• Title/Summary/Keyword: High temperature pressure sensor

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Fabrication of High-resistive ZnO Films Using Zinc acetate as Precursor and Their Humidity-sensing Properties (Zinc acetate를 precursor로 한 고저항 ZnO막의 제조 및 습도감지 특성)

  • Ma, T.Y.;Kim, S.H.;Kim, Y.I.
    • Journal of Sensor Science and Technology
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    • v.5 no.1
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    • pp.37-42
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    • 1996
  • ZnO films have been deposited on oxide grown Si wafers by the conventional thermal evaporation method. Anhydrous zinc acetate was directly heated and sublimed in the laboratory-made brass boat. The substrates temperature varied from $200^{\circ}C$ to $600^{\circ}C$. Oxygen has been flowed into the deposition chamber to change the partial pressure of oxygen. The films deposited at high oxygen pressure exhibited higher resistivity than films at low pressure. X-Ray Diffraction(XRD), Energy Dispersive Spectroscopy(EDS) and Rutherford Backscattering Spectrometry (RBS) were conducted on the films to reveal the crystallinity and composition of the ZnO films. The ZnO films deposited at high oxygen pressure were extremly sensitive to the humidity of higher than 70 % RH.

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Implementation of sensor network based health care system for diabetes patient

  • Kim, Jeong-Won
    • Journal of information and communication convergence engineering
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    • v.6 no.4
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    • pp.454-458
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    • 2008
  • It can improve human being's life quality that all people can have more convenient medical service under pervasive computing environment. For a pervasive health care application for diabetes patient, we've implemented a health care system, which is composed of three parts. Various sensors monitor both outer and inner environment of human such as temperature, blood pressure, pulse, and glycemic index, etc. These sensors form zigbee based sensor network. And medical information server accumulates sensing values and performs back-end processing. To simply transfer these sensing values to a medical team is a low level's medical service. So, we've designed a new service model based on back propagation neural network for more improved medical service. Our experiments show that a proposed healthcare system can give high level's medical service because it can recognize human's context more concretely.

TWO TYPES OF ACTIVE NOISE CONTROL SYSTEM USING MFB LOUDSPEAKER

  • Nishimura, Yoshitaka;Shimada, Yasuyuki;Usagawa, Tsuyoshi;Ebata, Masanao
    • Proceedings of the Acoustical Society of Korea Conference
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    • 1994.06a
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    • pp.764-769
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    • 1994
  • The impedance of an electro-acoustic transducer can be controlled by motional feedback, and the noise in a duct can be reduced actively by adjusting the impedance using an additional sound. In this paper, two approaches for active noise control using motional feedback (MFB) loudspeaker are described. First configuration uses an external sensor to pickup of source directly. In this configuration, the adaptation of controller is necessary to compensate the change of transfer function from noise source to control poing. The second configuration uses a new adaptive algorithm specialized for peridic noise. Because this configuration does not require any reference input and the error sensor couples very tightly with control loudspeaker, this MFB system itself is independent of the duct condition. No microphone are required in both configurations, so that a more reliable and stable active control system can be realized under severe conditions such as high pressure, high temperature, dust, flow and so on.

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Analysis of Cylinder Compression Pressure & Valve Timing by Motoring Current & Crank Signal during Cranking (모터링시 전류 파형과 크랭크각 센서를 이용한 기관의 압축압력 및 밸브 타이밍 분석)

  • Kim, In-Tae;Park, Kyoung-Suk;Shim, Beom-Joo
    • Transactions of the Korean Society of Automotive Engineers
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    • v.19 no.5
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    • pp.45-50
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    • 2011
  • Compression pressure of individual cylinder and valve timing have big influence on combustion pressure, indicated mean effective pressure (IMEP), emission, vibration, combustion noise and many other combustion parameters. Conventional method, however, to check compression pressure uniformity is done by mechanical pressure gage and valve timing is checked manually. This conventional method causes inaccuracy of cylinder pressure measurement because of different cranking speed results from battery status and temperature. Also to check valve timing, related FEAD parts should be disassembled and timing mark should be checked. This study describes and suggests new methodology to measure compression pressure by analysis of start motor current and to check valve timing by cylinder pressure with high accuracy. Results, it is found that detection of bulky as well as small leaky cylinder is possible by cranking motor current analysis and wrong valve timing can be detected by cylinder pressure analysis and cam and crank sensor signal.

