• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.53-57
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• 2006

This paper describes a novel processing technique for fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for super-temperature MEMS applications. PDMS (polydimethylsiloxane) mold is fabricated on SU-8 photoresist using standard UV photolithographic process. Liquid precursor is injected into the PDMS mold. Finally, solid polymer structure is cross-linked using HIP (hot isostatic pressure) at $400^{\circ}C$, 205 bar. Optimum pyrolysis and annealing conditions are determined to form a ceramic microstructure capable of withstanding over $1400^{\circ}C$. The fabricated SiCN ceramic microstructure has excellent characteristics, such as shear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}{\Omega}$) and BDV (min. 1.2 kV) under optimum process condition. These fabricated SiCN ceramic microstructures have greater electric and physical characteristics than bulk Si wafer. The fabricated SiCN microstructures would be applied for supertemperature MEMS applications such as heat exchanger and combustion chamber.

• The Journal of Engineering Geology
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• v.18 no.1
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• pp.83-92
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• 2008

In order to analyze infiltration characteristics of rainfall in soil, two laboratory experiments were conducted using an amplitude domain reflectometry (ADR) sensor and a pore water pressure meter (PWP) in this study. The first experiment is to understand the dependency of volumetric water content and temperature for standard sand and weathered granite soil. The second experiment is a laboratory flume test with changes of rainfall condition. As the results of the dependency experiment, the volumetric water content is increased with increase of the output voltage measured by the ADR sensor in both the standard sands and weathered granite soil. Furthermore, the results also indicate necessity of consideration of the temperature dependency under the condition of high volumetric water contents from 0.15 to 0.45. In the flume test, two measurement devices are detected to the variation of volumetric water content and pore water pressure at the installation point of the flume. In especial, the measured values of ADR4 and PWP3 installed on the lower part of slope are higher than those of the others. It means that the lower part of slope plays a role of a runoff face and a beginning point of slope failure.

• Journal of Sensor Science and Technology
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• v.1 no.2
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• pp.131-145
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• 1992

This paper has been described a process technology for the fabrication of Si-on-insulator(SOI) transducers and circuits. The technology utilizes Si-wafer direct bonding(SDB) and mechanical-chemical(M-C) local polishing to create a SOI structure with a high-qualify, uniformly thin layer of single-crystal Si. The electrical and piezoresistive properties of the resultant thin SOI films have been investigated by SOI MOSFET's and cantilever beams, and confirmed comparable to those of bulk Si. Two kinds of pressure transducers using a SOI structure have been proposed. The shifts in sensitivity and offset voltage of the implemented pressure transducers using interfacial $SiO_{2}$ films as the dielectrical isolation layer of piezoresistors were less than -0.2% and +0.15%, respectively, in the temperature range from $-20^{\circ}C$ to $+350^{\circ}C$. In the case of pressure transducers using interfacial $SiO_{2}$ films as an etch-stop layer during the fabrication of thin Si membranes, the pressure sensitivity variation can be controlled to within a standard deviation of ${\pm}2.3%$ from wafer to wafer. From these results, the developed SDB process and the resultant SOI films will offer significant advantages in the fabrication of integrated microtransducers and circuits.

• Advances in aircraft and spacecraft science
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• v.5 no.4
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• pp.499-513
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• 2018

One of the major problems in glass fiber reinforced epoxy (GFRE) composite pipes is the durability under water absorption. This condition is generally recognized to cause degradations in strength and mechanical properties. Therefore, there is a need for an intelligent system for detecting the absorption rate and computing the mass of water absorption (M%) as a function of absorption time (t). The present work represents a new non-destructive evaluation (NDE) technique for detecting the water absorption rate by evaluating the dielectric properties of glass fiber and epoxy resin composite pipes subjected to internal hydrostatic pressure at room temperature. The variation in the dielectric signatures is employed to design an electrical capacitance sensor (ECS) with high sensitivity to detect such defects. ECS consists of twelve electrodes mounted on the outer surface of the pipe. Radius-electrode ratio is defined as the ratio of inner and outer radius of pipe. A finite element (FE) simulation model is developed to measure the capacitance values and node potential distribution of ECS electrodes on the basis of water absorption rate in the pipe material as a function of absorption time. The arrangements for positioning12-electrode sensor parameters such as capacitance, capacitance change and change rate of capacitance are analyzed by ANSYS and MATLAB to plot the mass of water absorption curve against absorption time (t). An analytical model based on a Fickian diffusion model is conducted to predict the saturation level of water absorption ($M_S$) from the obtained mass of water absorption curve. The FE results are in excellent agreement with the analytical results and experimental results available in the literature, thus, validating the accuracy and reliability of the proposed expert system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1033-1036
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• 2002

