• 동력기계공학회지
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• 제2권2호
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• pp.67-72
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• 1998

To improve control performance, especially positioning speed, of a pneumatic positioning system, dynamic characteristics of a control valve should be considered. In case we design controller including dynamic characteristics of a control valve, it's not easy to design controller gain using simple state feedback because degree of a control system is increased. This study designed controller using loop shaping of $H_{\infty}$ control theory for a model composed of a pneumatic actuator and a control valve, and positioning experiment using this controller was performed. As a result, it was verified that the controller is useful for high speed positioning of a pneumatic positioning system.

• 한국정밀공학회지
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• 제15권11호
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• pp.76-82
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• 1998

In this study, the Ball screw and Servo motor Mechanism is considered as a High Speed Tool Feed System for the machining of a piston of a reciprocating engine. For the machining of a piston, that shapes oval, high speed servo mechanism is needed as a positioning of a cutting tool, and the stroke of tool is 0.1 mm ~ 1 mm. Ball screw and servo motor Mechanism is available very much because this mechanism is used widely in general machine. This Mechanism has been designed with the use of the decrease in mass and partial wear of the ball screw for high speed positioning of tool. Also the periodic learning control method with the inverse transfer function compensation has been applied to the positioning control for the high accuracy positioning of tool. These applications lead the achievement of the machining of a piston with an accuracy of 5${\mu}{\textrm}{m}$ at 2500 rpm in CNC turning.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.118-122
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. For composition of this technology, the development of system with high speed and high resolution is needed. At start point and end position vibration must be repressed on this system for composition of position control. This vibration is arisen nose, is increased setting time, is reduced accuracy. Especially, repressed for the lead with high speed. The small actuator with high speed and high resolution is need to repression against this residual vibration. This actuator is, for example, piezo actuator, piezoelectric material that converting from electronic signal to mechanical force is adequate material, beacause of control of control to position and force. In this study, piezo electric material is used to actuator, ultra precision positioning apparatus with stage of hinge structure is designed, simulation is performed, control performance is tested by producing apparatus. For easy usage and stability in industrial field, we perform to simulation and to position control test by digital PID controller.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.977-981
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• 2000

Direct drive linear motors have large potential for use as high speed machine tool feed units since they can increase machining rates and improve servo accuracy by eliminating gear related machining problems. So, in this paper, characteristic of 2-axis linear motor feed unit are studied and control gain are adjusted considering positioning, velocity, acceleration and static stiffness. We confirm linear motor feed unit are affected value of control gain sensitively, because drive directly. From the experiment, this feed unit has l${\mu}{\textrm}{m}$ micro step resolution, 5.7${\mu}{\textrm}{m}$ positioning accuracy and under 60${\mu}{\textrm}{m}$ circularity.

• 한국생산제조학회지
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• 제9권6호
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• pp.164-169
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. As such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. Control performance and stability analysis were performed in advance by modeling and designing the controller with Simulink.

• 동력기계공학회지
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• 제2권2호
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• pp.60-66
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• 1998

Positioning performance with a normal pneumatic positioning system, is mainly affected by friction force on the actuator and nonlinear characteristics of the control valve. We proposed a positioning system which is composed of a pneumatic actuator and high speed control valve. for accurate and speedy positioning. Driving piston on the actuator is mounted with externally pressurized air bearings to clear the friction force. This paper studies a method in order that improves positioning ability of the pneumatic positioning system considering the nonlinear characteristics of the control valve and the actuator.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.617-620
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. Is such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. We will examine the control performance and stability before manufacturing the real apparatus by using MATLAB SIMULINK based or pre-designed controller and system modeling.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
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• pp.221-226
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• 1999

It can be acquired the high effective productivity through of high speed, precision of machine tools, and then, machine tools will be got a competitive power. Industrially advanced countries already developed that the high speed feed is 50m/min using the high speed ball screw. Also, a lot of problems have happened the feed and servo drive system. It is necessary to study about the character of positioning accuracy, heat generation and high speed/accuracy control for feed/servo drive system of high speed/accuracy. In this study, we make use of high performance vertical machine center with a ball screw of large-scale-lead. Also, we'll apply the high-speed/accuracy control technology in this part of feedforward control, multi-buffering block size, etc. Using the design of the mechanical element and high-speed precision control, the basic design concept can be established.

• Journal of Electrical Engineering and Technology
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• 제13권5호
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• pp.2116-2124
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• 2018

Magnetic levitation system with the advantages of non-contact, no friction and no wear can satisfy the requirement of high precision and high speed positioning. In this paper, magnetic levitation positioning stage which mainly consists of planar coil and HALBACH permanent magnet array and its control and driving system are designed. Magnetic levitation system is a highly nonlinear and strongly coupled complex system and its control performance can be influenced by the uncertainty and external disturbance. So exact feedback linearization method is used to realize exact linearization and decoupling, and a strategy of sliding mode control based on disturbance observer is proposed to compensate the uncertainty and external disturbance. Detailed proofs of observer's convergence property and system stability are derived. Both the simulation and experiment results verify the effectiveness of sliding mode control algorithm based on disturbance observer.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.190-194
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• 2001

Because, Piezo-electric transducer(PZT) transform electric energy into mechanical energy, it is a adequate material for positioning control and force control, take excellent properties as actuator with high speed and high performance. Recently, researches of ultra precision positioning using this PZT are advanced in. In this paper, we use a actuator of PZT, design a positioning apparatus with ultra precision position apparatus as hinge structure. Because of this purpose, before, we were confirmed in control properties of ultra precision stage by FEM method.