• Proceedings of the IEEK Conference
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• 1998.10a
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• pp.629-632
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• 1998

This paper presents a new and simple technique to realize high Q inductor on low resistivity silicon wafer with 6 $\Omega$.cm. This technique is very compatible with bipolar and CMOS standard silicon process. By forming the deep and narrow trenches on the low resistivity wafer substrate under inductor pattern, oxidizing and filling with undoped polysilicon, the low resistivity silicon wafer acts as high resistivity wafer being suitable for the fabrication of high Q inductor. By using this technique the quality factor (Q) for 8-turn spiral inductor was improved up to max. 10.3 at 2 ㎓ with 3.0 $\mu\textrm{m}$ of metal thickness. The experiment results show that Q on low resistivity silicon wafer with the trench technique have been improved more than 2 times compared to the conventional low resistivity silicon wafer without trenches.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.18 no.4
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• pp.137-139
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• 2008

Floating zone, neutron transmutation-doped and magnetic Czochralski silicon crystals are being widely used for fabrication power devices. To improve the quality of these devices and to decrease their production cost, it is necessary to use large-diameter wafers with high and uniform resistivity. Recent developments in the crystal growth technology of Czochralski silicon have enable to produce Czochralski silicon wafers with sufficient resistivity and with well-controlled, suitable concentration of oxygen. In addition, using Czoehralski silicon for substrate materials may offer economical benefits, First, Czoehralski silicon wafers might be cheaper than standard floating zone silicon wafers, Second, Czoehralski wafers are available up to diameter of 300 mm. Thus, very large area devices could be manufactured, which would entail significant saving in the costs, In this work, the conventional Czochralski silicon crystals were grown with higher oxygen concentrations using high pure polysilicon crystals. The silicon wafers were annealed by several steps in order to obtain saturated oxygen precipitation. In those wafers high resistivity over $5,000{\Omega}$ cm is kept even after thermal donor formation annealing.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2004.09a
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• pp.446-449
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• 2004

High resolution geophysical imaging to delineate costal aquifer and seawater- freshwater interface has been applied in Baesu-eup, Yeonggwang-gun, Jeolla province Electrical resistivity information from vertical electrical sounding and 2-D electrical resistivity survey is key parameter to map equivalent Nacl concentration map over the survey area. Seismic velocity from refraction tomographic survey, on the other hand, gives more reliable information on the subsurface stratagraphy than electrical resistivity methods which frequently suffer from low resolution due to masking effect. We imaged high-resolution 3-D structure of costal aquifer by correlating the electrical resistivity with seismic velocity, and mapped equivalent NaCl concentration map using resistivity and hydro-geological information from well logging.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.55-58
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• 2002

In this paper, the volume resistivity properties of silicone rubber investigated due to temperature dependence. And the measurement of volume resistivity is measured from 1, 5 and 10 minutes when the each applied voltage, for example, DC 100[V], 250[V], 500[V] and 1000[V], is applied. according to the step voltage application method. As a result, The volume resistivity is higher high voltage than low voltage at the room temperature, but is higher low voltage than high voltage at high temperature.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.254-255
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• 2007

This paper describes underwater discharge phenomena which are less studied than gas, solid and dielectric liquid. Since discharge phenomena were affected by various factors, we investigated the effect of water resistivity in point-plane gap by impulse voltage. In discharge photograph, it is hard to discover the streamer development in positive polarity at high reisistivity. On the other hand, the streamer originated at the tip of rod and developed toward the plane with increasing voltage. It is found that the breakdown voltage of both polarities in lower resistivity are lower than that of high resistivity. High current flowing in lower resistivity before the breakdown induce more streamer and enhance the probability of breakdown.

• Proceedings of the KSRS Conference
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• v.2
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• pp.728-731
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• 2006

Ground subsidence near abandoned underground coal mines has become a serious social problem in Korea. The purpose of this study is to perform a comparative analysis between the ground subsidence area and the electrical resistivity measured by field survey at Samcheok City. A raster database composed of ground subsidence areas and electrical resistivity data was constructed for GIS. To analyze correlation between the two constructed raster datasets, we used a frequency ratio model. The results show that low and high electrical resistivity anomaly zones coincide with the existing subsidence areas. We infer that the high anomaly zone means saturated and low anomaly zone means vacant. It suggests that electrical resistivity might be a useful factor for analyzing ground subsidence hazard zone.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.28 no.6
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• pp.68-74
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• 2014

