have experimentally been investigated. The aspect ratio (AR) of cylinder is 1 and the Reynolds number (Re) based on cylinder diameter and free stream velocity is 150000. The pressure distributions on the flat top and the side wall of the finite cylinder immersed in a simulated atmospheric boundary layer have been obtained for different parapet heights. The large magnitudes of mean and minimum suction pressures occurring near the leading edge were measured for the cases with and without parapet. They shift to the further downstream on the circular top with increasing parapet height. It is seen that the parapets reduce the local high suction on the top up to 24%.

Nonlocal geometrically nonlinear dynamic analysis of nanobeam using a meshless method

  • Ghadiri Rad, Mohammad Hossein;Shahabian, Farzad;Hosseini, Seyed Mahmoud
    • Steel and Composite Structures
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    • v.32 no.3
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    • pp.293-304
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    • 2019
  • In the present paper, the element free Galerkin (EFG) method is developed for geometrically nonlinear analysis of deep beams considering small scale effect. To interpret the behavior of structure at the nano scale, the higher-order gradient elasticity nonlocal theory is taken into account. The radial point interpolation method with high order of continuity is used to construct the shape functions. The nonlinear equation of motion is derived using the principle of the minimization of total potential energy based on total Lagrangian approach. The Newmark method with the small time steps is used to solve the time dependent equations. At each time step, the iterative Newton-Raphson technique is applied to minimize the residential forces caused by the nonlinearity of the equations. The effects of nonlocal parameter and aspect ratio on stiffness and dynamic parameters are discussed by numerical examples. This paper furnishes a ground to develop the EFG method for large deformation analysis of structures considering small scale effects.

Analytical analysis for the forced vibration of CNT surrounding elastic medium including thermal effect using nonlocal Euler-Bernoulli theory

  • Bensattalah, Tayeb;Zidour, Mohamed;Daouadji, Tahar Hassaine
    • Advances in materials Research
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    • v.7 no.3
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    • pp.163-174
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    • 2018
  • This article studies the free and forced vibrations of the carbon nanotubes CNTs embedded in an elastic medium including thermal and dynamic load effects based on nonlocal Euler-Bernoulli beam. A Winkler type elastic foundation is employed to model the interaction of carbon nanotube and the surrounding elastic medium. Influence of all parameters such as nonlocal small-scale effects, high temperature change, Winkler modulus parameter, vibration mode and aspect ratio of short carbon nanotubes on the vibration frequency are analyzed and discussed. The non-local Euler-Bernoulli beam model predicts lower resonance frequencies. The research work reveals the significance of the small-scale coefficient, the vibrational mode number, the elastic medium and the temperature change on the non-dimensional natural frequency.