• Title/Summary/Keyword: High precision stage

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Development of a High-Speed Electrohydraulic Servovalve System Using Stack-Type Piezoelectric Elements

  • Joo, Choon-Shik;Bang, Young-Bong;Lee, Kyo-Il;Shim, Young-Bo
    • International Journal of Precision Engineering and Manufacturing
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    • v.4 no.6
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    • pp.29-37
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    • 2003
  • This paper presents a two-stage electrohydraulic servovalve with a nozzle-flapper pilot stage, which is controlled by stack-type piezoelectric elements. The flapper moving mechanism developed in this research can compensate for the hysteresis problem and thermal expansion of the piezoelectric elements. The experimental result shows that this flapper moving mechanism has the frequency response of about 600 Hz. And a simplified servovalve system using this flapper moving mechanism has the frequency response of about 300 Hz at the supply pressure of 210 bar.

Design of Fuzzy PI Controller for Piezo Actuator of Nano Stage (나노 스테이지용 압전 구동기의 퍼지 PI 제어기 설계)

  • Cho, Seong-Yeon;Chung, Chung-Choo
    • Proceedings of the KIEE Conference
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    • 2003.11c
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    • pp.629-632
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    • 2003
  • Piezo actuators are mainly used in precision position control system because of their high position resolution. Although there have been many approaches in open loop control of this, those method turn out to be not effective in precision control due to hysteresis and creep. To overcome the problems, closed loop PI control method is used in commercial products. However, it is very difficult to obtain fast response with conventional PI control although piezo actuator has fast response. In this paper, we propose a fuzzy PI control method with the proposed fuzzy PI controller, we obtains faster settling response over the conventional PI controller. We verify the effectiveness of the proposed method with experimental results.

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A Study on the Precision Wear Measurement for a High Friction and High Pressurized Cylinder by Using Vickers Indentor (Vickers Indentor를 이용한 고마찰, 고압 실린더의 정밀마모측정에 관한 연구)

  • 엄재천;정동윤;공호성
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1998.04a
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    • pp.69-76
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    • 1998
  • A precision wear tester is developed to measure the wear rate of a high friction and high pressurized cylinder. The tester consists of indentor system and optical measuring system. The indentor system has two diamond indentors so that they make indents on the inside of the cylinder by using compressed air system. The X-Y-$\theta$ stage of the measuring system can trace the positions of the indents and can measure the diameters of them. The variation of the diameter of each indent after test is converted into the wear rate.

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Design of High Precision Spindle System for ferrule Grinding Machine (페룰 가공용 고정밀 주축시스템 개선설계)

  • Pyoun, Y.S.;Park, J.H.;Lee, K.B.;Yokoi, Y.;Yeo, J.W.;Jeong, I.Y.;Ahn, K.J.;Kwak, C.H.
    • Proceedings of the KSME Conference
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    • 2003.04a
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    • pp.1003-1007
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    • 2003
  • In order to improve the international competitiveness of ferrule industry, the core technology of the second stage for ferrule grinding system is under developing. A high speed (10,000RPM) and high precision spindle system(Radial Runout 0.2 micrometer) bearing more cutting torque and force is designed considering the limitation of cost and size, the effect of heat, and various work-piece materials. A CAE software for machine elements and general machine system is used for preliminary evaluation and selection of design parameters. A dedicated program for the analysis of spindle system is used for final evaluation and selection of design parameter. The process how to evaluate and select using such tools are presented.

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Thermal Characteristic Analysis of a High-Speed HMC with Linear Motor and Magnetic Bearing (리니어모터와 자기베어링을 채용한 초고속 HMC의 열특성 해석)

  • Kim, S. I.;Lee, W. J.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.10a
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    • pp.11-15
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    • 2002
  • This paper presents the thermal characteristic analysis of a high-speed HMC with spindle speed of 50,000rpm. The spindle is supported by two radial and axial magnetic bearings. and the built-in motor is located between the axial and rear radial magnetic bearings. The X-axis and Y-axis feeding systems are composed of linear motor and linear motion guides, and the Z-axis feeding system is composed of servo-motor, ballscrew and linear motion guide. The thermal analysis model of high-speed HMC is constructed by the finite element method, and the thermal characteristics in the design stage are estimated based on the temperature distribution and thermal deformation under the conditions related to the heat generation of built-in motor, magnetic bearings, linear motors, servo-motor, ballscrew, and so on.

