• Journal of the Korean Society of Radiology
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• v.10 no.3
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• pp.171-180
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• 2016

This study was to evaluate the change in characteristics of concentration of ozone after exposure to high energy radiation in linac room. Background ozone concentration of linac room was measured and compared to ozone concentration around linac room. Background ozone concentration of linac room was mean $17.4{\pm}7.9ppb$. It was 50% of the ozone concentration($36.8{\pm}22.3ppb$) around linac room(p<0.05). The concentration of ozone after exposure to high energy radiation in linac room was elevated to double of background ozone level, intensity after exposure. with exposure time concentration of ozone increased proportionally. It showed maximum level at 130~180seconds and slowed a tendency to saturate. It required more than 10 minutes for ozone concentration in linac room to drop to ozone concentration around linac room. The concentration of ozone after exposure to high energy radiation is high enough to cause specific physical symptoms, such as acute dyspnea or chest pain due to dry cough. Exposure to high concentration of ozone in sealed linac room can aggravate pulmonary disease, so special attention is needed.

• Journal of Environmental Science International
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• v.11 no.12
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• pp.1243-1252
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• 2002

This paper aims to find the characteristics of concentration distribution of coastal urban air pollutants. For this purpose, It was used the daily meteorological data and the hourly concentration data for $O_3$and NO$_2$ in Busan metropolitan city from 1994 to 1996. It was investigated the annual and monthly distribution of ozone and nitrogen dioxide concentration at each site in Busan, and also investigated the characteristics of concentration change of air pollutants with time under the sea breeze. As a results, the concentration of nitrogen dioxide and ozone tend to be increased every year and nitrogen dioxide concentration is higher than ozone concentration at all sites in Busan. The concentration of ozone is high in summer season and low in winter season, but the concentration of nitrogen dioxide have a reversed trend. The monthly peak concentration of ozone occurred in April and September, while the monthly minimum concentration of nitrogen dioxide occurred in August. Their trend were identified by sites near the coastline than sites stands apart from the coastline. The sea breeze occurred annual mean 81 day in Busan from 1994 to 1996. The main wind direction of sea breeze was classified into southwesterly and southeasterly. In case of southwesterly, It was pronounced the south wind and southwest wind. In case of southeasterly, the occurrence frequency of east wind was high. Especially, the concentrations of urban air pollutants, such as ozone and nitrogen dioxide, were high on time which the sea breeze flow, and the areas that ozone concentration was high moved from outside part to central part of city with time. In costal urban such as Busan, the wind direction of sea breeze is influenced the change of ozone and nitrogen dioxide concentration on time which the sea breeze flow at each site and also influenced the change of air pollutants concentration of sites on the pathway of sea breeze.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.12
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• pp.591-596
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• 2006

we have been developed on the ultra high concentration ozone generator system which is the core technology in the realization of the semiconductor photoresist strip process using the ozone-vapor chemistry. The proposed ozone generator system has the structure of the surface discharge type which adopt the high purity ceramic dielectric tube. We investigate the performance of the proposed ozone generator system experimentally and the results show that the system has very high ozone concentration characteristics of $19.7[wt%/O_2]$ at the flow rate of $0.3[{\ell}/min]$ of each discharge cell. As a result of the silicon wafer photoresist strip test, we obtained the strip rate of about 400[nm/min] at the ozone concentration of $16[wt%/O_2]$ and flow rate of $8[{\ell}/min]$. So, we confirmed that it's possible to use the proposed high concentration ozone generator system for the ozone-vapor photoresist strip process in the semiconductor and FPD industry.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.12
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• pp.579-585
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• Journal of Korean Society for Atmospheric Environment
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• v.20 no.3
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• pp.345-360
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• 2004

