• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2004년도 춘계학술대회 논문집
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• pp.91-92
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• 2004

• 반도체디스플레이기술학회지
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• 제4권4호
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• pp.19-26
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• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

• 대한전기학회논문지
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• 제38권8호
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• pp.650-657
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• 1989

The conversion efficiency of an ozone generator can be significantly improved by modifying the discharge electrode of a helical strip line rod-to-cylinder type ozone generator to a pyramid-project-embossed rod, and by using a pulse corona discharge. Parametric studies have been carried out to obtain optimum values of peak pulse voltage, pulse forming capacitance, feeder cable and ozone generator capacitance, interelectrode spacing and corona tip density of ozone generator, and feed air flow rate and temperature. The generated ozone concentration was very dependent upon the value of pulse forming capacitance, feeder cable and ozone generator capacitance, and corona tip density. Maximum conversion efficiency was obtained with a pulse forming capacitance of about 500pF, 75pF matched feeder cable and ozone generator, and a corona tip density of 16mm. When operated at optimum values, ozone yield of 79, 99, 80 g/KWh for the different interelectrode type ozone generators tested were obtained, which are approximately 30% higher than that of an industrial ozone generator.

• 한국대기환경학회지
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• 제23권3호
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• pp.364-372
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• 2007

The ozone concentration is one of the important environmental issue for measurement of the atmospheric condition of the country. In this article, two time series ARE models, the direct ARE model and applied ARE model have been considered for analyzing the ozone data at southern part of the Gyeonggi-Do, Pyeongtaek, Osan and Suwon monitoring sites in Korea. The result shows that the direct ARE model is better suited for describing the ozone concentration in all three sites. In both of the ARE models, eight meteorological variables and four pollution variables are used as the explanatory variables. Also the high level of ozone data (over 80 ppb) have been analyzed at the Pyeongtaek, Osan and Suwon monitoring sites.

• The Plant Pathology Journal
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• 제16권3호
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• pp.130-136
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• 2000

Differences in physiological and biochemical responses between sensitive and tolerant rice cultivars to ozone were investigated to develop reliable indications of early ozone damage. Three Korean local rice cultivars -sen-sitive cultivar Dongjin (DJ), moderately tolerant cultivar Hwayeong (HY) and tolerant cultivar Ilmee (IM) were exposed to ozone at the concentrations of 100 nl $\textrm{l}^{-1}$ or 200 nl $\textrm{l}^{-1}$ , 8 h per day for 10 days in a controlled-environment fumigation chamber. The rice cultivars seemed to be endurable to ozone stress at the concentration of 100 nl $\textrm{l}^{-1}$ which is frequently monitored during the growing season in summer. However, severe damage was induced and differential sensitivity was clearly noted among the rice cultivars at the higher ozone concentration. Activation of the glutathion (GR) -ascorbate peroxidase (APX) cycle was likely to be responsible for protection of rice plants against ozone exposure, relating difference in sensitivity of rice cultivars to ozone. Photosynthetic activity appeared to be one of sensitive responses, for which chlorophyll fluorescence and leaf greenness can together provide a very reliable index, a degree of photosynthetic damages by ozone. Formation of malondialdehyde (MDA) was also considered as an indication that can differentiate cultivars sensitivity to ozone. However, the changes in polyamines and total phenolics were not consistent with exposed ozone concentrations and/or ozone sensitivity of the cultivars. The behavior of polyamines and phenolics in the damaged plants at high ozone levels could be interpreted as an indication of ozone injury rather than activation of additional protection mechanisms scavenging active oxygen species formed by ozone. Several responses triggered by ozone could explain the differential sensitivity of the rice cultivars and be used as reliable indications of relative ozone damage to rice plant.

• 한국전기전자재료학회논문지
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• 제32권4호
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• pp.320-326
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• 2019

Recently, the application of atmospheric plasma technology in air filtration is increasing. Sterilization by an atmospheric plasma device is very effective. However, ozone gas, which is generated during atmospheric plasma formation, poses a hazard to human health. To reduce the ozone gas during plasma discharge, we fabricated a one-plate hybrid plasma discharge device with a heating element, which can decompose ozone gas effectively by a simple heating action. In this study, we evaluated the plasma discharge characteristics and ozone concentrations with various Ar flow rates and temperatures. With increasing Ar gas flow rate, the ozone concentration and spectrum intensity increased till an Ar gas flow rate of 60 sccm, and decreased thereafter. When discharged in high temperature, the ozone concentration and spectrum intensity decreased. Further, to evaluate the state of the treated surface under various plasma discharge and heating conditions, we measured the variation in the contact angles on the surface. Regardless of the temperature, the contact angle increased with increasing discharge voltage. However, the contact angle increased when discharged at high temperature.