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Static Characteristic and Dynamic Characteristic Experiment of First-stage Proportional Pressure Control Valve (1단 비례 압력제어밸브의 정특성 및 동특성 실험)

  • Jeong, Heon-Sul;Nam, Ji-Woo;Lim, Hyo-Joon;Jung, Seung-Wook;Han, Sung-Min
    • 유공압시스템학회:학술대회논문집
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    • 2010.06a
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    • pp.18-24
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    • 2010
  • Because of the increasing demand on the high precision and high response of a machinery, electronic control valves are widely adopted at various application fields. This paper studies on the static characteristic of a first-stage proportional pressure control valve. At first an experimental apparatus including hyd. pump variable speed inverter, pressure and data aquisition system was setted up with the experimental apparatus, various tests such as P-Q-W test, hyd, pump, dynamic, static, frequency response test of the proportional valve was carride out and the results are discussed.

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Sliding Mode Control based on Disturbance Observer for Magnetic Levitation Positioning Stage

  • Zhang, Shansi;Ma, Shuyuan;Wang, Weiming
    • Journal of Electrical Engineering and Technology
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    • v.13 no.5
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    • pp.2116-2124
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    • 2018
  • Magnetic levitation system with the advantages of non-contact, no friction and no wear can satisfy the requirement of high precision and high speed positioning. In this paper, magnetic levitation positioning stage which mainly consists of planar coil and HALBACH permanent magnet array and its control and driving system are designed. Magnetic levitation system is a highly nonlinear and strongly coupled complex system and its control performance can be influenced by the uncertainty and external disturbance. So exact feedback linearization method is used to realize exact linearization and decoupling, and a strategy of sliding mode control based on disturbance observer is proposed to compensate the uncertainty and external disturbance. Detailed proofs of observer's convergence property and system stability are derived. Both the simulation and experiment results verify the effectiveness of sliding mode control algorithm based on disturbance observer.

Development of the disturbance observer for micro-stepping X-Y stage (마이크로 스텝핑 평판 스테이지의 외란 예측기의 개발)

  • Kim Jung-Han
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.14 no.3
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    • pp.23-31
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    • 2005
  • The purpose of this study is to design a disturbance observer for a micro-stepping stage to eliminate the disturbances from cables, friction, mass unbalance of the moving part, etc. The disturbance observer is designed for air-floating X-Y precision micro-stepping X-Y stage which widely used in stepper machine or semiconductor manufacturing systems. The micro-stepping X-Y stage has a weak point of the variation of characteristics with position locations, which caused by various disturbances. In this study, it will be described that a simple and high throughput disturbance observer algorithm improves the dynamic error and settling time of the micro-stepping stage.

Development of Jig Type Chuck for Roundness Improvement in a Machining of High Stage Speed Gear (고단속 기어의 가공 시 진원도 향상을 위한 지그척 개발)

  • Kim, Nam-Kyung;Bae, Kang-Yul;Kim, Nam-Hoon;Jang, Jeong-Hwan
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.15 no.1
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    • pp.20-25
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    • 2016
  • Recently, the requirements for high precision and efficiency machining are gradually increased to raise international competitiveness at the industrial fields of automotive and gears. This trend had made effects on the industrial fields in Korea and which needs further studying of high accuracy and efficiency machining. This study is to investigate the effects of Jig type chuck for roundness improvement in CNC turning machining of high stage speed gear. After hobbing machining, Dimensional change before and after heat treatment was very largely generated. In order to solve this problem was to develop a jig type chuck. After the heat treatment, the operation of the chuck which was the most distinguished equipment among Jig type chuck(0.006mm), Scroll type chuck(0.05mm) and Bolt type chuck(0.04mm). Therefore, Jig type chuck was satisfied the requirement from the actual field(0.02mm).

Path Generation Algorithm Development for Ultrafast/Wide Area Laser Processing (초고속/대면적 레이저 가공을 위한 경로 생성 알고리즘 개발)

  • Kim, Kyung-Han;Yoon, Kwang-Ho;Lee, Jae-Hoon
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.10
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    • pp.34-39
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    • 2010
  • We developed a path algorithm for ultrafast/wide area laser processing. Demands for high precision laser processing with a wide area has been increasing for a number of applications such as in solar cell battery, display parts, electronic component and automobile industry. Expansion of the area in which laser processing is an important factor to handle the ultrafast/wide area processing, it will require a processing path. Processing path is path of 2- axis stage and stage of change in velocity can be smooth as possible. In this paper, we proposed a smoothingnurbs method of improved speed profile. This method creates soft path from edge part, it is main purpose that scan area ($50mm{\times}50mm$) inside processing path makes path of topology of possible straight line. We developed a simulation tool using Visual C++.