• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.118-122
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. For composition of this technology, the development of system with high speed and high resolution is needed. At start point and end position vibration must be repressed on this system for composition of position control. This vibration is arisen nose, is increased setting time, is reduced accuracy. Especially, repressed for the lead with high speed. The small actuator with high speed and high resolution is need to repression against this residual vibration. This actuator is, for example, piezo actuator, piezoelectric material that converting from electronic signal to mechanical force is adequate material, beacause of control of control to position and force. In this study, piezo electric material is used to actuator, ultra precision positioning apparatus with stage of hinge structure is designed, simulation is performed, control performance is tested by producing apparatus. For easy usage and stability in industrial field, we perform to simulation and to position control test by digital PID controller.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1273-1276
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• 2005

A displacement magnification mechanism is usually employed in a nano-positioning stage to achieve a large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. For more large stage motion, double or multiple lever mechanisms can be used. In this case, a more accurate analysis model is needed. This study proposes a more reasonable analysis model for a multiple lever mechanism based on the single lever mechanism model. This paper describes that the high equivalent stiffness of the lever is the most important factor reducing the magnification ratio of the lever mechanism through increasing the deflection of the link and including the axial displacement of the pivot.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.3
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• pp.27-32
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• 2008

This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 mm and 400 mm/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 mm and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 kHz. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 mm/s.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.190-194
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• 2001

Because, Piezo-electric transducer(PZT) transform electric energy into mechanical energy, it is a adequate material for positioning control and force control, take excellent properties as actuator with high speed and high performance. Recently, researches of ultra precision positioning using this PZT are advanced in. In this paper, we use a actuator of PZT, design a positioning apparatus with ultra precision position apparatus as hinge structure. Because of this purpose, before, we were confirmed in control properties of ultra precision stage by FEM method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.24-28
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• 1996

Mirror-like polishing system of hemisphericall high-speed precision bearing for digital VTR drum was developed. Mechamism of the polishing process was analyzed in the view point of polishing contact range and contact length between the tool and the workpiece surface. It was suggested that the two stage polishing process adoptiong the diamond grinding wheel and polishing tool instead of multistage lapping processes, which enables the mass production of the bearing by reduction of polishing time.

• International Journal of Precision Engineering and Manufacturing
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• v.2 no.2
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• pp.57-64
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• 2001

In recent years, the concern of designing multi-stage gear drives ha increased with more application of them in high-speed and high-load. Until now, however, the researches on the design of gear drives have been focused on single gear pairs. Thus the design practice for multi-stage gear drives has been depended on experiences and expertise of designers and carried out commonly by trial and error. We propose an automation algorithm for the design of two-and three-strage cylindrical gear drives. The two types of dimensional design processes have been proposed to determine gear dimensions in a formal way. The first design process(Process I) uses to total volume of gears to determine gear ration , and uses K factor , unit load and aspect ration to determine gear dimensions, The second one(Process II) makes use of Niemann's formula and center distance to calculate gear ratio and gear dimensions. Process I and Process II employ material date from AGMA and ISO standards, respectively. The configuration design determines the positions of gears with minimizing the volume of gearbox by using a simulated annealing algorithm. The availability of the design algorithm is validated by the design examples to two-and three=stage gear drives.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.9
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• pp.202-209
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• 2000

In recent years the concern of designing multi-stage gear drives increases with the more application of gear drives in high-speed and high-load. until now however research on the gear drive design has been focused on single gear pairs and the design has been depended on experiences and know-how of designers and carried out commonly by trial and error. We propose the automation of the dimensional design of gears and the configuration design for gear arrangement of two-and three-stage cylindrical gear drives. The dimensional design is divided into two types of design processes to determine the dimensions of gears. The first design process(Process I) uses the total volume of gears to determine gear ratio and uses K factor unit load and aspect ratio to determine gear dimensions. The second one(Process II) makes use of Niemann's formula and center distance to calculate gear ratio and dimensions. Process I and II employ material data from AGMA and ISO standards respectively. The configuration design determines the positions of gears to minimize the volume of gearbox by simulated annealing algorithm. Finally the availability of the design algorithm is validated by the design examples of two-and three-stage gear drives.

• Journal of Advanced Marine Engineering and Technology
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• v.27 no.7
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• pp.862-871
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• 2003

In this paper, we addressed a modeling for the magnetic levitation stage. This planar magnetic levitator employs four permanent magnet liner motors. Each motor generates vertical force for suspension against gravity, as well as horizontal force for propulsion. Therefore. this stage can generate six degrees of freedom motion by the combination of forces. We derived a mechanical dynamics equation using Lagrangian method and electromechanical dynamics equation by using Co-energy method. Based on the derived dynamics, we can analyze the stage motion that is subject to the input currents and forces.

• Tribology and Lubricants
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• v.37 no.4
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• pp.129-135
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• 2021

An air-bearing stage uses externally pressurized air as the lubricant between the stage and the rail. The supporting force generated by the supplied air makes the stage rise and move smoothly with extremely low friction. Mechanical contacts rarely happen, the bearing surfaces do not produce wear particles, and dust is not generated. It also has the advantage of having low energy loss and high precision. Because of its advantages, an air-bearing stage is used in several types of machines that require high precision. In this article, the effect of the pocket depth on the hammering phenomena of the air bearing is studied. An analysis program is developed to calculate the dynamic behavior of the stage by solving the Reynolds equation between the stage and the guideway and the equations of motion on the stage. The acceleration, constant movement, and deceleration are applied to the stage. The stage is modeled as a five-degree-of-freedom system. In the course of the dynamic behavior, the hammering phenomena occur under some special conditions. The deeper the pocket, the more unstable the behavior of the stage, and air hammering occurs when it exceeds a certain depth. In addition, the higher the supply pressure, the more unstable the behavior of the stage. However, hammering occurs even with a shallow pocket depth. Other conditions that affect the hammering phenomena are calculated and discussed.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.263-268
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• 2001

The needs for precision machining of micro to milli parts have been increased as the industry require high quality products, especially for the micro-machining of IT products. The ultra-precision machining system is essential for the micro machining of fine structures, which insures machining accuracy, low systematic and random error and repeatability. In this study, we developed micro machining system, which is equipped with air bearing stage for ultra precision machining and also we present the results of V-grooving experiments, conducted by the developed system, to verify the performance of system. The results show that the machined V-grooving had good accuracy with repeatable stability.