• 제목/요약/키워드: High ozone concentration

검색결과 294건 처리시간 0.023초

오존과 초음파를 이용한 실리콘 웨이퍼의 Post Sliced Cleaning (Post Sliced Cleaning of Silicon Wafers using Ozone and Ultrasound)

  • 최은석;배소익
    • 한국재료학회지
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    • 제16권2호
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    • pp.75-79
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    • 2006
  • The effect of ozone and/or ultrasound treatments on the efficiency of slurry removal in post sliced cleaning (PSC) of silicon ingot was studied. Efficiency of slurry removal was evaluated as functions of time, temperature and surfactant with DOE (Design of Experiment) method. Residual slurries were observed on the wafer surface in case of cleaning by ozone or ultrasound separately. However, a clean wafer surface was appeared when cleaned with ozone and ultrasound simultaneously. It has found that cleaning time was the main effect among temperature, time and surfactant. Elevated temperature, addition of surfactant and high ozone concentration helped to accelerate efficient removal of slurry. The improvement of removal efficiency seems to be related to the formation of more active OH radicals. The highly cleaned surface was achieved at 10 wt% ozone, 1 min and 10 vol% surfactant with ultrasound. Application of ozone and ultrasound might be a useful method for PSC process in wafer cleaning.

기상 오존처리법을 이용한 폴리에스테르직물의 유연성에 관한 연구 (A Study on the Softness Properties of Polyester Fabric Using Vapor Type Ozone Treatment)

  • 이문수;권윤정
    • 한국의류산업학회지
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    • 제3권4호
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    • pp.362-366
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    • 2001
  • We studied on the softness properties of polyester fabric by vapor type ozone processing using ozone's strong oxidation instead of 25% NaOH chemical treatment. When vapor type ozone processing was directly treated to fabrics retaining water to 40% pick up ratio, high concentration ozone was generated oxidation of 3~4% approximately in polyester fabrics and finally its softness improved. The fabric's softness effect was improved because vapor type ozone generated the highest decomposition to oxidation of surface and inter molecules. The experiment revealed that fabric's softness was improved by change of the time of vapor type ozone processing. However, tensile strength and elongation were reduced by increase in time, 60 minute was assumed as the most optimized time to minimize the reduction of fabric's tensile strength and elongation as well as maximizing the fabric's softness.

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항공기 객실 내 오존농도의 규제와 적합성 입증방안에 대한 연구 (A study on the regulation and means of compliance for the ozone concentration in the cabin)

  • 최주원;박종혁;김일영;곽영필
    • 한국항공운항학회지
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    • 제11권2호
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    • pp.79-92
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    • 2003
  • This study is to identify the hazard of ozone and to evaluate ozone effect that is flowed into the cabin when the airplane is flying at high altitude. For this purpose, it is studied that how ozone is generated in the air, what the effect on human body is due to the cabin ozone and what the design criteria is considering or preventing the ozone hazard. And, finally the regulations and means of compliance are studied and introduced to assure that the aircraft satisfies the design criteria related to ozone.

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오존의 정수처리 적용을 위한 오존소비인자에 관한 연구 (A Study on the Ozone Consumption Rate for Drinking Water Treatment Process with Ozone Application)

  • 강태희;오병수;권순범;손병용;강준원
    • 대한환경공학회지
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    • 제27권6호
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    • pp.663-669
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    • 2005
  • 본 연구에서는 정수처리 공정에서 오존을 보다 효율적으로 적용하기 위하여 수중의 오존소비특성을 파악하고자 하였다. 오존의 소비특성을 측정하기 위하여 흐름주입분석법(FIA: Flow injection analysis)의 원리를 이용하여 오존분해속도 측정 자동화장치를 제작하였다. 수중의 오존농도를 연속적으로 측정함으로써 오존의 소비 경향은 순간적으로 오존이 소모되는 구간(I.D: instantaneous ozone demand)과 의사 1차 반응($k_c$: pseudo first-order rate constant)으로 소모되는 두 구간으로 나누어지며, 각 구간에서 오존 주입량에 의하여 영향을 받는 것으로 나타났다. 또한 I.D와 $k_c$값을 이용하여 구한 모델식으로부터 시간에 따른 오존 잔류농도를 예측할 수 있었으며, 예측된 모델간은 실험값과 비교하였을 때 거의 일치하는 것을 알 수 있었다. OH 라디칼의 농도 및 $R_{ct}$는 OH 라디칼 probe compound를 이용하여 간접적으로 계산하였다. I.D와 $k_c$ 구간에서 OH 라디칼 생성 경향을 파악할 수 있었으며, OH 라디칼 생성 또한 오존 주입량에 의하여 영향을 받는다는 것을 확인하였다. 마지막으로 정수처리 공정 및 계절에 따른 수질 차이에 의해서 오존소비인자가 변화하는 것을 확인하였으며, 이에 따라 오존공정의 적절한 도입위치 및 주입량을 효과적으로 결정해야 할 것으로 판단되었다.

