• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.8
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• pp.780-784
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• 2006

We present high aspect ratio air-core solenoid inductors with $100{\mu}m\;and\;200{\mu}m$ tall via structures on Pyrex wafer. The effect of various parameters such as different number of turns, via heights, pitch distance between turns on inductor's radio frequency (RF) characteristics have been studied. The highest Q factor we obtained from various solenoid inductors is 72.8 at 9.7 GHz, which was produced by a 3-turn inductor.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.39 no.4
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• pp.301-307
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• 2015

The diameter of a proton beam emanating from the MC-50 cyclotron is about 2-3 mm with Gaussian distribution. This widely irradiated proton beam is not suitable for semiconductor etching, precise positioning, and micromachining, which require a small spot. In this study, a beam cutting method using a microhole is proposed as an economical alternative. We produced a microhole with aspect ratio, average diameter, and thickness of 428, $21{\mu}m$, and 9 mm, respectively, for cutting the proton beam. By using this high-aspect-ratio microhole, we conducted machinability tests on microstructures with sizes of tens of ${\mu}m$. Additionally, the results of simulation using GEANT4 and those of the actual experiment were compared and analyzed. The outcome confirmed the possibility of implementing a micro process technology for the fabrication of three-dimensional microstructures of 20 micron units using the MC-50 cyclotron with the microhole.

• Korean Journal of Materials Research
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• v.22 no.7
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• pp.374-378
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• 2012

In an effort to overcome the problems which arise when fabricating high-aspect-ratio TSV(through silicon via), we performed experiments involving the void-free Cu filling of a TSV(10~20 ${\mu}m$ in diameter with an aspect ratio of 5~7) by controlling the plating DC current density and the additive SPS concentration. Initially, the copper deposit growth mode in and around the trench and the TSV was estimated by the change in the plating DC current density. According to the variation of the plating current density, the deposition rate during Cu electroplating differed at the top and the bottom of the trench. Specifically, at a current density 2.5 mA/$cm^2$, the deposition rate in the corner of the trench was lower than that at the top and on the bottom sides. From this result, we confirmed that a plating current density 2.5 mA/$cm^2$ is very useful for void-free Cu filling of a TSV. In order to reduce the plating time, we attempted TSV Cu filling by controlling the accelerator SPS concentration at a plating current density of 2.5 mA/$cm^2$. A TSV with a diameter 10 ${\mu}m$ and an aspect ratio of 7 was filled completely with Cu plating material in 90 min at a current density 2.5 mA/$cm^2$ with an addition of SPS at 50 mg/L. Finally, we found that TSV can be filled rapidly with plated Cu without voids by controlling the SPS concentration at the optimized plating current density.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2008.10a
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• pp.382-385
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• 2008

In the present study, the effect of cold reduction ratio on the spheroidization rate of SK85 high carbon steel sheet was investigated. High carbon steel sheet fabricated by POSCO was soaked at $850^{\circ}C$ for 2 hr in a box furnace and then treated at $570^{\circ}C$ and $670^{\circ}C$ for 10 min in a salt bath furnace followed by water quenching to obtain a fine pearlite structure and coarse pearlite structure. Cold rolling was conducted on the sheets by reduction ratios of 20, 30, and 40 % and heat treatment for spheroidization was carried out at $720^{\circ}C$ for the various time intervals from 1 to 32 hrs. Area fraction of spheroidized cementite was measured with an image analyzer as a function of cold reduction ratios and duration times.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.281-281
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• 2014

The field emission properties of GaN are reported in the present study. To be a good field emitter, it requires a low work function, high aspect ratio, and strong mechanical stability. In the case of GaN, it has a quite low work function (4.1eV) and strong chemical/mechanical/thermal stabilities. However, so far, it was difficult to fabricate vertical GaN nanostructures with a high aspect ratio. In this study, we successfully achieved vertically well aligned GaN nanostructures with chemical vapor-phase etching methods [1] (Fig. 1). In this method, we chemically etched the GaN film using hydrogen chloride and ammonia gases at high temperature around $900^{\circ}C$. This process effectively forms vertical nanostructures without patterning procedure. This favorable shape of GaN nanostructures for electron emitting results in excellent field emission properties such as a low turn-on field and long term stability. In addition, we observed a uniform fluorescence image from a phosphor film attached at the anode part. The turn-on field for the GaN nanostructures is found to be about $0.8V/{\mu}m$ at current density of $20{\mu}A$/cm^2. This value is even lower than that of typical carbon nanotubes ($1V/{\mu}m$). Moreover, threshold field is $1.8V/{\mu}m$ at current density of $1mA$/cm^2. The GaN nanostructures achieved a high current density within a small applied field range. We believe that our chemically etched vertical nanostructures are the promising structures for various field emitting devices.

• Journal of the Korean institute of surface engineering
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• v.53 no.3
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• pp.124-129
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• 2020

This study is for the development of high temperature ALD SiO₂ film process, optimized for gap-fill process in manufacturing memory products, using a space-divided PE-ALD system equipped with an independent control dual plasma system and orbital moving unit. Space divided PE-ALD System has high productivity, and various applications can be applied according to Top Lid Design. But space divided ALD system has a limitation to realize concentric deposition map due to process influence due to disk rotation. In order to solve this problem, we developed an orbit rotation moving unit in which disk and wafer. Also we used Independent dual plasma system to enhance thin film properties. Improve productivity and film density for gap-fill process by having deposition and surface treatment in one cycle. Optimize deposition process for gap-fill patterns with different depths by utilizing our independently controlled dual plasma system to insert N₂and/or He plasma during surface treatment, Provide void-free gap-fill process for high aspect ratio gap-fill patterns (up to 50:1) with convex curvature by adjusting deposition and surface treatment recipe in a cycle.