The electrical parameters of soils are highly dependent on the various factors such as types of soil, chemical compositions, moisture content, temperature, frequency, and so on. The analysis of soil parameters is of fundamental importance in design of grounding systems. In this paper, we present the experimental results of frequency-dependent impedance, resistivity, permittivity of soils as functions of types of soil and moisture content. The impedance and resistivity of soils are decreased as the moisture content and the frequency increase. In particular, the variation of the soil resistivity with the frequency is pronounced in the conditions of high resistivity and low moisture content. On the contrary, the permittivity of soils are sharply decreased with increasing the frequency below 10kHz and the frequency-dependent permittivity of soils are highly changed in the conditions of high moisture and low resistivity.

• Electrical & Electronic Materials
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• v.9 no.7
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• pp.727-732
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• 1996

In the present paper, the Cu films 4.mu.m thick were deposited by RF magnetron sputtering method on Si wafer. The Cu films deposited at a condition of 100W, 10mtorr exhibited a low electrical resistivity of 2.3.mu..ohm..cm and densed microstructure, poor adhesion. The Cu films grown by 200W, 20mtorr showed a good adhesion property and higher electrical resistivity of 7.mu..ohm..cm because of porous columnar microstructure. Therefore, The Cu films were deposited by double layer deposition method using RF magnetron sputtering on Si wafer. The dependence of the electrical resistivity, adhesion, and reflectance in the CU films [C $U_{4-d}$(low resistivity) / C $U_{d}$(high adhesion) / Si-wafer] on the thickness of d has been investigated. The films formed with this deposition methods had the low electrical resistivity of about 2.6.mu..ohm..cm and high adhesion of about 700g/cm.m.m.

• Geophysics and Geophysical Exploration
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• v.10 no.4
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• pp.369-376
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• 2007

Electrical resistivity tomography was carried out at seawater intrusion monitoring wells located at watershed in coastal areas. It is difficult to identify the characteristics of resistivity near monitoring well in case of using high signalto-noise ratio array due to the high conductivity condition in coastal aquifer although electrical resistivity survey is well adopted to delineate hydrogeological characteristics with the distribution of electrical resistivity. To improve the quality of electrical resistivity survey for two sites with seawater intrusion monitoring wells, inversion with the results of holeto-surface electrical resistivity tomography using single well was executed. The results of inversion for aquifer near wells were verified with the results of drilling log with the informations of fracture, electrical conductivity logging and normal resistivity logging. The inversion for aquifer near one of two wells was also performed at low and high tide with the same electrodes, respectively. From the inversion result, it is possible to obtain the resistivity images with high resolution and to identify the characteristics of aquifer related to seawater intrusion with tidal fluctuation. From this study, it was demonstrated that the hole-to-surface electrical resistivity tomography method accompanied with drilling log, electrical conductivity logging and normal resistivity logging would be useful to delineate the hydrogeological structures near monitoring wells in coastal areas.

• Proceedings of the Korean Geotechical Society Conference
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• 2009.03a
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• pp.673-676
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• 2009

Non-point pollutants, which mainly originate from high traffic roads and rural areas, contaminate the environment by flowing into various rivers and lakes and thus are of interest as an environmental issue. Accordingly, efforts have been made to design and maintain efficient filter systems for the control of the non-point pollutants. Meanwhile, clay-type materials are widely used for the absorption of chemicals included in pollutants and the absorption performances of various clays have been reported in the literature. Thus, the present study proposes a non-destructive monitoring method for the performance of a clay-type filter using electrical resistivity measurement. A series of experimental tests is performed on celite-based particulate filters with infiltrating non-point source pollutants having the same characteristics as pollutants on high traffic roads. Each test measures permeability, resistivity of the filter materials and resistivity of the filtrated water. As the particulate filter materials filtrate pollutants and absorb heavy chemicals (e.g., $Cr^{6+}$, lead, nickel, among others), ionic concentration increases resulting as the electrical resistivity decrease. When the filter systems approach the end of their lifetime, the electrical resistivity of the filter material converges to a very low value due to lowered filter absorption efficiency. Hence, the electrical resistivity of the filtrated water also converges to a low value due to high concentrations of heavy metals. The permeability converges to a very low value because of significantly reduced porosity due to clogging and absorption of pollutants on the filter material. The experimental results show that electrical resistivity monitoring of filter materials is a promising approach to estimation of filter performance and its life expectancy.