산업단지내 독성유기화합물 및 중금속으로 오염된 토양의 정화복원기술 상용화 연구

  • 김수곤;손규동;박지연;최희철;양지원
    • 한국지하수토양환경학회:학술대회논문집
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    • 한국지하수토양환경학회 2004년도 총회 및 춘계학술발표회
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    • pp.31-34
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    • 2004
  • Feasibility of electrokinetic(EK)-Fenton process and Ozone chemical oxidation were investigated for tile removal of organic contaminants and heavy metals from the contaminated soil. In EK-Fenton process, accumulated electroosmotic flow(EOF) was 80 L for 26 days. Removal efficiency of TPH, As, and Ni were 61%, 36%, and 47%, respectively. The concentration of As was high near the anode due to the transport of anionic As toward the anode, while the concentration of Ni was high near the cathode by the movement of cationic Ni to the cathode. Field scale application of in-situ ozonation was carried out for removal of TPH in 3-D test cell (3 m$\times$2 m$\times$2 m). After 25 days of ozone injection, more than 80% of removal rate was observed through the test cell.

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Environmental Distribution of Air Pollutants and Environmental Risk Assessment in Regional Scale

  • Matsumoto, Fumio;Saito, Mitsugu;Otsuka, Naohiro
    • International Journal of Safety
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    • 제9권1호
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    • pp.35-42
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    • 2010
  • We measured the concentrations of air pollutants at several residential sites, roadside sites and industrial sites in Iwate Prefecture, Japan. And the concentration distributions of air pollutants were estimated by atmospheric dispersion model using air emissions data. Based on those results, we calculated environmental risk of air pollutants emitted in Iwate Prefecture. As a result, it was found that the surround of factories with high emissions and highly toxic chemicals and the roadsides were high risk area, benzo(a)pyrene, formaldehyde and ozone exceeded the $10^{-5}$ risk level. Moreover, we tried to use "Loss of life expectancy: LLE" for an index to explain those risk to general public intelligibly. The total LLE of the carcinogenic chemicals was about 8.6 hours. Moreover, LLE of ozone was about 9.2 hours. Ozone has a big influence compared with the carcinogenic chemicals.

역극성 전압인가와 적층법을 이용한 판형오존발생기의 특성개선 (Characteristics Improvement of Plate-Type Ozonizer using Inverse-Polarity Voltage and Accumulative Method)

  • 이상근;박용권;이동욱;전병준;송현직;이광식
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제50권12호
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    • pp.614-621
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    • 2001
  • In this Paper, the ozonizer is fabricated by piling plate-type electrodes up to minimize and reduce install space. Hereby ozone generation characteristics of piled plate-type ozonizer were investigated. Inverse-polarity voltage was generated by H.V neon transformer. And 2 H.V neon transformers were used to supply high voltage each 9 electrodes of plate-type ozonizer. According to the experiments, ozone concentration, generation and yield were proportionally increased tilth increasing the number of electrode. And the maximum increase effects of 246%, 245%, and 33% were obtained when the number of electrode were increased from 3 up to 9.