Wafer bonding methods such as fusion and anodic bonding suffer from high temperature treatment, long processing time, and possible damage to the micro-scale sensor or actuators. In the localized bonding process, beating was conducted locally while the whole wafer is maintained at a relatively low temperature. But previous research of localized heating has some problems, such as non-uniform soldering due to non-uniform heating and micro crack formation on the glass capsule by thermal stress effect. To address this non-uniformity problem, a new heater configuration is being proposed. By keeping several points on the heater strip at calculated and constant potential, more uniform heating, hence more reliable wafer bonding could be achieved. The proposed scheme has been successfully demonstrated, and the result shows that it will be very useful in hermetic packaging. Less than 0.2 ㎫ contact Pressure were used for bonding with 150 ㎃ current input for 50${\mu}{\textrm}{m}$ width, 2${\mu}{\textrm}{m}$ height and 8mm $\times$ 8mm, 5mm$\times$5mm, 3mm $\times$ 3mm sized phosphorus-doped poly-silicon micro heater. The temperature can be raised at the bonding region to 80$0^{\circ}C$, and it was enough to achieve a strong and reliable bonding in 3minutes. The IR camera test results show improved uniformity in heat distribution compared with conventional micro heaters. For gross leak check, IPA (Isopropanol Alcohol) was used. Since IPA has better wetability than water, it can easily penetrate small openings, and is more suitable for gross leak check. The pass ratio of bonded dies was 70%, for conventional localized heating, and 85% for newly developed FP scheme. The bonding strength was more than 30㎫ for FP scheme packaging, which shows that FP scheme can be a good candidate for micro scale hermetic packaging.

• The Journal of the Korea institute of electronic communication sciences
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• v.8 no.6
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• pp.907-915
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• 2013

Tire Pressure Monitoring System (TPMS) is an auxiliary safety system for recognizing the condition of tires based on the pressure and temperature data transmitted from the sensor unit installed on a tire of the vehicle. Using TPMS, a driver can frequently check the state of tires and it aids to maintain the optimum running condition of the vehicle. Since TPMS must utilize the wireless communication technique to transmit data from a sensor unit to a signal processing unit installed in the vehicle, it suffers from interference signals caused by various external electrical or electronic devices. In order to suppress high-power interference signals, we employ beamforming techniques based on the uniform linear antenna array. As the number of the antennas is increased, the performance of the interference suppression is improved. However, there is the limit of the number of antennas, installed in the center of a vehicle, because of its size. In this paper, we compare and analyze the performance of the beamformer, when reducing the interelement spacing of antennas, to increase the number of the receiving antennas. For the performance analysis of the beamformers, we consider the switching beamformer and minimum-variance distortionless-response (MVDR) beamformer for TPMS, recently proposed.

• Journal of Sensor Science and Technology
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• v.29 no.5
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• pp.342-347
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• 2020

In this study, a portable total-phosphorus (TP) monitoring system utilizing a photocatalytic-reaction-based pretreatment method is proposed, fabricated, and characterized. Commercial TP monitoring systems are only used in laboratories because of their complex monitoring procedure, bulk-size, and high-cost. In particular, pretreatment in commercial TP monitoring systems is performed at high temperatures (> 120 ℃) and pressure (> 1.1 kg cm^-2) making it difficult to minimize the scale of the systems. The proposed TP monitoring system employs a pretreatment method with a photocatalytic reaction; thus, its size can be reduced, as photocatalytic reactions occur at room temperature and atmospheric pressure. Analytes with various TP concentrations are pretreated using the proposed portable TP monitoring system and are quantitatively measured with an LED and a photodiode.