Data Monitoring System for Activation Analysis Based on Fuel Heater of Diesel Cars (디젤차량용 연료히터의 활성화분석용 데이터 모니터링 장치)

  • Lee, Bo-Hee;Son, Byong-Min;Zhao, Xiang;Yoon, Dal-Hwan
    • Journal of IKEEE
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    • v.18 no.2
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    • pp.179-184
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    • 2014
  • In this paper, we have developed a data monitoring system for activation analysis based on fuel heater of diesel cars. The light oil of diesel engine below a constant temperature be changed to the waxing materials of a semisolid status like a paraffin, and then it may not start. In order to evaluate an engine activation performance, we suggest an engine start time with an change between an extremely low temperature and high temperature, a delay time goes with heater resistor and current and pressure. So, we have developed sensor module system that can obtain the operational status data between fuel line and fuel heater, and evaluate the performance of fuel heater through monitoring of a temperature and pressure. Finally, we can gather the temperature and pressure data of this system with mobile terminal, remotely and propose an utility of this system that can find problems of fuel heater through measured data.

Structural and temperature coefficient of resistance characteristics of colossal magnetoresistance Mn oxides prepared by RF sputtering

  • Choi, Sun-Gyu;Ha, Tae-Jung;Reddy, A.Sivasankar;Yu, Byoung-Gon;Park, Hyung-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.361-361
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    • 2007
  • A lot of efforts have been paid to develop infrared imaging systems in last decades. Bolometer has a wide range of applications from military to commercial, such as military night vision, medical imaging system and so on. Bolometer is a resistive sensor that detects temperature changes through resistance change. To improve detecting ability, bolometer should have a good resistive film which has high temperature coefficient of resistance (TCR) value. Colossal magnetoresistance (CMR) $L_{1-x}A_xMnO_3$ (where L and A are trivalent rare-earth ions and divalent alkaline earth ions, respectively.) are received attention to apply bolometer resistive film because it has a high TCR property which was discovered in the metal to semiconductor phase transition temperature region. In this work, CMR films were deposited on various substrates in relative low substrate temperature by RF magnetron sputtering. The influence of deposition parameters such as substrate temperature, gas partial pressure, and so on have been studied. The structural and TCR properties of the films were also investigated for applying to microbolometer.

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Micromachined ZnO Piezoelectric Pressure Sensor and Pyroelectric Infrared Detector in GaAs

  • Park, Jun-Rim;Park, Pyung
    • Journal of Electrical Engineering and information Science
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    • v.3 no.2
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    • pp.239-244
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    • 1998
  • Piezoelectric pressure sensors and pyroelectric infrared detectors based on ZnO thin film have been integrated with GaAs metal-semiconductor field effect transistor (MESFET) amplifiers. Surface micromachining techniques have been applied in a GaAs MESFET process to form both microsensors and electronic circuits. The on-chip integration of microsensors such as pressure sensors and infrared detectors with GaAs integrated circuits is attractive because of the higher operating temperature up to 200 oC for GaAs devices compared to 125 oC for silicon devices and radiation hardness for infrared imaging applications. The microsensors incorporate a 1${\mu}$m-thick sputtered ZnO capacitor supported by a 2${\mu}$m-thick aluminum membrane formed on a semi-insulating GaAs substrate. The piezoelectric pressure sensor of an area 80${\times}$80 ${\mu}$m2 designed for use as a miniature microphone exhibits 2.99${\mu}$V/${\mu}$ bar sensitivity at 400Hz. The voltage responsivity and the detectivity of a single infrared detector of an area 80${\times}$80 $\mu\textrm{m}$2 is 700 V/W and 6${\times}$108cm$.$ Hz/W at 10Hz respectively, and the time constant of the sensor with the amplifying circuit is 53 ms. Circuits using 4${\mu}$m-gate GaAs MESFETs are fabricated in planar, direct ion-implanted process. The measured transconductance of a 4${\mu}$m-gate GaAs MESFET is 25.6 mS/mm and 12.4 mS/mm at 27 oC and 200oC, respectively. A differential amplifier whose voltage gain in 33.7 dB using 4${\mu}$m gate GaAs MESFETs is fabricated for high selectivity to the physical variable being sensed.