• 한국환경과학회지
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• 제28권3호
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• pp.341-356
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• 2019

In this study, the impacts of local meteorology caused by tidal changes in the West Sea on ozone distributions in the Seoul Metropolitan Area (SMA) were analyzed using a meteorological model (WRF) and an air quality (CMAQ) model. This study was carried out during the day (1200-1800 LST) between August 3 and 9, 2016. The total area of tidal flats along with the tidal changes was calculated to be approximately $912km^2$, based on data provided by the Environmental Geographic Information Service (EGIS) and the Ministry of Oceans and Fisheries (MOF). Modeling was carried out based on three experiments, and the land cover of the tidal flats for each experiment was designed using the coastal wetlands, water bodies (i.e., high tide), and the barren or sparsely vegetated areas (i.e., low tide). The land cover parameters of the coastal wetlands used in this study were improved in the herbaceous wetland of the WRF using updated albedo, roughness length, and soil heat capacity. The results showed that the land cover variation during high tide caused a decrease in temperature (maximum $4.5^{\circ}C$) and planetary boundary layer (PBL) height (maximum 1200 m), and an increase in humidity (maximum 25%) and wind speed (maximum $1.5ms^{-1}$). These meteorological changes increased the ozone concentration (about 5.0 ppb) in the coastal areas including the tidal flats. The increase in the ozone concentration during high tide may be caused by a weak diffusion to the upper layer due to a decrease in the PBL height. The changes in the meteorological variables and ozone concentration during low tide were lesser than those occurring during high tide. This study suggests that the meteorological variations caused by tidal changes have a meaningful effect on the ozone concentration in the SMA.

• 한국대기환경학회지
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• 제11권1호
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• pp.45-56
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• 1995

We considered that characteristics of surface ozone continuous and important meteorological parameters from the data measured 7 air quality continuous monitoring stations during 2 years (1990, 1993) in pusan. The diurnal ozone variation showed a primary peak near 1500LST and a secondary peak of the DP(double peaked) pattern. The episode day was defined when an ozone peak higher than 60 ppb was observed at least one station. The frequency of episode day was 100 (298 hours, 69 days). The frequency of the episode day was higher at Meongryundong and Daeyeondong than other sites and highest in August under control of pacific subtropical high. The high temporatant meteorological parameters accompanying the high episode days. The favorable synoptic environment accompanying ozone episode was distributed to 7 different pattern. These pattern can be taken as a nesessary but not an absolute indicator for predicting the occerrence of an episode.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 E
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• pp.2001-2003
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• 1999

Recently the ozone generation system is well used for cleaning the contaminated water by using the strong oxidization effects of ozone. Ozone generation system is composed of ozone generation device, air or oxygen supply device and high voltage apply device. In this paper, commercial frequency was applied to the wire typed conductor. The ozone concentration was measured with air or oxygen as a supplied gas, which can be used as basic data for the development of ozonizer system.

• 상하수도학회지
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• 제10권4호
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• pp.55-63
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• 1996

This research was based on comparing ozonation with combined ozone/ultraviolet oxidation through the methods of reducing THM produced during water treatment. The results were as follows ; 1. The decline of THM concentration was appeared according as ozone dosage increases with ozonation and combined ozone/ultraviolet oxidation. The more effective method was the treatment of irradiating UV then ozonation. In the beginning of reaction the decline rate of THM formation potential was low, I thought it was because that the reaction of ozone and humic acid needed times to be steady state, or that THM formation potential existed according to humic acid. 2. The effect of combined ozone/ultraviolet oxidation when ozone dosage was 4.2mg/L min was almost the same that of ozonation when ozone dosage was 8.6mg/L min. 3. In experiment of TOC decline through ozonation and combined ozone/ultraviolet oxidation, TOC concentration was also dropped according to increasing ozone dosage and the more effective results were showed in treatment of irradiating UV than ozonation. But the similar TOC remove rates were showed in experiment of changing with ozone dosage during combined ozone/ultraviolet oxidation TOC remove rates were low in proportion to the remove rates of THM formation potential, it was considered that humic acid was made low molecule itself though ozonation and ozone/ultraviolet oxidation. Moreover, the high degree of remove efficiency will be get though the treatment of activated carbon of GAC treatment after combined ozone/ultravilet oxidation.