• Microbiology and Biotechnology Letters
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• v.45 no.1
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• pp.1-11
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• 2017

In this review, we focus on one of the most attractive biomaterials, microfibrillated cellulose (MFC). MFC, a type of nanocellulose, mainly originates from cellulose in lignocellulosic biomass. MFC represents one of incredible important natural resources due to its abundancy, renewability, and sustainability. MFC is produced through mechanical pretreatment, and it is composed of various sizes of microfibers, ranging from a few nanometers to a few micrometers. Because of the heterogenetic compositions of MFC, it possesses superior properties as a material, such as high surface area, high aspect ratio, and peculiar insolubility as a biomaterial. These properties allow MFC to be used in various bio-industries, from the traditional pulp industry to the high-tech food/bio/chemical/medical industries. However, it is difficult to use MFC on a commercial scale owing to the high energy input required during its production and the challenge of controlling its reactivity. Therefore, future studies should be focused on accurately characterizing MFC's surface morphologies, regulating its characteristics in a desirable direction, and standardizing proper guidelines for the analysis of surface morphologies its analysis.

• Structural Engineering and Mechanics
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• v.53 no.5
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• pp.939-956
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• 2015

In this study, in order to propose an efficient model to predict the torque capacity of steel fiber reinforced concrete (SFRC) beams, the existing experimental data related to torsional response of beams is reviewed. It is observed that existing data neglects the effects of some parameters on the variation of torque capacity. Thus, an experimental research was also conducted to obtain the effects of neglected parameters. In the experimental study, a total of seventeen SFRC beams are tested against torsion. The parameters considered in the experiments are concrete compressive strength, steel fiber aspect ratio, volumetric ratio of steel fibers and longitudinal reinforcement ratio. The effect of each parameter is discussed in terms of torque versus unit angle of twist graphs. The data obtained from this experimental research is also combined with the data got from previous studies and employed in artificial neural network (ANN) analysis to estimate the ultimate torque capacity of SFRC beams. In addition to parameters considered in the experiments, aspect ratio of beam cross-section, yield strengths of both transverse and longitudinal reinforcements, and transverse reinforcement ratio are also defined as parameters in ANN analysis due to their significant effects observed in previous studies. Assessment of the accuracy of ANN analysis in estimating the ultimate torque capacity of SFRC beams is performed by comparing the analytical and experimental results. Comparisons are conducted in terms of root mean square error (RMSE), mean absolute error (MAE) and coefficient of efficiency ($E_f$). The results of this study revealed that addition of steel fibers increases the ultimate torque capacity of reinforced concrete beams. It is also found that ANN is a powerful method and a feasible tool to estimate ultimate torque capacity of both normal and high strength concrete beams within the range of input parameters considered.

• Computers and Concrete
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• v.9 no.2
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• pp.153-169
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• 2012

The contribution of steel fibers on the 28-day compressive strength of high-performance steel fiber reinforced concrete was investigated, is presented. An extensive experimentation was carried out over water-cementitious materials (w/cm) ratios ranging from 0.25 to 0.40, with silica fume-cementitious materials ratios from 0.05 to 0.15, and fiber volume fractions ($V_f$= 0.0, 0.5, 1.0 and 1.5%) with the aspect ratios of 80 and 53. Based on the test results of 44 concrete mixes, mathematical model was developed using statistical methods to quantify the effect of fiber content on compressive strength of HPSFRC in terms of fiber reinforcing index. The expression, being developed with strength ratios and not with absolute values of strengths, is independent of specimen parameters and is applicable to wide range of w/cm ratios, and used in the mix design of steel fiber reinforced concrete. The estimated strengths are within ${\pm}3.2%$ of the actual values. The model was tested for the strength results of 14 mixes having fiber aspect ratio of 53. On examining the validity of the proposed model, there exists a good correlation between the predicted values and the experimental values of different researchers. Equation is also proposed for the size effect of the concrete specimens.

• Computers and Concrete
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• v.13 no.2
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• pp.255-270
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• 2014

Impact performance of high-performance concrete (HPC) and SFRC at 28-day and 56-day under the action of repeated dynamic loading was studied. Silica fume replacement at 10% and 15% by mass and crimped steel fiber ($V_f$ = 0.5%- 1.5%) with aspect ratios of 80 and 53 were used in the concrete mixes. Results indicated that addition of fibers in HPC can effectively restrain the initiation and propagation of cracks under stress, and enhance the impact strengths and toughness of HPC. Variation of fiber aspect ratio has minor effect on improvement in impact strength. Based on the experimental data, failure resistance prediction models were developed with correlation coefficient (R) = 0.96 and the estimated absolute variation is 1.82% and on validation, the integral absolute error (IAE) determined is 10.49%. On analyzing the data collected, linear relationship for the prediction of failure resistance with R= 0.99 was obtained. IAE value of 10.26% for the model indicates better the reliability of model. Multiple linear regression model was developed to predict the ultimate failure resistance with multiple R= 0.96 and absolute variation obtained is 4.9%.