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An experimental study on the liquid rocket engine combustion gas cooling (액체로켓 엔진 연소가스 냉각에 관한 실험적 연구)

  • 김현중;유석진;임하영;우유철
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2003.05a
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    • pp.266-269
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    • 2003
  • During liquid rocket engine combustion, the resulting combustion gas has flow characteristics of high temperature and high velocity. An experimental study was performed to obtain basic data for a flame deflector design that is endurable under such flow characteristics. While the injected-water cools down the combustion plume, temperature and pressure of the plume was measured. As the experiment is being performed, gas temperature was measured using infrared cameras, and the gas temperature data was compared with the temperature data from the sensor in the plume. With the results of this experiment, we were able to obtain applicable temperature data for flame deflector design and predict the performance and structural strength required for installation of water injector.

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Design and fabrication of wafer scale microlens array for image sensor using UV-imprinting (UV 임프린팅을 이용한 이미지 센서용 웨이퍼 스케일 마이크로렌즈 어레이 설계 및 제작)

  • Kim, Ho-Kwan;Kim, Seok-Min;Lim, Ji-Seok;Kang, Shin-Ill
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.10a
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    • pp.100-103
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    • 2007
  • A microlens array has been required to improve light conversion efficiency in image sensors. A microlens array can be usually fabricated by photoresist reflow, hot-embossing, micro injection molding, and UV-imprinting. Among these processes, a UV-imprinting, which is operated at room temperature with relatively low applied pressure, can be a desirable process to integrate microlens array on image sensors, because this process provides the components with low thermal expansion, enhanced stability, and low birefringence, furthermore, it is more suitable for mass production of high quality microlens array. In this study, to analyze the optical properties of the wafer scale microlens array integrated image sensor, another wafer scale simulated image sensor chip array was designed and fabricated. An aspherical square microlens was designed and integrated on a simulated image sensor chip array using a UV-imprinting process. Finally, the optical performances were measured and analyzed.

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The Developement of a Wind Direction/Speed Measurement Equipment Using RTD or Piezo Sensors (RTD 및 피에조 센서를 활용하는 풍향/풍속 측정장치 개발)

  • Joo, Jae-Hun;Kim, Dong-Hyun;Gong, Byung-Gunn;Lee, Jin-Ho;Choi, Jung-Keyng
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2011.05a
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    • pp.827-830
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    • 2011
  • In this paper, a wind speed & direction module and the DSP(Digital Signal Processor) sensor interface circuit board are proposed. This DSP system accepts and process the informations from a wind speed & direction module, the atmospheric pressure sensor, the ambient air temperature sensor and transfers it to the PC monitering system. Especially, a wind speed & direction module and a DSP hardware are directly designed and applied. A wind speed & direction module have a construction that it have four film type RTD(Resistive Temperature Detectors) or film type Piezo sensors adhered around the circular metal body for obtaining vector informations about wind. By this structure, the module is enabled precise measurement having a robustness about vibration, humidity, corrosion. A sensor signal processing circuit is using TMS320F2812 TI(Texas Instrument) Corporation high speed DSP.

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