• Journal of Sensor Science and Technology
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• v.18 no.5
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• pp.377-384
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• 2009

The ultrasonic hyperthermia for oncology has been developed and studied. The HIFU(high intensity focused ultrasound) is the most recent method to treat the tumor by using ultrasound. In this study, an insertion-type transducer for treating a prostate cancer, which can focus the ultrasonic beam mechanically and electrically, was designed and developed. The developed transducer was composed of three arrays, and each array has 32 elements. For the purpose of the mechanical focusing, both side arrays are slanted to the center array by $15^{\circ}$. With this structure, NFL(near field length) was set up as 30 mm. The PZT-4 and two matching layers were used, and the backing layer was excepted to prevent energy losses. The acoustic field analysis and the heating test were performed to evaluate the performance of developed transducer. The shape of an acoustic field, peak pressure, and acoustic pressure distribution were compared with numerical simulation. The NFL was 32 mm, the beam width was 5 mm, focal area was $40\;mm^2$, and peak pressure was 5.5 MPa. With heating by using developed transducer, the temperature increased up to $33^{\circ}C$ at focal zone. As a result of this study, the usefulness of suggested transducer for prostate cancer hyperthermia was confirmed by the acoustic field analysis and the heating test with TMM(tissue mimicking) phantom.

• Journal of the Korean earth science society
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• v.41 no.6
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• pp.575-587
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• 2020

Meteorological phenomena are observed by the Korea Meteorological Administration in a variety of ways (e.g., surface, upper-air, marine, ocean, and aviation). However, there are limits to the meteorological observation of the planetary boundary layer (PBL) that greatly affects human life. In particular, observations using a sonde or aircraft require significant observational costs in economic terms. Therefore, the goal of this study was to measure and analyze the meteorological factors of the vertical distribution of the see-land breeze among local meteorological phenomena using meteorological drones. To investigate the spatial distribution of the see-land breeze, a same integrated meteorological sensor was mounted on each drone at three different points (seaside, bottom of mountain, and mountainside), including the Boseong tall tower (BTT) at the Boseong Standard Weather Observatory (BSWO) in the Boseong region. Vertical profile observations for air temperature, relative humidity, wind direction, wind speed, and air pressure were conducted up to 400 m every 30 minutes from 1100 LST to 1800 LST on August 4, 2018. The spatial characteristics of meteorological phenomena for temperature, relative humidity, and atmospheric pressure were not shown at the four points. Strong winds (~8 m s-1) were observed from the midpoint (~100 m) at strong solar radiation hour, and in the afternoon the wind direction changed from the upper layer at the inland area to the west wind. It is expected that the analysis results of the lower atmospheric layer observed using the meteorological drone may help to improve the weather forecast more accurately.

• Journal of Sensor Science and Technology
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• v.24 no.4
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• pp.264-269
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• 2015

An infrared (IR) bolometer measures the change of resistance by absorbing incident IR radiation and generates a signal as a function of the radiation intensity. Since a bolometer requires temperature stabilization and light filtering except for the infrared rays, it is essential for the device to be packaged meeting conditions that above mentioned. Minimization of heat loss is needed in order to stabilize temperature of bolometer. Heat loss by conduction or convection requires a medium, so the heat loss will be minimized if the medium is a vacuum. Therefore, vacuum packaging for bolometer is necessary. Another important element in bolometer packaging is germanium (Ge) window, which transmits IR radiation to heat the bolometer. To ensure a complete transmittance of IR light, anti-reflection (AR) coatings are deposited on both sides of the window. Although the transmittance of Ge window is high for IR rays, it is difficult to use frequently in low-price IR bolometer because of its high price. In this paper, we fabricated IR window by utilizing silicon (Si) substrate instead of Ge in order to reduce the cost of bolometer packaging. To enhance the IR transmittance through Si substrate, it is textured using Reactive Ion Etching (RIE). The texturing process of Si substrate is performed along with the change of experimental conditions such as gas ratio, pressure, etching time and RF power.