• Journal of the Korean Society for Precision Engineering
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• v.22 no.2
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• pp.53-59
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• 2005

In this study, the isolation system for multi-mechanism HIF (high impulsive force) device has been investigated. For this purpose, parameter optimization process has been performed based on the simplified isolation system model under constraints of moving displacement and transmitted force. The design parameters for multi-mechanism HIF device have been derived with respect to HIF system I and HIF system II, respectively. In order to implement the dynamic absorbing system, the dual stage hydro-pneumatic damper and magnetorheological damper with semi-active control scheme are considered. Finally, the performance of the designed prototype isolation system has been evaluated by experimental works under actual operating conditions.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.49-53
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• 2007

In this study, we investigated experimentally the potential of a planer positioning mechanism with three degrees of freedom using a flexure guide and an electromagnetic linear motor. The goal was to produce a multi-axis positioning system with nanometric resolution over a 1-mm stroke. An $X-Y-\theta$ stage was designed based on previous results from a single-axis prototype and was constructed with a flexure guide mechanism and voice coil motor type linear actuators. We examined the necessity of a driving method and control system to ensure high resolution for multi-axis positioning. Experiments were conducted to evaluate the performance, and the results confirmed the mechanism's potential; fine point-to-point (PTP) positioning was achieved over a 1-mm stroke, with a resolution of 2 nm for translation in X-Y and 0.01 asec for yaw in $\theta$.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.25-29
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• 1999

The lead frame manufactured by press stamping process, is an important part of semiconductor. The recent technical trend of semiconductor, chip sized and high performance package technology, requires the lead frame to be of more multi-leads and of fine ILP (Inner Lead Pitch). As the ILP is getting finer, its corresponding punch of the stamping die is getting narrower. The punch narrower than its stamping limit has been broken due to local buckling. This paper analyzed the phenomena of punch breakdown. Moreover, the punch design was modified to increase the critical limit of buckling force. This paper, also, suggested new design rules of the punch, which asks the modification of its lead frame design that has to be considered in the stage of semiconductor package design. The new design rules of lead frame design yields a good reliability of semiconductor package as well as a good quality of lead frame.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.9
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• pp.75-81
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• 1998

Simulations of warm and hot forming processes need reliable expressions of flow stress at high temperatures. To get flow stress of the materials usually tension, compression and torsion tests are conducted. In this study, hot compression tests were adopted to get flow stress of medium carbon steel. Experiments have been conducted under both isothermal, near constant strain rate in the temperature ranges 650～100$0^{\circ}C$. Phase transformation takes place by temperature changes for steels in hot and warm forging stage. So Constitutive equation are formulated as the function of strain, strain rate and temperature for isothermal conditions and phase transformation.

• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.45-50
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• 2021

The adjustment of lens magnification can make the degree of precision in pattern measurement be improved, but several problems such as high cost, smaller field of view and stage error accumulation are followed. In this paper, a method for precisely measuring patterns is proposed based on gradient transition vector, in order to solve these problems. The performance of our method is evaluated using pattern images with several directions. Also, it is compared with previous methods based on edge and gray-level moment. It is judged that the proposed method outperforms consistent pattern width results, and so could be applied to automation processes for measurement and inspection of precise and complexed patterns in IT, BT industry products.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.31 no.3
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• pp.141-145
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• 2018

The paper presents a new dynamic displacement measurement system. The developed displacement measurement system consists of a sensor module, a base module and a computation module. The sensor module, which contains a force-balanced accelerometer and low-price RTK-GNSS, measures the high-precision acceleration with sampling frequency of 100Hz, the low-precision displacement and velocity with sampling frequency of 10Hz. The measured data is transferred to the computation module through LAN cable, and precise displacement is estimated in real-time with 100Hz sampling frequency through a two stage Kalman filter. The field test was conducted at San Francisco-Oaklmand Bay bridge, CA, USA to verify the precision of the developed system, and it showed the RMSE was 1.68mm.

• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

• Journal of Korean Neurosurgical Society
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• v.60 no.3
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• pp.289-293
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• 2017

An exoscope, high-definition video telescope operating monitor system to perform microsurgery has recently been proposed an alternative to the operating microscope. It enables surgeons to complete the operation assistance by visualizing magnified images on a display. The strong points of exoscope are the wide field of view and deep focus. It minimized the need for repositioning and refocusing during the procedure. On the other hand, limitation of magnifying object was an emphasizing weak point. The procedures are performed under 2D motion images with a visual perception through dynamic cue and stereoscopically viewing corresponding to the motion parallax. Nevertheless, stereopsis is required to improve hand and eye coordination for high precision works. Consequently novel 3D high-definition operating scopes with various mechanical designs have been developed according to recent high-tech innovations in a digital surgical technology. It will set the stage for the next generation in digital image based neurosurgery.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2199-2201
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• 2005

High voltage power supply with pulse load($4.5{\mu}s$ and PRF 60Hz) condition is investigated which is of interest for applications like Klystron modulator power supplies with output voltage of 50kV. The performance specifications with this type of power supplies are very stringent demanding tight regulation(<0.01%) and high efficiency(> 85%). The solution to this problem as a single stage converter is very difficult. The final output voltage is obtained as sum of the output of SCPS & PCPS. The combination of the two stages can satisfy the pulse load specifications. The analysis of the voltage and power division between SCPS & PCPS has been done for the proposed topology. It has studied under various operating conditions of line and load. Simulation results are validated by experimental results.

• Journal of the Semiconductor & Display Technology
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• v.6 no.4
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• pp.23-27
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• 2007

Rotary stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor quality products. To evaluate and improve the performance of such precision rotary stage, undesired movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of the worm gear type spindle with high precision capacitive sensors. To obtain the radial error motion, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have designed and developed the sensor mounting jig with standard cylinder for reversal method.