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오존노출 후 백서 기도점막의 형태학적 변화 (Morphologic Changes of Airway Mucosa after Ozone Exposure in Rats)

  • 김병국;나기상;신시옥
    • 대한기관식도과학회지
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    • 제6권1호
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    • pp.44-61
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    • 2000
  • Objectives : This study was designed to compare the morphological changes in the nasal, tracheal and main bronchial mucosa in rats exposed to 0, 0.3, 0.6, 0.9 and 1.2 ppm ozone for 7 days, 6 hours per day. Materials and Methods : We observed the nasal, tracheal and main bronchial mucosa in rats exposed to 0, 0.3, 0.6, 0.9 and 1.2 ppm ozone for 7days, 6hours per day with LM, SEM and TEM. Results : In light microscopy, influx of inflammatory cells, epithelial hyperplasia, loss of cilia and increased goblet cells were observed in all rats except those exposed to 0.3 ppm. these findings increased with the increase of ozone concentration, but there were no significant differences among the nasal, tracheal and main bronchial mucosa in rats exposed to the same ozone concentration. In scanning electron microscopy, a loss of cilia was observed in rats exposed to 0.3 ppm in some sections and 0.6 ppm and 1.2 ppm in all sections. In transmission electron microscopy, vacuolization of epithelial cells was observed in rats exposed to 0.3 ppm in some sections and 0.6 ppm in all sections. These results suggest that electron microscopic observation is necessary to study morphology of airway mucosa in rats exposed to ozone below 0.3 ppm. And also the morphological changes in nasal septal epithelium may reflect those of tracheal and bronchial epithelium after high concentration ozone-exposure.

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한국의 시골지역에서의 오존농도의 특성 (Characteristics of Ozone Concentration in the Rural Area of Korea)

  • 정용승
    • 한국환경과학회지
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    • 제4권1호
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    • pp.63-70
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    • 1995
  • 1993년 7월부터 1994년 6월까지 1년간 시골지역에서 지면 부근의 오존을 연속적으로 측정하여 5분 평균치를 연구에 이용하였다. 이 관측은 북위 $37.4{\circ}$, 동경 $127.6{\circ}$ 에 위치한 충북 청원군 강내에서 실시되었으며, 1년 평균값은 17ppbㅠ이고 월평균은6-47ppb이다. 여름에 최대값이 발생하고 겨울에 최소값이 나타나며, 이들은 인위적인 배출물 및 광화학 반응과 관련이 있따. 오존으 일변화는 15:00~16:00시에 최대치와 07:00~08:00시에 최소치가 발생한다. 오존이 80ppb이상 발생하는 기간에는 북-북서풍의 안정한 기류가 유입할때 발생하는 반면, 여름에 오존이 매우 낮게 발생하는 기간에는 북태평양에서 유입되는 기류와 함꼐 발생하였다. 그러므로 장거리에 근원을 둔 인위적인 대기오염의 이동(LRTAP)이 시골지역의 국지적인 오존의 발생보다 더 큰 기여를 하고 있음을 시사한다.

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한계농도 누적 오존지표로 본 1990~1997년의 수도권 오존농도 변화 (Tropospheric Ozone Patterns in the Metropolitan Seoul Area During 1990~1997 Using Two Ozone Indices of Accumulation over the Threshold Concentrations)

  • 윤성철;박은우;장영기
    • 한국대기환경학회지
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    • 제15권4호
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    • pp.429-439
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    • 1999
  • In order to assess the chronic impact of tropospheric ozone on vegetation in the Seoul metropolitan area, it is necessary to quantify ozone exposure. Two ozone indices commonly used to relate ozone exposure to injury of vegetation were calculated. SUM06(SUM of hourly concentrations at or above 0.06 ppm) and AOT40(Accumulated exposure Over a Threshold of 40 ppb) which are widely used as ozone indices in the US and Europe were calculated based on hourly ozone concentrations in 5 areas of Seoul and 5 cities of Kyunggido during 1990~1997. Most SUM06 levels were 1~5ppm.hr, however several areas in Northern and Eastern Seoul reached about 5~7 ppm.hr in 1996~1997. AOT40 values were as high as 17~24 ppm.hr. Although measured SUM06 levels would not be expected to significantly impact vegetation, the overall ozone index, as well as annual average, 95th, and 99th percentile have increased continuously over the last 8 years. Often, ozone concentrations are lower in cities where there is a significant NOx concentration, than in outlying rural agricultural areas where NOx scrubbing is not as important. Concentrations greater than 40 ppb, which can cause chronic ozone toxicity to vegetation, were found mostly in the summer and constitutued about 5~15% of total hourly ozone cocentrations.

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