The late sea-breeze and its impacts on ozone distributions were investigated during April to September from 1998 to 2002, in the Busan metropolitan area (including surrounding areas) using the surface ozone concentrations (obtained at 9 monitoring sites), local meteorological variables (obtained near the shore), together with synoptic data. The urban scale ozone concentration was also simulated using the MM5/UAM-V to better understand the role of late sea-breeze in Busan. The results from observation study showed that most of the late sea-breeze occurred when weak offshore synoptic flow (northwesterly) suppressed development of sea - breeze, and the ozone concentration level and frequencies exceeding ozone standard increased with the onset time of sea breeze. We also found that the late sea-breeze clearly induces relatively weak wind speed and high temperature during the daytime As a result it enhances the photochemical ozone accumulation and delays the occurrence time of the averaged maximum ozone concentrations. The results of simulation for high ozone episode (24 August, 2001) by MM5/UAM -V revealed that the late sea-breeze interacted with weak offshore synoptic wind can contribute significantly to high ozone concentration in the coastal urban area. The simulated horizontal and vertical distribution of ozone concentration indicated that ozone can be accumulated over the sea under stagnant condition and return to the land in the late afternoon with the sea breeze, suggesting both the relationship between late sea-breeze and recirculation and the importance of late sea -breeze effects influencing severe ozone pollution in Busan.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.4
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• pp.169-175
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• 2001

Ozone has been widely applied to many industrial fields because of its strong oxidation power, Therefore, the studies have been carried out for the methods on an effective and high concentration ozone generation. The silent or surface discharge type ozone generators have been mainly used for high concentration ozone generation in many fields of applications. But these two types of ozone generators have shortcomings to be improved. In this study, the ozone generator which improved the shortcomings of above ozone generators was proposed and fabricated for the high concentration ozone generation. And the proposed ozone generator could generate the surface and barrier discharge simultaneously. For this purpose, a mesh type discharge electrode was proposed and studied as a function of the widths output maximum ozone concentration of 2.96[vol%] was obtained at 5.6[kV], 830[mA], for 0.3[mm] width and 0.8[mm] vacancy of the mesh electrode and gap spacing of 0.65[mm] respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05d
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• pp.25-28
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• 2003

Ozone is a strong and useful oxidizing gas for the fabrication of oxide thin films. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper an ozone condensation system was evaluated from the viewpoint of an ozone supplier for oxide thin film growth. Ozone was condensed by an adsorption method and the ozone concentration reached 8.5 mol% in 2.5 h after the beginning of the ozone condensation process, indicating high effectiveness of the condensation process. Ozone was continuously desorbed from the silica gel by the negative pressure. We found the decomposition in the ozone concentration negligible if the condensed ozone is transferred from the ozone condensation system to the film growth chamber within a few minutes.

• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.1089-1092
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• 2003

This paper has been studied on wafer cleaning and photoresist striping in semiconductor fabrication processes using ozone solved deionized water. In this work, we have developed high concentration ozone generating system and high contact ratio ozone solving system to get high efficiency DIO$_3$. Through this study, we obtained 11% ozone gas concentration, 99.5% of ozone efficiency and 51% of solubility in deionized water.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 2001.05a
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• pp.191-194
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• 2001

The ozone forecasting systems have many problems because the mechanism of the ozone concentration is highly complex, nonlinear, and nonstationary. Also, the results of prediction are not a good performance so far, especially in the high-level ozone concentration. This paper describes the modeling method of the ozone prediction system using neuro-fuzzy approaches and fuzzy clustering. The dynamic polynomial neural network (DPNN) based upon a typical algorithm of GMDH (group method of data handling) is a useful method for data analysis, identification of nonlinear complex system, and prediction of a dynamical system.

• Journal of Environmental Science International
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• v.16 no.8
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• pp.985-994
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• 2007

To investigate the effect of NOx and VOCs(volatile organic compounds) on the generation of high ozone episode, examined the hourly variations of ozone, NOx and VOCs concentrations, and calculated the ozone isopleth about maximum ozone concentrations using OZIPR which was presented by U. S. EPA at three sites in Busan. There was some difference by the sites, but decreasing VOCs concentration was effective for reduction of ozone at 22 July, the episode day of 2005. In the year 2006, the episode day was 8 August and the variations of NOx and VOCs concentration was little than variation of ozone. So it was estimated that the photochemical production of ozone was low than transportation of ozone. And the result of the OZIPR modeling was that decreasing VOCs concentration was effective for reduction of ozone.